반도체 용어 사전 완본 사본

106
A ABIOS(Advanced Basic I/O System) PC의 의의의 BIOS의 의의의 의의의의 의의의의, ABIOS의 의의의의의 의의의의의 의의의 의의의. Abrasive 의의 의의의 PKG의 의의의의의의 의의의의 의의 의의의 의의의의 의의 의의의 의의의. Absorption Constant (의의의의) 의의의 의의 의의의의 의의의 의의의 의의의. Absorption Dichroism (의의 의의의) 의의의의의 의의의 의의 의의 의의의 의의 의의 의의의의의 의의 의의의의 의의 의의의 의의 의의의 의의의 의의 의의의의의 의 의 의의 의의의 의의 의의의의 의의의의 의의의의 의의의 의의 의의의의 의의의의의 의의 의의의 의의의의의 의의의 의의. Accel Mode 의의 의의의 의의의의의의 의의 의 의의의의 의의의의 의의 (의의의 의의 32-200KeV.) AC Characteristic Device의 의의의 의의 의의 의의 의 의의의 의의의 Timimg 의 의의의 의의 의의 의의의 의의. Acceptable Quality Level 의의의의의의. Sampling의의, 의의의 의의 의의의의의의 의의의 의 의의 Lot 의의 Batch의의 의의 의의의(variant unit)의 의 의의. 의의의(variant unit)의의 의의 의의 의의 의의 의의(의의)의의의의 의의 의 의의의 의의의 의의의 의의의 의의 의의. Acceptance Sampling 의의 의의 의의의 의.의의의의 의의 Sampling 의의 의, Sampling의의의 의의의의 의,의의의의 의의 의의의 의의 의의의 의의의. Acceptance Tests (의의의의) 의의의의 의의의의의 의의의 의의의 의의의의 의의의의의 의의의의의 의의의 의의의. Acceptor 3의의 의의의의 의의의의 의의의의 의의의의의 의의 의(hole;의의)의 의의의의 의의 3의의 의의의의 Acceptor의 의의. Acceptor Level(Acceptor 의의) 의의의 의의 의의의의의 의의의 의의의 의의의 Hole의 의의 의의의의 P의의의 의의 의의의 의의의 의의의의의 의의 의 의의의 의의의의의 의의의의 의의의의 의 의의의의 의의의 의의의의의 의의 의의의 Level의 Acceptor Level의의의 의의. ACI (After Cleaning Inspection) 의의의의의 의의, 의의 의 의의의 의의의 의의의 의 의의의의의 의의의 의의의 의의의, 의의의의 의의, CD(Critical Dimension : 의의의의) 의의 의의의의 의의. Active Matrix Drive (의의 의의의의 의의)

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AABIOS(Advanced Basic I/O System) AbrasivePC BIOS , ABIOS .

PKG . Absorption Constant () . Absorption Dichroism ( ) .

Accel Mode

( 32-200KeV.)

AC Characteristic

Device Timimg .

Acceptable Quality Level

. Sampling, Lot Batch (variant unit) . (variant unit) () .

Acceptance Sampling

. Sampling , Sampling , . Acceptance Tests () .

Acceptor

3 (hole;) 3 Acceptor . Acceptor Level(Acceptor ) Hole P Level Acceptor Level .

ACI (After Cleaning Inspection)

, , , CD(Critical Dimension : ) . Active Matrix Drive ( )

contrastresponse . .

Accumulation

MOSGate Bias silicon surface Gate Majority Carrier(, substrate Carrier) Density .

Accuracy

, . Active Element () . .

ADART (Automatic Distribution Analysis in Real Time) A/D Converter (Analog to Digital Converter)

Program, .

"1" "0" . ADC .

Additive Process ( ; ) .

Address Pre-Decoder

Row/Column Address Decoding Address Buffer internal Address AN, / AN Decoding . Addressing Technology ( ) LCD-Addressing .

Adhesion

WF WF . ( )

ADI(After Development Inspection)

, Pattern , CD . Agitation() WF

AGV

(Automatic Guided Vehicle, ) Intra-bay cassette 6 . LCD lot .

AH (Absolute Humidity)

.

AHU (Air Handling Unit)

, , Particle .

Air Gun

, .

Air Shower

FAB Line , box .

Alignment

WF mask . Ali gner() .

Alignment Mark Alloy

Align Align .

Si AI .

ALPG (Algorithmic Pattern Generator)

Device Data , instruction Coding

Alpha-particle

He() U Th trace contamination IC , sillicon hole-electron pairs Soft error .

Al-Target Ambient

Wafer Al() Al.

Carrier Gas (N2, O2, H2)

.

AMLCD (Active Matrix Liquid Crystal Display)

Amorphous

Silicon .

Amplification Analog

( ) .

.

Analog IC

IC .

Analog Memory

.

Analysis of Variance (ANOVA)

Analyzer Anelva

Wafer .

(Al, Cu, Ti) , .

Angstrom ()

1 =110-8 cm H+ = 0.059210-8

Anicon

LTO(Low Temperature Oxide) deposition

Anisotropic Etching

, () Isotropic Etching ( )

Annealing

, Si N2 Ar gas Oxide quality bulk silicon defect damage cure . Annular Ring ( ) .

Anode

. .

ANSI (American National Standard Institute) .

Antimony

Wafer , N Sb.

Anti Reflect

Polycide silicon 11.0 photo pattern . SiO2 TiN silicide pattern TiN ARC .

Antistatic

AOQ (Average Outgoing Quality)

lot lot . (AOQ)= LOT LOT >

AOQL (Average Outgoing Quality) Application Test

: AOQ

() , .

APCVD

Atmospheric Dressure CVD(Chemical Vapor Deposit-ion). (Vapor) , Gas Chamber .

APD (Avlanche Photo Diode)

PN Photo Diod e.

AQL (Acceptable Quality Level)

Sampling lot , lot .

Ar

Argon Gas

Arc Chamber Arc Current

lon .

Plasma Bean Arc Chamber

ARL (Acceptable Reliability Level) Array

.

Device .

Array Logic

FILP-FLOP, NAND, NOR, Diode Logic Circuit Array () Device.

Artwork Master

Film 1:1

As

(Arsenic)

Ashing

/ (Dry Strip) .

ASIC (Application Specific IC)

(), () IC , IC .

ASIC Memory

Memory. Computer Multi-port Video RAM(VRAM), data cache memory , dark memory . Frame memory Line memory . Dual-port memory FIFO(First In First Out) .

ASIC micon

User 1chip micon. microprocessor microcontroller CPU(CPU core ), CPU, ROM, RAM, Random Logic User system 1 chip . User , , , .

Aspect Ratio

Step Coverage . Assembly .

ASRP (Autoexec Spreading Resistance Probe) Assignable Cause

Silicon Wafer .

.

ASSP (Application Specific Standard Product)

IC. user IC, , IC , Printer controller .

ATE (Automatic Test Equipment) Au-Bond (gold ball Bond) Auto-Doping

Test .

Bonding

.

Auto Loader

(FAB, TEST, ASS'Y) .

Automatic Loading System Auto Transfer

Carrier Wafer .

Wafer Boat Loading Unloading . Auto Transport System ( ) computer system System. Av Voltage Gain,

AV TFT-LCD(AUDIO-VIDEO, TFT-LCD)

, TFT-LCD 1.1 inch 12 .

Avalanche breakdown

Pin Diode (reverse bias) breakdown Zener breakdow n mechanism doping Junction transition region Field electron electron-hole pairs impact ionization mechanism carrier Breakdown .

Avalanche Injection Diode

P+ N+ Diode

Avalanche Transistor

TR TR OFF Avalanche Breakdown ON .

Average Outgoing Quality Level (AOQL)

. sampling , (AOQ) .

A.W.W (Acid Waste Water)

.

Axial Fan Fan Clean Room , .

B

Backward Current

PN .(Reverse Current ) Back Flow Effect ( ) . Back Grind ( ) Wafer , Fab.

.

Back Plane

Back Panel

Fab. Line Bay Room PVC Back Panel . , Particle Room .

Back Seal Oxide

, Wafer Outdoping Wafer .

Back Side Grind

. Wafer Wafer Get tering .

Back Seal Marking

Device Marking lot Fab. Site lot# Device Marking.

Back-Annotation

layout layout ( ) simulation .

Back-Up System

, Gas .

Baffle Bake

Gas control .

Wafer Pre-Bake, Hard-Bake, Soft-Bake . 1) Pre-bake : Wafer Resist Wafer 15010 Oven Wafer 2) Hard-bake : Etch Wafer Resist 3) Soft-bake : Photo-Resist

Base Array

ASIC Process Gate (2 Input Nand gate or 2 Input Nor gate) userable gat e array LSI .

Base Line Spec

process flow . Base Line FAB Base Material () Basic Dimension () .

Batonnet

.

B/B Ratio (Book to Bill Ratio)

3 3 WSTS( ) Da ta . , B/B Ratio .

BC (Buried Contact) BCD Technology

POLY1 N+ Active contact POC 13 doping .

Bipolar, CMOS, DMOS , Bipolar , CMOS digital logic DMOS . (BCD system reliability .)

