submicron technologies teesing

2 | TEESING

ABOUT TEESINGTECHNICAL SUPPLIER SINCE 1952

Since 1952 Teesing been an international supplier of a complete package of products and services for connection applications. Owing to its specialised knowledge of the products and markets, Teesing is able to respond quickly to any question customers may have regarding the transport of gases and liquids to their point-of-use connection. Teesing Systems & Engineering can develop customised products and assemblies to meet the specifications of its customers’ critical process requirements.

With offices in the Netherlands, USA, China and Taiwan, Teesing is globally active and can rapidly respond to the requirements of niche markets worldwide.

• ABOUT TEESING 2• WHY TEESING 3• TEESING BUSINESS UNITS 4• ST INTRODUCTION 5• TEESING APPLICATION SOLUTIONS 6-9• SALES ENGINEERING TEAM 10• CUSTOMERCARE 11• ENGINEERING 12• ASSEMBLY AND TESTING 13• LOGISTICS 14• CLEAN AND LEAN 15• MOTT 16-19• SAES 20-21

• SETRA 22-23• SERTO 24-25• RECTUS 26• INSTRUMENTATION 27• ROTAREX 28-30• TEESING DEDICATED PRODUCTS 31-33• TEESING TUBING 34-35

CONTENTS

SUBMICRON TECHNOLOGIES | 3

TEESINGINTRODUCTION

WHY TEESING?

• The International Supplier of high quality connectivity solutions With offices in Europe, USA and Asia, Teesing can support you all over the world with a large variety of products.

• Extensive knowledge in application advice Our experienced sales engineers can advise you on any application.

• Customer focused We are willing to adapt to customer requirements. We are interested in your specific application to ensure you acquire the best products and support.

• Flexibility Teesing has a new warehouse-system to deliver fast and secure. Double packed or regular.

• Technical supplier for over 60 years We supply since 1952, Teesing is a solid partner for a large amount of companies worldwide.

• Innovative engineering department In close co-operation with the customer and supported by the latest technology, Teesing can develop the right products and assemblies for your specific requirements.

• In-house Cleanroom in the Netherlands Teesing has the unique capability to assemble its UHP fittings, hoses, valves, regulators and tubing in a class 100 cleanroom.

• Global Partnerships We have exclusive partnerships in Europe, USA and Asia to deliver you the best products at the right price.

WE ENGINEER FROM SOURCE TO PROCESS

4 | TEESING

TEESING BUSINESS UNITSINTRODUCTION

INDUSTRIAL APPLICATIONS

International supplier of fittings, valves, tubing, systems and assemblies. Our markets include the (petro)chemical industry, life science, railways and laboratory applications.

SUBMICRON TECHNOLOGIES

International supplier of HP/UHP components and assemblies from source to process. Our markets include the semiconductor, mechatronics, photovoltiac and LED industry.

ALTERNATIVE ENERGY

International supplier of components, systems and assemblies for CNG/H2 projects. Our markets include the automotive and transport industry and all markets related to alternative energy.


SUBMICRON TECHNOLOGIES INTRODUCTION

ABOUT TEESING SUBMICRON TECHNOLOGIES

Teesing supplies components for applications in a wide variety of products, assemblies and systems associated with gases and liquids used for semiconductor processing. Ranging from cooling systems, bulk storage gas cabinets, gas monitoring applications, bulk filtration and purification to point of use gas supply.

ULTRA HIGH PURITY COMPONENTS & EQUIPMENTS

High quality components and sub-assemblies such as: piping, valves, tubing, manifolds, assemblies, and systems are supplied to semiconductor toolmakers and meet the stringent demands of the semiconductor industry. Double packed and produced under cleanroom conditions.

Special features for the semiconductor industry include: minimal dead space in valves and fittings, minimal use of specific lubricants, cleaned and highly polished stainless steel, radial mounting, compression fittings, weld fittings, diaphragm valves, purifiers, mass flow controllers, pressure sensors, specific cleanroom solutions and more!

“UNIQUE CAPABILITY TO ASSEMBLE IN CLASS 100 CLEANROOM”

Leen Nugteren, Business Manager Submicron Technologies:“As we have a cleanroom on location in the Netherlands, all the products we supply can be double-packed in clean air, nitrogen or helium. Teesing has the unique capability to assemble its UHP fittings, hoses, valves, regulators and tubing in a class 100 cleanroom. For small assemblies it is possible to produce class 10.”

