Upgrade Info

1-Channel-AsB Detector AsB Detector with improved low-kV Performance and faster Imaging

Upgrade Info

Contact: Dr. Ulrich Kohl-Roscher

Date: September 2015

Introduction

Increase productivity and improve image quality of your FE-

SEM by retrofitting the new

1-Channel Angle selective Backscatter (AsB) Detector.

Benefit from the high speed and increased sensitivity due to

improved detector and electronics design. The new detector

builds on the proven detection scheme of

Angle selective Backscatter detector (AsB) with a new low-

kV capable detector diode, already known from MERLIN

systems.

Availability

The 1-Channel-AsB Detector is available for the following

FE-SEM series:

• 15xx

• SUPRA series

• ULTRA series

For MERLIN series use AsB4 instead.

1-Channel-AsB Detector AsB Detector with improved low-kV Performance and faster Imaging

Benefits

• Low-kV imaging with better imaging already at 1kV

• Faster imaging compared to previous AsB detectors,

thanks to improved electronics and reduced noise

components.

• High long-term and temperature stability for particle

scanning

• Contrast Mechanisms

With its segmented detection diode and the flexible mix-

ing of signals a lot of different contrast mechanisms can

be imaged. Allowing for pure material contrast, topo-

graphic contrast or channeling contrast (see fig. 1,2).

• Ease of use

The 1-Channel-AsB Detector is completely integrated

into the pole piece of the GEMINI lens. This allows you

to image BSEs with ultra short working distances without

aligning the AsB detector to the optical axis.

Operation

The detector is fully integrated in SmartSEM.

Resolve pure Material Contrast from your Field Emission Scanning Electron Microscope (FE-SEM).

2

Upgrade Info

Figure 2

With an 1-Channel-AsB Electron Detector image in MBS mode it becomes clear that the „scratches“ are dislocations. Vertical broad shadows are orthogonal to the rolling direction.

Strain deformation in steel with razor sharp dislocations.

Upgrade path

Software SmartSEM 5.07 or higher

Hardware Requires a free detector port on

LREM

Cannot be combined with a second

detector on a multiplexer.

A system preventive maintenance performed within the last

12 months is mandatory.

The retrofit must be performed by a ZEISS-authorized

service engineer. Application training is recommended.

For further information, contact:

microscopy@zeiss.com

Part Ordering no.

Upgrade Kit AsB1 -OSE-

1-Channel-AsB Detector integrated in

the GEMINI objective lens

346006-9040-990

Figure 1

1-Channel-AsB Electron Detector diode

Figure 3

Carl Zeiss Microscopy GmbH 07745 Jena, Germany microscopy@zeiss.com www.zeiss.com/microscopy

EN_4

3_01

1_04

2 | C

Z-09

/201

5 |

Subj

ect

to c

hang

e in

des

ign

and

scop

e of

del

iver

y an

d as

a r

esul

t of

ong

oing

tec

hnic

al d

evel

opm

ent.

| ©

Car

l Zei

ss M

icro

scop

y G

mbH