9â 9Ý 1b# Ö4Ù * f p + s...^8» ecs ulsi`˝‰xw ˇ‹ez[ Éw 8th ecs int. symp. on ulsi process...

43

Upload: others

Post on 07-Jan-2020

0 views

Category:

Documents


0 download

TRANSCRIPT

Page 1: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 2: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 3: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 4: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

^�»SiÐ��ÀZE_·��^©�ÉWö�^X»´$jA¬k¦�ÉW

8th Int . Conf. on Si Epitaxy and Hetero- structures (ICSI-8) &

6th Int . Symp. Control of Semiconductor Interfaces

h � Ë�l> 25+ 6( 2Ë0Ë`Ë1a 6Ë0�`Ë10 5ËQ1

h����bc

�DPd� 250Y

��ÉW�eSiÐ��ÀZE:·��^©���^©�yä:uvw

x`a��¨©��%;óch��1&�f"�WiG;L:#�"

�e>?�h�./2�ÉWÓ;;,���Tt���P7:1&g

�h�9tôi:jêklmôiÄ�D12,8� � 2�:në � 19

���e�oF�bj 50�:�x�Ebj 85��] 172��bjÄ�ù/e

Siö� SiGeC�·��°���ã>�I^�äiTtyReÁ��x`a

ö�{Bp´$juvwx��£�¢q\uvwxh�c¹0Ó�¤¥i

r}��i&¦ó��Ið�7�::Ü�HbÓÁås�tiÄuù

./2,02eOýbj�<=Ä_ai³:1&0:�t/e��i³A

�_ai³v Thin Sol id Fi lms (Vol .557, 2014) �9AÐ:1&¯wxÓ;

;3Ë�#oy@A�´$j¾K�HRe�2��Üe�ÉW�h��Ø

Õ�åz# �Ü�Ó;�eê@ò Si�·����uvwxhb�{Äh

A./;:�ë./;L:Tt |Jh�0 2015+1Ü9»./e@A�

)@#�A12ti��Äg6./&i;,

Page 5: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

^8»� ECS ULSIÁ��xw����EZ[��ÉW

8th ECS Int. Symp. on ULSI Process Integration

(Symp. E12, 224th Meeting of the Electrochem. Soc.)

h � Ë�l> 25+ 10( 28Ë0(`Ë1a 30Ë0}`Ë10 3ËQ1

h���� San FranciscoeUSA

�DPd� 50Y

��ÉW�e ULSIÁ��xw����EZ[�:�¢G;°��u

vwx`a��1&�f"�WiG;L:#�":1&>?�h�./2

�ÉWÓ;;,���Tt�g�h�9tôi0��P71:jêk

lmôiÄ�D12,8� � 2�:në � 19���e�oF� � 16

��] 37��bjÄ�ù/eOý¨©��%;¦ó��hbIð�7�

::Ü�HbÓÁås�tiÄuù./2,02eOýbj�<=Ä_a

i³:1&0:�t/e��i³A�_ai³v ECS Transact ion (Vol .58,

No.9 , 2013) �9AÐ:1&¯w./&i;,ÊõeL�¨©��Äd

d./;L:���e ULSIÁ��xw����EZ[���¢G;°

��uvwx�_3¨©Ä�K=chG;Ó;'Ô,

Page 6: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

^ 6»�Â���%;U��WE��Î}¼�Ãx:w��ÎÃ�¼y`a��G;�ÉW

SIGGRAPH Asia 2013 The 6th ACM SIGGRAPH Conference and Exhibition on Computer Graphics and

Interactive Techniques in Asia

h���� ~�U�¥�Z[�&ÐÃZHZ[����Eh�Ë�� 2013+ 11( 19Ë(�)a22Ë(ø)Web�� http://sa2013.siggraph.org/

SIGGRAPH�e��¶·#�= ACM (Association for Computing Machinery) � 1�� SIG (Special Interest Group1ÓeU��WE��Î}¼�Ãx:w��ÎÃ�¼y`a��G;úHI#�²&i;,�1&eL�¨©Ó@A¦���ÉW:1&

SIGGRAPH # 40 +�����1e�+���Óh�1& 2 �a3 �P��D­#A�&K2,���Â�wÓ;; SIGGRAPH Asia�e2008+�h�./e2008+Z�á�EÑ0�D­d 3389P, Exhibition¯cÈd 81È1e2009+��0µ 6424P, 71È1e2010+|~Ñ0µ 9238P, 102È1e2011+~�0µ 7734P, 122È1, 2012+Z�á�EÑ0µ 4338P, 79È1:h�./e2013+� 11( 19Ëa22Ë�~�Óh�./e6,078P��D­: 80È�¯cÈd#A�2,

SIGGRAPH��� SIGGRAPH AsiaÓ�e��`a�:�a��Á��Î{ħ�1&�0/ei�/ÜL�¨©Ó¦����:_a"��#�²&i;,̀ a�Á��Î{��e

Technical Papers, Emerging Technologies, Posters ��e�a�Á��Î{��eArtGallery� Computer Animation Festival��Ä;;,L�Ô�eU��WE��Î}¼�Ãx�`a#����G;Á��Î{Ä Technical PapersÓew��ÎÃ�¼y`a#�Ô�Ä Emerging TechnologiesÓ;;,Technical Papers�eU��WE��Î}¼�Ãx:w��ÎÃ�¼y`a�¦ó`a��G;i³��­��;F�bjÓeM+e� 400����Ttn��m�0ef� 20��n1#ß&efÄ90;,Emerging Technologies�e¦ó�w��ÎÃ�¼y`a��G;uÍ�x��EZ[�c�ÓeM+e� 100 ����Ttn��m�0ef� 20��n1#ß&efÄ90�eÉW�D­�L/t#jàÓK;::Ü�euÍ#�²&i;�­:���Ó�¡WiÜÓK;,

