stm6-lm/stm6 specifications measuring microscope stm6-lm/stm6 …nahwoo.com/userdata/stm6.pdf ·...

San-Ei building, 22-2, Nishi Shinjuku 1-chome, Shinjuku-ku, Tokyo, Japan

Postfach 10 49 08, 20034, Hamburg, Germany

2 Corporate Center Drive, Melville, NY 11747-3157, U.S.A.

491B River Valley Road, #12-01/04 Valley Point Office Tower, Singapore 248373

2-8 Honduras Street, London EC1Y OTX, United Kingdom.

104 Ferntree Gully Road, Oakleigh, Victoria, 3166, Australia

Specifications are subject to change without any obligation on the part of the manufacturer.

ISO9001Certificate No.69372

Certification

Design and production adheres to ISO9001

international quality standard.ISO 9001

Accredited by the Dutch Council for

Accreditation

ISO14001

Design and production at the Olympus Optical Co. Ltd. Ina Plant conforms with

ISO14001 specifications for environmental management systems.

CertificationCertificate No. 70933

ISO 14001008

U K A SENVIRONMENTAL

MANAGEMENT

MEASURING MICROSCOPE

STM6-LM/STM6

UNIVERSAL INFINITY SYSTEM

Web site address: http://www.olympus.com

STM6-LMSTM6

Manual 2-axis Manual 3-axis Motorized 3-axis

Vertical movement range 205mm 155mm

Maximum accepted sample height 205mm *1, 150mm *2 155mm *1, 100mm *2

FocusZ-axis measurement range 205mm *1, 150mm *2 — 155mm *1, 100mm *2

Coarse focusing speed 4.8mm / sec — — 4.8mm/sec

Fine focusing speed (variable)800µm / 400µm / 200µm / 50µm

— —800µm / 400µm / 200µm / 50µm

( full rotation of knob ) 4 steps ( full rotation of knob ) 4 steps

Illumination Cold light fiber guided illumination 12V100W halogen ( for both reflected and transmitted light )

Observation tube Erect image monocular tube, erect image trinocular tube, erect image trinocular tube for ES ( 100:0 / 0:100 / 10:90 )

Objectives (UIS)For metallurgical microscope MM6-OB series

For mesuring microscope UMPlanFL series, LMPlanFL series, UMPlanFL-BD series, LMPlanFL-BD series

Eyepiece ( UIS ) MM6-OCC10X ( with cross line, F.N. 22 ), MM6-OC10X ( F.N. 22 )

StrokeMM6-CS250 = MM6C-CS50 = X-axis: 50mm, Y-axis: 50mm / MM6C-CS100R = X-axis: 100mm, Y-axis: 50mm

X-axis: 250mm, Y-axis: 150mm MM6C-CS100 = X-axis: 100mm, Y-axis: 100mm / MM6C-CS150 = X-axis: 150mm, Y-axis: 100mmStage X-axis: ( 3+5L / 250 ) µm 50mm stroke: ( 3+L / 50 ) µm

Measuring accuracy Y-axis: ( 3+5L / 150 ) µm 100mm stroke: ( 3+2L / 100 ) µm[L: measuring length ( mm)] 150mm stroke: ( 3+3L / 150 ) µm [L: measuring length ( mm)]

Counter display Minimum readout 0.1µm/0.5µm ( selectable ) 0.5µm 0.1µm/0.5µm ( selectable ) 0.1µm

Dimensions *3 480 ( W ) X 579 ( D ) X 843 ( H ) mm 465 ( W ) X 437 ( D ) X 596 ( H ) mm 465 ( W ) X 437 ( D ) X 592 ( H ) mm 465 ( W) X 437 ( D ) X 696 ( H ) mm

Weight *4 Approx. 170kg Approx. 94kg Approx. 95kg Approx. 97kg

Power consumption 100 -120 / 220 - 240Vg0.9 / 0.4A 100 -120 / 220 - 240Vg0.7 / 0.4A 100 -120 / 220 - 240Vg1.6 / 0.8A50 / 60Hz 50 / 60Hz 50 / 60Hz

*1: With objectives for metallurgical microscope *2: With objectives for mesuring microscope*3: STM6-LM microscope body + MM6-CS250 stage combination, STM6 microscope body + MM6C-CS100 stage combination*4: STM6-LM microscope body + MM6-CS250 stage + integrated unit combination, STM6 microscope body + MM6C-CS100 stage + integrated unit combination

