microscopesseries 176 — measuring microscopes • an easy-to-operate standard measuring microscope...

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Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.

Motor-Driven Z-axis

MF SERIES 176 — Measuring Microscopes

•Aneasy-to-operatestandardmeasuringmicroscopeusing specially designed long working distance ML objective lenses.

•Measuringaccuracyisthehighestinitsclass(andconformstoJISB7153).

•IlluminationcanbeselectedfromanLEDunit,whichhas a longer life, or a powerful halogen unit for high-magnification applications.

•Excellentusability,ahigh-NAandlongworkingdistance objectives enable effective observation.

Manual type•Stagesrangeinsizefrom100×100mmto400×200

mm.•TheXYstageisequippedwithaquick-release

mechanism that enables switching between coarse and fine feed to provide swift and precise stage movement, even over a large distance.

SPECIFICATIONSWithoutZ-axisscale

Model No. MF-A1010D MF-A2010D MF-A2017D MF-A3017D MF-A4020DOrder No. 176-861*1 176-862*1 176-863*1 176-864*1 176-865*1

WithZ-axisscaleModel No. MF-B1010D MF-B2010D MF-B2017D MF-B3017D MF-B4020DOrder No. 176-866*1 176-867*1 176-868*1 176-869*1 176-870*1

Observation image BF(Bright-field)/ErectimageEyepiece(optional)withdiopteradjustment 10X(eyepiecefieldnumber:24),15X,20XNote:Monocular-one10Xeyepieceprovidedasstandard;Binocular-two10XeyepiecesprovidedasstandardObjective(optional) MLobjective3X(providedasstandard),1X,5X,10X,20X,50X,100X

Illumination unit (Oneofthetwooptions must be selected.)

LED illumination unitTransmittedillumination:Telecentricsystem,Built-inaperturediaphragm,WhiteLEDlightsource,steplesslightintensitycontrolwithcoolingfanReflectedillumination:Koehlerillumination,Variableaperturediaphragmmechanism,WhiteLEDlightsource,steplesslightintensitycontrolControlunit:PowerON/OFFswitch(mainswitch),100to240VACpowerinputconnector

Halogen illumination unitTransmittedillumination:Telecentricsystem,Built-inaperturediaphragm,Halogenbulb(12V,50W),steplesslightintensitycontrol,WithcoolingfanReflectedillumination:Koehlerillumination,Variableaperturediaphragmmechanism,Halogenbulb(12V,50W),steplesslightintensitycontrol,WithcoolingfanControlunit:PowerON/OFFswitch(mainswitch),100to240VACpowerinputconnector

StageMeasurement range 100×100mm 200×100mm 200×170mm 300×170mm 400×200mmQuick-release mechanism ProvidedasstandardfortheXandYaxesZero-setbutton ProvidedasstandardfortheXandYaxes(andfortheZaxisonlyfortheMF-Btype)

Zaxis Max. workpiece height 150 mm 220 mmFeed mechanism Coaxialcoarseandfinefeed,handlesonbothsides(coarse:30mm/rotation,fine:0.2mm/rotation)

Measuring accuracy *2 (XandYaxes,whennotloaded) (2.2+0.02L)μmL:measuringlength(mm)

Digital displayResolution 1/0.5/0.1μm0.0001/0.00005/0.00001inswitchableDisplay axes XandY(orX,Y,andZonlyfortheMF-Btype)Functions Zero-setting,directionswitching,RS232Coutput,USBoutput(specifictoQSPAK)

*1:ThefollowingsuffixesareaddedtotheorderNo.tospecifytheUserManual'slanguage:-10forEnglish;-11forSimplifiedChinese;NosuffixforJapanese.

*2:MeasuringmethodcomplieswithJISB7153.

MF-B2017D Thebinoculartube(eyepiece)andilluminationunitareoptional accessories.

RefertotheMF/MF-UseriesCatalog(No.E14003)formoredetails.

Specifications for Motor-Driven Z-axis MF modelsModel No. MF-J2017D MF-J3017D MF-J4020DOrder No. 176-891*1 176-892*1 176-893*1

Vision AF *2 Yes

Stage Quick release mechanism FittedtoXandYaxesZerosetswitch FittedtoXandYaxes

Zaxis Max. workpiece height 220 mmFeed mechanism Motordrive(Maximummeasuringspeed:20mm/s)

*1:TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,KforKC,CandNosuffixisrequiredforPSE.

*2:VisionUnitandanimageAFcableareseparatelyrequired.The specification other than the above is subject to the MF series.

