1. 2 | TEESING ABout teesing technical supplier since 1952 Since 1952 Teesing is `The right connection` as an international supplier of fittings, valves, tubing, systems and assemblies for industrial applications in four sectors: pneumatics, hydraulics, instrumentation and transport of media. With offices in the Netherlands (Rijswijk), U.S.A. (New Jersey), China (Beijing) and Zhubei City (Taiwan) we are globally active in several specialized niche markets, such as semiconductor, railway, alternative fuels, pharmaceutical and (Petro)chemical industries. We supply a complete package of products and services you require for your connection applications. Through our specialized knowledge of our products and markets we are capable in responding quickly to all your questions regarding the transport of gases and liquids to your point of use connection. Thanks to our engineering department we are also capable of delivering customized products and assemblies that are developed to meet the specifications of your critical process demands. ABout Teesing 2 WHY TEESING 3 teesing business units 4 st introduction 5 Clean and lean 6 engineering 7 Mott 8-9 saes 10-11 SETRA 12-13 SERTO 14-15 RECTUS 16 CeLERITY 17 rotarex 18 -19 rotarex - gazel 20 Teesing DEDicated products 21-23 CONTENTS

2. submicron technologies | 3 TEESING introduction Why Teesing? The International Supplier of high quality connectivity solutions With offices in Europe, USA and Asia, Teesing can support you all over the world with a large variety of products. Extensive knowledge in application advice Our experienced sales engineers can advise you on any application. Customer focused We are willing to adapt to customer requirements. We are interested in your specific application to ensure you acquire the best products and support. Flexibility Teesing has a new warehouse-system to deliver fast and secure. Double packed or regular. Technical supplier for over 60 years We supply since 1952, Teesing is a solid partner for a large amount of companies worldwide. Innovative engineering department In close co-operation with the customer and supported by the latest technology, Teesing can develop the right products and assemblies for your specific requirements. In-house Cleanroom in the Netherlands Teesing has the unique capability to assemble its UHP fittings, hoses, valves, regulators and tubing in a class 100 cleanroom. Global Partnerships We have exclusive partnerships in Europe, USA and Asia to deliver you the best products at the right price. all productssupplied by teesingcan bedouble packedin cleanroom conditionson request

3. 4 | TEESING TEESING BUSINESS UNITS introduction INDUSTrial applications International supplier of fittings, valves, tubing, systems and assemblies. Our markets include the (petro)chemical industry, life science, railways and laboratory applications. submicron technologies International supplier of HP/UHP components and assemblies from source to process. Our markets include the semi- conductor, mechatronics, photovoltiac and LED industry. alternative energy International supplier of components, systems and assemblies for CNG/H2 projects. Our markets include the automotive and transport industry and all markets related to alternative energy.

4. submicron technologies | 5 SUBMIcron technologies introduction ABOUT TEESing submicron technologies Teesing supplies components for applications in a wide variety of pro- ducts, assemblies and systems associated with gases and liquids used for semiconductor processing. Ranging from cooling systems, bulk storage gas cabinets, gas monitoring applications, bulk filtration and purification to point of use gas supply. Ultra High Purity Components & equipments High quality components and sub-assemblies such as: piping, valves, tubing, manifolds, assemblies, and systems are supplied to semicon- ductor toolmakers and meet the stringent demands of the semiconduc- tor industry. Double packed and produced under cleanroom conditions. Special features for the semiconductor industry include: minimal dead space in valves and fittings, minimal use of specific lubricants, cleaned and highly polished stainless steel, radial mounting, compression fit- tings, weld fittings, diaphragm valves, purifiers, mass flow controllers, pressure sensors, specific cleanroom solutions and more! Unique capability to assemble in class 100 cleanroom Leen Nugteren, Business Manager Submicron Technologies: As we have a cleanroom on location in the Netherlands, all the products we supply can be double-packed in clean air, nitrogen or helium. Teesing has the unique capability to assemble its UHP fittings, hoses, valves, regulators and tubing in a class 100 cleanroom. For small assemblies it is possible to produce class 10.