BCG Approach(Boston Consulting Group Approach) , (SBU) 2 , . .

BCR (Bar Cod Reader) Bean Line

Bar Code .

Source lon Beam .

Beam Mask

Beam , Wafer .

Beam Spectrum

, .

Behavioral Description

System input output computer language . VHDL(very high speed hardware descri-ption language), HDL .

Bench Test

Test Pattern Die DC Probing Electric al Paramet-er Bent Lead () 45 .

Bias Bias

. () System error.

TR 0 0 Bias .

Bidirectional Buffer

signal voltage level , sense AMP data ext-ernal load driv e Buffer.

Bipolar

(electron) (hole) ( Transistor )

Bipolar TR

TR NPN Type PNP Type 2 . Emitter, Base, Collector 3 , Base Emitter Collector . Transistor Bipolar IC .

BI-MOS

MOS Chip .

BiCMOS (Bipolar-CMOS)

Bipolar Transistor CMOS Transistor Chip IC. Bipolar Transistor , CMOS . Binary Number System (2) 0 1 .

B/I (Burn-in)

( 83, 63) .

Bin

. ) Bin 1-, Bin13-, Bin 15-Parameter .

Bin 1 Check

Test .

Bin Grade Down

Test Step Good Device speed power .

Bit Line Bit Map

Memory data data data .

Memory CheckMemory Data Cell ( Cell )

Bit Mapper

, Fail Point Address Fail F/A Tool. Bit Fail Device Test Random Address Cell Fail .

Black & White SPOT

, pinhole seak .

Black Hole

F/A Contact Contact Pattern Poly or Metal Pattern Misalign Over Etch Contact Overap Contact Edge Chemi-cal Contact Defect.

Black Stripe SM

Blade

Wafer . Bleeding () . .

Blister

.

Block Factors

Block. Block Block Block

.

Blow Hole BN Wafer

(Solder).

Boron Wafer Boron Wafer Wafer. BN BN Wafer Tube 375 N2 .

Boat

Wafer SiC Wafer .

Boat Holder Bonding

Boat Poly-Si .

wire bonding Chip PAD .

Bond Diode

Bonding Layor ()

Bonding Pad

Chip wire bonding . Bond Strength () .

Bottom Up Design

Primitive Cell Circuit Level, Logic Level, Architechure L evel IC .

Boulder

FAB Diffusion . Bow () Wafer Wafer film

BPSG

Boron Phosphorus Silicate Glass flow (850Vis-cosity ) . Oxide Film B,P .

BPT (Bond Pull Test)

bondability GRAM weight gauge ball stitch bond .

Bread Board

IC IC IC

Break-Down

PN Breakdown . , avalanche br eakdown zener breakdown .

Breakdown Voltage

P-N Diode Breakd own .

Break-Up Bridging

Half Cutting Wafer Full Cutting .

.

Broken () Wafer Quartzware .

BT Stress (Bias & Temperature Stress)

Bias() Stress .

BT Test (Bias and Temperature Test) Bubbler

TR, Diode Bias .

(D-I Water) Wafer .

Bubbler Memory Buffer

, .

.

Buried Layer

TransistorCollector Collector .

Buried Via Hole

Burr

. Trim Lead .

(85 ~ 125) Device Stress Test , IC (Reliability) , Pa rameter Over Stress Test.

Burn in

Burner Burnt

.

Burn-in Device Stress High Current Device Device .

BVcob (Collector-Base Breakdown Voltage with Emitter Open)

Open - , Collector Base Breakdown .

BVcer (Collector-Base Breakdown Voltage with Specified Resistance)

- .

BVces (Collector-Emitter Breakdown Voltage with Emitter Short-Circuited to base)- Short - .

BVcev (Collector-Emitter Voltage with Specified Reverse Voltage Between Emitter And base)- - .

BVebo (Emitter-Base Breakdown Voltage with Collector Open)Collector open -

CCache DRAMCache ( data buffer ) SRAM Regist DRAM , DRAM SRAM . Main Memory CPU .

CAD(Computer Aided Design)

( ). IC, LSI LSI computer , Simulation, , Device, , , Mask Pattern, Test Pattern Step CAD . .

CAD Software

CAD Program .

CAE(computer aided engineering)

CAD System ( (Simulation) Tools). CAD , CAD Computer CAE simulation , CAE CADCAM En gineering .

CAM(Computer Aided Manufacturing)

, CAD system NC(Numerical Control: ) . Computer LSI LSI , CAM . CAD Master data test data Process data . CAD CAM Computer s ystem CAD/CAM .

Capacitance

.

MOS . , , , MOS , silicon , , .

Capatiance Voltage Characteris

Capacitor Capillary

()

Wire Bonding Chip Lead Frame Load Wire .

Capture Center Carrier Carrier

.

(, )

Wafer 25 . (Blue Carrier), (Black Carrier), (White Carrier), (Metal Carrier) . 1) Blue Carrier : Poly Propylene , 2) White Carrier : Teflon , .

Carrier Generation

carrier .

Valence Electron Conduction Band Electron Hole Carrier Generation.

Carrier Handler Cart

Wafer .

Wafer strage box .

Cascade

3 (DIW) Wafer .

CAT(Category) Cavity

Bin .

PKG PKG .

Cavitation

pump , , .

CBIC (Cell Based IC)

MASK CAD S/W Library .

CBR (CAS Before RAS)

RAS Low CAS Low Refresh .

CC (LIM Central Controller)

STC stocker cassette .

C&C (Computer and Communications) .

CCD (Charge Coupled Device)

(). . ( ) 2 . () .

CCM(Cell Control Manager)

Factory Automation System Host Level program() .

CCST (Constant Current Stress Time)

Dielectric Film Life Time TDDB(Time Dependent Dielectric Breakdown) . CCST 100 Plate Poly Dielectric Film Breakdown

.

CD (Critical Dimension)

. 1) ADI(After Develop Inspection) : Wafer . 2) ACI(After Clean Inspection) : Wafer Strip .

CD-ROM (Compact Disk Read Only Memory) CDI (Collector Diffusion Isolation) Cell

CD() Disk.

IC .

RAM ROM IC Transistor, Capacitor, Resistor 1Bit .

Cell Boundaries

. . data .

Cell Deviations(d)

, , A data . A Xm . . Xm=A d=0. A "+", A "-" .

Cell GAP Cell IMP

LCD , .

Mask ROM Bit Implant . P-Well Boron TR compe nsate .

Cell Interval(i) Cell Library

(). .

function primitive cellNAND, NOR, XOR Cell Logic sy-mbol, Electrical dat a Layout .

Cell Midpoint(Xm)

, . .

Ceramic

.

Cer-DIP(Ceramic Dual In-Line Package)

Ceramic Lead PKG.

Certification

.

Centeral Line

. .

Chance Cause(Random Causes)

, , , .

Chance Variation (Random Variation) .

Channel

MOS Transistor Gate . P-Channel, NChannel .

, . Test Time Data .

Characterization Testing

Charge

Charge Coupled Device(CCD) .

Chip

( 0.5~ 10mm) (Die ). , , .

Chip Select Chip-Set

LSI LSI .

System component(TTL, Contro-ller, PLL) Chip . chipset system solution software .

Chiral

.

. cholestric .

Chiral Nematic Phase

Chiral Pitch

. .

Chokralsky Method

Chokralsky . Chromaticity( ) , , 3 , .

Chrome Mask Chuck

Mask chrome() Mask.

, Wafer Test Wafer Prober .

Chuck Table

Wafer .( )

CIM(Computer Integrated Manufacturing)

, , . , , , Computer .

Clad

(Base Material) .

Clamp Pressure

, . Clean Class () Particle . 1M DRAM 0.1m Particle . 0.5m Particle .

Cleaning

Wafer Carrier (D.I Water) .

Clean Paper

. Clean Room() , Particle .

Hole.

Clearance Hole

Clinched Lead

.

Clock Pulse

1 AND Clock Pulse .

. .

Cluster

C-MOS

(Complementary Metal Oxide Semiconductor) N Channel, P Channel MOS Transistor Noise Margin . CMOS Logic TTL CMOS Logic IC Family, Family NAND NOR Gate, Filp-Flop , Bipolar Logic IC CMOS Logic .

MOS

Clocked CMOS, CMOS. C-MOS LOT .

CMS(Central Monitoring System) .

Coating

, Wafer ().

COB(Chip on Board)

PCB Board Die .

Cob(Collector Capacitance) Bubbler

Collector-Base PN .

Wafer .

Co-Processor

Main processor instruction . Main processor , floating-p oint math-co-processor, graphic graphic coprocessor .

CODEC (Coder and Decodr) COG (Chip On Glass)

ADC DAC one chip IC.

, , .

Cold Solder Joint

.

Cold Test

(-18 )

Collector Collet

Transistor .

Chip Lead Fram Expanding Tape Chip Lead Frame .

Column

, . Column Fail Device Test Y Address, X Address Cell Fail . Combinational Circuit () NAND, NOR Digital

Common

.(Ground)

Comparator

, TTL Logic IC . Complementary Circuit ( ) TR .