������[��³ôi�eEmerging Technologies�Á��Î{#qd+T%&��bc��\.f;2��eDirector :iÔ����Ke�+t`./; Chair :<=1&QR�;2²&i;,2013+� Emerging Technologies��em�#ß&ef./26TTt 17���>?ÄÉ��� 3ËQ�ù2²&uÍ�x��EZ[�c�./e�­#�12,

2014+�^7»SIGGRAPH Asia�12(3a6Ë��� ¡Óh�Ä¢»./&i;,

Page 7: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 8: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

^7»ó IV³´$j��Ð�Ã��XÃx��EÃZ[�Á_Ë�_a£-É�¶·�>UKÂ[w���V�E¤ÌABk£k¦Á��x

�«µ�¶·��>¥7th International WorkShop on New Group IV Semiconductor

Nanoelectronics and JSPS Core-to-Core Program Joint Seminar

“Atomically Controlled Processing for Ultralarge Scale Integration”

h � Ë�l> 26+ 1( 27Ë0(`Ë1a 28Ë0�`Ë10 2ËQ1

h����Ý[�_������ ���x��\à�,

�DPd� 60Y

���EÃZ[�Á�eó²³´$j°��Á��x`aö���u

vwxh�c¹0Ó�¤¥ir}��i&��f"�Wi#�"�e�

���«µÁ�Â�Ã��H23� A04�Ìn¯é�k£¤°± IV³´$

j^©�>:��uvwxh�c¹��G;��Ä��:�²&>?1

2�ÉWÓ;;,����x��\à�,���Ð�Ã��XÃx�

«µ�¶·z¯UK §�� Ë�_a£-É�¶·�>UK�ÌA

Bk£k¦Á��x�«µ�¶·��>�0UEu¼�E�E�g�

h�9tôi1�HI��~:1&h�./e��P7�¦Á��Î{P

7�:1&g�h�9tôiÄe��P7:1&§¨©ªôi:jêkl

môiÄ�D12,Ë� Fwïe}Î�xe¥ÑÒE��¶·òj­

t�bj#oynë � 8� �o � 9� �x�E � 21��bd 38

�� �0� Ý[�_���\G;bj 8�1Ä�ù/eHb�ti

Ä�ù/2,@A�´$j¾K�HRe�2��Üe���EÃZ[�

Á�h��ØÕÓ;�eê»� 2015+�h�G;L:Ä9»./&i;,

Êõe@A��Ó��¢£�K²T%:�;L:���e�_3¨©Ä

� K = c h G ; : � ë . / ; , � É W � « p �

ht tp : / /www.murota . r iec . tohoku.ac . jp /EI4GroupIV-WS2014/ � � i & û h .

/&i;,

Page 9: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 10: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 11: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

