transmission electron microscope
TRANSCRIPT
Transmission Electron Microscope
Characterization of Materials
Dr M Israr Qadir
TEM is most versatile tool for microstructural investigation TEM is widely used in industry and academia
Primary objective to investigate the microstructure and composition of semicondrs, alloys, and biological samples
At very high magnification 50x – 150,000x and more
A resolution of 1 Angstrum can be optimized under optimum conditions
1. Alignment of electro-optical system
2. Stability in accelerating voltage
3. Cleanness of the microscope
History In 1924, A French scientist de Broglie “cleared the path”
Electrons can behaves like waves
First TEM was built in 1931 by a German Ernst Ruska.
Principle Working principle of TEM is similar to Optical microscope
Having slight differences such as
1. Photons are replaced by electrons
2. The light source is an electron gun instead of light bulb
3. The lenses are magnetic as opposed to glass
Principle A ray of electrons is generated by a filament
Focused by a illumination lens system on the specimen
Electrons penetrate the specimen “imaging lens systems” are responsible to generate the
images
Pre-requisites Pressure should be very low to reduce the interference
Sample must be very thin, so that the electrons can penetrate the sample
Nanoparticles can be imaged as it is, however, we need cutting, etching and polishing for bulk materials
Price of the microscope is on the order of 1-4M US $
Spherical aberration Spherical aberration means it defocuses the electrons which
are scatter with different angles from source
Unfortunately this is inherent problem of electro-optical lens
New microscopes are equipped with SA corrector
With per piece cost of 1 M € and is complicated in operation
Operator change the focus where the resolution is best
Chromatic aberration Reflects the inability of a single lens to focus
Reason lies with difference in energy of the scattered electron results in variation in energy
The result is an image with slight defocusing.
In early years, chromatic was most damaging aberration