.

Compound

Compound Semiconductor . Component () . . Component Density ( ) .

Component Pin ) . Component Side () .

Compound Device. Compressor .

2 .

Computer Network

. 1 . Condenser() 2 .

. Y Y-G-jB G . . Conduction Band () , . Conductivity ( ) . Conductor () ( 10E 6 ~ 4cm ) Conductor Side () . Conductor Spacing () .

Conductance

Contact (TEST)

Continuity Test , tester interface device . Test IC pin protection diode . Contact Potentia () .

Contrast Ratio

. . Concuctor Width () .

Conformal Coating Confounding

.

, block () . Connector Area () .

Console

() .

Contact Resistence

Metal Wafer . Contact Spacing () .

Contact Spiking

AI P/N Alloy Junction Junction Spike Alloy .

Contamination.

.

Control Chart

Control Chart-Standard given

.

Control Gate

2 Polysilicon Stacked Structure Non-Valatile Momory Gate , Electrode Bias Program Erase .

Control Limit

. data

Continuous Sampling Plan

Sampling. , sampling sampling .

Conventional Memory

DOS Memory 640KB Base Memory . Expan ded Memory Extended Memory .

Converter

. .

Cooker Test

TR, Diode, IC .

Coplanar Structure Core

.

Embedded IC Micro-Operation ALU CPU Block (Peripherals) Core .

. Corrosion() AL Etchant Gas Al2O2 Metal Cosmetic Appearance() A Instrum ent panel , E (car-audio), B Game . Convalent Bond() . .

Correlation

Cooling Wafer (CW)

CPO (Customer Product Operation)

Device Test Customer Special Spec .

CPU (Central Processing Unit)

Computer , .

CPU Core

LSI Microprocessmicrocon- troller, standard cell SOG Gate Array library , user system ASIC Micon

1chip

Crack

. , stress Chip, PKG .

Cradle

Chip Mount , .

Crazing

.

Critical Energy

Ion Beam Energy mask Implant Energy . Cross Section() Layer Pattern Layer .

Cross Talk

.

Cross-over Crow Feet

IC .

Wafer .

Crystal Osillator

.

LCD

CTN(Complementary TN)

CUM Graph(Cumulative Graph)

data data data . Water die data Die (element) Data (Wafer) .

Cumulative Frequency Distribution Cure

. .

, PKG .

Custom IC.

IC.

Customer Layer

ASIC process gate array base array process user gate process .

. Cut Stroke .

CUT-OFF Frequency

CV(Cleaning Vacuum) CV(Count Variance).

.

CVD (Chemical Vaper Desposition)

APCVD, LPCVD Nitride, PSG, BPSG, LTO .

Wafer

Poly

C-V Plot (Capacitance Versus Voltage Plot)

Wafer , (, , , ) .

.

CVST (Constant Voltage Stress Time)

Cycle

Function Test Device .

Cycle Time

.

CRT(Cathode-Ray Tube) Cryo-Pump

.

Gas .

CQ(Conditional Qualification) .

CTE(Coefficient of Thermal Expansion) .

Hepa Filter Clean Room A Class . 0.3m/s 700/h. Granting Down Flow Clean , Hepa Box

CTM(Clean Tunnel Module)

.

, .

CTS(Computerized Typesetting System)

CU(Control Unit) Culvert

Timing. .

, .

DD(Demerit)Quality score . D-A (Digital to Analog Converter) Analog .

DA(Die Attach)

Die Lead Frame

DAC(Digitaaal to Analog Converter)

Digital Analog . Hi-Fi CD player 16bit D/A convertor .

D.C Characteristic

DeviceStatus Current , Device Status .

DAD(Digital Audio Disk)

Disk .

DAE(Dynamics Asian Economies)

, , , .

Daisy Chain Dambar

LSI

PKG Lead Bar. Dark Current() .

D.A.T.A

Derivation And Tabulation Associates Inc. .

Data Line

on-off .

Data Retention Mode

(DRAM/SRAM) power-off battery back-up circuit

DC(direct Current) DC Characteristic

.

Device Status current , DeviceStatus .

DC Parametic Testing

Steady state test OHM . / / . DC test (ICC), (leakage test), (VIL,VIH), (VOL,VOH) .

DC PDP (Direct Current Plasma Display Panel)

(lonized Neon-Argon Gas , .

DCW (Dry Cooling Water) DD (Double Die) Die.

FAB Cooling Coal .

Debug

, . Debugging, Screening, BURN-IN .

Debugging

Test Plan .

Decay Time

100% 10% .

Decel Mode Decoder

lon ( 0-33kev)

2 (Decode) (10 ) 2-10 Decoder . Encoder Defect () product service

. defect . 1) Class 1 : . 2) Class 2 : . 3) Class 3 : . 4) Class 4 : .

Deflash

Compound . Defocus ( ) (P/R) . Delamiantion () .

Delay Time

TR Switching () 10% .

Demo

Wafer .

data () control .

Demutiplexer

Dent

.

Depletion Device

MOS FET Gate Channel . Depletion Layer() PN P HoleN . .

Depletion Mode Depletion Type

TR Bias .

Channeldeplete . channel .

Deposition

CVD , Si Film() (Oxide, Nitride) .

strip back defect site .

Deprocess

Descum

(scum) .

Design Kit

Electrical/Physical ASIC modeling layout database Electricla Design Kit . (: Mentor Design Kit, Verilog Design Kit)

.

Design Rule

Develop

Mask Align expose Pattern .

Development

. Pattern .

Device

()() Dextrotatory ( ) .

Dewetting

.

DF (Die Fabrication)

Wafer mount dicing saw .

Dichronmated Gelatin

Dichomated gelatin .

Dicing

Wafer ( )

Dicing Saw Die Attach

Wafer Die (Chip) diamond wheel.

Die Lead Frame .

Die Business

Probe Test package Good Die wafer wafer Good Die .

Die Bonder

(chip) , IC .

Die Bonding

IC Chip . , .

Die Coating Die Collet

Die .

Die Die . .

Die Pocket

Die . .

Die Sawing

Wafer chip . Dielectric Constant() .

Dieletric Isolation

IC Electrical . (), Poly-Si, Ce-ramic .

Diffused Resistor Diffusion

diffusion .

(Wafer) B (boron;) P(Phosporous;) .

Diffusion Capacitance Diffusion Current

Diffusion Junction Capacitor .

E-filed/ Current Carrier .

Diffusion Furnace

Diffusion Length

Carrier Carrier Carrier . Life Time Carrier diffusion length .

Diffusion Pump Diffusivity

gas .

.

Digital(DIC) Digital IC

Analog "1" "0" (Digital IC)

"1" "0" digital IC, MOS IC Bipolar digital I C , logic IC Memory IC . ,, .

Digitizing

Mask . Dimenrization() .

Dimension

DIMM(Dual In-Line Memory Module)

PC Memory module PCB pin .

Dimple

Wafer . Dimentional Stability( ) , , , . Dimentioned Hole () .

DIN

Deionized Water .

Diode

di-electrode 2 . 2 , , .

Diode Array

.

Diode Ring Structure

.

DIP(Dual Inline Package)

IC , (Chip) .

Discolor Discrete

Wafer FAB Pad .

(IC) . TR, Diode, , Discrete .

Discretional Array Method

LSI 10 100 (Cell Unit Cell ) Cell .

Discrete Device

, Transistor , Diode .

Discrete Product

Diode, Transistor, (Rectifier), (Thyristor) , .

Discretion Wiring-Approach

Wafer , Wafer Patt ern LSI .

Display Device

, .

DIW (Deionized Wafer)

, Wet . D-I Water (De Ionized Water Semiconductor grede Water) , Wafer .

DLM

2 Metal Layer . 1 power routing line 2 rounting line .

D-MOS(Double DiffusionMetal Oxide Semiconductor) channel length , MO S .

DMA (Direct Memory Access)

CPU data DMAC(8237A) DM A data .

Domain

cell .

Donor

N-type P, As, Sb .

N donor . (Forebidden band) level Donor Level .

Donor level

Dope

(, ION IMP-LANTATION ) .

Dopant Doping

Dope .

(Wafer) P-type N-type .

Dope Oxide Dosage Dose

Doping layer Oxide.

.

lon lmplantation dose , .

Dot-Clock Signal

.

DPLL(Dull Phase Locked Loop)

PLL 2 PLL PLL DPLL , Digital PLL .

DRAM(Dynamic Random Access Memory)

Capacitor Cell device CAP Charge Refresh Cycl e . Refresh RAM (capacitor) , Memory leak , Refresh . DRAM SRAM memory cell memory .

Drain

TR(FET) , . TR, TR .

DRC/ERC/LVS

DVP-Circuit Layout Design Rule, . 1) DRC(Design Rule Check) ; Layout Data (Metal , ) Check 2) ERC(Electrical Rule Check) ; Check. 3) LVS(Layout vs Schematic) ; Layout Data Circuit .

Dressing Drift

Wafer (Blade) Dressing .

"0" .

Drift Current

Extrinsic Semiconductor E-Filed Current Carrier Drift Velocity v=E (:M oblity, E:Electric Filed) .