Objectives working distance

Objectives for Magnifications 1X 3X 5X 10X —measuring microscope MM6-OB 59.6 76.8 65.4 50.5 —

Magnifications 5X 10X 20X 50X 100X

UMPlanFL series For brightfield 20.0 10.1 3.1 0.66 0.31

LMPlanFL series Long working distance 22.5 21.0 12.0 10.6 3.4

UMPlanFL-BD series For brightfield/darkfield 12.0 6.5 3.0 0.66 0.31

LMPlanFL-BD series For brightfield/darkfield, long working distance 15.0 10.0 12.0 10.6 3.3

STM6-LM/STM6 specifications

Microscope body

Objectives formetallurgicalmicroscope

STM6 SERIESLINEUP

Versatile, High-Reliability Lineup PackedWith Features To Meet Any and EveryMeasurement Need.

STM6-LMLarge motorized 3-axis

measuring microscope with0.5µm readout

STM6Compact motorized 3-axismeasuring microscope with

0.1µm readout

STM6Compact manual 3-axis

The new STM6 series offers more system versatility and higher performance than ever before.Maintaining the exceptional levels of precision and durability that have always characterizedOlympus measuring microscopes, the series features a wide range of models to cover the ever-expanding user demand for new measuring capabilities and superior functionality. The range includes the STM6-LM, for fast inspection of large samples, and the high-precision STM6 which offers the most compact body in this class. In addition, multiple add-on units ensure that any and every user need can be met.Among the series' outstanding features are motorized focusing (a world first from Olympus),highly advanced UIS optics, the high-rigidity body with integrated counters, and much more. The STM6 series: created and built to perform today's most demanding measuring tasks.

STM6-LMLarge motorized 3-axis measuringmicroscope with 0.1µm readout.

STM6-LMLarge motorized 3-axis measuring

microscope with 0.1µm readout

0.1µm readout

STM6 SERIESLINEUP

Versatile, High-Reliability Lineup PackedWith Features To Meet Any and EveryMeasurement Need.

0.1µm readout

The new STM6 series offers more system versatility and higher performance than ever before.Maintaining the exceptional levels of precision and durability that have always characterizedOlympus measuring microscopes, the series features a wide range of models to cover the ever-expanding user demand for new measuring capabilities and superior functionality. The range includes the STM6-LM, for fast inspection of large samples, and the high-precision STM6 which offers the most compact body in this class. In addition, multiple add-on units ensure that any and every user need can be met.Among the series' outstanding features are motorized focusing (a world first from Olympus),highly advanced UIS optics, the high-rigidity body with integrated counters, and much more. The STM6 series: created and built to perform today's most demanding measuring tasks.

STM6-LMLarge motorized 3-axis measuringmicroscope with 0.1µm readout.

STM6-LMLarge motorized 3-axis measuring

microscope with 0.1µm readout

0.1µm readout

Japan (NRLM)

Japan Quality Assurance Organization(JQA)

Gauge Block

DialGaugeTester

Glass Block SquaresGaugeBlock

DialGauge

Measuring Microscopes

England (NPL)

United Kingdom

Accreditation Service(UKAS) Calibration Standard

Qualified Company by OLYMPUS

OpticalPolygonsfor Angle

Standards

StandardSquares

Rotary Indexing Tables

SquaresTester

StandardScale

Standard He-Ne Laser

Scale MeasurementMechanism

Rigid body and stage for rock-solid stability over long periodsSTM6 series quality derives from two main sources: time-tested manufacturing expertise plus valuablefeedback from actual user experiences. Recognizingthat precision and rigidity must not only be provided but also maintained for long periods, Olympus a-chieved exceptional lengths to ensure a high standard of rigidity in the microscope body and stage. Linearity is maintained by utilizing a line guide mechanism. Inaddition, newly developed Olympus original integratedoptical linear scale provides improved reliability.

Cold light illumination* to minimize heat effecton measuring precisionFiber-carried cold light is used for both reflected lightand transmitted light illumination, ensuring minimumheat effect on the sample and microscope body evenduring long-time inspections. The light source itselfis a 12V, 100W halogen lamp that provides a brightand uniform observation field of view and reducesoperator eye fatigue. Reflected and transmitted lightilluminators can be used simultaneously, withcontinuous adjustment available for both from a

Rigorous manufacturing procedures ensuretop-class quality controlOlympus puts the highest priority on precisionthroughout all the stages of production andassembly. As well as maintaining a strictly controlledthermostatic manufacturing environment, skilledOlympus engineers apply the most rigorousstandards to component material selection, high-precision machining, delicate finishing processes andfinal adjustment. All completed products andcomponent parts are fully controlled under a rigoroustraceability system.