Méz_�É� � �

��� ������ � �� ��

Méz_�É�e¦Ü�i¬­#Ü��ÉÓ;�eL/0Ó�h�»d�

++�»#{�;3��É�e�4Tt¢4�ù2;�È4#¹i2Á��

*�Mé��G;8¸�c¹��bj:ti#�":1&��e®¯�M°�

Mé���L/t�¹i;uvwx�v����në �:�7�#�²

&K23

�+n�¿»��ÉÄh�./e9± �Ä 1�e�o �Ä[����ù

/23¦ó��Ið:>?Äbj./eHb�WiÄ�ù/23

^**)»�

Ëñ� � pq')+*(p²Ë0�1 � '*³qq´'µ³qq�

��� � Ý[�_����67��r*'�r*)ÉWg �

��� � �

**)´'¶·¸¹º»¼½¾¿�¾ÀÁ�ÂÃĺ»¼¹ºÀž¿�ÆŸÁÇ�ÈÀ�É¿¾À¾»�ʾ˺̸¼Áº�ÆͺºÅ�μÅÍ�

ÆμŽͼÀÌ�ϼ˺»Ð¼ÅÇ�

/ÑÒÓ 'eÑ×'eÔÕÖ* 'e���×Ø£ pel©s� p0 'Ý[�_z_

�^e pÙPÚ�ÉÈ1 �

**)´p¶à4dr}ÛîÐãä#¹i;����4�Mé �

/ÜÝ��GweÞÕßàeákâãeä¾³å0Ý[�_z_�^1 �

**)´)¶uWÝvw�D��EZ�Ñ�x��x}¼Ñ�#¹i2Z��ÑÀ�

D�Mé��%;à4dr}ýe�

/æçèle�{�E�y�ªÂ�weé�êëeä¾³å0Ý[�_z_

�^1 �

**)´r¶|}Æ�ÅÆ}¼Ñ�#¹i2ÌÍ}2wvÎ��w÷EÂ���ü

t�

/ìOíî 'eïðñ­ peòóôõ 'öp0 'Ý[�_�z_�^e pÝ[�_

z_�^1 �

�DPd� r*P�

^**r»�

Ëñ� � pq')+m(p*Ë0�1 � '*³qq´'µ³)q�

��� � Ý[�_����67��r*'�r*)ÉWg �

��� �

**r´'¶£|�]8/÷¹<à4«¹��E����Ç£�üt �

/ø¨�à 'eÑ×'e��ù p0 'Ý[�_z_�^e pË-���|DW

EZ[�Ü0Ú1«ú � ,]��1 �

**r´p¶}Ý�X�Ã�ã}¼Ñ�:�>¨¨û#¹i2üýÀ?þ]! �

/����e���leé���0Ý[�_z_�^1 �

**r´)¶Ì¯= »³���EEMé¹óWEyDEÀE$4¼�«ª �

/á� 'eïðñ­ 'eòóôõ 'öp0 'Ý[�_z_�^ ö�pÝ[�_�z

Page 12: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

_�^1 �

**r´r¶�¸¿Å¼´¾ÀźÀÀ¾� »º½º¼Ëº»� ÁºÐ¼ÌÀ� ¼À� ¾� »º�¸ºÀ½Ç� к¿º½Å¼Ëº� ¾Á¼ÀÌ�

½Í¾ÀÀº¿�

/ ʺ¼�ɺÀÌö��¸¹¼Ç¸�¼��Á¾½Í¼0Ý[�_z_�^1 �

**r´*¶�Á¾Äż˺�Æľ»Ðº��;ÀÀº¿�ÂÐż¹¾Å¼ÈÀ��ºÅÍÈÁ� È»��»È¾Á�¾ÀÁ�ʼ»º¿ºÐÐ�

�ȹ¹¸À¼½¾Å¼ÈÀ�ÆÇÐź¹Ð�

/ ¸¾À�¸¼e�¸¹¼Ç¸�¼��Á¾½Í¼0Ý[�_z_�^1 �

�DPd� rpP�

^***»�

Ëñ� pq')+µ( p)Ë0�1 � '*³qq´'µ³)q�

���Ý[�_����67��r*'�r*)ÉWg �

��� �

***´'¶)qq¹¹8�O�ª«12ZDU�p�$4¼ �

/l©� 'e���n 'e[Ø. 'e�����'e��� peÀé�� pe���

peé��� '0 'Ý[�_�_�z_�^e po�s¾K`ab\��1 �

***´p¶ÏÆ´�Ï���Ï�·�O�D�ÃÎÏ:�Õé�= �

/ìT�le�� !eä¾³å0Ý[�_�_�z_�^1 �

***´)¶Z��ÑÀ�D� Æ"��¶wvEZó#¹i;�Ñó#EE �$�%T�D

�Ã��G;üt �

/&c�leÞÕßàeä¾³å0Ý[�_�_�z_�^1 �

***´r¶'ºÐº¾»½Í�ÈÀ�ʼ»º¿ºÐÐ�ÉÈκ»�"»¾ÀÐ º»�μÅÍ�·º¾»´ ¼º¿Á�½È¸Ä¿¼ÀÌ �̧ мÀÌ�

�¸¿Å¼´ÄÈ»Å�¾ÀźÀÀ¾Ð�

/()¾ 'e*+, peÑ×'0 'Ý[�_�_�z_�^ ö�p-.Ìýs�_

/1 �

***´*¶Î��¨¢w÷EÂMé¹�ë}2wvv�FÑ�

/ïðñ­ 'eìOíî peòóôõ p0 'Ý[�_�_�z_�^ ö�pÝ[�

_�_��z_�^1 �

�DPd� r*P�

^**m»�

Ëñ� � pq')+((prË0�1 � '*³qq0 'µ³qq�

��� � Ý[�_����67��r*'�r*)ÉWg �

��� �

**m´'¶�ë$4¼#¹i2 "12r}¹ �"'Á�Ey�

/��34 'eïðñ­ 'eòóôõ 'öp0 'Ý[�_�_�z_�^e pÝ[

�_�_��z_�^1 �

**m´p¶¢�A��Ë�Ìßne�2��������G;üt �

/æ� P ö�Ñ×0Ý[�_�_�z_�^1 �

**m´)¶5~67�w���ó��Ñd»���¦�éà4dr}ýe#¹

i;Z��ÑÀ�D�ñëQ8Ðeé$¶wvEZó �

/�� !eä¾³å0Ý[�_�_�z_�^1 �

**m´r¶�Ñó9�ÁMé��%;:�;1ß¼#¹i2¶wvEZó#T<

12=>À���Î��G;üt �

Page 13: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

/ò©?ãe�� !eä¾³å0Ý[�_�_�z_�^1 �

�DPd� r)P�

^**µ»�

Ëñ� � pq')+'q(ppË0�1 � '*³qqa '²³qq�

��� � Ý[�_����67��r*'�r*)ÉWg �

��� �

**µ´'¶@¾»¼¾�¿º�¼Ð�ÈÈÁ³��Á¾Äż˺�Æľ»Ðº��;ÀÀº¿�ÂÐż¹¾Å¼ÈÀ�¸Ð¼ÀÌ�Æľ»Ðº�

@ÆÆ´·A�Æ��¿ÌÈ»¼Å͹Ð�

/ ¸¾À�¸¼�¾ÀÁ��¸¹¼Ç¸�¼��Á¾½Í¼0Ý[�_�_�z_�^1 �

**µ´p¶ZDU�p�¢$4¼D��«£�:MB�C$}¼Ñ�#¹i24�

��EE �

/D�E ö�[Ø.ö�é���0Ý[�_�_�z_�^1 �

**µ´)¶��îF¶w�EÑ��E�����$R��\à"­® �

/G¨û¸eÊ©HôeÑ×0Ý[�_�_�z_�^1 �

**µ´r¶üIA��;*��=Mé�w��E¶�xJ\��G;8¸"üt

/�KL�e()¾eÑ×0Ý[�_�_�z_�^1 �

**µ´*¶$4ÍEF«è]N#¸¹12¢}2wv�×û �

/¥MN ö����lö�é���0Ý[�_�_�z_�^1 �

**µ´m¶}Ý�X�Ã�÷�j¬��;O4�P �

/���l0Ý[�_�_�z_�^1 �

�DPd� rqP�

^**²»�

Ëñ� � pq')+''(pmË0�1 � '*³qq´'²³qq�

��� � Ý[�_����67��r*'�r*)ÉWg �

��� �

**²´'¶ÌÍÊI~�T��%;ñ¨�qZ��ÑÀ�D�à4dr}ñë

Q8Ðe¶wvEZó �

/�� !eä¾³å0Ý[�_�_�z_�^1 �

**²´p¶ÏÆ´�Ï����� Æ�´�Ï��#¹i;¨î��������EÃ�O�D�

ÃÎÏ�

/ìT�le�� !eä¾³å0Ý[�_�_�z_�^1 �

**²´)¶��4Ô�4ÔÕ�d»w�d;×û �

/�^³eeÑ×0Ý[�_�_�z_�^1 �

**²´r¶Mdà�¶w�EÑ��EÇ£#¹i2D}�Ã���E�¥|}e�

/��HeÊ©HôeÑ×0Ý[�_�_�z_�^1 �

**²´*¶�ë¢}2wváx�Ñ#¹i2QÀáxRS¨¢ �

/¯-LT 'ö�ïðñ­ 'ö�òóôõ 'öp0 'Ý[�_�_�z_�^e pÝ[

�_�_��z_�^1 �

**²´m¶GwyD�FABZDU�}Ý�XÃx�

/[Ø.0Ý[�_�_�z_�^1 �

�DPd� )²P�

Page 14: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

^**(»�

Ëñ� � pq')+'p(prË0�1 � '*³qq´'µ³qq�

��� � Ý[�_����67��r*'�r*)ÉWg �

��� �

**(´'¶"¼%pó��Ñ$4¼��%;¥|}¢bñ �

/�UVõe[Ø.eé���0Ý[�_�_�z_�^1 �

**(´p¶£|�]8/÷¹<à4«¹��E����Ç£�üt �

/ø¨�à 'ö�Ñ×'ö�ìO×W p0 'Ý[�_�_�z_�^ ö�pË-��

�|DWEZ[�Ü0Ú1«ú,]��1 �

**(´)¶$¹Ä»È˺¹ºÀÅ�È �·º¾»´�¼º¿Á�ÉÈκ»�"»¾ÀÐ º»� ¼½¼ºÀ½Ç��Ç�ÐμŽͼÀÌ�

ɾ»¾Ð¼Å¼½�¿º¹ºÀÅÐ�

/()¾ 'ö�*+, pö�Ñ×'0 'Ý[�_�_�z_�^e p-.Ìs1 �

**(´r¶ÌÍ�ÍE÷��w��G;��

/Ê©HôeÑ×0Ý[�_�_�z_�^1 �

�DPd� rqY�

^*mq»�

Ëñ� � pq'r+'(p²Ë0�1 � '*³qq´'m³)q�

��� � Ý[�_����67��r*'�r*)ÉWg �

��� �

*mq´'¶'º¾Á¼ÀÌ� ɺ» È»¹¾À½º� $¹Ä»È˺¹ºÀÅ� È � ƹ¾»Å´Æͺ¿ � ÆÇÐź¹� �Ç� XмÀÌ�

ϼ˺»Ð¼ÅÇ�'º½ºÄżÈÀ�

/ÑÒÓ 'eÑ×'eÔÕÖ* pe���×Ø£ )ö�l©s� )0 'Ý[�_�_�

z_�^e pÝ[�_ ·$�1ºe )ÙPÚ�ÉÈ1 �

*mq´p¶T�D�èî��������EÃ��%; �$�%MéÓ�à4d¸

¹��:Ð�ÑÒE¸¹����G;�üt �

/YZ)[eÞÕßàe\Q]^eä¾³å0Ý[�_�_�z_�^1 �

*mq´)¶µµ� 12� ɾÐм˺� �¼¿¿¼¹ºÅº»´Î¾Ëº� $¹¾Ì¼ÀÌ� Ϻ˼½º� È»� ƺ½¸»¼ÅÇ�

�ÄÄ¿¼½¾Å¼ÈÀÐ�

/1¼»ÈǾи�Æ�"%0»¾Á¸¾Åº�ƽÍÈÈ¿�È �ÂÀ̼Àºº»¼ÀÌö�"ÈÍÈ�¸�XÀ¼Ëº»Ð¼ÅÇ1�

�DPd� r)P�

^*m'»�

Ëñ� � pq'r+p(p*Ë0�1 � '*³qq´'µ³qq�

��� � Ý[�_����67��r*'�r*)ÉWg �

��� �

_9± �`@¼ºÎ�ÈÀ� ¸Å¸»º�»¾Á¾»�ź½ÍÀÈ¿ÈÌÇö�ÐÇÐź¹Ð�¾ÀÁ�¾ÄÄ¿¼½¾Å¼ÈÀÐ�

/Ï»¶�AºÈ�ɶ�A¼ÌÅ;»Å'öp0 '�Ϻ¿ Å�XÀ¼Ëº»Ð¼ÅÇ�È �"º½ÍÀÈ¿ÈÌÇö�p��·Â�Æ�"ÈÍÈ�¸�

XÀ¼Ëº»Ð¼ÅÇ1�

*m'´'¶�¿¾·a¾·�1Â�"��ôE��'ä»e`a�

/�l 'e§��b×pe�cd! 'ee�f )ö�Ì�� )egòhZ )0 '�i

�IÚ�ÉÈ67`ab\��e p�i�IÚ�ÉÈÌà4¢uvwx«ª

�e )Ý[�_�����1 �

*m'´p¶¾�Ð�1�"��ÌR�e�

Page 15: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

/Q�Ö! 'el©Y� 'ee�f peÌ�� pegòhZ p0 '�i�IÚ�ÉÈ

Ìà4¢uvwx«ª�e pÝ[�_�����1 �

*m'´)¶ÉX#¹i2D}�Ã���E,]�ÌÍe��G;�üt �

/<�jk 'e��H peÊ©Hô peÑ×p0 'Ý[�_z_�67@�Zx�

{b\_^e pÝ[�_z_�^1 �

�DPd� rqP�

Page 16: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

Ó æ z _ � É

��� ������ �����

Óæz_�É�eÓ4eØj£Ie{Ó4���lR4#MN:G;��>?#

bj1eti�å uP#G;�:1&e 1950 +U�bm12�ÉÓ;;3�¢G;¨©�e��Óæe����äÓæen�ÓæeoÓk¦eu¼Â�Ñ���eÓ�

¨û�\>eÓ�ºâ�ä×eÓ~�z_��e<p�ù2²&i;3 2013 +n�e�mø¨qlôierUs�t�môi�Ü:Óe�É 3»0^ 362»e^ 363»e^ 364»1:� �É 1»Äh�./23É��e^ 362»Ä����� 2Ðu�ÉWge^ 363»:^ 364»ÄÝ[�_z_��£67Zx�{�cy� 103ÉWgÓ�ù/23��e^ 362»��£67�_ÉHIP�ÉeË�º@�ä_ÉßR_��ÉeË�¢_Éa���ÑEÁeË��ä_É�vå:º@��É:�«�

Óe^ 363»� IEEE SPS Sendai Chapter :«�Óe^ 364»�{Ó4Ð�Ã��XÃx�Ée IEEE SPS Sendai Chapter :«�Óh�./23^ 362»� 2013 +11 ( 19 Ë0�1e 20 Ë0}1�h�./e�bj 19 �e�D­�7g 91 YÓ;²23^ 363»� 2013 + 12 ( 18 Ë0}1�h�./e�bj 2�e�D­�7g 52 YÓ;²23^ 364»� 2013 + 12 ( 26 Ë0�1�h�./e�bj5�e�D­� 41 YÓ;²23� �É�e 2014 + 3( 14 Ë0ø1�w�xôi0��b\^_�_1��;�ë�y#^_G;�:iÔ�Óh�./e�D­� 8YÓ;²23

Page 17: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

- . ¤ Á Î Ü � } Ý E Î { ¥

� � �

��� �� � ��� � �� � ���

��É�e®�eçÌ\���ÁÎÜ�]N�8¸:ó�yèz«�°�j¬�á

èe��ddI���c¹:�/��¢G;¦ó��>?��1&e9± �ö�9

±>?#h�G;::Ü�eHb��ti:�bj#�ÔL:#�":1&i;3

l>u++n�HI:1&e_�_ñ#��:G;z{i³�8Ñi2ÁÎÜ�8¸

���ÁÎÜ�c¹e]!��G;��tiÉ�#[»h�3�_�ñ��;ÁÎÜ

�F']Ne}��|�®�ñ>eÁÎÜ�ddI�R�­®:yä]NeÁÎÜ�¸

¹��ªE¡�ÅÆ8Õ�ÄhbeíÙeDÇ�÷��h��P`ae}Ç}wÝ�H

E{Ôhbe��BC£�ñ>����bjÉ#u»h�3� , À�­��;ÁÎÜ�~�I�:çÌ\eÁÎÜ�ddIhbel<ÁÎÜ���Åä»R , }ÎE����Î}���ªE¡���óWEy , ��°��ä�­® , ��ÁÎÜ�eÁÎÜ�'�8¸:c¹��G;��bj�#+»h�123<��ch# f;ÁÎ