•UsabilityoftheMFserieshasbeenimprovedbymotorizing.TheZ-axisofthenewlyintroduced MF-J is motorized to enable easier focus adjustment and measurement on heavy workpieces.

•UsingtheVisionUnit(optional)enablestheimage AF function.

MF-J2017DThe binocular tube (eyepiece)andillumination unit are optional accessories.

Bulb replacement for transmitted/reflected illumination

Standard:Halogenbulb(12 V,50W)(513667)Bulblife:50hours

MicroscopesMicroscope lineups that systemize observation, measurement and processing

Productsequippedwiththemeasurementdata output function can be connected to the measurement data network system MeasurLink (refertopageA-5fordetails).

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MF-U SERIES 176 — Universal Measuring Microscopes

•Integrationofmetallurgicalandmeasurementmicroscope functions provides high-resolution observation and a high-accuracy measurement solution.

•Measuringaccuracyisthehighestinitsclass(andconformstoJISB7153).

•IlluminationcanbeselectedfromanLEDunit,which has a longer life, or a powerful halogen unit for high-magnification applications.

•Excellentusability,ahigh-NAandlongworking distance objectives enable effective observation.

Manual type•Stagesrangeinsizefrom100×100mmto

400×200mm.•TheXYstageisequippedwitha

quick-releasemechanismthatenablesswitching between coarse and fine feed to provide swift and precise stage movement, even over a large distance.

SPECIFICATIONS

BF (bright-field)

WithoutZ-axisscale

Model No. MF-UA1010D MF-UA2010D MF-UA2017D MF-UA3017D MF-UA4020DOrder No. 176-871*1 176-872*1 176-873*1 176-874*1 176-875*1

With Z-axisscale

Model No. MF-UB1010D MF-UB2010D MF-UB2017D MF-UB3017D MF-UB4020DOrder No. 176-876*1 176-877*1 176-878*1 176-879*1 176-880*1

BD (bright-field/dark-field)

WithoutZ-axisscale

Model No. MF-UC1010D MF-UC2010D MF-UC2017D MF-UC3017D MF-UC4020DOrder No. 176-881*1 176-882*1 176-883*1 176-884*1 176-885*1

With Z-axisscale

Model No. MF-UD1010D MF-UD2010D MF-UD2017D MF-UD3017D MF-UD4020DOrder No. 176-886*1 176-887*1 176-888*1 176-889*1 176-890*1

Observation image BF(Bright-field),DF(Dark-field)(MF-UCandMF-UDmodelsonly),Polarization,DifferentialInterferenceContrast(DIC)/Erect imageEyepiece(optional)withdiopteradjustment 10X(eyepiecefieldnumber:24,twoeyepiecesprovidedasstandard),15X,20X

Turret(required)Bright-field(BF)

Manual/Motor(selecteitherone)Bright-field/dark-field(BD)

Objective (optional)

Bright-field(BF) M Plan Apo, M Plan Apo SL, G Plan Apo seriesBright-field/dark-field(BD) BD Plan Apo, BD Plan Apo SL series

Illumination unit (Oneofthetwooptions must be selected.)

LED illumination unitTransmittedillumination:Telecentricsystem,Built-inaperturediaphragm,WhiteLEDlightsource,steplesslightintensitycontrol,WithcoolingfanReflectedillumination:Koehlerillumination,Variableaperturediaphragmmechanism,WhiteLEDlightsource,steplesslightintensitycontrolControlunit:PowerON/OFFswitch(mainswitch),100to240VACpower input connector

Halogen illumination unit

Transmittedillumination:Telecentricsystem,Built-inaperturediaphragm,Halogenbulb(12V,50W),steplesslightintensitycontrol,WithcoolingfanReflected:BF/BDKohlerilluminationwithadjustableaperturediaphragm,12V,100Wor12V,15Whalogenlamp(selectable),externalfiber-optic

illumination, stepless brightness adjustmentControlunit:PowerON/OFFswitch(mainswitch),100to240VACpower input connector

StageMeasuring range 100×100mm 200×100mm 200×170mm 300×170mm 400×200mmQuick-release mechanism ProvidedasstandardfortheXandYaxesZero-setbutton ProvidedasstandardfortheXandYaxes(andfortheZaxisonlyfortheMF-UBand-UDtypes)

ZaxisMax. workpiece height 150 mm 220 mmFeed mechanism Coaxialcoarseandfinefeed,handlesonbothsides(coarse:10mm/rotation,fine:0.1mm/rotation)

Measuring accuracy *2

(XandYaxes,whennotloaded) (2.2+0.02L)μmL:measuringlength(mm)

Digital displayResolution 1/0.5/0.1μm0.0001/0.00005/0.00001inswitchableDisplay axes XandY(orX,Y,andZonlyfortheMF-UBand-UDtypes)Functions Zero-setting,directionswitching,RS232Coutput,USBoutput(specifictoQSPAK)

*1:ThefollowingsuffixesareaddedtotheorderNo.tospecifytheUserManual'slanguage:-10forEnglish;-11forSimplifiedChinese;No suffix for Japanese.