•Olympus measuring microsocpe traceability system

Technology with traceability — the road to high precision

Accurate design and leading-edge technology: two keys to significant quality and process improvements

Traceability system for higher quality

single power unit — a design feature that increasesoperating convenience and saves valuable installationspace. *May not be available in some area

Optical linear scale to guarantee sub-micronresolutionAll optical information gained through Olympus'originally developed optical linear scale is processedand measured electrically. The precision of the scaleis obviously critical to measuring accuracy — so tominimized error, this scale is mounted to the bestposition basedon the Abbeformula, whichdefines theideal positionof scale andmeasuredobject as onthe linear line,toward themeasuringdirection.

FEM analysis

As of March 2001

Japan (NRLM)

Japan Quality Assurance Organization(JQA)

Gauge Block

DialGaugeTester

Glass Block SquaresGaugeBlock

DialGauge

Measuring Microscopes

England (NPL)

United Kingdom

Accreditation Service(UKAS) Calibration Standard

Qualified Company by OLYMPUS

OpticalPolygonsfor Angle

Standards

StandardSquares

Rotary Indexing Tables

SquaresTester

StandardScale

Standard He-Ne Laser

Scale MeasurementMechanism

Rigid body and stage for rock-solid stability over long periodsSTM6 series quality derives from two main sources: time-tested manufacturing expertise plus valuablefeedback from actual user experiences. Recognizingthat precision and rigidity must not only be provided but also maintained for long periods, Olympus a-chieved exceptional lengths to ensure a high standard of rigidity in the microscope body and stage. Linearity is maintained by utilizing a line guide mechanism. Inaddition, newly developed Olympus original integratedoptical linear scale provides improved reliability.

Cold light illumination* to minimize heat effecton measuring precisionFiber-carried cold light is used for both reflected lightand transmitted light illumination, ensuring minimumheat effect on the sample and microscope body evenduring long-time inspections. The light source itselfis a 12V, 100W halogen lamp that provides a brightand uniform observation field of view and reducesoperator eye fatigue. Reflected and transmitted lightilluminators can be used simultaneously, withcontinuous adjustment available for both from a

Rigorous manufacturing procedures ensuretop-class quality controlOlympus puts the highest priority on precisionthroughout all the stages of production andassembly. As well as maintaining a strictly controlledthermostatic manufacturing environment, skilledOlympus engineers apply the most rigorousstandards to component material selection, high-precision machining, delicate finishing processes andfinal adjustment. All completed products andcomponent parts are fully controlled under a rigoroustraceability system.

•Olympus measuring microsocpe traceability system

Technology with traceability — the road to high precision

Accurate design and leading-edge technology: two keys to significant quality and process improvements

Traceability system for higher quality

single power unit — a design feature that increasesoperating convenience and saves valuable installationspace. *May not be available in some area

Optical linear scale to guarantee sub-micronresolutionAll optical information gained through Olympus'originally developed optical linear scale is processedand measured electrically. The precision of the scaleis obviously critical to measuring accuracy — so tominimized error, this scale is mounted to the bestposition basedon the Abbeformula, whichdefines theideal positionof scale andmeasuredobject as onthe linear line,toward themeasuringdirection.

FEM analysis

As of March 2001

For high magnification measurement andNomarski DIC observationThree different types of reflected light illumination unitsare available for both the STM6-LM and STM6, tomeet the full range of users’ measurement require-ments. Corresponding to measuring objectives ormetallurgical objectives using the revolving nosepiece,these enable brightfield, darkfield and Nomarski DICobservations. The system can be freely upgraded byadding further units according to need.

MM6-VL

MM6-VLU

MM6-VLRFor STM6-LM

For STM6

MM6C-VLMM6-AF

MM6C-AF

MM6-ES

MM6C-KMAS

MM6C-RLAS

Motorizedfocusing button(up/down)

Coarse and fineswitchwoverbutton

Set-up buttonfor upper andlower limits

Auto focusbutton

Auto focus stopbutton

Z reset button

Focusing handle

Data outputbutton

Z-axis operation box

For Olympus, system expansion and ease of usestarts with concern for the user

Design ideas to reduce fatigue even in long-time operations

Motorized focusing for quick and precise Z-axis measuementOlympus' introduction of motorized focusing to thiscategory of microscopes drastically improvesoperability in both focusing and the measuring ofheight and depth. Exchanges of coarse and 4-stepfine movements (800, 400, 200 and 50µm/rotation)are carried out from the Z-axis control boxconveniently located right by the operator's hand.(For STM6-LM and STM6 motorized type)

Highly advanced optics for edge detection andmicroscopic inspectionClear edge detection, which is indispensable foraccurate measuring, is ensured by the superbresolution and highcontrast of advancedUIS optics. This results in greatlyimproved bothmeasurement andmicroscopicinspection.

