safety in nanoscale science & engineering laboratory buildings

S AF E T Y I N N AN O S C A L E S C I E N C E & E N G I N E E R I N G L AB O R AT O RY B U I L D I N G S

2 0 1 2 N S F

N A N O S C A L E S C I E N C E A N D E N G I N E E R I N G G R A N T E E S C O N F E R E N C E

A R L I N G T O N , V A 3 D E C E M B E R 2 0 1 2

Mark Jamison, P.E.

Vice President | HDR Architecture, Inc.

[email protected]

M Y E X P E R I E N C E

30 Years in Semiconductor & Nanoscience Lab Design

S A F E T Y I N N A N O S C A L E

S C I E N C E A N D E N G I N E E R I N G

L A B O R ATO RY B U I L D I N G S

» Safety means to protect:

• Human Health = Workers

• External Environment = Good Neighbor

• Laboratory Facilities = Investment

» Science & Engineering Laboratory

Buildings

• Complex Buildings & Systems

• Building Systems – HVAC,

Plumbing, Electrical, etc.

• Chemical & Gas Usage

• Equipment – From bench top to

large, heavy expensive items

• Work Environment – Labs,

Cleanrooms, Biosafety Labs, etc

S A F E T Y I N

N A N O S C A L E S C I E N C E

A N D E N G I N E E R I N G

L A B O R ATO RY

B U I L D I N G S

S A F E T Y I N N A N O S C A L E

S C I E N C E A N D

E N G I N E E R I N G

L A B O R ATO RY B U I L D I N G S

» Nanoscale (1 – 100 nm)

• Materials - size issues, toxicology not well

understood

• Processes - Many Similar to Other Science

Labs – size issues

• Environment – Many Laboratory Environmental

Criteria Tighter

» Temperature & Humidity

» Vibration & acoustics

» Electromagnetics

» Particulates

• Increased Laboratory Complexity

N A N O S C I E N C E & E N G I N E E R I N G

Applied Sciences Basic Sciences

Semiconductors

Biotech

/BioPharm

Biological

Chemical

Physical

Advanced

Technologies

H O M E S W E E T H O M E ?

Let’s Hope Not

P U R D U E U N I V E R S I T Y Birck Nanotechnology Center

P U R D U E U N I V E R S I T Y

B I R C K N AN O T E C H N O L O G Y C E N T E R



Typical Space Types

» Semiconductor Cleanroom



Typical Space Types


» Bio Cleanroom



Typical Space Types


» Bio Cleanroom

» Fabrication Labs

» “Quiet” Labs

» Metrology / Imaging Labs

» Optics Labs

» Biology Labs



Typical Space Types


» Bio Cleanroom

» Fabrication Labs

» “Quiet” Labs

» Metrology / Imaging Labs

» Optics Labs

» Biology Labs

» Variety of Support Spaces

• Gas Bunkers

• Chemical Stores

• Waste Treatment

• Mechanical & Electrical

» Fire

» Chemical

» Biological

» Radiological

» Energy/Electricity

» Laser

» Cryogenic

» Hazardous Gas

» Pressure

» Leaks (pipes, tanks, equip.)

» Nanomaterial

B U I L D I N G S A F E T Y H A Z A R D S

Fire Safety

» Very well understood and highly

regulated.

» Fire & Smoke Detection

» Alarm & Notification

» Sprinkler Systems

» Other Extinguishing Systems

» Building Construction

» Building Separations


Chemical Safety

» Very well understood and

regulated.

» Chemical Fume hoods

» Other exhaust devices,

» Negative pressure control,

» Safety cabinets.

» Safety shower / Eye wash

» MSDS


BioSafety

» Very well understood and

regulated.

» Biocontainment facilities

» Biocontainment workstations

» Safe handling practices.


Energy Hazards

» Well understood and regulated

» Isolate, insulate, and ground

» Emergency power shut-off

» LOTO

» Maintain clearances

» Arc Flash


Laser/Optics Hazards

» Well understood and somewhat

regulated.

» Control the source and direction.

» Isolate the hazard – curtains, doors

» De-energize the source.

» Safety interlocks


Oxygen Depletion (Cryogens)

» Well understood and somewhat

regulated.

» Provide oxygen monitoring

» Quench tubes

» Purge exhaust


Hazardous Gases

(toxic, flammable, etc)

» Well understood and well regulated

» Substitute lower hazard

» Limit quantity

» Containment – vented cabinets

» Detect and shut down.