5. 6 | TEESING CLEAN AND LEAN submicron technologies SERVICES CLEAN AND LEAN-LIFTS Teesing has had its own cleanroom for over 10 years, so it can deliver its products and assemblies clean and double-packed according to client specific requirements. A number of lean-lifts have been conditioned and are overpressured; (assembled) products are stored here for our clients in the semiconductor and mechatronics industries. This system ensures that cross contamination and movement of particles are kept to a minimum. The products are stored in a safe and clean manner. SUPPLY INTEGRITY & EFFICIENCY Teesing uses an automated system in the product storage process, so stock level information is updated real-time. Products come to staff instead of staff having to walk to the items, which makes a considerable difference in terms of efficiency. Besides the fact that this system saves a lot of space and time during the logistics process, the risk of making any incorrect deliveries is significantly reduced. Teesing cLEANROOM SOLUTIONS Together with its partners, Teesing can handle anything from a few samples for prototypes to complete assemblies for volume production. Cleanliness is tested using UV and Laser technics. Extreme clean dry air (XCDA) with sub ppb levels of contaminants is used and Teesing has bake- out capabilities. This ensures minimal particle counts and reduces TOC levels, in order to deliver sub-systems or components ready for producing nanotechnologies.

6. submicron technologies | 7 Teesing ENGINEERING submicron technologies SERVICES ENGINEERING In close co-operation with the customer and supported by the latest technology, Teesing can develop the right products and assemblies for client specific requirements. Teesing can also provide additional engineering services like supplying CAD-files of most of the products. Consulting The knowledge of the sales engineers regarding the product range and the various markets is complemented by the sup- port of the in-house engineering department. This enables Teesing to advise its customers in a knowledgeable, compe- tent manner and to propose appropiate application solutions. Product Streamlining Teesing can analyze, optimize and redesign products in order to guarantee the optimal solution for your application. If needed the product or assembly can be modified to ensure the best result. We engineer from source to process

7. 8 | TEESING MOTT submicron technologies product range MOTT company profile Mott Corporation (formerly Mott Metallurgical Corporation) was founded as a Connecticut corporation on July 9, 1959 by Lambert H. Mott. The company consists of three business segments: High Purity: Specializing in the rigorous demands of particulate removal from process gases during semiconductor manufacture. Process Systems: Combining porous metal filter elements with hardware, electronics and software to make large-scale, turnkey systems for large-volume separation of liquids, gases,solids and slurries. Specialty Porous: Creating literally any OEM component formed partially or exclusively of porous metal, in configurations from simple to complex. Teesing is the official supplier for all Mott porous metal products in the Netherlands, Belgium and Luxembourg.

8. submicron technologies | 9 MOTT submicron technologies product range mott filters GasShield point-of-use filters are available in over 20 standard designs, constructed of 316L stainless steel, nickel, or Hastelloy C-22, and rated for flows up to 600 slpm and inlet pressures as high as 5000 psig. The 100% metal bulk filters are available for flows up to 25000 slpm and inlet pressures from 400 - 650 psig. Mott offers a full line of filter and flow restrictor products in de- signs compatible with the gas system interfaces presently gaining acceptance in process tools, gas cabinets and valve manifold box installations. The IGS filters are designed to provide greater system flexibility coupled with ease of change-out and reduced maintenance times. Filters are offered in 316L SS, nickel and Hastelloy C-22 for gas compatibility and range in flow rates from 10 to 100 liters per minute. mott restrictors Mott also offers High Purity Flow Restrictors, in which porous metal elements are designed into double-male face seal fittings to provide consistent, long-lasting, wear- and plug- resistant flow control with a minimal footprint to conserve space. mott diffusers The diffusers of Mott are specially developed for proces chambers where particle generation is required to be a slow as possible. By Using the porous metal diffuser a laminiary flow will be main- tained, which will result in a minimized particle displacement in the proces chamber. mott SPARGERS To induce CO2 or other gases into a bioreactor it wil increase pro- ductivity when you use a Mott sparger. Depending on the require- ments on media grade, face velocity, sparger diameter, liquid and tanksize we will be able to offer the solution to provide an optimum environment for biological processes.

9. 10 | TEESING SAES submicron technologies product range SAES company profile SAES Pure Gas began production in 1989, with the introduc- tion of the MonoTorr gas purifier. As a pioneer in developing heated getter technology, SAES continues to set the standard for the market with its superior impurity capacities and longer purifier lifetimes. In order to meet individual customer requi- rements and the needs of an increasing technological market, SAESs extensive research and development has resulted in the largest portfolio of gas purifiers available for all gas purifi- cation needs. With the introduction of the ambient temperature MicroTorr purifier and the MegaTorr bulk gas purifier, SAES Pure Gas has models to satisfy a wide range of flow rates and gas applications. Teesing is the official supplier for all Saes Pure Gas products in the Netherlands, Belgium and Luxembourg.