Easy positioning using reticles whichcorrespond to the resolving power of the human eyeFor any measuring microscope, accurate alignment ofthe measuring object to the reticles is critical. Instraight-line alignment, research shows that the useof a reticle and a dotted line produces more accurateresults than using only a single line. Through analysisof the characteristics and resolving power of thehuman eye, Olympus has improved alignmentaccuracy by using areticle and a dottedline on the plate.

Towards the ideal observation eye-pointposition: column with counterThe column with counter is integrated with themicroscope body, with the display sectioncomfortably located at almost the same height as theobservation eye-point position. The operator canthus confirm themeasuring value withonly a slight change ofeye angle, allowingeasier concentration onthe sample observationand positioning.

A versatile lineup of add-on motorized units that allow selection of necessaryfunctions and bring dramatic improvements to measurement efficiency

A range of add-on type units that bring dramaticimprovements to measurement efficiency Several optional units are available to improvemeasuring efficiency, including an auto focus unit tomeasure height and depth automatically and atransmitted light edge sensor unit, whichautomatically detects a sample edge. These unitsdramatically improves measurement efficiency byshortening observation time and reducing fatigue.(MM6-AF may not be available in some area)

For high magnification measurement andNomarski DIC observationThree different types of reflected light illumination unitsare available for both the STM6-LM and STM6, tomeet the full range of users’ measurement require-ments. Corresponding to measuring objectives ormetallurgical objectives using the revolving nosepiece,these enable brightfield, darkfield and Nomarski DICobservations. The system can be freely upgraded byadding further units according to need.

MM6-VL

MM6-VLU

MM6-VLRFor STM6-LM

For STM6

MM6C-VLMM6-AF

MM6C-AF

MM6-ES

MM6C-KMAS

MM6C-RLAS

Motorizedfocusing button(up/down)

Coarse and fineswitchwoverbutton

Set-up buttonfor upper andlower limits

Auto focusbutton

Auto focus stopbutton

Z reset button

Focusing handle

Data outputbutton

Z-axis operation box

For Olympus, system expansion and ease of usestarts with concern for the user

Design ideas to reduce fatigue even in long-time operations

Motorized focusing for quick and precise Z-axis measuementOlympus' introduction of motorized focusing to thiscategory of microscopes drastically improvesoperability in both focusing and the measuring ofheight and depth. Exchanges of coarse and 4-stepfine movements (800, 400, 200 and 50µm/rotation)are carried out from the Z-axis control boxconveniently located right by the operator's hand.(For STM6-LM and STM6 motorized type)

Highly advanced optics for edge detection andmicroscopic inspectionClear edge detection, which is indispensable foraccurate measuring, is ensured by the superbresolution and highcontrast of advancedUIS optics. This results in greatlyimproved bothmeasurement andmicroscopicinspection.

Easy positioning using reticles whichcorrespond to the resolving power of the human eyeFor any measuring microscope, accurate alignment ofthe measuring object to the reticles is critical. Instraight-line alignment, research shows that the useof a reticle and a dotted line produces more accurateresults than using only a single line. Through analysisof the characteristics and resolving power of thehuman eye, Olympus has improved alignmentaccuracy by using areticle and a dottedline on the plate.

Towards the ideal observation eye-pointposition: column with counterThe column with counter is integrated with themicroscope body, with the display sectioncomfortably located at almost the same height as theobservation eye-point position. The operator canthus confirm themeasuring value withonly a slight change ofeye angle, allowingeasier concentration onthe sample observationand positioning.

A versatile lineup of add-on motorized units that allow selection of necessaryfunctions and bring dramatic improvements to measurement efficiency

A range of add-on type units that bring dramaticimprovements to measurement efficiency Several optional units are available to improvemeasuring efficiency, including an auto focus unit tomeasure height and depth automatically and atransmitted light edge sensor unit, whichautomatically detects a sample edge. These unitsdramatically improves measurement efficiency byshortening observation time and reducing fatigue.(MM6-AF may not be available in some area)

Clutch-type large stage allows quick inspectionof large areasThe stage provides a large measuring area (250 x150mm). All X and Y movements are clutch-controlled, and quick changeover between coarseand fine movements is performed by simply moving a lever. Free movements on the X/Y axis and X/Yplane allow even large samples to be quickly andaccuratelyinspected. It is alsopossible tomeasure multiplesamples on thestage at the sametime.