Nanomaterials

» Not yet well understood or easily

managed, and not regulated.

» Best practices and recommendations

only

» Based on best practices from other

hazards listed above.

» Data on toxicity and toxicology is

only slowly being developed, and is

not able to keep up with

development of novel engineered

materials.


H AV E Y O U L I V E D T H R O U G H T H I S ?

» Who has personally been involved in the:

» Design of a New Laboratory or Facility?

» Permitting of a New Laboratory or Facility?

» Construction of a New Laboratory or Facility?

• Construction of the Building

• Tool / Equipment Install

• Commissioning

• Certification of a Cleanroom

S A F E T Y I N T E G R A L TO P R O C E S S

» Safety in Planning

» Safety in Design

» Safety in Construction

» Safety in Commissioning

» Safety in Operation

» Safety in Maintenance

» Safety in Renovation

It is complex and involves everyone’s participation

So How do we Deal with Safety on a Project?

I T ’ S A T E A M E F F O R T

» Researchers

» Facilities Department

» Safety & Health

» Industrial Hygienist

» Fire Marshal

» Code Authorities

» Architects

» Engineers

» Contractors

» Suppliers

» Commissioning Agents

» Maintenance & Operations

» Process Engineering Staff

» Security

» Telecommunications

» Nurse

S A F E T Y B A S I C S

• Compulsory Requirements

• Engineered Features

• Administrative Controls

» Building Codes / Fire Codes

» National Fire Protection Association (NFPA) Standards

» Accessibility Codes

» American National Standards Institute (ANSI)

» International Organization for Standardization (ISO)

» Others

• Local Zoning

• EPA – Emissions, Waste Streams

• Energy

C O M P U L S O RY = C O D E S A N D S TA N D A R D S

C O D E S A N D G U I D E L I N E S

» The Building Codes

• International Building Code

• International Fire Code

• International Mechanical Code

• Electric Code – NFPA 70

A M EMBER OF THE IN TERN ATION A L COD E FA M ILY ®

IFC ®

IN TERN ATION AL F IR E COD E ®

A M EMBER OF THE IN TERN ATION AL COD E FA M ILY ®

IBC ®

IN TERN ATION AL B U IL D ING CODE ®

Receive FREEupdates, excerpts of code references, technical

articles, and more when you register your code book. Go to

www.iccsafe.org/CodesPlus today!

Building Code (IBC)

» USE AND OCCUPANCY CLASSIFICATION

• BUSINESS GROUP ‘B’ Occupancy

» Laboratories: testing and research

• HIGH-HAZARD GROUP ‘H’ Occupancy

» Chem rooms – H2, H3, H4 Many requirements

including Explosion Control

» Labs – Fabrication Cleanrooms – ‘H5’

» FIREWALLS – ‘SEPARATIONS’

» Control Areas – Chemical Quantity Limits

» Dampers

» TRAVEL DISTANCES

B U I L D I N G C O D E S

H A Z A R D O U S P R O D U C T I O N M AT E R I A L S

Building Code (IBC)

» HPM LIMITS

» Control Areas (‘B’ Occupancies)

• Hazardous Materials – Maximum

Allowable Quantities

» Solids, Liquids & Gas

» Storage

» Use – Closed Systems

» Use – Open Systems

H A Z A R D O U S P R O D U C T I O N M AT E R I A L S

Building Code (IBC)

» HPM LIMITS –

» H5 NanoFabs

• Hazardous Materials –

Maximum Allowable Quantities

» Solids, Liquids, Gas

• Gas Detection / Alarms

• Fire / Smoke Detection(Vesda)

» Not all Cleanrooms Must be

H Occupancy

d. The aggregate quantity of flammable, pyrophoric, toxic and

highly toxic gases shall not exceed 9,000 cubic feet at NTP.