*2:MeasuringmethodcomplieswithJISB7153.

MF-UB2017DThe turret, objectives and illumination unit are optional accessories.

RefertotheMF/MF-UseriesCatalog(No.E14003)formoredetails.


Standard:Halogenbulb(12V,50W)(513667)Bulblife:50hours

For replacement for reflected illumination (fromseparatelightsource)*3

Standard:Halogenbulb(12V, 100W)(517181)High-intensitybulb(12V,100W)(12BAD602)

*3:Atthetimeofpurchase,astandardbulbandahigh-intensitybulbareprovided.(OnlyfortheReflectedilluminationmodels.)


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Motor-Driven Z-axis

Specifications for Motor-Driven Z-axis MF-U modelsBF(Bright-field)

Model No. MF-UJ2017D MF-UJ3017D MF-UJ4020DOrder No. 176-894*1 176-895*1 176-896*1

BD(Bright-field/dark-field)

Model No. MF-UK2017D MF-UK3017D MF-UK4020DOrder No. 176-897*1 176-898*1 176-899*1

Eyepiece(optional)withdiopteradjustment 10X(eyepiecefieldnumber:24,twoeyepiecesprovidedasstandard),15X,20X

Objective(optional) Bright-field(BF) M Plan Apo, M Plan Apo SL, G Plan Apo series Bright-field/dark-field(BD) BD Plan Apo, BD Plan Apo SL series

Vision AF *2 Yes

StageMeasuring range 200×170mm 300×170mm 400×200mmQuick release mechanism FittedtoXandYaxesZerosetswitch FittedtoXandYaxes

Zaxis Max. workpiece height 220 mmFeed mechanism Motordrive(measuringspeed:max.20mm/s)

Measuring accuracy *3 (X and Y axes,whennotloaded) (2.2+0.02L)μmL:measuringlength(mm)

Digital displayResolution 1/0.5/0.1μm0.0001/0.00005/0.00001inswitchableDisplay axes X,YandZFunctions Zero-setting,directionswitching

*1:TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,KforKC,CandNosuffixisrequiredforPSE.

*2:VisionUnitandanimageAFcableareseparatelyrequired.*3:Measuring method complies with JIS B7153.Note:ForallspecificationsnotincludedaboveseepageJ-7.

•UsabilityoftheMF-Userieshasbeenimprovedbymotorizing.TheZ-axisofthenewlyintroducedMF-UJ/UKismotorizedto enable easier focus adjustment and measurement on heavy workpieces.

•UsingVisionUnit(optional)enablestheimage AF function.

MF-UJ2017DThe turret, objectives and illumination unit are optional accessories.

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Hyper MF/MF-USERIES 176 — High-Accuracy Measuring

Microscopes

•Thisistheultimatemeasuringmicroscopeachieving the world's highest accuracy (1.5+10L/1000μm),with0.01μmresolution.

•Three-axismotorizedfrontoperationjoystickcontrol, which makes a refreshing change from conventional microscope operation, allows fine positioning even during fast movement.

•Largeworkstagewithstrokeof250×150mmprovides enough margin for the measurement of larger workpieces.

•Thebest-sellingdataprocessingunit,QM-Data200, and the Vision Unit can be integrated to provide an effective and stable measurement environment.