XYZ0.5µm

Auto Focus

Option

250×150Stage

Motorized

Option Option

Edge Sensor

XYZ0.1µm

Motorized AutoFocus

Option Option

250×150Stage

Edge Sensor

468370

MM6-ES edge sensor unit,MM6-AF AF unit,MM6-VLU universal reflected light illuminator,and MM6-CAL22 2-dimensional data processing unitcombination example

STM6-LM dimensions

MM6-CS250 dimensions

Setting example

(Unit: mm)

Motorized focusing as standard, for fast, high-precision measurement of large samples

Motorized focusing dramatically reducesfatigue in Z-axis measurementMotorized focusing is equipped as a standardfeature. Since the single control box puts thefocusing controls right by the operator’s hands, it isno longer necessary to take awkward positions tocontrol the Z-axis.

Space efficient body with integrated electric apparatusThe counter column and electricapparatus are integrated with themicroscope body to save space andfacilitate operation. Data can betransmitted via the built-in RS232C, whichenables easy connection to externalequipment like a personal computer orprinter. Data in a personal computer canthen easily be used to make a databaseusing such software as Microsoft Excel.

Large motorized 3-axismeasuring microscope with0.1µm readout

Large motorized 3-axismeasuring microscope with0.5µm readoutMM6-VL reflected light illuminator combination example

377 32

AA2709

Clutch-type large stage allows quick inspectionof large areasThe stage provides a large measuring area (250 x150mm). All X and Y movements are clutch-controlled, and quick changeover between coarseand fine movements is performed by simply moving a lever. Free movements on the X/Y axis and X/Yplane allow even large samples to be quickly andaccuratelyinspected. It is alsopossible tomeasure multiplesamples on thestage at the sametime.

XYZ0.5µm

Auto Focus

Option

250×150Stage

Motorized

Option Option

Edge Sensor

XYZ0.1µm

Motorized AutoFocus

Option Option

250×150Stage

Edge Sensor

468370

MM6-ES edge sensor unit,MM6-AF AF unit,MM6-VLU universal reflected light illuminator,and MM6-CAL22 2-dimensional data processing unitcombination example

STM6-LM dimensions

MM6-CS250 dimensions

Setting example

(Unit: mm)

Motorized focusing as standard, for fast, high-precision measurement of large samples

Motorized focusing dramatically reducesfatigue in Z-axis measurementMotorized focusing is equipped as a standardfeature. Since the single control box puts thefocusing controls right by the operator’s hands, it isno longer necessary to take awkward positions tocontrol the Z-axis.

Space efficient body with integrated electric apparatusThe counter column and electricapparatus are integrated with themicroscope body to save space andfacilitate operation. Data can betransmitted via the built-in RS232C, whichenables easy connection to externalequipment like a personal computer orprinter. Data in a personal computer canthen easily be used to make a databaseusing such software as Microsoft Excel.

Large motorized 3-axismeasuring microscope with0.1µm readout

Large motorized 3-axismeasuring microscope with0.5µm readoutMM6-VL reflected light illuminator combination example

377 32

AA2709

Space-saving body allowsinstallation to convenientplaceThis model is the smallest insize in this class of measuringmicroscope despite of itsnumerous versatile function.

4-model lineup to perform afull range of different jobsOne motorized 3-axis model with 0.1µm readout,two manual 3-axis models with 0.1µm and 0.5µmreadouts and one manual 2-axis model with 0.5µmreadout give users a wide variety of selection to suittheir specific purpose.

Auto Focus

Option

MotorizedXYZ0.1µm

50×50Stage

150×100Stage

Option

Edge Sensor

100×100Stage

100×50Stage

XYZ0.1µm

50×50Stage

150×100Stage

Option

Edge Sensor

100×50Stage

100×100Stage

XYZ0.5µm

50×50Stage

150×100Stage

Option

Edge Sensor

100×50Stage

100×100Stage

XY0.5µm

50×50Stage

150×100Stage

Option

Edge Sensor

100×50Stage

100×100Stage

STM6 (Motorized model) dimensions STM6 (Manual model) dimensions (Unit: mm)

MM6C-CS50 dimensions50×50 stage

MM6C-CS100R dimensions100×50 stage

363 437

327 20

230 272

7 206 25

Compact and highly functional design, with many possible combinations of bodies and stages

Compliance with high magnification requirementand wide measuring areasOperation at high magnifications and over widemeasuring areas. Users can select or add from fourtypes of stage and a varietyof reflected light illuminationsystems. Three of the stagetypes ( 50 x 50, 100 x 50 and100 x 100 ) are equippedwith coaxial knobs for coarseand fine movement, while thefourth ( 150 x 100 ) has aclutch-free mechanism toenable quick movement andprecise positioning.