Drive-In

Deposition B() P()DMF wafer (Furnace) .

Driver

Device , .

Driving Fregurncy Driving Voitage

.

.

DRO(Destructive Read-Out)

. . Dross() .

DRT(Device Reliability Test) Dry Etch

" " (Quality Approval Test) .

, Gas(Plasma) .

Dry Process

TR, IC beam .

DST(Die Share Test)

Die Die Attach Die Frame pad .

DT(Down Time) Dummy Wafer

.

Tube Uniformity Wafer Wafer Wafer Wafer

Dumping-ZIG

Carrier wafer carrier .

DUT(Device Under Test) Duty Cycle

. test , DUT Board .

refresh rate 60Hz .

Duty Ratio

. Dyed Polyimides (polyimide) .

Dynamic Shift Register Dynamic RAM

MOS Shif Register .

(Dynamic Random Access Memory; DRAM) "1" "0" . Dynamic Scatting Mode ( ) . . .

Dynascope

Wafer 0.1mm . ( ) , , .

DW(Diffused Wafer)

EE/Post SimulationSimulation layout esti-mated wire capacitance Pre Simulation la yout actual wire capacitance Post Simu-lation .

EA (Exhaust Air)

GAS , , , , , .

EAROM (Electrically Alterable ROM) EBE (Electron-Beam Evaporation) EBR (Edge Bead Removal)

EPROM .

Beam Wafer() .

Wafer particle .

ECC (Error Check & Correction)

ROM device repair column row program RAM Redency . logic column row fail column row . MASK ROM DRAM Module .

ECC

(Error Correction Code)(Error Checking Code) , .

ECC Mode (Error Catch & Correction Mode)

Memory Module Parity Bit 2Bit Error Memory Module .

ECL (Emitter Coupled Logic)

CML(Current Moded Logic) . Bipolar Transistor () . Transistor Emitter Emitter Coupled Logic .

Edge Board Connector Edge Board Connector

.

.

Edge Definition ()

film .

E/D MOS (Enhancement-Depletion MOS) ED (Electronic Data Interchange) Editing

Enhancement MOS Depletion MOS .

CAD System CRT Layout .

EDO (Extened Data Output)

DRAM data access fast page mode /CAS signal inactive high valid data /CAS signal low active data . fast PAGE MODE TPC(fast page mode cycle) speed . .

EDS

Wafer .

EDS Test

Wafer (chip) .

EDS Yield

EDS test : (Good Die / Net Die)100

EECA

(European Electronic Component Manufactures Association) .

E-E PROM(Electrically-Erasable PROM)

off data . Parallel data Intel Type Seria l data NEC Type . Tunneling Erase Programming In-System 2 Transistor 1 cell EPROM .

Elght Nines

9 8 . 99.999999% .

MOS Source Drain cha-nnel Gate length . EL ()(ELECTRO-LUMINECENCE) . 1936 DESTRIAU 2 .

Effective Channel Length

ELD (Electro Luminescent Display)

PDP COLOR .

ELD

.

Electroless Deposition ( ) .

Electrical Test

Process Wafer Passivation Test Pattern Test Test (, wafer mapping)

Electron Beam Exposure System

Beam mask pattern system, mask pattern pattern pattern generator , , . LSI pattern data algorithm , EBMT( tape) Beam on/off, aperture pattern . ASIC sample needs . mask wafer Beam . Element () .

Ellipsometer

Thin Film (Polarization) . Electron Beam Exposure ( ) () photolithography .

EM (Electromigration) Emitter EMM

Metal Quality .

NPN,PNP Transistor .

(Emission Microscope Multilayer Inspection) Electron Hole recombination photon leakage current FA .

Emulsion Mask Encoder

Mask , Emulsion() Mask.

Decoder . (10 2 )

End Point Detection

Etch Wafer plasma Etch stop reference .

End Seal

LCD

End Station Endurance

lon wafer .

data program erase .

Energy Band

Energy .

Energy Gap

energy gapdlfkrh .

. . .

Energy Level

Enhancement Device Enhancement Mode

Gate Channel MOSFET.

TR (FET) Gate bias . Entity () .

EOH (Ending on Hand) EOP (End Of Point) EOTC

( ).

plasma .

(European Organization on Testing and Certification)

EPD (Etch Pit Density)

Etch Pit . End Point Detect Etch Etch Etch .

Epi (Epitaxial Layer)

. Bipolar Transistor

Epitaxial Layer .

Epitaxial

EPI-TAXIAL " " . Substrate Substrate . Epitaxial-Growth () Substrate .

EPM (Electric Parameter Monitor)

test pattern , .

EPM Standard Sub Program Epoxy

EPM .

Chip lead frame .

Epoxy Dispenser EPROM

Epoxy

(Erasable Programmable Read Only Memory) ROM . programm- able ROM, Program IC Package glass . bit .

EPS(Experimental Plan Sheet) Equip(Equipment).

S/N RUN SPLIT

Erase

EPROM EEPRO Floating Gate Tunneling Bit . EPROM Floating Gata discharge EEPROM Floating Gate .

Erase Gate

Erase Gate 3Polysilicon Split Gate Flash E(E)PROM Erase Gate Electrode.

ERC(Electrical Rule Check) ERC(Electrical Rule Check)

check .

Layout , .

ESD(Electro Static Discharge)

ET Part(Extended Temperature Part)

Memory Device 0 ~ 70 Device 40 ~ 85 .

Etch Back

, .

Etch Bias Etching

Photo etch pattern .

. Silicon wafer chemical gas . Etching Selectivity( ) SX (plasma) .

Etch Factor Etch Rate

.

. A/min .

E-Test (Electrical Test)

Process Wafer Passivation Test Pattern Test Test.

Evaporation Evaporator Event

Wafer AI, Au() .

beam wafer .

Evtity Start, End, Maintenance .

Evolutionary Operation(EVOP)

. .

EWS(Engineering Work Station)

CAD Design Tool system system. Excess Electron ()

. Excite () . pumping .

Exclusive Effect

2 . . , .

Exclusive or Circuit

"1"', "0" "1" .

Exoending Tape

Wafer 360 tape. Expose() P/R wafer pattern aligner .

External Visual Inspection Exposure

.

, WF mask . mask p attern .

Extraction Voltage

Lon Source lon Beam .

Extrinsic Semiconductor

(lntrinsic Semiconductor) (3, 5 )

Eylet

.

FFAB (Fablication) FAB ProcessWafer .

Wafer diffusion, thin film, photo, etch .

Factor

, .

Fail Memory

Device Function Test Device Device

Falg

. . tag . Fail Time() TR off collector on 90% 10% .

Fan coil unit

coil .

Fan Out Capability Fan-In

Device data current drive .

.

Fan-Out Farad

.

. 1F 1 volt/sec 1A .

Simulation simulation vector % access output simulation vector .

Fault Coverage

FCU (Fan Coil Unit)

, .

FDM (function data module) Fermi Energy

(function data) module.

energy energy . energy - . 1/2 F . FET ( Transistor:Field Effect Transistor)

carrier () Transistor. carrier Bipolar Unipola() Transistor . FFU () Fan Filter Unit . fanfilter filter fan clean

Field oxide

active active .

FIL (Filament) Fill Factor

.

Filter () Final test (/Class Test) .

Finder Coat

Wafer .

Fire Damper (F.D)

Duct damper 70 fuse damper.

Film Ware

software ROM . First Acticle () .

First Minimum Fixture

Gooch & Terry 0 .

.

Fixed Oxide Charge (Qf) Flat Pack

Oxidation , , Cooling silicon Oxide charge.

IC .

Flat-Zone Aligner

carrier loading wafer(flat-zone) .

EPROM EEPROM EPROM EEPROM , EPROM, EPROM . Memory Device block . flash memory NOR, NAND NOR EEPROM Hot Electron , NAND . . Memory har d disk . Flat Zone ( ) Wafer cut .

Flash EEPROM

FLC

. . .

Flexible Strength,

Flip-Flop

2 (on off) .

.

Flicker

Floating Gata

MOS TR Floating Gate .

Floor plan

chip layout block layout layout block .

Flux

.

Forbidden Band () . .

Forming Die

Forming I.C. ead frame lead frame .

Forming Gas

1) Die Attach wire bonding H2 N2

Gas. 2) FAB(, ) Gas. Forward () PN P +, N . Forward Current ( ) PN . Forward Voltage ( ) PN PN . Four Layer Diode (4 Diode) PNPN 4 Diode.

Four-Point Probe

sheet .

FOX (Fast Oxidation)

(0~25) Hipox . (High Pressure oxida tion)

FPGA (Filed Programmable Gate Array)

program chip CAD .

FPO (Finish Process Order)

lot lot 1 lot flow , lot FPO lot . .

FQ (Full Qualification) FR (Failure Rate)

Customer .

" " .

FRAM (Ferroelectric RAM)

. , memory cell RAM SRAM DRAM data . EEPROM data .

Reticle/mask Alignment PatternProcess item Sawing Scribe line Alig nment . Scibe li ne Align key Process inspection Pattern .