SPECIFICATIONSModel No. HyperMF-B2515B HyperMF-UB2515B HyperMF-UD2515B HyperMF-UE2515B HyperMF-UF2515BOrder No. 176-430*1 176-431*1 176-432*1 176-433*1 176-434*1

Optical tube

Finite correction optical systemBF(Bright-field)

Infinity-correction optical systemBF(Bright-field)

Infinity-correction optical systemBD(Bright/Dark-field)

Infinity-correction optical systemBF(Bright-field)withtheLAFfunction

Infinity-correction optical systemBD(Bright/Dark-field)with the LAF function

Standardreticle(Built-in) 90°broken-crossline(linewidth5μm)Pupil distance adjustment SiedentopftypeAdjustmentrange:51to76mmOptical path switching ratio Observation/ TV-photomicrography = 50/50Vertical tilt angle 25° TiltingTV port Provided as standard

Observation image Erect imageEyepiece Magnification 10X, 15X, 20XObjective lens (optional)

Selectable from the monocular unit(equipped with one eyepiece) or binocular tube (equipped with two eyepieces) Equippedwithtwo10Xeyepieces

ML series objective lens 1X, 3X, 5X, 10X, 20X, 50X, 100X — BF(Bright-field) — M Plan Apo, M plan Apo SL, G plan ApoBD(Bright/Dark-field) — BD Plan Apo, BD Plan Apo SL

Turret (optional)

BF(Bright-field) — (Equippedwithafour-holemanualturret/motorizedfive-hole turret *2)BD(Bright/Dark-field) — (Equippedwithafour-holemanualturret/motorizedfour-holeturret *3)

Focusing section

Maximum height of workpiece 150 mmMeasuring accuracy (1.5+0.01L)μmL:Measuringlength(mm)Drive method Motorized control using a joystick

Illumination unit

Transmitted illumination device Telecentricsystem,Built-inaperturediaphragm,Halogenbulb(12 V, 50 W),100-steplightintensitycontrol,Fiber-opticcablecoldlightilluminationReflected illumination unit Koehlerillumination, Variable aperture diaphragm mechanism,Halogenbulb(12 V, 100 W), 100-step light intensity control, Fiber-optic cable cold light illumination

Workstage Measuringrange(X×Y) 250×150mmMeasuring accuracy*4 (Whenno load is put on the X- or Y-axis) (0.9+0.003L)μmL:Measuringlength(mm)

Dimensions of the top plane 460×350mmUsable dimensions of the stage glass 300×200mmSwiveling angle ±3°Maximum loading mass 30 kgDrive method Motorized control using a joystick

Detector Highprecisiondigitalscale(Patented)Digital display

Resolution 0.01μmAxes to be displayed X,Y,ZData processing unit QM-Data200orVisionUnit(required)

Operation section

LAF(justfocus) — — AvailableLAF(trackingfocus) — — Available

*1:TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,KforKC,CandNosuffixisrequiredforPSE.*2 and *3 are factory-installed options.*4:MeasurementaccuracycomplieswithJISB7153.

Hyper MF-UThe optical tube, turret, and objective lens are optional.

Refer to the Hyper MF/MF-U Catalog(No.E14012)formoredetails.

For replacement for reflected illumination (fromseparatelightsource)

Standard:Halogenbulb(12V, 100W) (517181)High-intensitybulb(12V,100W)(12BAD602)


Standard:Halogenbulb(12V,50W) (02APA527)


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TM SERIES 176 — Toolmakers' Microscopes

•Compactuniversaltoolmakers'microscopethat can be installed on any site.

•NewlydesignedLEDilluminatorsprovideenhanced observation for higher accuracy and resolution.

•OptionalLEDcircularilluminatoravailableforapplicationsrequiringall-roundlighting.

•Achievesamaximummeasuringheightof115 mm despite the compact size.

•Installationofdigimaticmicrometerheads(MHD-50MB,option)makesmeasurementeasy and precise.

•Avernierscale(AngleIndex)builtintotheeyepiece mount enables accurate angular measurements.

•Overallmagnificationis30Xusingthestandard accessory lenses but can be changed to lie within the 20-200X range by using optional objectives and/or eyepieces.

Micrometer heads are optional.

Angle Index (Standard Accessory)

RefertotheTMSeriesCatalog(No.E14013)formoredetails.

TM-505B TM-1005B

SPECIFICATIONSModel No. TM-505B TM-1005BOrder No. 176-818*1 176-819*1

Optical tube Monoculartype(Verticaltiltangle:30°)Observation image ErectEyepiece protractor Resolution(graduation):1°,Rotationangle:360°,Resolution(angle):6',AdjustablezeropointEyepiece Standardaccessory:15X(fieldnumber:13),Options:10X,20XObjective lens Standardaccessory:2X,Options:5X,10X

Microscopehead

Maximum height of workpiece 115 mm 107 mm

Focusing method Manual(Coarsefeed)

Illumination unit

Transmitted illumination Stepless brightness adjustment, White LED light source with green filter

Surface illumination Obliquesingle-sourcetype,Steplessbrightnessadjustment,WhiteLEDlightsource

Cross-travelstage

Measuring range 50×50mm100×50mm

(Anoptional50mmgaugeblockisrequiredtocoverfullrange.ACERAblockisrecommended.)

