sige semiconductor devices for cryogenic power electronics electrochemical society seventh...
TRANSCRIPT
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SiGe Semiconductor Devices
for
Cryogenic Power Electronics
Electrochemical Society
Seventh International Symposium on Low Temperature Electronics
14 October 2003, Orlando, Florida
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R. R. Ward, W. J. Dawson, L. Zhu, R. K. Kirschman
GPD Optoelectronics Corp., Salem, New Hampshire
O. Mueller
LTE–Low Temperature Electronics, Ballston Lake, New York
R. L. Patterson, J. E. Dickman
NASA Glenn Research Center, Cleveland, Ohio
A. Hammoud
QSS Group Inc., Cleveland, Ohio
Supported by NASA Glenn Research Center and ONR/DARPA
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Why use SiGe?
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Why SiGe Devices?
• Si-Based Circuits Demonstrated, but only > 77 K
• Standard Si Bipolar Devices Cease Operation < ~100 K
• Applications Require Operation < 77 K, to ~30 – 40 K
• Possible Materials for < 77 K are Ge and SiGe
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Why SiGe Devices?
• SiGe Devices Can Operate to Lowest Cryogenic
Temperatures (~ 0 K)
• All Device Types – Diodes, Field-Effect Transistors,
Bipolar Transistors
• Highly Compatible with Si Processing
• Can Optimize Devices for Cryogenic Applications
by Selective Use of Ge, Si, SiGe
• SiGe Provides Additional Flexibility through
Band-Gap Engineering (% of Ge)
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Development Program
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Development Program
• Parameters
– Low power (~10 W) to medium power (~100 W)
– Temperature range 300 K to ~20 K
• Past
– Initial SiGe diodes fabricated
– Initial SiGe heterojunction bipolars (HBTs) fabricated
• Future
– MOSFETs (lateral, vertical)
– Power HBTs (vertical)
– IGBTs (lateral, vertical)
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SiGe Cryo Power Diodes
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SiGe Cryo Power Diodes - Design
(N+ implant)
P+ SiGe Metal
Metal
N+
N– Si epi
N+ Si
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SiGe vs Si Power Diodes - Forward
0
20
40
60
80
100
I (mA)Ifor (mA) RTIf RT (mA)If (mA)
0 0.2 0.4 0.6 0.8 1 1.2
Si
Vfor
(V)
300 K
2ASiGe: 1A
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SiGe vs Si Power Diodes - Forward
0
20
40
60
80
100
I (mA)Ifor (mA) LNIf LN (mA)If (mA)
0 0.2 0.4 0.6 0.8 1 1.2
Vfor
(V)
77 K
Si2ASiGe: 1A
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SiGe Cryo Power Diodes - Forward Voltage
0
0.5
1
1.5
0.2 A0.2 A SiVf 0.2 AVf 0.2 A
Vf (0.2 A)Vf (0.2 A)Vf @ 0.2 A (V)
0 40 80 120 160 200 240 280 320
Temperature (K)
Ge commercial
SiGe
If = 0.2 A
SiGe
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SiGe Cryo Power Diodes - Forward
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SiGe Cryo Power Diodes - Forward
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0
0.5
1
1.5
1 A lines1 A symbols1 A line Si1 A symbol SiVf 1 A
Vf 1 AVf (1 A)Vf (1 A)Vf @ 1 A (V)
0 40 80 120 160 200 240 280 320
Temperature (K)
Ge commercial
Si
If = 1 A
Ge
SiGe
SiGe Cryo Power Diodes - Forward Voltage
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SiGe Cryo Power Diodes - Reverse
-0.02
0
0.02
0.04
0.06
0.08
0.1
-100 -80 -60 -40 -20 0 20 40
Voltage (V)
SiGe/SiDiodes300 K
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SiGe Cryo Power Diodes - Reverse
-0.02
0
0.02
0.04
0.06
0.08
0.1
-100 -80 -60 -40 -20 0 20 40
Voltage (V)
SiGe/SiDiodes77 K
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SiGe Cryo Power Diodes - Reverse Recovery
-4
-2
0
2
4
6
8
10
12
0.0 0.2 0.4 0.6 0.8 1.0
Dio
de
Cu
rren
t (A
)
Time (µs)
300 K
77 K
SiGe-1B
Silicon-Germanium Diode
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SiGe Cryo Power Diodes - Reverse Recovery
-4
-2
0
2
4
6
8
10
12
0.0 0.2 0.4 0.6 0.8 1.0
Dio
de
Cu
rren
t (A
)
Time (µs)
300 K
77 K
GPD SiGe-2A
Silicon-Germanium Diode
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SiGe Cryo Power Diodes - Results
• N on P and P on N, single and double epi
• Measured to 77 K; operate to ~?? K
• Forward V less than Si at low – med forward I
• Imax ~> 10 A (300 – 77 K)
• Reverse breakdown V >100 V (300 – 77 K)
• Reverse recovery decreases at 77 K
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SiGe Cryo Heterojunction Bipolar Transistors (HBTs)
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SiGe Cryo Power HBTs - Design
~ 0.5 μm n+ Si
~ 0.4 μm p SiGe
~ 20 μm n– Si
Emitter contact
~ 300 μm n+ Si
Collector contact
Base contact
N-P-N (N+/P/N-/N+)
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SiGe Cryo Power HBTs - 300 K
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SiGe Cryo Power HBTs - 80 K
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SiGe Cryo Power HBTs - 80 K
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SiGe Cryo Power HBTs - 80 K
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SiGe Cryo Power HBTs - 40 K
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SiGe Cryo Power HBTs - 40 K
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SiGe Cryo Power HBTs - Results
• Initial fabrication
• NPN
• Operate down to ~40 K
• Power ~5 W, limited by package
• I max ~> 0.4 A (300 – 40 K)
• V forward breakdown ~>30 V (300 – 40 K)
• Need improved contacts
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Cryo Power SiGe Devices - Plans
• HBTs
– Improve HBT contacts, extend operation to ~20 K
– Larger area, I max to 10 A (300 – 20 K)
– V forward breakdown >100 V (300 – 20 K)
– High-power cryogenic packaging
• Additional Devices
– MOSFETs
– IGBTs
– Medium power, 300 – 20 K operation
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Summary
• Cryogenic power electronics is needed
for spacecraft going to cold environments
and for space observatories
• Temperatures may be as low as ~30 – 40 K
• We are developing SiGe devices specifically
for cryogenic power applications
• We have made initial SiGe cryo power diodes
and HBTs
• We plan to improve the diode and HBT
characteristics and to develop MOSFETs and IGBTs