Frame

Frame Ring

Wafer tape . Free Election ()

Freon

.

Freedericks () . Hc .

From/To chat

Inter-bay intra-bay simulation chart.

FSTN(Film Super Twist Nematic)

DSTN . FSTN DSTN .

FTA (Fixed To Attempt Ratio)

Wafer repairable fuse cutting .

Full-Auto

host AGV CST LOAD/UNLOAD . Full Custom Tool Chip IC. MOS tran-sistor level . Simulation, opti-mization Chip Area layout .

Full Cutting

, (tape cutting) Wafer (95~100%) .

Function Test.

Device Formater Device .

F.W.W(Flouric Waste Water)

.

GGaAs(Gallium Arsenide)

, silicon . III-V Si 5~6 , device . UHF SHF GaAs FET, micro anlog IC, Diode, laser, .

Gas Scrubber Gate

gas .

transistor , 2 MOS transistor bipolar transistor base .

Gate Array

NOT-Gate, AND-Gate, OR-Gate, NOR-Gate, NAND-Gate Transistor logic . semi-custom digital IC. cell master wafer user Timing Chart Data CAD . Gate Type Chip Gate Gate SOG(Sea o f Gate) G/A .

Gate oxide Gel

TR 2 , insulator , MOS TRGate

.

Gettering

, , Si-SiO2 .

GIDL (Gate Induced Drain Leakage)

Gate oxide breakdown voltage drain substrate leakage current gate drain field drain deep depletion band , ba nd tunneling drain junction inpact ionization EHP drain hole substra te leakage current .

Glass Substrate

. .

Gm (Transconduction)

Gate Source Drain . = Bipolar TR ()

GN2 (General N2)

N2. Purge .

GO/NO GO TEST

(pass) (fail) (GO), (NO-GO) . Wafer Die Package Device / Test . Test Program Program.

GOI (Gate Oxide Integrity)

Gate Oxide . (BV,) . GOI System In-Line Diffusion Oxidation Tube, Recipe, W/S Electrical Stress Test .

Grade Junction

PN P N . P N P N .

Grating

Clean Down Flow Lamimar Unit floor . Ac cess Floor . . Aluminum . . Grain () . Ground Gate ( ) TR(FET) 3 Gate (Common Gate) . .

PNPTR P N , P . P . BAND GUARD .

Guard Ring

Guard Rings

CMOS Latch-up Pattern Ring .

Guest-Host Effect

. . , .

H

H.A.L(Host Solder Air Leveling)P.C.B .

Handler

Package Ttest Test system(Tester) .

Half Cutting Halide

Wafer 70 ~ 80 % .

2 . .

Hard Fail

defect .

HCT (High Speed C-MOS TTL)

C-MOS TTL LSTTL ( ) Computer computer CPU, Menory, IC . Heat Sink Plane () .

HEMT (High Electron Mobility Transistor)

Transistor , GaAs , FET GaAs undoped GaAs, N AIGaAs , AIGaAs Channel .

Hepa Box

Clean Room Hepa Filter Box.

HEPA Filter (High Efficiency Particulate Air Filter)

Clean Room Filter . (0.1m - 99.9995 %)

Hetero Junction

P N PN Junction . P N . 2 HETERO Juction .

High Power Inspection Hfe(DC Current Gain)

Wafer Die

Emitter .

Hierarchy

LSI Design Design .

High Pressure Cleaner Hillock

Wafer CO2 D-I Water .

. HMDS(Hexa Methyl Di Silazane ) Wafer Wafer Primer() .

H-MOS(High-performance MOS)

MOS IC N-NOS MOS.

Hold Time

data tCAH(Column Address Hold Time) tRAH(Row Addres s Hold Time), tDH (Data Hold Tome) .

Hole

. .

HOPL(High Temperature Operating Life Test)

" " 125 Oven 7.5(V) Bias, 1000 " " .

Hot DI water Hot Run

DI water(85), Wafer .

RUN(lot) RUN . Normal RUN RUN.

Hot Test

Test .

Hot Electron

. ( ) . . Hot Electron .

HP4145

Wafer level DC Graphic Bench Test T ool.

H/S (Heat Sink)

. PKG .

HTO (High Temperature Oxidation)

. . (900) Si Wafer , Si Wafer SIO2 .

HTRB (High Temperature Reverse Biase) HTS (High Temperature Storage)

" Bias" Device Bias Oven .

" " (125) Oven Device .

HVAC (Heating Ventilation and Air Conditioning) Hybrid-Circuit Hybrid I.C

, () .

, , . (THIN FILM) (THICK FILM) I.C , I.C . IC ,, , .

II-line stepper 365 nm

IC (Integrated Circuit)

2 , , .

IC Memory

TR MOS F-F Memory(cell) IC. IC Tester ( ) IC . ATE (Automatic Test Equipment) .

Ids

MOS TR Source Drain .

Ie (Emitter Current)

IEC (Integrated Equipment Computer)

.

(Integrated Injection Logic) Bipolar Transistor PNP Tr-ansistor NPN Transistor . Bipolar Logic IC . PNP Transistor NPN Transistor N P . Gate . Analog. Digital Bipolar IC Digital . (Isoplanar Integrated Injection Logic) .

ILT (Infant Life Test)

() 48. Burn-In . Image Sticking() ghost .

Impact Ionization

Electric Field Electron Atom Electronhole Pair . Implanter( ) wafer , , 3 . Implanting () wafer B() P() Implanter .

Impurity

, P N . P: B, AI, Ga, In N: P, As, Sb

Index Feeding

Lead Frame .

Index Register

Address Register.

Induced Cholesteric Phase

. .

, .

Induced Smectic Phase

Indum arsenide Initial Oxide

InAs, III-V .

Si Nitride Tensite Stress(1109 Dyne/cm2) , Buffered Oxide . , Oxide Bird's Beak . Injection() PN .

Ink

.

Inker

Wafer Ink .

Inking

Package Package Wafer Inking .

Inorganic Filter

.

Input Buffer Input Level Insulator

Signal voltage level .

Device De-vice (High, Low) .

.

Inter-bay Interface

Bay Bay Clean Way (AGV, Track) .

Amp Computer . Inter Metallic Compound( ) .

Intra-bay Intrinsic

Bay AGV Track .

P N , P N .

Inversion

MOS FET Gate PN Type NP Type . Inversion Wall() . , . Inverted Staggered() source .

Inverter

Digital Circuit 10 01 .

Optic, X-ray, electron beam Lithography . Ion Implantation .

Ion Beam Lithography

Ion Injection

Silicon lon . Ion Shell () .

IPA (Iso Propy Alcohol) IPO (Inter Poly Oxide) ISO-Planar Isolation

.

Poly Si Poly Si Oxide.

Planar .

Chip TR, Diode Isolation .

Isolation Diffusion

N Epi P Sub-strate . Epi .

Isotropic Etching

. () . Isotrophic Phase ()

. ..

Isolation in IC Isotropic

.

ITO(Indium Tin Oxide)

. (In2O3, SnO2) .

JJ-FET(Junction FET)Depletion Mode Source-Drain lon Gate Gate Drain FET(Filed Effect Transistor) .

Jig

.

Junction

. Junction Depth (Xj) Silicon Diffused layer background .

Junction Diode

PN Diode Junction Transistor ( TR) 3 ( PNP NPN) TR.

Junction Spiking Jungle-Box

Metal-Silicon contact Metal Silicon

Gas Gas Flow Meter(MFC) GAS .

K

Kerf

(). Blade .

Keying Slot

.

LLabelling() Wafer RUN Tube Diamond pen .

Laminar Flow Station Laser Diode

Filter .

PN . PN .

Laser Interference Method

Etch Wafer Laser .

Laser Repair

Data ( ) laser data( ) .

Laser Scriber Laser Test Lasera Latch

Wafer Die .

Yield Fuse Laser

.

Latch Up

CMOS , ionizing redation Turn on .

Layer

IC Si-Wafer (Insulator, Conductor) Photo/Etch Pattern .

Layout Plot

Layout Hard Copy CMOS LSI THYRISTOR TRANSISTOR IC .

L/B (Loadboard)

Test System Jig.

LC (Liquid Crystal)

. . " ".

LCD(Liquid Crystal Display)

.

LDD(Lightly Doped Drain)

Doping , Device .

LDMOS(Lateral Diffused MOS)

MOSFET Source Drain .

Lead Finshing

Lead (Tin), .

Lead Frame

TR, Diode, IC Sawing Die Attach . Alloy42 , Copper, Kovar, Steel IDF TTT .

Leak

Pin Pin .

Leak Current Leakage

.

Input tristated output open circuit high impedence . leakage voltage input triasted output current input leakage triasted leakage .

LED(Light Emission Diode)

Diode. (PN )

Legend() .

LF(Lead Frame) Library

Chip .

Gate array Standard cell .

1 , 2 Motor.

LIM(Linear Induction Motor)

Linear IC

IC , , .

LIPAS(Line Item Performance Against Schedule) . Liquid Crystal () . Liquid Phase Epitaxy () . Ga, Sn .