Table size 152×152mm 240×152mmUsable area of the stage glass 96×96mm 154×96mm

Maximum stage glass loading 5 kg

Linear measurement method Micrometer head*2

Resolution Depends on the micrometer head specifications*2(forMHD-50MB (164-163):0.001mm)Micrometer head travel range for MHD-50MB (164-163):50mmPower supply AC100to240V50/60HzMaximumpowerconsumption:4.2WMain unit mass 14 kg 15 kg

Note:Themainunitwithdigimaticmicrometerhead(MHD-2”MB)isprovidedintheTM-500series.TM-A505B (176-820A)TM-A1005B (176-821A)

Other specifications are the same as the other TM-500 Series.*1:ThemainunitiscompatiblewithCE.TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:AforUL/CSA,

DforCEE,EforBS,DCforCCC,KforKC,CandNosuffixisrequiredforPSE.*2:MicrometerheadsareoptionalforTM-505B and TM-1005B.


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Vision UnitSERIES 359 — Vision System Retrofit for

Microscopes

•Themeasurementtoolsandvariousmacroicons allow measurement in one easy step.

•Thegraphicsandmeasurementnavigationfunctions facilitate operation.

•Theimagesavingfunctionandthedataoutput function to the spreadsheet software are standard.

•CombinedusewiththeMF/MF-USeries(Motor-DrivenZ-axis/Motor-Driven)achievestheimageAF(autofocus)function.

Applicable Models•Mitutoyo MF series, MF-U series(ConnectiontotheMF-H seriesisnotavailable.) Hyper MF series, Hyper MF-U series

SPECIFICATIONSVision Unit

Magnification of the optical system When installed on the microscope0.5X(usingthe0.5XTVadapter)

Image detection High-sensitivity1/2incolorCMOScamera 3 million pixels

Resolution 0.1μm

Accuracy (Measurementenvironment:20°C)

Depends on the accuracy specification of the Mitutoyo measuring microscope to which the unit is fitted.

Forreference:WhenusinganMLseries3Xobjectivelens(InaninspectionusingasampleworkpiecebasedontheMitutoyostandards)

Measurementaccuracyinthescreen:Within±2.5μmRepetitiveaccuracyinthescreen(±2σ):Within±1μm

Software(option) QSPAK Vision Unit Edition

Note:QSPAKandadataprocessorarerequiredseparately.

Foot switch12AAJ088

Refer to the QM-Data200 and Vision UnitCatalog(No.E14008)formoredetails.

MF-J2017D plus Vision Unit

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Refer to the QM-Data200 and Vision UnitCatalog(No.E14008)formoredetails.

QM-Data200(standtype)

QM-Data200SERIES 264 — 2D Data Processing Unit

•2DDataProcessordesignedtoperformarithmeticprocessingofXYcoordinatedataacquiredfromprojectorsandmeasuringmicroscopes for local display or output to a printer.

•Informativecolor-graphicdisplaysonthelargeLCDscreenmakeforeasymeasurement operations.

•TheAImeasurementfunction(automaticidentificationofmeasuringitem)eliminatesswitching between the measurement command keys.

•Equippedwithameasurementprocedureteaching function and measuring position navigation in Repeat mode.

•Theusermenufunctionallowsuserstoregister measurement commands or part programs to create their own menus.

•Measurementresultoutputto(CSV)formatinspreadsheet software.

•Partprogramsandcalculationresultscanbesaved on a USB-compatible memory device.

SPECIFICATIONSModel No. QM-Data200

Order No.Standard type Flexible arm type Standard type

264-155*1 264-156*1 264-159*1

Applicable models(Conventionalmodels)*2

PJ-A3000 series PJ-H30 series PV-5110 PH-3515FPH-A14 MF seriesMF-U series

PJ-A3000 series PJ-H30 series PV-5110 PH-3515FPH-A14

HyperMF/MF-U

Unit of measurement Length:mmAngle:SwitchablebetweendecimaldegreeandsexagesimalnotationResolution 0.1μm 0.01μmProgram function Creating,performing,andeditingofmeasurementprocedures

Statistical processing Number of data, maximum value, minimum value, mean value, standard deviation, range, histogram Statisticsclassifiedbyeachmeasurementfunction(Statisticsclassifiedbyeachcommand)