10. submicron technologies | 11 SAES submicron technologies product range saes point of use purifiers SAES Pure Gas MicroTorr ambient temperature purifiers are ideal solutions for point-of-use gas purification. Gases Purified include: Nitrogen, Rare Gases, Hy- drogen, Oxygen, CDA, Ammonia, Corrosives, Silane, Arsine, Phosphine, etc. Flow rates up to 1,000 slpm. saes heatED getters SAES Pure Gas MonoTorr heated getter purifiers are ideal solutions for point of use purification where CH4 and N2 removal is required. Gases purified include: Argon, Helium, Nitrogen, Hydrogen. Flow rates up to 150 slpm. saes bulk gas purifiers SAES Pure Gas offers the MegaTorr, an entire line of bulk gas purifiers designed for complete facility-level purification. Gases purified include: Nitrogen, Argon, Helium, Oxygen, CDA, Hydrogen, Ammonia. Flow rates up to 20,000 Nm3/hr depending on the gas. saes MicroContamination Collection Service The unique in-situ CollectTorr sampling system and off-line analytical service from SAES Pure Gas have been developed to provide end-users of leading edge lithography and inspection/metrology equipment with a dedicated, simple, and reliable tool for optics molecular contamination purge gas certification. Utilizing the solid-state trap-based CollectTorr Sampling System coupled with state-of-the-art analytical equipment, parts per trillion (pptV) levels assessment of molecular acids, bases, refractory and organic contaminants are successfully achieved.. find the latest documentation on the download page on our website

11. 12 | TEESING SETRA submicron technologies product range SETRA company profile Setra Systems designs and manufactures a broad line of sensing products. This includes humidity, current, vacuum, and pressure sensing instruments, low pressure calibrators, and weighing and counting scales for a wide variety of applications in the HVAC/R, Semiconductor, Test & Measurement, Medical, Pharmaceutical, Barometric, Vacuum, and Industrial markets. Setra has been designing and manufacturing sensor instruments and products since 1967, and we are dedicated to lean manufacturing, standard processes, and continuous improvement. SETRA pressure transducers Setras Ultra High Purity Pressure Transducer Models are widely used in the semiconductor industry and are ideally suited for high-purity gas delivery systems within semiconductor processes. Also control applications that require ultra-clean operation, high throughput performance, and exceptional long-term stability rely on the pressure transducers from Setra. Designed with low cavity volume of 0.11 in3, virtually eliminating particle entrapment, the Ultra High Purity Pressure Transducers can be easily purged. All wetted parts are 316L VIM/VAR stain- less steel passivated to 5 Ra (7 Ra. max.) fi nish, which eliminates surface irregularities and provides the proper surface chemistry for corrosion resistance, assuring contaminant-free gas distribution. Versions available in Gauge, Compound and Absolute PSI in Pres- sure Ranges of -1bar to 200 bar These Ultra High Purity Pressure Transducers are offered with a 5 VDC, 1 0 V D C o r 4 - 2 0 mA output. A six- foot multiconductor cable or Bayonet connector is provided for electrical termination.

12. submicron technologies | 13 setra submicron technologies product range SETRA DIGITAL pressure GAUGES Setra digital pressure gauges offer extremely high accuracy and unmat- ched stability in a digital output configuration. Environmental monito- ring and test & measurement systems around the world rely on Setras experience in barometric pressure measurement instrumentation, as well as high accuracy measurements of higher pressures. Both models utilize Setras unique SETRACERAM sensor, which is combined with advanced microprocessor based circuitry and sophisticated firmware to provide system accuracy to better than 0.02% full scale. The LD 330 is a small Local Display designed to be easily installed in-line between a Setra pressure transducer and the users data acquisition system and power supply. It has a low power consumption 3-1/2 digit ana- log to digital converter with a Liquid Crystal Display (LCD). The compact housing allows transducer and power supply connection through a variety of electrical terminations.