LN2(Liquified N2) Loader

N2 GAS, .

Stocker Station Cassette Unit.

Load Circuit

Test Device Application , Cpacitance Circui t.

Loading

Wafer Boat Tweezer . Loading Effect() Pattern Pattern .

Loading fixture

Lead Frame .

Local Oxidization of Silicon

.

silicon silicon silicon silicon . Logic Circuit() 2 , , , .

Logic Simulation

IC Functionality Logic Value .

Logic Synthesis

HDL Netlist Logic Level Schemetic . VHDL Logic .

Lot Lot

Sampling .

Wafer .

Low Power Part LP(Lens Paper)

Power Device Portable .

Lens .

LPCVD(Low Pressure CVD)

Wafer Deposition Gas .

LRR (Lot Reject Rate)

Gate Lot Reject.

LSB (Least Significant Bit) .

LSI (Large Scale Integration)

Transistor100 . LTO (Low Temperature Deposition of Oxide, ) LPCVD 400~450 .

LTS(Low Temperature Storage)

" " (-40) Oven Device . Luminerous Effciency .

.

Luminescence

LVS (Layout Versus Schematic) Lyotropic Nematic

Layout .

, .

MMacro Cell Library Core Macrocell Interface Input/Output Macrocell .

Macro Function

Macrocell Macrocell Library CAD software Library Library.

Macro Loading Effect Magazine

Wafer etch .

Lead Frame Strip Carrier . Magneto Diode ( Diode) Diode.

Main Frame

. . , , . Magnetic Ink (, ) Ink, TRIC Wafer . Majority Carrier ( ) . .

Manual Station Mask

Handler Tester .

. Mask Epitaxial Method

Mask .

Mask Layout

Mask , , , ,, , , mask .

Mask Tooling Information

Reticle/Mask Information PG Data, FramePIE Scrbe Line Align Key Information Vendor .

Master Drawing

, , , .

MBE(Molecular Beam Epitaxy) MCC(Motor Channel Center) Mcdonnell Switch

.

Motor , Panel.

. Boiler , Gas Boiler .

MCM (Multi Chip Module)

. MCM , , .

MDS (Microcontroller Development System) Measling

MICOM Program Tool.

.

Gas .

Mechanical Pump

Mega Cell

RAM,ROM Memory PC 82 Series Logic Macrocell Library.

Mega function

Megacell Library Macrofuntion CAD Library Megafunction Library Disk .

Memory IC Data . RAM SRAM, DRAM, SRAM Cell Latch , DRAM Condenser . SRAM , Access . DRAM Condenser Bit ,. . Leak Data Rewrite (Refresh) . Memory Effect .

Memory Cell

Memory module Mesogen

Memory Memory .

.

Metal Gate

(AI ) TR MOS FET MOS FET IC .

Metallization

.

MFC(Mass Flow Controller) .

Micro Bridge

Pattern Pattern Bridge Scope Current leve l Scope .

Micro IC

.

Micromulsion Mil

() .

1/1,000 Inch. 25.4m. Minority Carrier( ) .

Mis-Align

(mask) Wafer .

IC Metal 1 Layer . 2, 3 .

MLM(Multi-Layer Metal)

MMIC(Monolithic Microwave Integrated circuit)

Wafer IC Inductor, Capacitor,, Transistor .

MO Tape(MASK ORIGINAL TAPE) Mobility

Mask Data .

, , , , 10/m . .

(Metal-Organic Chemical Vaper Deposition) MOVPE Epi . Source 5 .

MOCVD

Mode

. . , , Operation .

Model Parameter

Simulation .

Module

. Module .

Molding

() . Wire Bonding () package .

Molding Compound

Wire Bonding .

Molding Die

.

Monitoring

.

Monolithic IC

1 .

MOP(Metal Oxide Passivation) .

MOS(Metal Orcide Semiconductor)

Silicon Device.

MOS FET(MOS Field Effect Transistor)

Source, Drain Gate3 Gate Source Drain Channel .

MOS IC

MOS FET IC.

Movement

Run .

MPR(Micro Peripheral)

LSI Micro Computer Microprocessor LSI .

M-Pyrol

, , .

MRB(Material Review Board)

Criteria , Stock Shut-down 24 Corrective action .

MSI(Medium Scale Integration)

100 10 Transistor .

MTO(Medium Temperature Deposition of Oxide) Multi-Processing

LPCVD 800 .

.

Multiple Diode Multiplexer

2 Diode .

() Control .

Myelin Figure Nail Heading

A 2 .N

.

Intensity .

Nano Line

Nano Spec

Wafer .

National Reference Standard Navigation TFT-LCD

2 .

LCD , .

N-Channel

P FET , .

, , lame lla .

Neat Phase

Necking

Interconnect line .

Negative LCD

Normally black .

Negative Resistance Nematic IC Net Die Netlist

.

.

Wafer Total Die.

Simulation Layout , , , Signal Name File.

Neural Processing Chip N-CH Filed Implant

Neuron Neuron IC.

Filed Region VT Cell Cell Filed Oxide ICON .

N MOS(N-channel MOS) Nodule

P Source Drain N MOS device.

, Si Si . Noise Margin( ) 1 0 level "1" "0 " . Non-Volatile( ) Memory.

Notch/Void

() . Notch , Hole Void .

Notching

Photo line .

Notebook TFT-LCD

3.5Kg PC 10 Laptop Pitch 0.21, 0. 33mm.

NPN TR

N ,P, N , , TR.

N-Type Silicon(Negative Type Silicon) NVD(Non Visual Defect)

Major Carrier Electron .

Deprocess Fail Defect Non Visual Defect .

OOA(Outside Air)AHU .

OAHU(Out Air Handing Unit) Oalemce Election

.

, .

OCD(Optically Coupled Device) .

Octal Test

Probe Test touch 8Die Probeinng 8 Die test .

OEIC(Organized design for line & Crew System)

System Layout Method Line .

One Chip CPU

1 Chip LSI . ONO Capacitor Dielectric Material Oxide/ Nitride/ Oxide 3 Pinhole Breakdown , Nitride Dielectric Constant Oxide Capacitance .

Open

.

Open Repair

TFT Arrey Panel Data Lline Gate Line line short .

Optic Emission Method

Plasma etch Optic signal .

Optical Axis

(No:ordinary) (Ne:extra ordinary) . Orientation- Film() . Oscilator() .

O/S(Open Short) .

OTP(One Time Programmable)

EPROM Device Plastic Package Erase Package Device .

Output Buffer

Sence AMP Data External Load Device Buffer.

Output Level Outgassing

Device Data (High, Low) .

Source Gas Gas Lon Beam .

Oven

Wafer .

Over Coat

(ITO) Alksli Barrir Coa t .

, .

Over Coating(Polyimide Coating)

Over Etching

End Ppint Detection Etch .

Oerlay Vernier

Wafer Wafer Pattern .

Over- flow Oxidation Oxide

.

, (650 ~ 1200 ) Wafer .

(SiO2)

Oxide Breakdown

Oxide voltage . Oxide Film() .

PP-ChannelN P FET ,

.

P & R(Placement & Rounting)

Design Automation Chip Layout Macro-Block Standard-Cell .

P/A(Process Area)

Wafer Area.

P-Type Silicon(Positive Type Silicon)Major Carrier Hole Si .

PA(Process Air) Package

Air Comp Dryer Filter Air .

TR, Diode, IC Package Mold() Type, Ceranic type, Cam() type . Type Pin Type .

Package Density

. Panel Plating() . Parasitic Effect() IC .

Passivation

, , Damage Plas ma CVD Oxide Nitride , PN , .

Pattern

.

PBH (Planer Buried Heterostructure)

(LD) , epi . PCB (Printed Circuit Board: ) , , , , TR, IC, LSI, .

PCD (Plasma Coupled Device) PCM Data

CCD Device.

RUN Data Test pattern Data.

PCM Test

Process control monitor , .

PCT(Pressure Cooker Test)

" " 15PSI, =100%, =1212 Pressure Cooker .

PCW(Process Cooling Wafer) PD(Photo Detector)

.

PIN-PD, APD .

PDP(Percent Defect Panel)

.

Plastic Package Type Package Lead Socker .

PDIP (Plastic Dual In-Line Package)

PECVD(Plasma Enhanced Chemical Vapor Deposition) Plasma . TFT-LCD Insulato r a-Si .

Pellet

Wafer .

Pelletize

compound .

Performance Board

Test System Test System Probe PCB Coaxial Cable Wiring Interface board.

Peripheral LSI

Test system CPU LSI.

PG(Pattern Generator)

CAD System Digitizing Mask Pattern Reticle .

PG(Pattern Generation)

Pattern Layout Reticle/Mask Data .

PG Tape

Layout Data Reticle/Mask E-Beam Machine Format

Data PG data Tape .

PGA(Pin Grid Array)

LeadPackage . Phase() 1 . Photo Conductive Effect() .

Photo Diode

PN PN . Photo Etching( ) .

Photo-Resist

Positive Negativ e 2 .

Photo-Resist or Resist

Positive Negative . Photo Volatic Effect( ) PN PN .