Ü��c¹`a:�/#��;8¸���1e¦ó��>?# ���ti#�Ô

::Ü�67uP#�ÔL:ÄÓK234O��É�D­�e_�À\ùf&�ñ+

�Y�õÓ;²23

Page 18: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

��0-.�V�E� � �

��� ��� � !� � "#� $%�

� ��00~��Èz_1�e�È�wÜ:Ð��È=>0��11��È

A�ñj�?����È~�3�#�Ô¨©Ó;�e���67z_¨©�

�­:`a­��ùt�;#E�i3L�3�Ä�ÄÓ@t/;�Ô��²

&Q�i 1977+ 2(�e��0�iT�x�ygKT#�m1e_3:1&

j�eG;�"Óe���0-.�V�EÑ�Äbm123L�HI�e�Ü

�t�i�:x��yÝ[�_�_���;Ü�Ó;�eLLÓti./2

d"���e�Ä�@A���0��vð#�1��=���#?2

1&��e�z"�>?#L��ÉTt@�é�¯1&K23 2001+�

IEEE EMC Society -.ChapterÄ,-./e¢£1&HI1&i;3

� l> 25+n�e^ 196»0 10( 23Ë1�cé�_�����ù����;�

�É�EMC`a:ËwFó��Ñ��ZVW�EZ[��e IEEE Inter-

national Symposium on EMCh��D7� 2�:¬��� Best Symposium

Paper Award$�ý� �e^197»0u( 28Ë1����_�ò���#ni

&�67�I�Ttñ�;��i�È4�¢!w�����,]w�� �

:_ñ��;+���bjÄ;²23

Page 19: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

� � �

U � � W E � Ë w Ð � x � É

� � �

� � � � � � � � � � � �

��� &'� (�� � )*� +,��

U��WE�ËwÐ�x�É� �ÀÓH�G;�­# ��nK U��WE

�ËwÐ�x��%;¦ó��>? ]���i& �É#h�1 �����

��67���G;�gQ�_3�u'#r;L:#�":1&i;3pq')+n��

^ 'm*» �ÉTt^ 'm²» �É0Ó r»� �É#h�123�

�¸Ðżº�Ƹ´"2¸��¸¾À�0 ·¾Å¼ÈÀ¾¿��ͼ�·¾À�XÀ¼Ëº»Ð¼ÅÇ 1� � 1¾¹¼¿ÅÈÀ¼½¼ÅÇ�

'º¿¾ÅºÁ�É»È�¿º¹Ð�¼À�@¾»¼È¸Ð�»¾ÄÍÐ�:iÔ�w�ÑÓ � �¼´�¸ÀÌ��ͺÀ�

0 ·¾Å¼ÈÀ¾¿��ͼ�·¾À�XÀ¼Ëº»Ð¼ÅÇ 1� � �º¹È»Ç�ÆÇÐź¹�ÆÇÀÅͺмÐ� È»��ÉÆÈ�Ð�μÅÍ�

)ϴО½�ºÁ��º¹È»¼ºÐ �:iÔ�w�ÑÓ �#�²20 r(ppË13�

á� ���0Ý��_�_�67äz_��^1� � ɸ¹Ä¼ÀÌ��Ç�"ÇļÀÌ �:i

Ô�w�ÑÓ �#�²20 m(p'Ë13l�� ���0 ¡zK�_�_�67z_

��1� � "¾¼�¹¾ÄļÀÌ�ͼº»¾»½ÍÇ�¾ÀÁ�˾»¼¾Å¼ÈÀÐ�È �Å»ºº�ºÁ¼Å�Á¼ÐžÀ½º�:i

Ô�w�ÑÓ �#�²20''(pµË13 �Á¶�ƾ¼Á¸»�'¾Í¹¾À �0�¾ÀÌ¿¾ÁºÐÍ�

XÀ¼Ëº»Ð¼ÅÇ�È �ÂÀ̼Àºº»¼ÀÌ�¾ÀÁ�"º½ÍÀÈ¿ÈÌÇ1�� ɾ¼»Î¼Ðº��ȹľż�¼¿¼ÅÇ�»¾ÄÍÐ �

:iÔ�w�ÑÓ �É#�²20 p( * Ë13�

02 ^))»�^)r» ·XÂ�V�E#«�1 $»º��X¿¼ÁÈÎÐ�¼�0XÀ¼Ëº»Ð¼ÅÇ�È �

Aº¼½ºÐź»s� � �ÈÁº¿¿¼ÀÌ�È ��ÈÀÁ¼ÀÌ�μÅÍ�ĻȽºÐкÐ�¾Á�ºËºÀÅÐ �:iÔ�w�Ñ

Ó �É#�i0 *(p)Ë1 @¼À½ºÀÅ�˾À�%ÈÐŻȹ � �oXÅ»º½ÍÅ�XÀ¼Ëº»Ð¼ÅÇs �� C���

ÆÇÀžô�»ºº�Ϻ˺¿ÈĹºÀÅÐ�:iÔ�w�ÑÓ �É#�²20'q(p(Ë13�

� ��É� 4O��Ô�^��ÓH�G;�­��;¦ó��>?� �#Ü

:� Hb�ti:å uPÄ�./ Áås�_3u'��#8¢123�

Page 20: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

Z x � { k ¦ � É

� � �

��� -.� /�� � 01� 23�

��É�eZx�{k¦��%;eäiTtc¹�ù2;¥£�¦ó��Ið�

�i&tWG;L:#�":1&i;3�+n�HI�4T�:��Ó;;3

� -1 ( �É ) ó�Uz^�_ÁÎG/� môi� yU}xÀ� w¡�0���Learning Entropy and its Use for Novelty Detection in Bio-Signal1� u1 ( � �É ) Ý[zK�_z_�� ôi� ¤é êP�0����¡���÷

ª��XÃxZx�{�\¹ek¦`a1

Page 21: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

� � � 6 7 v w Ý � � X Ã x � É

� � �

� � � � � � � � � � � � � � � � � � ��� 45� 678� -9� :7�

���vwÝÐ�Ã��XÃx�ØÕ�^_`a¨©���Ó;;Äe��`aKó

�2���e�£z_`a:<��I�#Ü�ñ`^_ùc�:�Ì\ÄZÕÅÆÇÓ

;;,1T1eñj¨£�HR�ç ��e´$jÇ£:ñj¨£:�A¬,]��i

&�×9GgK��Ü<i,��ÉÓ�e�£z_�´$jz_��­:ej¬^

_eñ`^_eñä_evwÝ��D�Ñz_e�z_����¨©��­¾Ä<=

1&e���vwÝÐ�Ã��XÃx�Êõ�¥¦�§#tiG;L:#�":1&i

;,�+n�e67vwÝ��XÃx�É«���Z��Â~{#u»h�12,

The 2nd RIEC International Symposium on Brain Functions and Brain Computer

l>26+ 2(21022Ëh� _ Plenary talk` ”Nanoelectronic devices and –materials for

neuroscience” A.Offenhäuser (Jüelich research center, Germany) eH. Yamamoto (Waseda