Display unit ColorgraphicLCD(equippedwithabacklight)ABS point — Available(Automaticmovement)LAF(LaserAF) — AvailableEdge sensor position correction Available(ProfileProjectorswithOPTOEYE) —

Input/output

XYZ: Datainputfromlinearscales(Maximumnumberofaxes:3)RS-232C■1 : ConnectiontoanexternalPCRS-232C■2 : ConnectiontoameasuringunitcounterOPTOEYE: ConnectiontoanOPTOEYEedgesignal(OPTOEYE200)FS: FortheconnectiontothefootswitchPRINTER: FortheconnectiontoanexternalprinterUSB-MEMORY:FortheconnectiontoaUSBmemory

Measurement result file output RS-232Coutput(CSVformat,MUX-10format)

Display language 16languages(Japanese,English,German,French,Italian,Spanish,Portuguese,Cheskey,Chinese(simplified/traditional),Korean,Turkish,Swedish,Polish,Dutch,Hungarian)

Power supply AC100to240V50/60HzMaximum power consumption 17W(excludingoptionalaccessories)

External dimensions (W×H×D)

260×242×310mm(includingthestandsection)

318×153×275mm(whenthearmishorizontal)

260×242×310mm(includingthestandsection)

Mass Approx. 2.9 kg Approx. 2.8 kg Approx. 2.9 kgStandard Accessories ACadapter,Powercable,QuickOperationGuide

*1:TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:AforUL/CSA,DforCEE,EforBS,KforKC,CandNosuffixisrequiredforPSE,and00forpowercordotherthanA,D,E,K,C,Nosuffix.

*2:PleasecontactMitutoyoofficewithrespecttothemodelsthatareapplicabletothemodelsotherthanmentionedabove.

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FS-70 SERIES 378 — Microscope Unit for Semiconductor Inspection

•Compactmicroscopeunitequippedwithaneyepiece observation section.

•Aversatilemicroscopeheadtypicallyusedas an OEM product suitable for fitting to specialist machines, such as those designed for inspection and repair of semiconductor wafersusingYAG(near-infrared,visible,near-ultraviolet,orultraviolet)lasers*.

*Theperformanceandsafetyoflaser-equippedsystemproducts is not guaranteed.

•Usableininfraredopticalsystems*. Applications:internalobservationofsilicon

systems;spectralcharacteristicsanalysisusinginfrared.

* An infrared source and infrared camera are necessary.•ModelssupportingBF(Bright-field),DF

(Dark-field),Polarization,andDifferentialInterferenceContrast(DIC)areavailable.

•Theinward-facingturretandlongworkingdistance objective lenses maintain the high operability of the microscope.

The parfocal manual turret, eyepieces and objective lenses are optional.

FS70Z

Refer to the Microscope Units and ObjectivesCatalog(No.E14020)formoredetails.

FS70L FS70L4

SPECIFICATIONSModel No. FS70 FS70-TH FS70Z FS70Z-TH FS70L FS70L-TH FS70L4 FS70L4-THOrder No. 378-184-1 378-184-3 378-185-1 378-185-3 378-186-1 378-186-3 378-187-1 378-187-3

Short base model No. FS70-S FS70-THS FS70Z-S FS70Z-THS FS70L-S FS70L-THS FS70L4-S FS70L4-THSOrder No. 378-184-2 378-184-4 378-185-2 378-185-4 378-186-2 378-186-4 378-187-2 378-187-4Focus adjustment 50mmtravelrangewithconcentriccoarse(3.8mm/rev)andfine(0.1mm/rev)focusingwheels(right/left)Image Erect imageOptical tube type Siedentopf,adjustableinterpupillarydistancerange:51-76mmField number 24mmTilt angle — 0° - 20° — 0° - 20° — 0° - 20° — 0° - 20°Optical pass ratio Fixed type

(Eyepiece/TV=50/50)

Switchable type(Eyepiece/Tube=100/0:0/100)

Fixed type (Eyepiece/TV=50/50)

Switchable type (Eyepiece/Tube=100/0:0/100)

Protective filter — Built-in laser beam filterTube lens 1X 1X - 2X zoom 1XApplicable laser — 1064/532/355 nm 532/266 nmCameramount C-mount(usingoptionaladapterB*1) Use a laser with TV port. C-mountreceptacle

(withgreenfilterswitch)Illumination system, optional

Reflectiveilluminationforbright-field(Koehlerillumination,withaperturediaphragm) 12V,100Wfiber-optics,steplessadjustment,lightguidelength:1.5m