TEESING APPLICATION SOLUTIONSUBMICRON TECHNOLOGIES OVERVIEW OF PRODUCT RANGE

POINT OF USE

DELIVERY BULK GASES

Point of use filter• 9 log reduction value• High performance

operation• Preconditioned with

clean dry nitrogen• All welded construction

eliminates out-gassing

Air dryer• Anti-corrosive treatment• Cool compressed air

output• Optional accessories

available

Bulk purifier• Separate control power• Fully automatic

operation• Digital and analogue

communication

Bulk filters• All metal construction• Suited for higher

temperatures• Clean start-to-finish packaging

Point of use gas purifier• Delivery of ultra-high-

purity gas• Environmentally friendly• Made of stainless steel• Low pressure drop

GAS 3.0/4.0 APPLICATION

Quick couplings• Metal to metal seal• Leak free • Easy purgeability• Easy assembly

Switch overboard• Connect multiple

gascylinders.• Two duoblocks • Safety relief valve• Two purge outlets

HIGH PURITY GAUGES

Analogue pressure gauges• 316L stainless steel

wetted parts• Variety of models• Different pressure

ranges• Accuracy of 1%

Digital pressure gauges• High purity gas delivery

system• Easily mounted with

integral connectors• Small size• Low power consumption

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RING LINE APPLICATIONS

UHP/HP valves• Easy and fast to install• Compact size• Extensive range

KD/KY valves• Electro-polished• Cleaned for high purity

service• Extensive range

SERTO TOOLSerto tool• A constant quality• Specially for cleanroom

envoirements • Easy and fast assembling

for larger couplings• Timesaving

VACUUM 3.0/ 4.0 APPLICATION

316 RVS tubing• High chemical resistance• Thermal stability-

non-toxic hose

Diaphragm valves• Low particle emission• Easy purgeabillity• Clean operation, no rubbing• Fully contained

Stainless steel T-fittings• High pressure resistant• Corrosion resistant• Compact design• Minimal dead space

VACUUM 5.0/ 6.0 APPLICATION

Metal gasket face seal fittings• Helium leak tested• Vacuum high pressure• Quick assembly• High quality butt welding

Micro fittings• Helium leak tested• Vacuum high pressure• Quick assembly• High quality butt welding

316 RVS polished tubing• High chemical resistance• Thermal stability-non-

toxic hose • Electro-polished

UHP pressure regulator• Sperical ball for ultra

smooth control• Sealed bonnet for extra

protection • Ergonomic design



UHP GAS CIRCUIT (GAS CABINET)

UHP/HP valves• Easy and fast to install• Compact size• Extensive range

High purity filters • High-strength, all

metal solution to filtration

• Extensive range• High quality

constuction• High flow rates

Flow restrictors• Clog-free operation• Less friction• Corrosion resistant

Metal gasket face seal fittings• Helium leak tested• Vacuum high pressure• Quick assembly• High quality butt

welding

Ultra high purity pressure transducer• EMI/RFI immunity

avoids downtime• Superior stability avoids downtime

Purifiers• Regenerable models

available• Lifetime service• Enviromental friendly

Check valves• Extremely leak tight• Wear and corrosion

resistant• Protected seals

Micro fittings• Helium leak tested• Vacuum high pressure• Quick assembly• High quality butt

welding

PUR - hose• PU hose reinforced• High cold flexibility• Abrasion resistant• Little deformation

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Liquid Ring Vacuum Pumps• Robust construction• Isothermal compression• Non-polluting

Stainless steel fittings• Easy and fast to install• Resistant to corrosion• Extensive range

PUR - Hose• High cold flexibility• Abrasion resistant• Little deformation

Dry-Break KL-Series Quick Coupling• Single-handed operation• Ergonomic sleeve shape• Minimum leakage

Stainless Steel Ball Valves• Extensive range• Different brands available• One, two and three ports

Pumps• Micro design• Self-priming• Dry running

High Purity Filters• High-strenght, all metal

solution to filtration• High flow rates• High quality construction

Check valves• Extensive range• Available in different materials• Extremely leak tight

DIN 11851 Coupling• Rounded thread• Electro - polished external

surface• Standard NBR seal• Inc needed 852 welding parts

UHP/HP valves• Easy and fast to install• Compact size

PTFE - hose• Smooth surfaces• 100% UV resistant

PFA - Hose• Universal chemical

resistance• Outstanding flexibility

Ultra High Purity pressure Transducer• EMI/RFI immunity avoids

downtime• Puperior stability• Aavoids downtime

XCDA PNEUMATIC CIRCUIT

UPW COOLING CIRCUIT


10 | TEESING

TEESING SALES ENGINEERING TEAMSUBMICRON TECHNOLOGIES SERVICES

EXTENSIVE KNOWLEDGE

The extensive product and market knowledge of Teesing’s sales engineers enables them to work together effectively with customers to find the perfect solution. The sales engineers not only advise on the products but also on how to integrate them with the customer’s existing machinery. This ensures harmonious interaction with their application or processes.