PI(Process Integration)

Photo, Etch, Diffusion, Thin Film, Ion Implantation Process Flow . Piezo Electric Effect() .

Pin Hole

Mask WF Pattern . .

Pit

. Pixel() "Picture Element" R,G,B 3 1 .

Pixel Defect

LCD .

PLA(Programmable Logic Array)

Program . Planner. FAB Silicon .

Planar Transistor Plasma

FAB Silicon Chip .

.

Plasma Display

.

Plasma Etching

Gas Energy , , , , , .

Plating.

PLCC(Plastic Leaded Chip Carrier) Plenum

Package lead 4 .

.

.

PLL(Phase Locked Loop)

P-MOS

Channel MOS Transistor.

P-N Junction

P-N Junction P N . Junction (rectifier) Diode .

PNPN Diode

PNPN 4 Diode.

PNP Type Transistor

PNP P, N, P , , TR .

, 2 PVA TAC(Tri Acetyl Cellul ose) . Poly-Crystal() . Poly-Crystal Silicon( ) . .

Polarizer

, . .

Poly-Si

Polyimide Polymer

Rubbing .

. (Monomer) .

Positive LCD Post Burn-in

LCD Normally White .

Burn-in .

Post Laser Repair Test

Laser Repair Wafer Chip Pass/Fail Laser Repair .

Pot

.

Power Regulator

Bipolar IC IC Linear IC .

Pattern . Pattern . Pre Burn-in Burn-in .

PR(Photo Resist)

Predipitate

( ), FAB .

Preform Feeder

Preform Lead Frame .

Pretilt Angle Probe Card

.

Wafer Chip Probe Tip .

Prober

Test Wafer X, Y, Z ROOM/HOT Wafer Point Test .

Probing

PAD Probe Tip Contact .

Process Minispec.

base line FAB SPEC ,, .

Profile

.

Proximity Effect

Pattern Etch .

PRT(Production Realiability Test) PSG(Phospho-Silicate-Glass)

.

. Phosphorous Reflow .

P/S(Prober Station)

Wafer

PSRAM(pseudo SRAM)

DRAM SRAM Refresh DRAM SRAM .

P-Type

N-Type 3 .

.

P type semiconductor

Punch-Through Breakdown

Source/Drain Junction depletion region Breakdown Substrate , Short Channel Junction Depletion Source-Dain .

PV(Process Vacuum)

Pump . .

PVD(Physical Vapour Deposition) PW(Polished Wafer) .

CVD , .

PWL(Pulsed Word Line)

ICC Reading Word Line Signal Pulse Control Circuit .

QQDR(Quick Drain Rinse)DI Rinse Cycle Sho-wer Drain Cleaning .

QFP(Quad Flat Package) Quartz Boat

Lead Package Lead .

Wafer , . Quartzware() Furnace N/C Chamber .

Q-tip

. Cleaning .

QTL(Q8K Test Language) Qual(qualification)

Q8K Test System PGM language.

Test .

Elec tronics .

Quantum Electrnics

QV (Quality Validation)

Test QA , ,Test .

RR/A(Return Air) Rack .

. .

Ram Height

.

Rambus DRAM

Rambus DRAM. Data 500MHz data bus .

RAMDAC

Pixel Address RAM DAC R.G.B Analog Chip.

Raster

CRT .

Recipe

Material Process Rule Control data .

Rectifier

Diode .

, . . Rectifying Action() .

Recombination

Redundancy

Cell Chip .

Redundancy

Chip Cell Defect Cell Cell .

Reference Check

Device System Check . Reflectance() Film .

Reflective Display Refresh

Backlight Display.

DRAM MOS FET WRITE-IN REFRESH .

Reject

Wafer Mask .

Reliability

.

Repairable

Memory Chip Fall Bit Redundancy Fail Cell Spare Cell Repairable . Wafer Test Row Column Cell Row Column . Repeating Defect() Wafer .

.

Resin Recession

Resisstor Retilcle

Mask Chip 10 Mask Master Mask .

Resistration

.

Response time Retest

.

System Align Test Wafer Test .

Reticle

Mask .(Stepper Mask) Wafer Pattern () () Wafer .

Reverse Tilt

.

Reverse Twist

, .

RF(Radio Frequency)

, Gas , .

RIE(Reactive lon Etching)

. Plasma etching Ion .

Ring Oscillator Rinse

Library .

(DI Water) Wafer . Rise Time() TR Collector () 10% 90% .

Room Temperature Test .

ROR(Ras Only Refresh) Round Cut Routing

RAS Low Refresh .

Wafer Wafer .

PCB . PCB Drill PCB . Row Fail Device Test X address, Y address cell fail .

R.S(Resistivity)

.

RTI(read time inspection)

FQA Sampling .

RTV(Room Temperature Vulanizing)

. 25, 60% .

Rubbing

.

Run Split

Run , Run Wafer , .

RZ(Return to Zero)

Pattern Data "1" "0" Palse .

SS/A(Service Area) Mainternance Area 1M-DRAM CALSS 100. Salt Spray " " =35, 5% Device Lead Frame Check .

Sawing

Wafer 1/1000 Wafer X,Y .

S/C(Solder Coating)

I.C lead lead .

Scanner

Beam line lon Beam Beam .

Scanning Trigger Circuit

Feedbac k .

Schematic

. Simulator Text Netlist .

Schottky Barrier Schottky Diode

.

, P-N Diode.

Schottky gate fet SCP

FET Gate , Schottky FET.

Gate PNPN .

Scramble Scratch

Device Pin Test .

, .

Screening

DEBUG, BURN-IN LOT .

Scibe

Wafer Chip .

Die Sawing .

Scibe line

Scribing

, Wafer ( , )

Scrubber Scum

Wafer .

Wafer .

SDA(Statistical Dafect Analysis)

Process Wafer Fail(Row, Column, Bit fail) Feedback Data.

SDRAM(Synchronous DRAM)

System Clock Data 10ns Access Time DRAM.

Bonding Wire .

Seal

Seal Print

LCD Seal .

Search Level

Die Lead .

Second Bond SECSDEV

Lead Frame Bond.

Loopback Test Simulator .

SECSIM(SECS Simulator) SECSTEST SECCPEC Segment

SECS Test PC Simulator.

Loopback Test Simulator HOST .

SECS Protocol Specification Vendor .

NIXIE TUBE , , , . , .

Segment ON/OFF

"8" .

SEG(Selective Epitaxial Growing)

Epi Silicon Oxide . Selective Diffusion() . Selective Oxidation Process() .

Self Align

Mask . Self bias( ) .

Self Refresh

DRAM Refresh Refresh Mode DRAM , Self Refresh DRAM Refresh T ime Refresh .

Self-Alignment

MOD Gate AL Melting Poing AL DEP. Themal Caycle . AL DEP Source Drain Drive-in . S/D Drive-In Gate Define Alignment Tolerrance Overlap Regio n S/D Parasitic Overlap Capac-itance Minimum size .

SEM(Semiconductor Equipment and Material Institute) , .

Semi-Auto

Host CST LOAD/UNLOAD Opertor . Semi-Custom Masker Cell Mask User IC/LSI IC.

Semiconductor.

( ) ( ) .

.

Sensor

Sense AMP

Cell Data Data line voltage swing Data line Signal Am plifier. Sequential Circuit() GateNAND, NOR , Flip-Flop, Shift Register, Counter, Memory .

SER(Soft Error Rate)

Memory Particle FIT .

SET(Summary of Electrical Test) Set-up

TEST Information Sheet.

() . Set-up Mode Arc Energy lon Beam .

SF(Stacking Fault) .

SF(Spiral Flow) .

Sheath() . Shelf() Stocker Cassett .

Shift Register

Register (Shift ) .

Shoe Box Shoom

Carrier 2 , carrier .

Device graphic , 2 , Device pass/fail dotting Device .

.

Short Circuiting Short Repair Shrink

.

Chip .

SiC(Silicon Carbide)

, Wafer Tube , .

Side Ball Bonding

Wire .

Side Etch Silicon

() .

4 .

Silicon Compiler

System master pattern IC .

Silicon Gate

Gate , MOS .

Si Gate MOS

MOS FET Gate (Poly) silicon MOS Device.

Silicon Nitride

.

SIMM(Single In Line Memory Module)Edge connector .

Simulation Vector

simulation input pin input netillist cycle .

Single Crystal Single end

.

lead .

Single In Line.

Lead .

SIP(Single Inline Pkg)

Memory Module Memory Modual, Pin Type Memory Module . Inserting .

Site

Wafer .

Skew Slice

Pin Timing.

Wafer . Silicon .

level , limitter level slicer . Slot() Carrier boat Wafer .

Slicer

Sludge

.

Smart Power IC

Control IC . Smock()

Line .

SN(Spit Notice)

RUN Spit Split .

SOA(Safe Operating Areas) .

Socket Board

Jig (TEST PKG )

SOG(Sea of Gate)

ASIC Unit Gate Array Channel . Metal D ie Unit Gate .

SOG(Spin On Glass)

VLSI , , . SOG SOG 400 ~500 .

SOIC(Silicon outline Integrated Circuit) IC.