Objective, optional (forobservation)

M Plan Apo, M Plan Apo SL, G Plan Apo

Objective, optional (forlaser-cutting)

— M/LCDPlanNIR, M/LCDPlanNUV

M Plan UV

Loading *2 14.5 kg 13.6 kg 14.1 kg 13.2 kg 14.2 kg 13.5 kg 13.9 kg 13.1 kgMass(mainunit) 6.1 kg 7.1 kg 6.6 kg 7.5 kg 6.4 kg 7.2 kg 6.7 kg 7.5 kg

*1:Installationisoptional.*2:Loadingonopticaltubeexcludingweightofobjectivelensesandeyepieces

Bulb replacement Standard: Halogen bulb (12 V, 100 W) (No.517181）For the fiber-optic cable illumination unit (12 V, 100 W) (No.378-700)

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WIDE VMU-V WIDE VMU-H WIDE VMU-BDV WIDE VMU-BDH

VMU SERIES 378 — Video Microscope Unit•Compactandlightweightmicroscope

designed to be built in for camera observation

•Aversatilemicroscopeheadtypicallyusedas an OEM product suitable for fitting to specialist machines, such as those designed for inspection and repair of semiconductor wafersusingYAG(near-infrared,visible,near-ultraviolet,orultraviolet)laser*1.*1Theperformanceandsafetyoflaser-equipped

system products is not guaranteed.•ForVMU-LBandVMU-L4B,therigidityand

general performance of the microscope main unit have been enhanced compared with previous models.

•Applications*2:internalobservationofsiliconsystems, spectral characteristics analysis using infrared, etc.

*2 An infrared source and infrared camera are necessary.

•Telecentricsystemequippedwithanaperturediaphragmisstandardonthereflectedillumination optical system.

•Bestsuitedtoprocessimagesforwhichuniformilluminationisrequired.

•Designandmanufactureareflexibletomeetyourdemands such as double camera mounting or double(low/high)magnification.

SPECIFICATIONSModel No. VMU-V VMU-H VMU-LB VMU-L4BOrder No. 378-505 378-506 378-513 378-514Cameramountingdirection Vertical Horizontal VerticalObservation Bright-field/Erect image Bright-field/Inverted image Bright-field/Erect image

Optical tube

TV adapter EquippedwithaC-mount EquippedwithaC-mount(Equippedwithagreenfilterswitchingmechanism)Image forming (tube)lens Built-in1X(visible/near-infraredcalibration) Built-in1X(near-infrared/visible/

near-ultravioletcalibration) Built-in1X(visible/ultraviolet)

Available for lasers —

YAGlasersource(Fundamental,Second/Third

harmonic)mountable

YAGlasersource(Second/Third/Fourthharmonic)

mountable

Objective lens(requiredoption)

For observation M Plan Apo series, M Plan Apo HR series, M Plan Apo SL series, G Plan Apo series

For laser processing —

M/LCD Plan Apo NIR seriesM/LCD Plan Apo NUV seriesNote:Selecteddependingonthe

wavelength of the laser source

M/LCD Plan Apo NIR seriesM/LCD Plan Apo NUV seriesM Plan UV seriesNote:Selecteddependingonthe

wavelength of the laser sourceApplicablecamera(s) 2/3typeorlesscameras(C-mounttype)Reflectedilluminationoptical system Telecentricsystemequippedwithanaperturediaphragm

Illuminationunit(optional) Fiber-opticcableilluminationunit(12V,100W)(378-700*) /(15V,150W)(176-316*)Main unit weight 650 g 750 g 1270 g 1300 g

Note1:Besidesthemodelsshownabove,productsequippedwithacompactKoehlerilluminationsystemintendedforgeneralobservationarealsoavailable.Note2:TheM Plan Apo 1Xobjectivelensisusedwiththepolarizationunit(378-710 or 378-715).* Order numbers differ depending on the power supply cord.

VMU-V VMU-H VMU-LB VMU-L4B


WIDE VMU SERIES 378 — Wide-field Video Microscope Unit•Wide-FOVvideomicroscopeunitfor

Bright/Dark-field observation.•Incorporatesawide-fieldimagesensor

(APS-Cformatorsmallersize)providingseven times greater viewing area than the VMU Series for greatly enhanced inspection efficiency.

•Inadditiontonormalbright-fieldobservation, this series supports dark-field observation for scratch inspection, etc., and polarized light observation for increased contrast when viewing certain specimens.

