lext ols4100 3d measuring laser microscope

LEXT OLS-4100 Laser Scanning Microscope

Olympus SEG-Industrial

LEXT OLS-4100 Laser Scanning Microscope

LEXT OLS-4100

• Superior Resolution and Accurate

Measurement

• High Measurement Throughput

• Sample Flexibility

• Ease of Use

• How it Works

• Superior Resolution and Accurate

Measurements

• Magnification Range 108x - 17,280x

• Maximum FOV 2.5mm

• Lateral Resolution, 120nm

• Z resolution, 10nm

Superior Resolution and Accurate Measurement

The OLS4100 is the first Laser Confocal Microscope that guarantees

precision and repeatability.

Accuracy Accuracy and repeatability

Accuracy

Degree to which a measured value deviates from the true value

Degree to which repeated measurements under unchanged conditions

show the same resultsRepeatability

Repeatability

Arrows are in the same position, but miss

the center.

Arrows are in the same distance from the

center, but placed separately.Arrow are gathered in the center.


Precision

Resolution

Horizontal: XY Height: Z

0.12 m 0.01 m

Repeatability


20x : 3σn-1=0.1 m

50x : 3σn-1=0.04 m

100x : 3σn-1=0.02 m

20x : σn-1=0.040 m

50x : σn-1=0.012 m

100x : σn-1=0.012 m

Accuracy


Within 2% of a

measured value

0.2 + L/100 m or less

L= measuring length in

m

0.12μm line and space


The dedicated 405 nm optical system removes aberration.

NAdesign

wavelength

LEXT-dedicated 20x objective lens

MPlanApoN20xLEXT0.6 405nm






Volume Line Roughness

Particle Analysis Edge Detection

Height Distance

Plane Roughness

Film Thickness

Area



Laser Intensity Image Color Image 3D Intensity Image

3D Color Image 3D Height Image 3D Wireframe Image

• Roughness Analysis


Contact roughness gauge

High frequency roughness can be measured that would be lost by using a Stylus

R:2um

R:0.4um

0

0.2

0.4

-0.2

-0.4

0.2um

0

0.2

0.4

-0.2

-0.4 0.05um


Take a roughness measurement on a soft surfaces without damaging the surface

Scanning a soft sample with

contact roughness gauges can

damage the surface.


The ability to take a Surface Roughness Measurement on a small area


• High Measurement Throughput

Band Scanning Function

Scan a reduced area of the FOV for increased speed

Ultra-fast Scanning Function

• Maximum frame rate is 32 frames per second

• Z Measurement capability is on par with FAST Mode

• Data is acquired every three lines

Fine Fast Ultra-

fast

1024x1024 4fps 8fps 16fps

1024x768 5.3fps 10.6fps 21.2fps

1024x512 8fps 16fps 32fps

1024x256 16fps 32fps -

1024x128 32fps - -

10nm100nm1um10um100um

Mounting Precision molds Photo

detecting

element

Display

Metal

material

Metal parts

Mobile

parts

Package Nanoimprint

Film

Semiconductor

Automobile

parts

Solar cell

Medical

equipment

Sample Flexibility

Dual pinholes allows the OLS4100 to overcome issues with

samples that have both reflective and non-reflective surfaces

Sample Flexibility

Confocal optical path B

Photomultiplier

(set to high sensitivity)

Confocal optical path A

Photomultiplier

(set to standard sensitivity)

Pinhole

Sample Flexibility

Sample: an Electro-deposition tool made of diamond

Surface with different reflectivity levels

Objective lens: MPlanApoN50xLEXT

Height Map of Electro-deposition tool

Objective lens: MPlanApoN50xLEXT

Sample Flexibility

Image and measure vertical walls

or slope angles up to 85 Degree

Sample Flexibility

Objective lens 50x Laser DIC Objective lens 50x DIC

Objective lens 50x No DIC

Differential

Interference

Contrast (DIC)

• Ease of Use

Ease of Use: Smart Scanning Function

Taking an image is simple even for a

new user

• Put the sample on the stage and focus

• Click Auto Scan and then Acquire

• System will do a pre-scan to confirm

top, bottom and the appropriate lighting

level

o Brightness level is determined

across the FOV

o Will automatically retry up to three

times

o Reflectance Characterization of

the sample can be selected in

advanced menu

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OLS4000 OLS4100

Conventional operation:

Brightness adjustment is performed

using several pixels from the center of

the image.