13. 14 | TEESING SERTO submicron technologies product range serto connection system: unique! teesing facts Serto connectors mount radially onto the tube, making the connection easy, time saving and without any damage to the tube itself. It is a leak tight, flat-flace, metal to metal connection without o-rings or washers. Apart from easy assembly, the connections are extremely reliable, as some connectors can take up to 250 bar of internal pressure. SERTO company profile Since the beginning of 1952, Teesing has been the exclusive distri- butor for Serto products in the Netherlands. Serto is an unparalleled Swiss brand that uses high performance, patented technology to supply an extensive range of couplings, valves, tubing and complete assemblies to fit the industrys needs. The semiconductor industry has specific requirements regarding cleanliness and compact size. Serto uses a cleanroom in order to comply to the highest standards of cleanliness.

14. submicron technologies | 15 SERTO submicron technologies product range serto connectors Serto stands for a unique modular system. The union can be fitted or released radially thus eliminating the need to displace or even bend tubing runs. When the nut is tightened down, the clamping ring is deformed and constricts lightly around the tube without producing a notch. In the area of the constriction and at the clamping ring/base part joint, the deformation forces produce high specific surface-area pressure contacts which guarantees a firm hold of the tube and tight metallic sealing. Serto will make it possible to connect HP tubing to plastic tubing or hoses, even flexible hoses are connected leak free by using an internal support sleeve. The unique clamping connectors from Serto in stainless steel, PVDF and PA are commonly used worldwide in the semiconductor market.

15. 16 | TEESING RECTUS submicron technologies product range Rectus company profile Rectus is one of the largest German brands in the field of quick connectors. Apart from a wide range of standard couplings, Rectus also provides tailor-made solutions. rectus quick connectors Rectus has worlds widest range of quick connectors and has developed specific versions for use in high purity conditions. Specifically for the semiconductor industry Teesing and Rectus have developed dedicated quick connectors for use in a cleanroom environment. One example is the flat-faced KL series which makes it pos- sible to connect or disconnect without any droplets. Also the ergonomic grip allows easy use with cleanroom gloves. These connectors are also available without locking sleeve, so multi couplers can be configurated in block/ plate assemblies allowing fast connection of multiple connectors at once which avoids switching mistakes. For use in clean environments its extremely important to have a minimum release of particles. Therefore Teesing developed together with Rectus a new clean sleeve design with full trace- ability. By using a special lasermark process, each product can be marked with a batch number with a minimum chance on particle release. RECTUS CONNECTORSare used by one of theworlds largestmanufacturersof lithographysystems

16. submicron technologies | 17 Celerity submicron technologies product range celerity company profile Celeritys broad selection of pressure transducers, pressure gauges and related instruments provides best-in-class monitoring of ultra-high-purity bulk gases, specialty gases and liquefied process gases. Celerity Pressure Gauges Celeritys stainless steel pressure gauges are designed and developed for the demanding high-purity applications of the semiconductor industry. Welded in oxygen-free chambers to meet rigid cleanliness and safety guidelines, the gauges include pressure switches and transmitters and come in a variety of pressure ranges and process connections.

17. 18 | TEESING Rotarex submicron technologies product range Rotarex is a well known manufacturer of valves, fittings and regulators for High Purity (HP) and Ultra High Purity (UHP) applications. Based in the heart of Europes technical crescent, Luxembourg, Rotarex is one of the best in technical engineering and precision manufacturing worldwide. Since 1922, Rotarex assures technical quality, safety and reliability for gas pressured systems. During the years, many brands such as Selfa, Gazel and Sagana have become a part of the Rotarex Group.

18. submicron technologies | 19 Rotarex submicron technologies product range Rotarex SELFA Valves & Regulators All Selfa products are manufactured to meet the highest standards and are assembled in a cleanroom. Avoiding particles starts already with the design which minimizes the number of parts in gas wetted areas which makes Selfa valves, fittings and regulators ideal for semiconductor applications. Metal diaphragms and bellows technologies assure a perfect tightness and high life span even when used for highly corrosive and reactive gases. Selfa can count on a large range of standard products but customization is also a possibility. Selfa range is composed of 3 main product types: Valves: Diaphragm and bellows valves, ranging from small 4mm passage all the way to large 100mm, manual or pneumatic actuation, or a combination in V-blocks. Selfa also offers cryogenic valves for liquefied gases. Regulators: Special design for lowest particle generation. Fittings: Cylinder connectors for all types of gases and for all connection standards

19. 20 | TEESING Rotarex gazel submicron technologies product range Rotarex GAZEL Face-seal fittings Gazel fittings are the UHP fittings (VCR-type) range of the Rotarex Group. Manufactured to the highest standards. Gazel fittings are cleaned, mounted and packed in clean- room conditions according to UHP specifications. Electro polishing ensures a perfect surface finish. Gazel has 5 ranges of fittings: Metal gasket face seal fittings Space saver fittings High flow fittings Micro fittings Weld fittings Gazel fittings are compatible with the industry leading face seal fittings. Gazel has a large range of standard fittings but also custom solutions are possible.