SOJ(Small Outline J-form Package)

Device "J" LEAD PKG PCB .

Solder Ball

.

Solder Coating

, Frame Coating . Soldering () PCB I.C , .

Soldering Oil

Wafer Soldering Machine .

Soler Preform Solder Resist

Die Lead Frame .

PCB , Solder . Soler Side() .

Sorting

Wafer .

SOT(Small Outline Transistor) Transistor.

Space Charge Spacer

.

LCD , .

SPARC(Scalable Processor Architecture) Speed-Up Capacitor Spider bonding

SUN MICRO 32 Bit RISC Processor.

TR Inverter Speed-Up .

Wireless Pattern Wafer .

Spike

Silicon Contact .

Spindle Motor

Blade Wafer , . Air Bearing 30, 000RPM .

SPLC(Stocker PLC) Split

Stocker Stocker Program .

Normal RUN .

Split Word line

SRAM Cell Layout Design Asymmetry Word Line .

Argon Gas Target Wafer .

Sputtering

Square Out

Wafer , Wafer .

S-RAM(Static RAM)

Dynamic RAM . .

SSI(Small Scale Integration)

10 Gate . Stack . FAB Silicon .

Standard Cell

Standard Cell Cell , Chip semi-custom LSI Gate Array custom .

Standby

.

.

Standby Current Drain Static Hold

2V Data Data Retention .

Static memory

MOS FET .

STC(Stocker Controller)

Bay Cassette , Bay Cassette Bay Cassette Bay .

STD(Standard)

Stem

TR , Header .

WF 1 Chip Chip . WF 1 . STN(Super-Twisted Nematic) WF PC .

Stepper

Storage Time () TR ON .

Stress

Wafer .

Stringer Strip

Film Etch Residue .

Wafer P.R , .

Strobe

Device Device Latch Timing.

Sub-Mask

Mask Master Mask Mask mask.

Substrate

() , Wafer .

Substrate-Concentration Subtrative Process

Wafer , Bulk .

, , etching . Supported Hole() .

Surface Agent

.

Surface Concentration

. Wafer . Surface Passivation( ) PN . (ACTIVE) PN (PASSIVE) .

Surface Potential Surge Current

. Wafer .

.

Synchronization() Timing .

SWMI(Side Wall Masked Isolation)

LOCOS Isolation Oxide En-croachment , bird's Beak .

TTAB(Tape Automated Bonding)Tap Die .

TAB

TR IC 1mm TAB .

Taping

Wafer Tape ( ).

TCA Oxidation

TCA .

TCP(Tape Carrier Package)

IC Chip Tape Film TAB(Tape automated bonding) Package.

TEG(Test Element Group) Tenting

Bread Board TR, Diode, .

Resist .

TEOS(Tetra Ethyl Ortho Silicate) Terminal

Si Source .

lon Source Cover .

Test Head

Tester Handler Prober Station .

Test Mode

Device Test Test Access Device , Test Test Time Test multi-bit test .

Test Pattern Tester

/ Wafer Pattern.

Computer .

Test Option Test Plan

Computer .

, , , Limit .

Test Program

Wafer Program SPEC Program Software.

Test Schematic(Test Circuit)Jig .

.

Test System

Test Vector

Test Simulation Test Signal Set.

Test vehicle

Mask.

Test Test Program Pass/Fail .

Testability

Chip Level Block Sub Block Test .

TF-EL Display (Thin-Film Electrolumines- cent Displays)

, .

TFIC(Thin Film Integrated Circuit)

5 . .

TFT(Thin Film Transistor) TFT Array

FET.

Matrix TFT .

Thermal Addressing

. Thermo-Optic Effect( ) . .

Thermotropic LC

.

Thermal Relief() . Thermal Shock Test() TR, Diode, IC . Thermo Electric Effect() , , . Thick Film IC( ) 5 .

Thin Film

Thick Film ( 5 micro) .

3D Circuit Device

LSI , DEVICE LSI Silicon LSI . 3 .

Threshold Level

Input Device . Thyristor () PN 3 ON/OFF 2 OFF ON .

Tie bar Tilt

PKG Lead Bar.

, . .

Tilt Angle

.

Timing

Device Comtrol Clock, Address, Data .

Tin Plating Tip

Sn Frame .

Chip .

TiSiX (Titanium Silicide)

Titanium silicon contact .

Tj(junction Temperature).

TN LCD (Twisted Nematic Liquid Crystal Display)90 LCD.

TN-FE LCD (Twisted Nematic Filed Effect LCD)

90 Twist LCD.

TNI. Clearing Point Tooling Hole

.

. Topology () Wafer .

TQFP(Thin Quad Flat Package) TR(Transformer) Transfer

1.0 mm 1.4mm QFP.

.

LCD , Carrier Boat Wafer Carrier Boat .

Transfer Collect Transfer Print

Tape Die .

Ni-beads .

Transfer System

. RUN SHOE BOX Wafer

.

Transition time

Device level level A.C .

Transistor

Emiter Collector base base carrier .

Transition Trap

.

carrier . Trench . FAB , Silicon .

Triangular Voltage Sweep Method

Gate mobile ion oxide current gattte bias oxide check .

.

Triger

Trim/Form

Package lead 90 I.C .

Tristate output

Level High Low High Impedance .

TSOP(Thin Small Outline Package)

Package 1.0mm SOP(SOIC) P-DIP PACKAGE SYSTEM .

TS(Tensile Strength)

.

TTL(Transistor Transistor Logic) TTV(Total Thickness Variation) (wafer)

. .

Tunneling

Bisas PN, Oxide Energy Band Gap

Electron Hole .

TV RUN

Test Vehicle Wafer.

Tweezer

Wafer ( Vacumn Tweezer )

Twist angle

Cell .

UUART(Universal Asynchrnous Receiver & Transmiter) LSI Interface .

UJT(Unjunction TR) Ultra Filter

Junction 1 Base 2 TR.

2 Particle Filter.

Ultrasonic Cleaner

() .

Under Coating

LCD SiO2 . SiO2 . MASK LAYER .

Undershoot Noise

0V NOISE, 0V NS Pulse Negative Latch-up .

Uni-Biopolar IC Unipolar

- TR .

Transistor FET .

Unloader

Frame Magazine Frame .

Unloading

Loading Wafer Tweezer Transfer Arm CARRIER BOAT .

UPS(Uninteruptable Power Supply) . UV(Ultra Violet,) Energy .

VVacumn TubeTransistor , , , , Transistor IC .

Vacuumn Tweezer

Chip Carrier . Valence Band () . Valence Electron() .

Vane Damper Varistor

Fan .

.

Vcc (Supply Voltage)

. Device Device Device .

Vector

Simulation Input Pin Input Netilist Cycle .

Vector Address

Pattern Memory Pattern Address. Verical TR( ) () . .

VFD(Vacumn Fluorescent Display)

. .

VIA

Metal lnsulating filed Contact.

VIA not OPEN

METAL LAYER PROCESS VIA CONTACT UNDER ETCH Metal Layer Contact SPEC .

Via hole

PCB .

Viewing Angle

. LCD. Virtual Cieaing Point( ) .

Viscosity

, . .

Visual inspection Void

Chip Device .

RTN (). FAB SPACE .

Vss

Device Device Vcc Clock Device Signal . VTD Depletion TR VTH.

VTH(Threshold Voltage).

VTN

Natural TR VTH.

VTPC(Vertical Probe Card)

Wafer Test Device PAD Needle Probe Card Probe Card Needle .

WWafer (Si) .

Wafer Carrier Wafer ID

Wafer , .

RUN Wafer Wafer .

Wafer Sort

Wafer Level GO/NO-GO Test , Test Wafer Probe Prober Card Test . Wafer Storage Box (Wafer) Wafer Carrier Box.

Wave Form

Wafer lon Beam .

Wave Soldering

.

Wedge Bonding Well

.

CMOS Technology N-Channel Transistor P-Channel Transistor Si-Substrate N P-Channel Transistor substrate.

Wet Etch Wet Sink Wetting

. .

Wafer .

.

WI(Wire Inspection)Bond .

Wide Bit

8bit I/O Byte Word Dar Device .

WIP(Work In Process)()

Wire Bonder

TR IC Wire Bonding Wire Bonder .

Wireless Bonding Work Function

.

.

Work Holder

Lead Frame Loader Magazine Die Unloading Magazine .

Work station Worm

WF .

(1 : Write once Read many) .

Write

EPROM EEPROM Floating Gate Bit .

WSI(Wafer Scale Integration)

Wafer Chip Wafer .

WSTS(World Semicondiuctor Trade Statistics)

. .

XXylne or Way Coat (resist) .

Y

Yield

Wafer Wafer 1 Wafer Chip Wafer Test Chip .

ZZenor breakdownPN Diode 0 . . Zenor . PN Diode , . . , . .

Zero ohm resistor

SIMM PD Pin Chip Connector ZERO OHM RESISTOR .

ZIP(Zigzag In-line Package)

Package Type Package Lead Zigzag Device .

Zone AHU(Zone Air Handing Unit)

FAB Return FAB Air .