WIDE PRODUCT RANGE

Its wide range of products allows Teesing to offer appropriate solutions for a variety of market requirements. Teesing’s sales engineers efficiently use and combine these products to find solutions which meet the customer’s requirements. Where necessary, Teesing Systems & Engineering provides support to guarantee the best possible service to customers.


TEESING CUSTOMER CARESUBMICRON TECHNOLOGIES SERVICES

FAST ACCESS TO INFORMATION

Teesing’s Customer Care department offers customers fast access to product information such as specifications and pricing. Customer Care takes orders and provides rapid responses to questions about availability and delivery times.

BRIDGING BETWEEN CUSTOMERS AND TEESING’S DEPARTMENTS

To avoid miscommunication and to ensure that customers are given appropriate information from the various Teesing departments, Customer Care provides customers with a fixed point of contact. When communicating with other departments, Customer Care always receives updates to ensure the best and fastest service to its customers.

UPDATE ON ORDER CHANGES

Teesing Customer Care is notified directly of any delivery changes. They will contact the customer concerned and arrange a solution if necessary.

12 | TEESING

TEESING ENGINEERINGSUBMICRON TECHNOLOGIES SERVICES

TEESING SYSTEMS & ENGINEERING

Teesing has its own engineering department which can develop parts and assemblies in consultation with its customers. Some customers require parts that are not available in the standard product range. In such cases, Teesing designs, develops and manufactures customised parts in small or large quantities on demand.

QUALIFIED ENGINEERS

The Teesing Systems & Engineering team consists of knowledgeable and trained engineers who can meet customer needs for solutions to complex mechanical engineering issues. Whether a customer requires the modification of an existing assembly or module or a brand new solution, Teesing can rely on 60 years of experience to ensure the best results today.

CONNECTION TO PRODUCTION FACILITIES

Teesing can produce customised products on demand. Its worldwide network of suppliers and production facilities enables Teesing to have customised products manufactured in the right quantities at the right price for any specific application.

LATEST ENGINEERING SOFTWARE

Visual and technical support is provided by the latest 3D engineering software. Teesing Systems & Engineering can exchange CAD files in multiple formats with its suppliers and customers to facilitate the assembly of multiple products. 2D drawings can also be provided for quality checks and inclusion in installation manuals.


ASSEMBLING

Teesing can combine a range of parts in an assembly for easy installation in the customer’s product. Teesing has the materials, machinery and know-how to create assemblies for its customers which save time and money. Before starting production, Teesing’s engineers develop the assemblies in CAD to ensure the right specifications.

LARGE PRODUCT RANGE IN STOCK

The wide range of products in stock allows Teesing to engineer and produce assemblies efficiently. The large stocks in the Teesing warehouse means that engineers can choose any quantity of products for the assembly production line. Products from different manufacturers can be combined to ensure the best solution.

TESTING

Teesing has the facilities to test products following assembly. Besides technical inspections, products can be leak-tested over 20 bar using air or over 40 bar using demineralised water. High precision manometers allow accurate product testing and the detection of pressure drops over longer periods of time.

TEESING ASSEMBLY & TESTINGSUBMICRON TECHNOLOGIES SERVICES

14 | TEESING

EFFICIENT ORDER PROCESSING

Teesing has optimised its order and delivery process to ensure fast delivery with minimum errors. By using lean lifts connected to a computerised order-and-stock system, orders can be processed efficiently and real-time stock levels are always available. The Teesing warehouse carries a large stock of many of its products and most items have no minimum order quantity.

PRODUCT LABELS AND TRACIBILITY

Products are packaged and labelled to minimise delivery errors and ensure optimum service to customers. Products supplied by Teesing – and therefore their specifications – can always be easily traced.

PACKAGED TO CUSTOMER-SPECIFIC REQUIREMENTS

If necessary, products can be packaged and labelled to customer requirements. Any product or assembly can be cleaned under cleanroom conditions and double-packaged on request.