20. teesing DEDICATED products submicron technologies product range TEESING product range introduction Over the years, Teesing has build on its technical experience to become an expert in engineering and producing products and assemblies to suit the requirements of its customers. As Teesing aims to be a total supplier for the semiconductor market, various products have been engineered and produced to compliment the product range. TEESING PFA Valves AND Fittings Teesing PFA flare fittings are well suited for any corrosive or high/purity application. These durable fittings are manufac- tured in a class 10.000 cleanroom facility from virgin PFA, the cleaned and double/packed to ensure ultimate cleanliness prior to installation. Teesing PFA diaphragm valve have a low maintenance bonnet with an economically designed handwheel and an integral optical position indicator. All medium wetted parts are made of PFA (body) and PTFE (diaphragm). All Diaphragm valves are assembled, tested and packaged under class 100 cleanroom conditions TEESING SPECIAL TUBING Teesing delivers pre-bent PU tubing for ultraclean applica- tions. The PU tubing has excellent bending properties with very little deformation even after long-term stress conditions. This tubing stays flexible also in low temperatures and is abrasion resistant. Ask for our special Tubing Brochure!

21. 22 | TEESING teesing DEDICATED products submicron technologies product range TEESING DIAPHRAGM PUMPS The Teesing micro diaphragm liquid pumps are based on the principle of the oscillating displacement pump which is remarkably simple in design. Micro design and maximum performance resulting from built-in technology are the outstanding characterics of the products. We also deliver mo- dified twin headed pumps with special reinforced diaphragms for higher flow rates, better suction height and increased lifetime. TEESING LIQUID RING PUMPS Liquid ring vacuum pumps are single-stage displacement pumps of uncomplicated and robust construction. These pumps are non-polluting due to nearly isothermal compres- sion, oil-free (no lubrication in the working chamber) and able to handle nearly all gases and vapours and small quantities of entrained liquid. The pumps are easy to maintain and stand for a reliable operation, low noise and nearly free from vibration. find the complete range of products on www.teesing.com

22. submicron technologies | 23 Teesing DEDICATED products submicron technologies product range TEESING BALL VALVES The wide range of High Purity ball valves offered by Teesing are available from DN 15 - DN 300. The end connections are available in butt weld, tubing and triclamp connections. All ex- tend weld ends are suitable for orbital welding in place (CF3M/ DIN 1.4409). The ball valves can be delivered in a true or full port edition with a manual or automated actuation. TEESING ASSEMbLIES Teesing offers a high quality components and sub assemblies such as: piping, valves, regulators, tubing, manifolds, assem- blies, and systems are supplied to semiconductor toolmakers and meet the stringent demands of the semiconductor indus- try. Double packed and produced under cleanroom conditions.

23. TEESING B.V. Verrijn Stuartlaan 40 2288 EL Rijswijk The Netherlands Tel +31 70 413 07 00 Fax +31 70 413 07 30 info@teesing.com www.teesing.com CHINA OFFICE Hong Kong Macau Center Suite 418 4Th Floor, Office Tower 2 Chao Yang Men Bei Da Jie 100028 Beijing, China Tel +86 10 659 590 74 Fax +86 10 650 142 48 teesingchina@teesing.com www.teesing.com.cn USA OFFICE 10 Millpond Drive Unit 7 Lafayette, NJ 07848 United States of America Tel +1 973 383 0691 Fax +1 973 383 4672 teesingusa@teesing.com www.teesing.com TAIWAN OFFICE 4F.-15, No.36, Taiyuan St. Zhubei City Hsinchu County 302 Taiwan Tel +886 3 560 05 60 Fax +886 3 560 05 60 teesingtaiwan@teesing.com www.teesing.tw Aspro TIS (Beijing) Co. Ltd. Xi Tuo Cun, Ma Chi Kou Zhen Chang Ping District Beijing 102206 China Tel +86 10 807 221 65 info@aspro-tis.com.cn www.aspro-tis.com.cn www.teesing.com Contact our sales engineers to receive detailed product information. We recommend to visit our website for regularly updated product information.