F I R E C O D E S

Fire Codes ( NFPA)

» 13 - Automatic Sprinkler Systems and Standpipe Systems

» 10 - Portable Fire Extinguishers

» 30 - Flammable and Combustible Liquids Code

» 45 - Standard on Fire Protection for Laboratories Using Chemicals

» 55 - Compressed Gases and Cryogenic Fluids Code

» 72 - National Fire Alarm and Signaling Code

» 318 - Standard for the Protection of Semiconductor Fabrication Facilities

Mechanical & Electrical Codes

» Ventilation Systems

» Exhaust Systems

» Piped Liquids

» Drainage and Waste Systems

• Treatment Systems

» Power Supply

» Grounding

B U I L D I N G C O D E S

ANSI, OSHA

» ANSI/AIHA Z9.5 Laboratory Ventilation (American Industrial

Hygiene Association American National Standards Institute,

Inc.)

» OSHA Laboratory Standard - 29 CFR 1910.1450

• Occupational Health and Safety Standard for Laboratories using

Hazardous and Toxic Substances

» Insurance Requirements

O T H E R R E Q U I R E M E N T S

Semiconductor Incidents

Fire

Fluid Leaks

ServiceInterruptionMisc.

Explosion

» Over 2000 “Safety Incidents” in Semiconductor Fabs worldwide since

1977.

» Lives Lost

» Cost in the Billions

» Local environment degraded

» Many Codes have been in direct response to these incidents

» These Incidents Affect:

• Human Health = Workers

• External Environment = Good Neighbor

• Laboratory Facilities = Investment

W H Y B E C O N C E R N E D W I T H T H E C O D E S ?

W H O C A N H E L P Y O U ?

» Materials Suppliers

» Your Safety & Health Department

» Your Staff

» Architects

» Engineers

» Contractors

» Equipment Suppliers

V E N T I L AT I O N S Y S T E M S

» Pressurization

• Positive in cleanroom (to keep contamination

out) wrt corridor

• Negative in other types of labs handling

nanomaterials wrt corridor

• Negative in Biology labs wrt corridor

» Do Not Recirculate air if hazards exist

» Use directional airflow where possible

» Manage exposures with exhaust systems

» Exhaust Systems Used to

Maintain Negative Pressure

in Labs

» Capture & Containment

• Glove Box

• Powder-handling Enclosure

• Chemical Fume Hood

• Localized Snorkels

• Canopy Hoods

• General Room Exhaust

E X H A U S T A N D

C A P T U R E S Y S T E M S

A I R F I LT R AT I O N

» HEPA Filters on Exhaust

• Protect Discharge to Atmosphere

• Must Use Bag-In-Bag-Out Procedure

• Filters Must be Accessible for Maintenance

» Prefer No Recirculated Air, But Filter If There

is No Alternative

» Benchtops

» Chemical Fume Hood

C L E A N A B L E

S U R FA C E S

M AT E R I A L S S TO R A G E

» Provide Rooms for Chemical

and Gas Storage

» Secure Access Control

» Sealed Containers for Nanomaterials

» Labeling of All Materials is Critical

» Waste Storage and Disposal

» Verify That the Safety Systems

Designed Into the Building Work

» Critical Systems

• HVAC

• Exhaust

• Controls

• Chemical Fume Hoods

• Cleanroom

» Schedule Re-certifications –

Particularly Critical After

Renovations

C O M M I S S I O N I N G

A C A U T I O N

The best designed systems are Inadequate

when you have to deal with…..

P E O P L E

B U I L D I N G S A F E T Y - A D M I N I S T R AT I V E

» Lab Users’ Safety Procedures and Policies

» Personnel Responsibilities

» Behavior

» PPE

» Chem Hazards – Liquids and Gases –

» Spills, Exposures

» Electrical Hazards

» EHS Communication – Labels, MSDS, Training

» Alarms, (Manual and Auto Detections)

» Shut-downs – EPO’s

» Evacuation Procedures

B U I L D I N G S AF E T Y - AD M I N I S T R AT I V E

Operational

• Material Handling/Transport

» Corrosives, Toxics, Flammables, Explosives

» Nanomaterials

» Spills and Clean-up–Wet, Dry Materials

» Disposal

» Alarms and Evacuation Protocols

» Training

F O C U S O N N A N O M AT E R I A L S

Do We Deal with them Differently?

Risk Management Protocols (NIOSH, CDC)

National Institute for Occupational Safety and Health

Centers for disease Control and Prevention

N A N O M AT E R I A L S A F E T Y

1

Elimination

2

Substitution

3

Engineering

4

Administrative

5

PPE

Change design

to eliminate

hazard

Replace a high

hazard for a low

hazard

Isolation /

enclosure,

ventilation (local,

general)

Procedures,

policies,

shift design

Respirators,

clothing, gloves,

goggles,

ear plugs

Process, Equipment or Job Task

*Source: Based on Approaches to Safe Nanotechnology NIOSH

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N A N O M AT E R I A L S

Risk Management Protocols for Dealing with Nanomaterials

Is there a Nanomaterial Hazard?