• Pre-Scanning

Current

Z-Position

Pre-scan

Z Range

Initial Search Area

Calculated

Z Range

Initial Search Area [ m] Z Range of the pre-scan [ m] Pre-scan Time [sec]

5x 1000um (100um) 1940um (1040um) 8

10x 500um (80um) 1200um (780um) 16

20x 100um (30um) 490um (420um) 13

50x 50um (10um) 185um (145um) 25

100x 50um (10um) 98um (58um) 15

Ease of Use: Smart Scanning Function

Ease of Use: Brightness Adjustment

Manual Mode

• Set Top and Bottom

• Click the Brightness Adjustment

Button

• System will do a pre-scan within

the top / bottom range you have

set to optimize the brightness

Ease of Use: Stitching Function

The OLS4100 will quickly create a wide field map at low

magnification. This map can be used to:• Track where you are on your sample at higher magnifications

• Define an area for image stitching


• Circle Mode


• Unnecessary areas can be excluded.

• Stitch up to 625 images together

• Rectangles can be specified for stitching

Rectangles can be specified Unnecessary areas can be excluded

Ease of Use: ID Login

Calling up the Wizard or settings

Restrictions on operations

Communication between users

User information is reflected in data and reports

• Wizards guides the user through the operation of the microscope.

• Allows even first time users to obtain accurate measurement results.

Ease of Use: Wizard

Ease of Use: Macro Map

• Know where you are on your sample

• Drive to other locations using the Macro Map

Ease of Use: Report Generation

• How it works

スキャナ

Uses a semiconductor laser with a short 405 nm wavelength

400nm 800nm700nm600nm500nm

対物レンズ

LED

CCD

ピンホール

LD

Light source of OLS4000

How it works: Laser Light Source for High Resolution

LD

Contains Olympus’s own scanner-on-scanner type of two-dimensional scanner

An electromagnetic MEMS scanner is set in the X direction.

Scanning with world’s highest 4096 x 4096 resolution

対物レンズ

LED

CCD

ピンホールScanner

How it works: Fast Scanning without Distortion

The revolving nosepiece moves in the Z direction along an 0.8 linear scale. Movement is dependent on depth of field of objective

How it works: Z Direction Scanning

How it works: Confocal Height Sensor

LED

CCD

スキャナ

LD

対物レンズ

A circular pinhole is used to remove out of focus data.

Only in focus light is acquired.

Circular confocal pinhole

Telan lens

Non-confocal Confocal

Photomultiplier

Pinhole

Variation in intensity is measured at each image pixel.

Multiple of points located in the proximity of the point with the highest intensity are extracted.

The curve of an ideal I-Z curve is calculated.

Based on the calculated I-Z curve, a maximum intensity value and its Z data are calculated.

These values are defined as the intensity and height values of the image pixel.

Calculated height

Calculated Reflection

intensity

CFO: Calculated Focus Operation

How it works: CFO Search

How it works: Color Imaging

LED

スキャナ

LD

対物レンズ

ピンホール

CCD

Even the toner of a laser beam printer is

clearly visible.

A CCD with two million image pixels superimposes color images to create a 3D image.

lext ols4100 3d measuring laser microscope

Technology

nm superior resolution

accurate measurement

um superior resolution

space superior resolution

surface roughness measurement

resolution horizontal

nm z resolution

lateral resolution