TEESING LOGISTICSSUBMICRON TECHNOLOGIES SERVICES


CLEAN AND LEAN-LIFTS

Teesing has had its own cleanroom for over 10 years, so it can deliver its products and assemblies clean and double-packed according to client specific requirements. A number of lean-lifts have been conditioned and are overpressured; (assembled) products are stored here for our clients in the semiconductor and mechatronics industries. This system ensures that cross contamination and movement of particles are kept to a minimum. The products are stored in a safe and clean manner.

SUPPLY INTEGRITY & EFFICIENCY

Teesing uses an automated system in the product storage process, so stock level information is updated real-time. Products come to staff instead of staff having to walk to the items, which makes a considerable difference in terms of efficiency. Besides the fact that this system saves a lot of space and time during the logistics process, the risk of making any incorrect deliveries is significantly reduced.

TEESING CLEANROOM SOLUTIONS

Together with its partners, Teesing can handle anything from a few samples for prototypes to complete assemblies for volume production. Cleanliness is tested using UV and Laser technics. Extreme clean dry air (XCDA) with sub ppb levels of contaminants is used and Teesing has bake-out capabilities. This ensures minimal particle counts and reduces TOC levels, in order to deliver sub-systems or components ready for producing nanotechnologies.

CLEAN AND LEANSUBMICRON TECHNOLOGIES SERVICES

16 | TEESING

MOTTCOMPANY PROFILE

Mott Corporation (formerly Mott Metallurgical Corporation) was founded as a Connecticut corporation on July 9, 1959 by Lambert H. Mott. The company consists of three business segments:

High Purity: Specializing in the rigorous demands of particulate removal from process gases during semiconductor manufacture. Process Systems: Combining porous metal filter elements with hardware, electronics and software to make large-scale, turnkey systems for large-volume separation of liquids, gases,solids and slurries.

Specialty Porous: Creating literally any OEM component formed partially or exclusively of porous metal, in configurations from simple to complex.

Teesing is the official supplier for all Mott porous metal products in the Netherlands, Belgium and Luxembourg.

MOTTSUBMICRON TECHNOLOGIES PRODUCT RANGE



MOTTFILTERS

GasShield point-of-use filters are available in over 20 standard designs, constructed of 316L stainless steel, nickel, or Hastelloy C-22, and rated for flows up to 600 slpm and inlet pressures as high as 5000 psig. The 100% metal bulk filters are available for flows up to 25000 slpm and inlet pressures from 400 - 650 psig.

Mott offers a full line of filter and flow restrictor products in designs compatible with the gas system interfaces presently gaining acceptance in process tools, gas cabinets and valve manifold box installations. The IGS filters are designed to provide greater system flexibility coupled with ease of change-out and reduced maintenance times. Filters are offered in 316L SS, nickel and Hastelloy C-22 for gas compatibility and range in flow rates from 10 to 100 litres per minute.

WHY MOTT POROUS FILTERS?Filtration systems, utilising sintered metal media for solids/liquid separation, have proven to be an effective and economical alternative to other separation methodologies, which may be vulnerable to pressure spikes, high temperatures and/or corrosive environments.

These harsh environments, often demanding use of continuous service, are ideally suited for an all-metal filtration system utilising sintered metal media, which have been fabricated into tubular metal elements. Sintered metal media have demonstrated high particle efficiency removal, reliable filtration, performance, effective backwash capability, and long on-stream service life in many industrial applications that typically utilise leaf filters, bag filters, and plate and frame filters.

While applications include sustained high temperature and corrosive environments, any pressure-driven filtration process with high operating costs can be improved with sintered metal filtration technology. Suitable applications are found in oil refineries, chemical and petrochemical processes, and pharmaceutical production facilities.

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MOTTDIFFUSERS

The diffusers of Mott are specially developed for proces chambers where particle generation is required to be a slow as possible. By Using the porous metal diffuser a laminiary flow will be maintained, which will result in a minimized particle displacement in the proces chamber.

MOTTSPARGERS

To induce CO2 or other gases into a bioreactor it wil increase productivity when you use a Mott sparger. Depending on the requirements on media grade, face velocity, sparger diameter, liquid and tanksize we will be able to offer the solution to providean optimum environment for biological processes.



MOTTSTATIC FLOW CONTROLERS (SFC)

The Static Flow Controller (SFC) is a high accuracy compact flow setting device for gas applications manufactured in ISO class 5 cleanroom. Once Mott’s porous metal static flow control elements are calibrated, they never vary given the fluids are clean and the inlet and outlet characteristics are consistent with design parameters.