•Bulkinspectionscoveringawideareacanbe performed with multiple units in a high-density configuration. SPECIFICATIONS

For Bright-field Observation For Bright /Dark-field ObservationModel WIDE VMU-V WIDE VMU-H WIDE VMU-BDV WIDE VMU-BDHOrder No. 378-515 378-516 378-517 378-518Cameramountingorientation Vertical Horizontal Vertical Horizontal

Observation Bright-field /Erect image

Bright-field /Inverted image

Bright /Dark-field /Erect image

Bright /Dark-field/Inverted image

Optical tube

Optical system Magnification:1XVisiblelightCameraMount F-Mount,C-Mount(withaligningandparfocaladjustmentmechanism)Imaging forming (tube)lens Built-in1Xtubelens(Correctingwavelengthrange:436to656nm)

Image field ø30Polarized unit* Mountable

Objective lens (requiredoption)

M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo BD Plan Apo, BD Plan Apo HR, BD Plan Apo SL

Applicable camera APS-Cformatorsmallersize

Reflectedilluminationoptical system

Telecentric illumination, Bright-field illumination opticaltube(Single-portfiber-opticillumination)

Telecentric illumination, Bright/Dark-field illumination opticaltube(Dual-portfiber-opticillumination)

Bright/Dark-field switching with light source on-offIlluminationunit(optional) Fiber-opticilluminationunit(12V,100W)(378-700)/(12V,150W)(176-316)Main unit mass 1800 g 1950 g 2000 g 2150 g

*Polarized observation by Bright-field illumination

Image sensorMounting WIDE VMU-V and WIDE VMU-H units alternately prevents interference between image sensors.

Optical fiber for dark-field illumination

Optical fiber for bright-field

illumination

Image sensor

VMU

WIDE VMU

×7

WIDE VMU dark-field

J-15

J



•M/BD Plan Apo(MPlanApochromatBright/Dark-field)objectivesfeaturetheimageevenness over the entire view field needed to achieve high color reproducibility.

•Thefollowingobjectivelensessupportawiderange of wavelength including near infrared, visible,andultravioletlasers.SpecialtyLCDlaserobjectivesareavailable:M/LCD Plan NIR (-HR) series(Near-infraredlensesforlaser processing featuring ultra-long working

distances),M/LCD Plan NUV series (Near-ultravioletlenses),M Plan UV series (Ultravioletlenses),andG Plan Apo series (CoverGlasscorrectedlensesthatallowfocusing through a window for vacuum and hightemperatureapplications).

•Usesenvironment-friendlyglass(noleadorarsenic)forthelensmaterial(ofthespecifiedmodels).

•Withoutchangingtherequiredmagnification,ultra-highspeedvariablefocallengthenablesobtaining perfectly focused images in real-time with stress-free operation.

•Thetimerequiredforauto-focusingisdrasticallyreduced,andtheopticalsystemfocusrangeisextended without the expense of a mechanical drive.

FS objective lensesSERIES 378 — Ultra-long working distance objective lens

Variable Focal Length LensTAGLENS

TAGLENS-T1 TAGLENS main unit + Controller + Software

Video Microscope Unit VMU-T1 Video microscope for TAGLENS-T1 (Above TAGLENS-T1 is required)

BF (Bright-field) for observation/measurement BD (Bright/Dark-field) for observation/measurement For near-infrared calibration (NIR)

For near-ultraviolet calibration (NUV) For the ultraviolet calibration (UV)

SPECIFICATIONS

SPECIFICATIONS

Operating principle Variable refraction indexFocallengthvariablefrequency 70 kHzMax. opening width ø11mmTransmittance 90% (λ400 to 700 nm)

CompatibleTAGLENS TAGLENS-T1Imaging lens magnification 1XImaging area ø11mmApplicable objective lens M Plan Apo Series

OptionsCommonfunctionsinVMU-LB/L4Bseries:turret, motorized turret, polarization unit, focusingunit,XYstage,simplifiedstand

M Plan Apo SeriesObjective lens 1X 2X 5X 7.5X 10X 20X 50XDepth of focus ×2 0.88 mm 0.18 mm 0.028 mm 0.012 mm 0.007 mm 0.003 mm 0.0018 mmTotal scanning width 16 mm 4.0 mm 0.64 mm 0.28 mm 0.16 mm 0.040 mm 0.007 mmRatio:Totalscanningwidth / (Depthoffocus×2) 18X 22X 23X 23X 23X 13X 3.8X


microscopesseries 176 — measuring microscopes • an easy-to-operate standard measuring microscope...

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