Compact motorized 3-axismeasuring microscope with0.1µm readout

Compact manual 3-axis measuringmicroscope with 0.1µm readout

MM6C-RLAS universal illuminator combination example

MM6C-KMAS brightfield illuminator combination example

MM6C-VL reflected light illuminator for STM6 revolving nosepiececombination example

500 59

900 830

Setting example:150×100 stage combination

Setting example:50×50 stage, 100×50 stage or100×100 combination

Space-saving body allowsinstallation to convenientplaceThis model is the smallest insize in this class of measuringmicroscope despite of itsnumerous versatile function.

4-model lineup to perform afull range of different jobsOne motorized 3-axis model with 0.1µm readout,two manual 3-axis models with 0.1µm and 0.5µmreadouts and one manual 2-axis model with 0.5µmreadout give users a wide variety of selection to suittheir specific purpose.

Auto Focus

Option

MotorizedXYZ0.1µm

50×50Stage

150×100Stage

Option

Edge Sensor

100×100Stage

100×50Stage

XYZ0.1µm

50×50Stage

150×100Stage

Option

Edge Sensor

100×50Stage

100×100Stage

XYZ0.5µm

50×50Stage

150×100Stage

Option

Edge Sensor

100×50Stage

100×100Stage

XY0.5µm

50×50Stage

150×100Stage

Option

Edge Sensor

100×50Stage

100×100Stage

STM6 (Motorized model) dimensions STM6 (Manual model) dimensions (Unit: mm)

363 437

327 20

230 272

7 206 25

Compact and highly functional design, with many possible combinations of bodies and stages

Compliance with high magnification requirementand wide measuring areasOperation at high magnifications and over widemeasuring areas. Users can select or add from fourtypes of stage and a varietyof reflected light illuminationsystems. Three of the stagetypes ( 50 x 50, 100 x 50 and100 x 100 ) are equippedwith coaxial knobs for coarseand fine movement, while thefourth ( 150 x 100 ) has aclutch-free mechanism toenable quick movement andprecise positioning.

Compact motorized 3-axismeasuring microscope with0.1µm readout

MM6C-KMAS brightfield illuminator combination example

MM6C-VL reflected light illuminator for STM6 revolving nosepiececombination example

500 59

900 830

Setting example:150×100 stage combination

Setting example:50×50 stage, 100×50 stage or100×100 combination

88 71 5555

250.4 245.2

MM6-AF dimensions(Auto focus unit)

MM6C-AF dimensions(Auto focus unit)

(Unit: mm)

Instant, high-precision focusing for minute or uneven areas

Quick and accurate measuring free from operators' error

Simple add-on type auto focus unitAssist focus mode is newly added to STM6 series inaddition to the One-shot and Tracking focus modes.All the height and depth measurements, whichrequire the continuous fine and accurate operation,can be done with utilizing each focusing mode.Z direction measurement efficiencies are dramaticallyimproved with the auto focus so that the humanerror is now minimized.This unit can be easily added on because of itsintermediate tube type compact design.

zOne-shot modeFrom the roughly focused state, this mode enablesinstant focus on the center of the field of view.

xtrack modeThis mode maintains focus by following the focusedsurface. Since image is always fucused, workefficiency is dramatically improved.

cAssist modeAuto focus goes into the waiting mode when samplesurface run off from the focus tracking area.Move the stage up or down with motorized control tobring the sample surface into the tracking area sothat auto focus will be again working to get thefocus.

Tracking area

Assist areasample

Active reflective type auto focus optical path

Objective Reproducibility (2σ n-1)LMPLFL20x 2µmLMPLFL50x 1µmLMPLFL100x 1µm

Objective Spot diameterLMPLFL20x ø2.5µmLMPLFL50x ø1µmLMPLFL100x ø1µm

Reproducibility to 1µm using high-magnification objectivesThe confocal auto focus employs active reflectionmethod. This system maintains steady focusing evenon samples with angle or unevenness on surfaces.With a 100x objective, reproducibility is 1µm.