A static flow controller (SFC) is a device used to control the flows up to 40 slpm of gases to a single setpoint with a high accuracy. A static flow controller is designed and calibrated to control a specific type of gas at a particular setpoint. The SFC can be configured to a specific static operating condition, including vacuum, with +/- 1% flow accuracy. This reliable mechanical solution will control the rate of flow to the given setpoint with a +/- 0.1% repeatability.

POROUS METAL FOR FLOW RESTRICTIONPorous metal elements can be integrated into all kinds of fittings for a cost-effective solution that guarantees laminar flow in your processes.

How did our engineering department come up with this innovation? It all started with a question from one of our customers in the semiconductor industry who was already using our fittings. The challenge was to make a cost-effective flow restriction in their system with a minimum of change in the current design. This can be done in two ways:

Standard OrificeRestriction by a hole in the house of the fitting.

Speed, pressure and heat increase as gas moves through the orifice, causing wear and tear and increasing chance of clogging.

Mott Flow RestrictorRestriction by a porous metal element.

Gas moves uniformly through porous metal element with minimal friction due to viscosity and reduced chance of clogging.

LOWPRESSURE

HIGHPRESSURE

LOWPRESSURE

HIGHPRESSURE

LOWPRESSURE

HIGHPRESSURE

LOWPRESSURE

HIGHPRESSURE

An entirely new product was created by combining two existing products into one. And the customer didn’t need to change the design.

An entirely new product was created by combining two existing products into one. And the customer didn’t need to change the design.

20 | TEESING

SAESSUBMICRON TECHNOLOGIES PRODUCT RANGE

SAESCOMPANY PROFILE

SAES Pure Gas began production in 1989 with the introduction of the MonoTorr® gas purifier. As a pioneer in developing heated getter technology, SAES continues to set the standard for the market with its superior impurity capacities and longer purifier lifetimes. In order to meet individual customer requirements and the needs of an increasing technological market, SAES’s extensive research and development has resulted in the largest portfolio of gas purifiers available for all gas purification needs.

With the introduction of the ambient temperature MicroTorr® purifier and the MegaTorr® bulk gas purifier, SAES Pure Gas has models to satisfy a wide range of flow rates and gas applications.


SAESSUBMICRON TECHNOLOGIES PRODUCT RANGE

SAESPOINT OF USE PURIFIERS

SAES Pure Gas MicroTorr ambient temperature purifiers are ideal solutions for point-of-use gas purification.Gases purified include nitrogen, rare gases, hydrogen, oxygen, CDA, ammonia, corrosives, silane, arsine, phosphine, etc. Flow rates up to 1,000 slpm.

SAESHEATED GETTERS

SAES Pure Gas MonoTorr heated getter purifiers are ideal solutions for point of use purification where CH4 and N2 removal is required. Gases purified include argon, helium, nitrogen, hydrogen. Flow rates up to 150 slpm.

SAESBULK GAS PURIFIERS

SAES Pure Gas offers the MegaTorr, an entire line of bulk gas purifiers designed for complete facility-level purification. Gases purified include nitrogen, argon, helium, oxygen, CDA, hydrogen, ammonia. Flow rates up to 20,000 Nm3/hr depending on the gas.

SAESMICROCONTAMINATION COLLECTION SERVICE

The unique “in-situ” CollectTorr sampling system and off-line analytical service from SAES Pure Gas have been developed to provide end-users of leading edge lithography and inspection/metrology equipment with a dedicated, simple, and reliable tool for optics molecular contamination purge gas certification. Utilising the solid-state trap-based CollectTorr Sampling System coupled with state-of-the-art analytical equipment, parts-per-trillion (pptV) levels assessment of molecular acids, bases, refractory and organic contaminants are successfully achieved.

22 | TEESING

SETRASUBMICRON TECHNOLOGIES PRODUCT RANGE

SETRACOMPANY PROFILE

Setra Systems designs and manufactures a broad line of sensing products. This includes humidity, current, vacuum, and pressure sensing instruments, low pressure calibrators, and weighing and counting scales for a wide variety of applications in the HVAC/R, Semiconductor, Test & Measurement, Medical, Pharmaceutical, Barometric, Vacuum, and Industrial markets. Setra has been designing and manufacturing sensor instruments and products since 1967, and we are dedicated to lean manufacturing, standard processes, and continuous improvement.

