saving energy and reducing waste the equipment suppliers view cemco-fsl hampshire england the...
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Saving energy and reducing Waste
The equipment suppliers view
Cemco-FSLHampshire
England
THE INSTITUTE OF CIRCUIT TECHNOLOGYSOUTHERN SYMPOSIUM
Wet Process equipment past and present
FSL 22 Etcher
Developer
Etch Strip
Wet Process equipment past and present
Criteria for future equipment design
•USE OF LOW VOLUME ENCLOSED SUMPS
•IMPROVE CHEMICAL & RINSE WATER FLOW DYNAMICS
•IMPROVE PROCESS LIQUID CONTAINMENT
•IMPROVE DRYING TEQNIQUES
•INTEGRATION OF CONTROLLED WATER USAGE & CHEMICAL/WASTE MANAGEMENT
•REDUCE PROCESS FOOTPRINT
Low volume enclosed sumps
BENEFITS
•LESS HEAT LOSS
•LESS CHEMICALS
•LESS WATER
•LESS POWER
•LESS WASTE
Sump sizes typically 80Ltr water & 120 Ltr Chemical or
less
BENEFITS
•SMALLER CHAMBER
•LESS HEAT LOSS
•MORE UNIFORM PROCESS
•SHORTER FOOTPRINT Chemical Process Typically 165 lpm Flow
rate
Improve chemical & rinse water flow dynamics
Improve chemical & rinse water flow dynamics
Process chamber volume: aprox. 150 litres.
Process chamber volume turnover rate: 1.5 per min.
Fluid Dynamics: Chaotic.
Process chamber volume: aprox. 5 litres combined.
Process chamber volumeturnover rate 65 per min.
Fluid dynamics: Streamline.
Conventional FSL Immersion chamber
Sreamline Immersion chamber
Improve chemical & rinse water flow dynamics
Improve chemical & rinse water flow dynamics
Patent No 2351458 DE
Conventional FSL 65 litre/min Spray Rinse thin material
system.
Streamline 65 litre/min Fluid Knife Rinse thin material
system
Improve process liquid containment
BENEFITS
•LESS CHEMICAL & WATER CARRY OUT
•LESS WASTE
•LESS EXTRACTED CONTAMINANTS
Improve drying techniques
•NO WATER ABSORBING ROLLERS •NO SUPLIMENTARY AIR HEATING•NO HEATED OVEN SECTION
BENEFITS
•NO POST CLEAN CONTAMINATION
•LESS POWER
•NO WATER RESIDUE MARKS
•SHORTER FOOTPRINT
Integration of controlled water usage & chemical / waste management
•ON-LINE COPPER RECOVERY•MONITORING OF RINSE WATER CONDUCTIVITY
BENEFITS
•IMPROVED PROCESS CONTROL
•CLOSED LOOP WASTE MANAGEMENT
•REDUCED CHEMICAL & WATER CONSUMPTION
Cupric etch Copper recovery
System
Rinse water copper recovery System
‘Streamline’
•USE OF LOW VOLUME ENCLOSED SUMPS
•IMPROVE CHEMICAL & RINSE WATER
FLOW DYNAMICS
•IMPROVE LIQUID CONTAINMENT/SEGREGATION
•IMPROVE DRYING TEQNIQUES
•INTEGRATION OF CONTROLLED WATER
USAGE & CHEMICAL/WASTE MANAGEMENT
Reduce process footprint
24-CW324-25-IM24-13-IM
1905
24-CW3
M
1127
964
12 1 2 3 4 5
1598
406
991
24-DS24-CW324-53 IM24-13-IM
6 7 8 9 10
M
310 BOARD = 510 610 BOARD = 680
1:1
J .P
***
*** Q0064 1 1B
CONVENSIONAL VS STREAMLINE COMPARISONHALF METER MPM SILVERLINE
A 07/11/79 ***** N/A
B 27/06/08 PW16502
Typical 0.5mpm AlphaStar Silver line
Conventional FSL design
Aprox 9mtr
StreamlineAprox 4.5mtr
Reduce process footprint
24-CW324-25-IM24-13-IM
1905
24-CW3
M
1127
964
12 1 2 3 4 5
1598
406
991
24-DS24-CW324-53 IM24-13-IM
6 7 8 9 10
M
310 BOARD = 510 610 BOARD = 680
1:1
J .P
***
*** Q0064 1 1B
CONVENSIONAL VS STREAMLINE COMPARISONHALF METER MPM SILVERLINE
A 07/11/79 ***** N/A
B 27/06/08 PW16502
Typical 0.5mpm AlphaStar Silver line
Conventional FSL design
Aprox 9mtr
StreamlineAprox 4.5mtr