Auto focusing on the very small areas When using 50x and 100x objectives, the laser spotdiameter is 1µm. This allows Z-axis measurement onsmaller areas — enabling measurement of, forexample, the bonding wires in semiconductor chips.

Theoretical values from calculations

Values based on our standard samples

MM6-AF may not be available in some area Wavelength λ=785nm, IEC60825-1 Class 1 compatible

Sample

Photo Detector unit

Pinhole unit

Photo Detector unit

Pinhole unit

Laser Diode

Objective

88 71 5555

250.4 245.2

MM6-AF dimensions(Auto focus unit)

MM6C-AF dimensions(Auto focus unit)

(Unit: mm)

Instant, high-precision focusing for minute or uneven areas

Quick and accurate measuring free from operators' error

Simple add-on type auto focus unitAssist focus mode is newly added to STM6 series inaddition to the One-shot and Tracking focus modes.All the height and depth measurements, whichrequire the continuous fine and accurate operation,can be done with utilizing each focusing mode.Z direction measurement efficiencies are dramaticallyimproved with the auto focus so that the humanerror is now minimized.This unit can be easily added on because of itsintermediate tube type compact design.

zOne-shot modeFrom the roughly focused state, this mode enablesinstant focus on the center of the field of view.

xtrack modeThis mode maintains focus by following the focusedsurface. Since image is always fucused, workefficiency is dramatically improved.

cAssist modeAuto focus goes into the waiting mode when samplesurface run off from the focus tracking area.Move the stage up or down with motorized control tobring the sample surface into the tracking area sothat auto focus will be again working to get thefocus.

Tracking area

Assist areasample

Active reflective type auto focus optical path

Objective Reproducibility (2σ n-1)LMPLFL20x 2µmLMPLFL50x 1µmLMPLFL100x 1µm

Objective Spot diameterLMPLFL20x ø2.5µmLMPLFL50x ø1µmLMPLFL100x ø1µm

Reproducibility to 1µm using high-magnification objectivesThe confocal auto focus employs active reflectionmethod. This system maintains steady focusing evenon samples with angle or unevenness on surfaces.With a 100x objective, reproducibility is 1µm.

Auto focusing on the very small areas When using 50x and 100x objectives, the laser spotdiameter is 1µm. This allows Z-axis measurement onsmaller areas — enabling measurement of, forexample, the bonding wires in semiconductor chips.

Theoretical values from calculations

Values based on our standard samples

MM6-AF may not be available in some area Wavelength λ=785nm, IEC60825-1 Class 1 compatible

Sample

Photo Detector unit

Pinhole unit

Photo Detector unit

Pinhole unit

Laser Diode

Objective

One point to rotate coordinatesInput 1 and use numeric keypad to inputeither X-axis value and Y-axis value signs orX-axis value signs and Y-axis value signs.Rotate the coordinate system so that inputpoint 1 becomes the set up axis value sign.

One point to rotate for X-axisWithout shifting the originpoint, rotate the coordinatesystem so that input point 1lies on the X-axis.

Angle for rotationRotate the coordinate systemby the entered angle A.

Previous coordinatesGo back to the previouscoordinates setting.

One point for Z parallel moveShift the Z-axis in parallel sothat the origin point lies in theplane of input point 1.

Parallel X/Y shiftInput point “1” will be the neworiginal position with shiftingthe X/Y coordinates position.

Boot-up coordinatesGo back to the boot-upcoordinates setting.

Coordinates, differences anddistanceCalculate X-Y coordinates at theinput point, as well as differencesof X-Y coordinates and distancesthe previous input points.

Distance from origin and angulardifferenceCalculate distance between input pointand original point; the angle from theX-axis; and the angle difference fromthe previous input point.

One point for Z distanceCalculate the Z-axis distance ofinput point 1 from the referenceplane.

Z distanceMeasure Z coordinate of inputpoint plane and Z distancefrom previously input point'splane.

Two points for distanceCalculate the distance betweentwo input points at differentheight.

Four points for perpendiculardistanceCalculate the perpendiculardistance from input point 4 andafter to a plane determined bypoint 1 through 3.

Distance from reference line and previouspointDetermine a line with point 1 and 2 thenmeasure the distance from point3 to the line.Measure distance to the line and to theprevious point from the 4 th and after point.

Parallelism measurementCalculate crossing angle of two lines that are determinedwith point 1 and 2, and point 3 and 4. Also calculatelength of perpendicular line from the line determined withpoint 3 and 4 to the other at the typed in referenceposition on the line determined with point 1 and 2.