SETRAPRESSURE TRANSDUCERS

Setra’s Ultra High Purity Pressure Transducer Models are widely used in the semiconductor industry and are ideally suited for high-purity gas delivery systems within semiconductor processes. Also control applications that require ultra-clean operation, high throughput performance, and exceptional long-term stability rely on the pressure transducers from Setra.

Designed with low cavity volume of 0.11 in3, virtually eliminating particle entrapment, the Ultra High Purity Pressure Transducers can be easily purged. All wetted parts are 316L VIM/VAR stainless steel passivated to 5 Ra (7 Ra. max.) fi nish, which eliminates surface irregularities and provides the proper surface chemistry for corrosion resistance, assuring contaminant-free gas distribution. Versions available in Gauge, Compound and Absolute PSI in Pressure Ranges of -1bar to 200 bar

These Ultra High Purity Pressure Transducers are offered with a 5 VDC, 1 0 V D C o r 4 - 2 0 mA output. A six- foot multiconductor cable or Bayonet connector is provided for electrical termination.


SETRASUBMICRON TECHNOLOGIES PRODUCT RANGE

SETRADIGITAL PRESSURE GAUGES

Setra digital pressure gauges offer extremely high accuracy and unmatched stability in a digital output configuration. Environmental monitoring and test & measurement systems around the world rely on Setra’s experience in barometric pressure measurement instrumentation, as well as high accuracy measurements of higher pressures. Both models utilize Setra’s unique SETRACERAM ™ sensor, which is combined with advanced microprocessor based circuitry and sophisticated firmware to provide system accuracy to better than ± 0.02% full scale.

The LD 330 is a small Local Display designed to be easily installed in-line between a Setra pressure transducer and the user’s data acquisition system and power supply. It has a low power consumption 3-1/2 digit analog to digital converter with a Liquid Crystal Display (LCD). The compact housing allows transducer and power supply connection through a variety of electrical terminations.

24 | TEESING

SERTOSUBMICRON TECHNOLOGIES PRODUCT RANGE

SERTOCOMPANY PROFILE

Since early 1952, Teesing has been the exclusive distributor of Serto products. Serto is an unparalleled Swiss brand that uses high performance, patented technology to supply an extensive range of couplings, valves, tubing and complete assemblies.

SERTOTOOL The Serto pre-assembly tool is driven by compressed air and can be set up easily anywhere due its small size and light weight. Each device has a rotatable tool insert, which is suit-able for a specific material (M brass, stainless steel, stainless SOL, etc.) and can not be misplaced. Available in a cleanroom version.

SERTOMATICFor assembling larger diameters we prefer to use the Serto-matic. Sertomatic is equiped with a strong electro-hydraulic pump which allows fast assembling of all serto couplings. The Sertomatic is suitable for assembling couplings up to 35 mm diameter.


SERTOSUBMICRON TECHNOLOGIES PRODUCT RANGE

SERTOCONNECTORS

Serto stands for a unique modular system. The union can be fitted or released radially thus eliminating the need to displace or even bend tubing runs. When the nut is tightened down, the clamping ring is deformed and constricts lightly around the tube without producing a notch.

In the area of the constriction and at the “clamping ring/base part” joint, the deformation forces produce high specific surface-area pressure contacts which guarantees a firm hold of the tube and tight metallic sealing.

Serto will make it possible to connect HP tubing to plastic tubing or hoses, even flexible hoses are connected leak free by using an internal support sleeve.

The unique clamping connectors from Serto in stainless steel, PVDF and PA are commonly used worldwide in the semiconductor market

Recently aluminium is added to this range of Serto clamp connectors.

SERTO CONNECTION SYSTEM: UNIQUE!TEESING FACTS

Serto connectors mount radially onto the tube, making the connection easy, time saving and without any damage to the tube itself. It is a leak tight, flat-flace, metal to metal connection without o-rings or washers.

Apart from easy assembly, the connections are extremely reliable, as some connectors can take up to 250 bar of internal pressure.

26 | TEESING

RECTUSSUBMICRON TECHNOLOGIES PRODUCT RANGE

RECTUSCOMPANY PROFILE

Rectus is one of the largest German brands in the field of quick connectors. Apart from a wide range of standard couplings, Rectus also provides tailor-made solutions.

RECTUS QUICK CONNECTORS

Rectus has world’s widest range of quick connectors and has developed specific versions for use in high purity conditions. Specifically for the semiconductor industry Teesing and Rectus have developed dedicated quick connectors for use in a cleanroom environment.

One example is the flat-faced KL series which makes it possible to connect or disconnect without any droplets. Also the ergonomic grip allows easy use with cleanroom gloves.

