PO LYMERIZATION and NANO COMPOSITE

DE POSITION BY ATMOSPHERIC PRESSURE

PLASMA (A PPECVD)

Ali Gulec and Lutfi Oksuz Suleyman Demirel University Faculty of Science and Art

Department of Physics, 32260 Isparta,TURKEY

Aysegul Uygun Suleyman Demirel University, Faculty of Science and Art

Department of Chemistry, 32260 Isparta,TURKEY

A dielectric barrier atmospheric pressure RF plasma system has been built using 13.56 MHz RF source with an homemade matching unit. A RF glow discharge is obtained with the helium flow and furan is introduced to the system. Polyfuran deposition is obtained onto glass and the characteristics of thin film are analyzed. In the same experimental setup, poly thiophene and polyfuran composites are deposited in the presence of Ti02 nano particles. The morphological, chemical structure, thermal and electrical characteristics are investigated. The plasma polymerization indicated different results than the conventional polymerization of similar thin films.

* This work is supported by The State Planning Organization with project number 2007K -121310 and also The Scientific and Technological Research Council of Turkey with project number 106T l34.