Perpendicularity measurementCalculate shift of crossing angle of two linesthat are determined with point 1 and 2, andpoint 3 and 4 (Obtaining crossing angle iscalculated as the difference angle from thereference angle of 90.).

Flatness of planeCalculate the differencebetween highest and lowestvalue (flatness) among anyinput points on the same plane.

1 point input Used when directly input apoint as data. Measured datais processed as input data.

2-point input Used when the input point ismidpoint of two measured points.This midpoint coordinate isprocessed as input data.

3-point input Used when input point is the centerof a circle. The center coordinatesof the circle created by threemeasured points is processed asinput data.

4-point input Used when input point is theintersection of two lines. Theintersection coordinates valuecreated by two lines from 4 inputpoints is processed as input data.

5-point inputUsed when input point is the center ofthe rectangle. Two input points formone side of rectangle and the otherthree points for other three sides ofrectangle. This center coordinates isprocessed as input point data.

Coordinates for originInput X and Y points via thenumeric keypad as the neworigin so that the coordinatesmoves in parallel to the neworigin.

Direct coordinatesMeasures the coordinate ofinput point 1.

Midpoint coordinatesCalculate the coordinate of themidpoint between input points1 and 2.

Three points for circle measurementCalculate the diameter, radius, andcenter coordinates of a circledetermined by the input three points.

Four points for coordinates andangleCalculate the intersectioncoordinates and intersection angleof two lines determined by point 1and 2, and point 3 and 4.

Five points for rectangleCalculate each side of arectangle that passes point 1through 5, and its centercoordinates.

Two points for angle, distance andcoordinatesCalculate angle of a line through points 1and 2 to the X-axis, the distance betweenthe 2 points, and the coordinatedifferences of the X-and Y-axes.

Three point for perpendiculardistanceCalculate the perpendiculardistance from point 3 to the linethrough points 1 and 2.

Five points for radius and coordinatesCalculate the intersection coordinatescreated by a circle that passes point 1through 3, and a line determined withpoints 4 and 5 as well as the radius of thecircle.

Six points for intersection coordinates andradiusCalculate intersection coordinates created bya circle that passes point 1 through 3, and acircle that passes point 4 through 6. Alsomeasures the radius of each circle.

Two points for X and centerThe line through input points 1and 2 becomes the X-axis andthe midpoint becomes theorigin.

Two points for X and originThe line through input points 1and 2 becomes the X-axis andinput point 1 becomes theorigin.

Three points for X and YThe line through input points 1and 2 becomes the X-axis, andthe perpendicular line frominput point 3 down to the X-axis becomes the Y-axis.

Three points for X and YInput point 3 becomes theorigin and the line parallel tothe line through point 1 and 2will be X-axis.

Four points for X and originThe line through input points 1and 2 becomes the X-axis. Theintersection of the X-axis andthe line through input points 3and 4 becomes the origin.

Measuring

andcalculating

MM6-CAL22 dimensions

(Unit: mm)

OS Microsoft Windows 98 English version

RAM 32MB or more

Disk space 5MB or more

PC PC/AT compatible

I/O device Communication port (COM1 or COM2),parallel port and FD drive

CPU Intel 80486DX2/66MHz or higher, Pentiumprocessor or fully compatible processor

Display Minimum resolution: 800x600Minimum display color: 16

Display adapter Windows compatible

Pointing device Mouse or other pointing devices

Keyboard Windows compatible

Dongle Enclosed in the package

Teaching software system requirements

Versatile calculation functions in a compact data processor

No need for parallel alignmentnecessarySince no parallel alignment for the sample isnecessary, the operator can start measuringimmediately after the sample is placed onthe stage.

Calculate and output the result withpoint data inputSimply 2-dimensional calculation isprocessed with only the point data input. 3 new alignment items and 6 newmeasuring items are added for better andeffective measuring work.

Hot-key registration assignment foralignment and measuring itemsNow the necessary function can beassigned to the buttons without increasingnumber of keys.It realizes the easy and user-friendlyoperation.

RS232C interface as standardStored measurement data can betransferred to a personal computer via thestandard RS232C interface, and organizedwith commonly used software.

Editing teaching programs withpersonal computerUp to 8 different patterns of measuringprocedures may be saved to the MM6-CAL22 with combination of various kinds ofmeasuring function.The teaching software lets users edit andmanage teaching programs on a PC.

MM6-CAL22 may not be available in some area.