University) e S. Katsurabayashi (Fukuoka University)e S. Kubota (Yamagata University) e

H.Suzuki (University of Tokyo)e V. Gripon (Télécom Bretagne, France) e N. Katayama

(Tohoku University) e H. Kamiya (Hokkaido University) e T. Yagi (Osaka University)�

The Joint Symposium of 8th International Symposium on Medical, Bio- and Nano-Electronics,

and 5th International Workshop on Nanostructures & Nanoelectronics

l>26+ 3( 5-7 Ëh� _ Plenary talk` ”Self-organized TiO2 nanotube arrays: Latest

features and applications” P. Schmuki (University of Erlangen, Germany)e Y. Kimura (Tohoku

University) e N. Koshida (Tokyo University of Agriculture and Technology)e B. Wolfrum

(Forschungszentrum Jülich, Germany)e A. C. H. Yu (University Hong Kong, China) e T.

Yoshinobu (Tohoku University) �

Page 22: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 23: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

XWE�ζw{U��WE�¼��(NPC)�É��� ;<�=>�� �?�@A�

��É�e¨5�7�O��ió1i�ζw{�8Ñ=U��WE�¼��Zx�{

��G;�#ddG;L:#�":1&��el> 25+n�4T� 5»#h�123

^ 84»� l> 25+ 7( 27Ë0©1ª}Éu�bj 1�

^ 85»� l> 25+ 10( 5Ë0©1Ý��«¬­�®¯ª�}2��x���E�bj 2�

^ 86»� l> 25+ 11( 19Ë0�1�����uÐuu��V�Eg0Wu-[1�bj 11�

^ 87»� l> 26+ 3( 1Ë0©1Ý��TKP Ý�°�رª�}2��x���E�bj 2�

^ 88»� l> 26+ 3( 25Ë0�167@�Zx�{b\_^� � �É�������c¹¨©Ó�9»�Î}#¹i2ó1i]L®w��i&�

�­�²é³0¥U´-�_1

Page 24: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

{Ó4Ð�Ã��XÃx�É� � �

��� BC� D���� � -.� D�

�"�{Ó4]!eÓ4yRe{Ó4uvwx:��c¹e�¹{Ó4��G

;�bj�ti#�Ô,

^73»

Ëñ : l>25+11(28Ë (� )� 14:40 a 17:30

É� : Ý[�_z_� �£67Zx�{�cy�451� 453ÉWg

�� :

1. “Î��µ¯�¶#¹i2��"-·�M¸�¹Ô�¶�Sºc»�{Ó4

]! ”

¨�ªÂ 1e���¼ 2e�Õ�)! 1 ,3eb²3õ 2eøì3 3 ,1

(1 Ý[�_�_��z_�^e2 Ý[�_�_�½_�^e

3 Ý[�_�_�z_�^ )

2. “Ó殯â�¾vð÷�¢JD£���ñj¿�����bñG;À�4

M¸Ín�{Ó4]!��;À�lR�d» ”

ÁH� 1e�Õ�)! 1 ,2eøì 3 2 ,1

(1 Ý[�_�_��z_�^e2 Ý[�_�_�z_�^ )

3. “Â��Ãùcñ�Ä4M¸Ín�e�����;ÅÆIÄÇÈlR�{Ó

4]!�ÛnðO ”

§¨¢? 1e�Õ�)! 1 ,2eøì 3 2 ,1

(1 Ý[�_�_��z_�^e2 Ý[�_�_�z_�^ )

4. “ÉIÄÇ�ʬ�Báj¬�ü�{Ó4]!��%;·ËÄ�9RÌk�

�;ëQ¨×�ðO ”

²ìÍ­ 1e�Õ�)! 1 ,2eøì 3 2 ,1

(1 Ý[�_�_��z_�^e2 Ý[�_�_�z_�^ )

^74»

Ëñ : l>25+12(26Ë (� )� 13:00 a 16:35

É� : Ý[�_z_� �£67Zx�{�cy� 103ÉWg

�� :

1. “À�ÎÃ��ÎNÄ#EE�)În�#�;Ïæ

aÓ�M]�ÁDYEZ[�#¹i2üÐa ”

�ÕØ£ 1eÑZ� 2eD¨Òl 2e�ÔÓÔ 3

(1 Ý[�_�����e2 (Ú )KDDI��e3 Ý��_ )

Page 25: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

2. “ÕÀË���&ÖSfw�üt:34×7Ó�hb

0ÚÛ67�M¾R��ðO#�#1&0 ”

Ø�Ù 1e� .Z 1 ,2eÚì� 1 ,2es�t� 1 ,2eÛÕåª 3eÜ�Ã� 1 ,2

(1 Ý[�_�����e 2 Ý[�_�_�67^_�^e

3 Ý[_��_ )

3. “�Àx�Ó�\>��%;N]"�Á�Eó�8Ñ=Ó�<�e�üt ”

�ÝÞ (Ý[�_�_�z_�^ )

4. “�ßÇ�SºI�­®�2�� 2êÒ�Õd»��%;�¶���#T<

12{Ó4ÐQ���L¯ ”

à¸� 1e�Õ�)! 2 ,1eøì3 1 ,2

(1 Ý[�_�_�z_�^e 2 Ý[�_�_��z_�^ )