What are the Materials?

What is the Potential for Exposure?

What are the Processes?

How can the Exposure be Controlled?

How will Emergencies be dealt with?

E X P O S U R E R I S K S

» Dock to Dump

• Receiving Materials (at the Dock)

• Generating nanomaterials in

non-enclosed systems

• Working with nanomaterials in liquid suspension

• Handling powders of nanostructured material

• Machining, sanding, etc. of nanomaterial solids

• Cleaning up spills

• Maintenance of fabrication equipment

• Cleaning of dust collection systems

• Building renovation projects

• Handling waste (proper Disposal)

WA S T E

Consider the Many Waste Streams

» Nanomaterials disposal

» Cleaning materials – wipes, vacuum filters, etc.

» Worker protective clothes, gloves

» Building systems filters

And How to Deal With Them

» Collect materials separately from standard waste

» Provide space to collect waste

» Procedure for disposal

B U I L D I N G S A F E T Y - E N G I N E E R E D

Designed-in Safety

» Risk Management Protocols (NIOSH, CDC)

• Identify the Hazard

• Assess the Exposure Potential

• Control the Exposure

E N G I N E E R I N G S O L U T I O N S

Building Systems – Similar to Other Hazards

» Ventilation Systems

» Exhaust Systems

» Special Capture / Containment Systems

» Cleanable Surfaces

» Room Pressurization

» Captured Waste Streams

» Safe Materials Storage Rooms & Containers

» Decontamination Facilities – Showers, Lockers, etc.

» Tacky Mats at Doors

A D M I N I S T R AT I V E C O N T R O L S

Operational

» Administrative controls can limit workers’ exposures

through techniques such as:

• Using job-rotation schedules that reduce the time an

individual is exposed to a substance

• Standard operating safety procedures

• General or specialized housekeeping procedures

• Spill prevention and control

• Proper labeling and storage of nanomaterials

• Employee training on the appropriate use and handling

of nanomaterials

P E R S O N AL P R O T E C T I V E E Q U I P M E N T

Operational

» (PPE)

• Gloves

• Goggles, Shields, Safety Glasses

• Shoe Types/Covers

• Materials Exposure Containments

• Respirators

H AV E A P L AN

All Nanomaterials Handling Should have a Work Plan

» A Written Plan

» Define the Materials

» Define the Process

» Identify Potential Risks

» Plan Control Strategies

» Implement Control Strategies

» Develop Procedures

» Training for Staff

» Plan for Emergencies

Don’t forget Visitors!

W H AT S H O U L D

U S E R S D O ?

» Prepare Your Emergency Management Plans!

» Be Involved in the Design and Operation of Your

Facility!

» Be Involved With the First Responders

» Understand the ‘Code Requirements’

U N D E R S TA N D T H E S A F E T Y F E AT U R E S

» Gas Monitoring and Automatic Shutoff Valves

• Manual Turn-ons Required

» PPE - locations and use

» Cleanroom Equipment Safety Features – Fire

Protection, Exhaust, Emergency Manual

Shut-offs

» Mechanical Air Systems – Supply and

Exhaust Systems – Emergency Operations

• Re-startup of Shutdown Systems – Power loss

» Electrical Systems – Emergency, Standby,

Dedicated, Conditioned, UPS

» Building Control Systems

S U M M A RY-

B E P R O A C T I V E

» Be involved in Facility Design and Construction

» Stay Involved on How the Facility is Supposed

to Operate

» Develop the Emergency Management Program

• Use Consultants if need be!

» Be involved in not just Safety Protocol Training

–but Code and NFPA Requirements also

» Be involved with EHS Departments and First

Responders–Policies, Processes, Procedures

TO M I S Q U O T E A N O T E D P U B L I C

O F F I C I A L …

L E T ’ S B E S A F E O U T T H E R E !

Mark Jamison, P.E.

Vice President

HDR Architecture

(402) 399-4908

T H A N K Y O U

safety in nanoscale science & engineering laboratory buildings

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