These connectors are also available without locking sleeve, so multi couplers can be configurated in block/ plate assemblies allowing fast connection of multiple connectors at once which avoids switching mistakes.

For use in clean environments it’s extremely important to have a minimum release of particles. Therefore Teesing developed together with Rectus a new clean sleeve design with full traceability. By using a special lasermark process, each product can be marked with a batch number with a minimum chance on particle release.

RECTUSCONNECTORSARE USED BY ONE OF THEWORLD’S LARGEST MANUFACTURERSOF LITHOGRAPHY SYSTEMS


INSTRUMENTATIONSUBMICRON TECHNOLOGIES PRODUCT RANGE

Teesing offers sollutions to flow pressure, vaccuum and level chalIenges. In industries as diverse as biopharmaceuticals, solar cells, analytical instrumentation, and semiconductors. Teesing provides the broadest array of flow products in the market. All flow products rank at the top of their catagory for accuracy, reliability, and user preference.

PRESSURE GAUGES

Our stainless steel gauges were designed and developed for the demanding high-purity applictions of the semiconductor industry. With an accuracy of 1% of full scale, the 2 inch gauges offer a reliable and efficient way to monitor pressure locally. The gauges are cleaned for oxygen service and suitable for high purity, high cleanliness, and harsh service applications in gas panels, gas cabinets, valve manifold boxes, process analyzers, and more.

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ROTAREXSUBMICRON TECHNOLOGIES PRODUCT RANGE

ROTAREXCOMPANY PROFILE

Rotarex is a well known manufacturer of valves, fittings and regulators for High Purity (HP) and Ultra High Purity (UHP) applications. Based in the heart of Europe’s technical crescent, Luxembourg, Rotarex is one of the best in technical engineering and precision manufacturing worldwide.

Since 1922, Rotarex assures technical quality, safety and reliability for gas pressured systems. During the years, many brands such as Selfa, Gazel and Sagana have become a part of the Rotarex Group.

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ROTAREXSUBMICRON TECHNOLOGIES PRODUCT RANGE

ROTAREX SELFA VALVES & REGULATORS

All Selfa products are manufactured to meet the highest standards and are assembled in a cleanroom. Avoiding particles starts already with the design which minimizes the number of parts in gas wetted areas which makes Selfa valves, fittings and regulators ideal for semiconductor applications.

Metal diaphragms and bellows technologies assure a perfect tightness and high life span even when used for highly corrosive and reactive gases. Selfa can count on a large range of standard products but customization is also a possibility.

Selfa range is composed of 3 main product types:

• Valves: Diaphragm and bellows valves, ranging from small 4mm

passage all the way to large 100mm, manual or pneumatic actuation, or a combination in V-blocks. Selfa also offers cryogenic valves for liquefied gases.

• Regulators: Special design for lowest particle generation.

• Fittings: Cylinder connectors for all types of gases and for all

connection standards

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ROTAREX GAZELSUBMICRON TECHNOLOGIES PRODUCT RANGE

ROTAREX GAZELFACE-SEAL FITTINGS

Gazel fittings are the UHP fittings (VCR-type) range of the Rotarex Group. Manufactured to the highest standards. Gazel fittings are cleaned, mounted and packed in cleanroom conditions according to UHP specifications. Electro polishing ensures a perfect surface finish.

Gazel has 5 ranges of fittings:

• Metal gasket face seal fittings• Space saver fittings• High flow fittings• Micro fittings• Weld fittings

Gazel fittings are compatible with the industry leading face seal fittings. Gazel has a large range of standard fittings but also custom solutions are possible.

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TEESING DEDICATED PRODUCTSSUBMICRON TECHNOLOGIES PRODUCT RANGE

TEESING PRODUCT RANGEINTRODUCTION

Over the years, Teesing has build on its technical experience to become an expert in engineering and producing products and assemblies to suit the requirements of its customers. As Teesing aims to be a total supplier for the semiconductor market, various products have been engineered and produced to compliment the product range.

TEESINGPFA VALVES AND FITTINGS

Teesing PFA flare fittings are well suited for any corrosive or high/purity application. These durable fittings are manufactured in a class 10.000 cleanroom facility from virgin PFA, the cleaned and double/packed to ensure ultimate cleanliness prior to installation.