5. “{Ó4Ð�£¤�Õ��8Ñ=�ßÇr}úIµ»w��%;�ßÇÎ

�ÎÑvð�Õ��vx��9:á¯�¦�e ”

�kâl 1e�Õ�)! 2 ,1eøì3 1 ,2

(1 Ý[�_�_�z_�^e 2 Ý[�_�_��z_�^ )

4O

Page 26: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 27: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

67�dy�� � �

� � � � � � � � � � � �

��� 1EFG8� � FHIJ�

67�dy�É� ã�"67ãä�N]"_ääi�67�äi:�

�67N]=_"�Á�Eó��1& ¥=_�ÀÓH�1&i;�­#

�:1&nK ¦ü��>?�]���i&� �É#h�1 _3�u'

#r;L:#�":1&i;3�+n� ]X»� �É#h�123 �0å

B¦1��� ����ê���Ó;;�G¨×��0Ý[�_�_�67^

_�^1 "���Ûîe./2�dëQ��%; Ûî"�MRF�àæ¨

çd» " cÕ?!�0Ý[�_�_�67^_�^1 "u¼EÁÎEX��

�?þºâh�c¹ " ïc��0Ý[�_�_�67^_�^1 "�ÑU}

ã����;è@!uE���:r}¨� " é-l�0Ý�zK�_�_�

6 7 ä z _ � ^ 1 "Characterizations and generalizations of the Bethe

approximation" �Uêë�0Ý[�_k£¨£°�^_Ìý�I^1 "uP

Í��ªÑ�w#¹i2Çìd¨× " s�í~�0Ý�zK�_�_�b\

äz_�^1 "Dictionary Learning��%; Sample Complexity� BÜ�:

Belief Propagation�ÑîDÜ{ "3

Page 28: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

� � � � � ñ j � ñ ` z _ � É

� � �

� � � � � � � � � � � � � � � � ��� KL� M�� � 3N� O�

� ��É�ñjz_�ñ`z_�¦ó��>?��1&9± �#h�G;::Ü

�Hb��bj:ti#�ÔL:#�":1&l>-u+¿(�bm12,4T�l

>u++n�HI.Õ#�G,

� ^ 28 »�l> 25 + 11 ( 25 Ë0(1�-[���Tt-+���0Ó67^_�^ 2�� sg�&h�./eúï^_�I^ ó¨©z>���E y�w�

ËwÐ�x�¨©�9tmôi�ð� �¥ ñ��ô�{#�1&�Ä"#@; a

�:ËÑ�Q�;;Ü�a�:�G;9± �Ä�ù/2,�KJi&µË�-+�

-+Tt-X�Z+0Ó[���o �Ä;²2,�D­�u�YÓ;²2,ʻܥ

£�¨©Tt��D­Ä;�eHb�tiÄ�./2,

Page 29: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1

� � �

���x��z_�� � �

��� P�� QR�� � SC� TU�

u-@��Ö�t/;Ìn�67��\]�� ���Ã��ÂE�8Ñ

=°�uvwx`aTtZx�{^�0Ó�b\^_ÄZÕÓ;;3����

x��\à�,�� L�67�#��;b\^_`a��� ���Ã�

�ÂE�8Ñi2�£��ñ�x��#!_G;89"°�uvwx`a�

�#b\"�A�"�ddG;L:#�"� ����,:1&l

>-X+[(-�,�./23��� L��,#���ch1&Et

/2>?�Ü:ÑK ¥=��Ð�Ã��XÃx�x����XÃx��¢1

2^_`a��1&ò¨WiG;L:#�":1&i;3l>u++n�4T

��Ô�][»� �É#\�123

^mµ» � l>p*+*( 'µË� 'r³qq�´�'*³)q�

"Nanomaterials with charged quantum dots for solar energy conversion and

advanced sensing applications"

Vladimir Mitin (Dept. Electrical Eng., University at Buffalo, USA)

^m²» � l>p*+m( pµË� '*³qq�´�'m³qq�

"On the Possible Generalization of TFT and ULSIC Technologies"

Yue Kuo (Texas A&M University, USA)

^m(» � l>p*+'p('mË� 'p³)*�´�'²³'*ö�'p( 'µË� q(³)q�ó '*³p*�

� mq12| ��%Æ*�I��hb� �

/c�ù�0Ýz�1 �

�{ 'qq12|�¤�`a�dc:���h�c¹� �

/§¨ �¬��©Ã��ô �õ��ò�^8�Ì� ���Ü�[���öä^�

k ����Ì� ��0÷ø�1 �

�«è���ѶwÝEF#¹i2�ηÑïb£���%;¦ü�dù:

Êõ�c+� �

/Ü�ú³�à�û.0Ýz�1 �

��� �

^µq» � l>pm+'( )'Ë� '*³qq�´�'m³qq�

"Digital implementation of multimodel bioinspired spiking neural networks based

on SIMD and AER"

Jordi Madrenas (Technical University of Catalunya, Spain)

Page 30: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 31: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 32: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 33: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 34: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 35: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 36: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 37: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 38: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 39: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 40: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 41: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 42: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1
Page 43: 9â 9Ý 1b# Ö4Ù * f P + S...^8» ECS ULSI`˝‰xw ˇ‹EZ[ ÉW 8th ECS Int. Symp. on ULSI Process Integration (Symp. E12, 224th Meeting of the Electrochem. Soc.) h ’ ¸⁄l>25+10(28¸0(‘¸1a30¸0}‘¸103¸Q1