Teesing PFA diaphragm valve have a low maintenance bonnet with an economically designed handwheel and an integral optical position indicator. All medium wetted parts are made of PFA (body) and PTFE (diaphragm). All Diaphragm valves are assembled, tested and packaged under class 100 cleanroom conditions

TEESINGSPECIAL TUBING

Teesing delivers pre-bent PU tubing for ultraclean applications. The PU tubing has excellent bending properties with very little deformation even after long-term stress conditions. This tubing stays flexible also in low temperatures and is abrasion resistant. Ask for our special Tubing Brochure!


TEESINGDIAPHRAGM PUMPS

The Teesing micro diaphragm liquid pumps are based on the principle of the oscillating displacement pump which is remarkably simple in design. Micro design and maximum performance resulting from built-in technology are the outstanding characterics of the products. We also deliver modified twin headed pumps with special reinforced diaphragms for higher flow rates, better suction height and increased lifetime.

TEESINGLIQUID RING PUMPS

Liquid ring vacuum pumps are single-stage displacement pumps of uncomplicated and robust construction. These pumps are non-polluting due to nearly isothermal compression, oil-free (no lubrication in the working chamber) and able to handle nearly all gases and vapours and small quantities of entrained liquid. The pumps are easy to maintain and stand for a reliable operation, low noise and nearly free from vibration.

FIND THE

COMPLETE RANGE

OF PRODUCTS ON

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TEESINGBALL VALVES

The wide range of High Purity ball valves offered by Teesing are available from DN 15 - DN 300. The end connections are available in butt weld, tubing and triclamp connections. All extend weld ends are suitable for orbital welding in place (CF3M/ DIN 1.4409). The ball valves can be delivered in a true or full port edition with a manual or automated actuation.

TEESINGASSEMBLIES

Teesing offers a high quality components and sub assemblies such as: piping, valves, regulators, tubing, manifolds, assemblies, and systems are supplied to semiconductor toolmakers and meet the stringent demands of the semiconductor industry. Double packed and produced under cleanroom conditions.

TEESING TUBINGMATERIALS AND SIZES

Teesing offers tubing in a wide variety of materials such as copper, stainless steel and various types of hot-formed plastics. Teesing has a large variety of tubing sizes in stock available, in both small and large quantities.

MATERIALS • Low density polyethylene (LPDE) • Polyamide (PA) • Polyurethane (PU) • Polytetrafluorethelene (PFTE) • Fluorinated Ethylene Propylene (FEP)• Perfluoroalkoxy (PFA) • Polyvinylidenefluoride (PVDF) • Dekabon (DEKA)• Stainless steel • Jacoflon• Multicore tubing • Copper / Polyvinylchloride (CU/PVC) • Copper (CU)• Tubetrace type

TEESING TUBINGPRE-BENDED TUBING

Whether brazed or welded, curved or wound, Teesing can produce to any shape required ready-to-fit. Customers can choose from a multitude of pipe shapes and manufacturing processes.

TEESING TUBINGSUBMICRON TECHNOLOGIES PRODUCT RANGE

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TEESING TUBINGCUSTOMER SPECIFIC DESIGNS

Teesing is able to design and produce tubing to customer-specific requirements, including the required couplings for easy assembly with the final product.

ASK FOR OUR TUBING

BROCHURE!

TEESING TUBINGSUBMICRON TECHNOLOGIES PRODUCT RANGE


TEESING B.V.Verrijn Stuartlaan 40

2288 EL Rijswijk

The Netherlands

Tel +31 70 413 07 00

Fax +31 70 413 07 30

[email protected]

www.teesing.com

CHINA OFFICEHong Kong Macau Center

Suite 418

4Th Floor, Office Tower

2 Chao Yang Men Bei Da Jie

100028 Beijing, China

Tel +86 10 659 590 74

Fax +86 10 650 142 48

[email protected]

www.teesing.com.cn

USA OFFICE10 Millpond Drive Unit 7

Lafayette, NJ 07848

United States of America

Tel +1 973 383 0691

Fax +1 973 383 4672

[email protected]

www.teesing.com

TAIWAN OFFICE4F.-15, No.36, Taiyuan St.

Zhubei City

Hsinchu County 302

Taiwan

Tel +886 3 560 05 60

Fax +886 3 560 05 60

[email protected]

www.teesing.tw

Aspro TIS (Beijing) Co. Ltd.Xi Tuo Cun, Ma Chi Kou Zhen

Chang Ping District

Beijing 102206

China

Tel +86 10 807 221 65

[email protected]

www.aspro-tis.com.cn

WWW.TEESING.COM

Contact our sales engineers to receive detailed product information. We recommend to visit our website for regularly updated product information.

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