reflectivity & amorphous
TRANSCRIPT
Reflectivity & Amorphous
Amorphous Materials
Periodic arrangement of atoms causes destructive interference in all directions except those predicted by Bragg’s law.
The measurable diffraction occurs at non-Bragg angles only when crystal imperfections are present.
Amorphous materials do not show long-range order. They exhibit short-range order: statistical preference of a particular interatomic distance.
Amorphous Materials
Consider our sample as any form of matter in which there is random orientation.
This includes gases, liquids, amorphous solids, and crystalline powders.
The scattered intensity from such sample:
rmnf
s – s0
s0 s
n
i
nm
mn
i
nm
m
n
i
n
m
i
m
mnmn
nm
effeffI
efefI
rqrss
rssrss
0
00
2
22,
where
nmmn rrr takes allorientations
)(2
0ssq
Amorphous Materials
Average intensity from an array of atoms which takes all orientations in space:
rmnf
s – s0
s0 s
,sin
n mn
mnnm
m qr
qrffI where
Debye scattering equation
sin4q
It involves only the magnitudes of the distances rmn of each atom from every other atom
Bragg’s law
Polyatomic Molecules
Consider gas of polyatomic molecules.
Gas is not too dense – there is complete incoherency between the scattering by different molecules.
Intensity per molecule:
Lets take a carbon tetrachloride as example.
It is composed of tetrahedral molecules CCl4.
Then:
Rqr
qrffNI
n mn
mnnm
m
sin correction
factor
ClCqr
ClCqrf
ClCqr
ClCqrfff
ClCqr
ClCqrfffNI
ClCClCl
ClCC
sin3
sin4
sin4
CCl4
Polyatomic Molecules
For tetrahedral CCl4 molecule:
The intensity depends on just one distance r(C – Cl).
Peaks and dips do not require the existence of a crystalline structure.
Certain interatomic distances that are more probable than others are enough to get peaks and dips on the scattering curve.
ClCrClClr 3
8
Intensity (in e.u. per molecule) for a CCl4 gas in which the C – Cl distance is r = 1.82 Å. (Warren)
RClCqr
ClCqrf
ClCqr
ClCqrffffNI
Cl
ClCClC
sin12
sin84
2
22
Å82.1ClCr
Crystal as Molecule
Lets treat crystal as a molecule
FCC has 14 atoms:
8 at corners of a cube
6 at face center positions
a is the edge of a cube
Rqr
qrffNI
n mn
mnnm
m
sin
3
3sin8
2
2sin24
5.1
5.1sin48
sin30
2
2sin72142
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qa
aq
aqNfI
qa
Amorphous Materials
Atoms in liquids and amorphous solids have definite structures relative to an origin at the center of an average atom.
This type of structure is expressed by a radial distribution function:
We use the equation:
It can be shown that the scattered intensity can be written as:
rr 24
drrr 24 – average number of atom centers between distances r and r + dr from the center of an average atom
n mn
mnnm
m qr
qrffI
sin
dzzAedzzAefdrqr
qrrrNfNfI ikzikz2
0
2
00
222 sin4
interaction between distant neighbors
interaction between near neighbors not negligible only for
very small angles
Assumption: Sample takes with equal probability all orientations in space
Amorphous Materials
We obtain very important and much used equation:
For solids:
4r 2(r )dr – average number of atom centers between distances r and r + drfrom the center of an average atom.
For liquids:
4r 2(r )dr – average over surroundings of each atom in the sample and also an average over the time of measurement.
0 20
22 sin12
44 dqrqNf
Iq
rrrr
0 – average atom density per sample can be obtained experimentally from the scattering curve
Experimental determination of 4r 2(r )
Previous expressions apply only to coherent (unmodified) scattering.
Many corrections are required:
correct for air scatter
correct for absorption by sample
correct for polarization
correct for incoherent (Compton-modified) scattering – requires conversion to absolute (electron) units
RDF determination requires high-quality data at large q (small r ).
Example: Liquid Sodium
We obtain :
(a) Total intensity curve for liquid Na unmodified + modified, (b) total independent scattering per atom, (c) independet unmodified scattering per atom f 2, (d) modified scattering per atom i (M ). (Warren)
c
ba
c
cda
Nf
fI
Nf
Iqi
2
2
21
12
Nf
Iqi
Example: Liquid Sodium
Experimental curve qi(q) for liquid Na. (Warren) (a) RDF 4r 2(r ) for liquid Na, (b) average density curve 4r 20(r ), (c) distribution of neighbors in crystalline Na. (Warren)
0
0
22 sin2
44 dqrqqiqr
rrr
Example: Carbon black
(a) Final scattering curve of carbon black, theoretical independent scattering curves: (d) coherent, (c) incoherent, and (b) total independent scattering.
What is Carbon Black?
Carbon black is made primarily from a petroleum-based
feedstock. The oil is pumped into a specially designed
furnace, where it is heated above 2,000° F. This process
"cracks" the oil to produce a gas stream laden with carbon
black powder. The gas stream passes through a series of
filters, where the carbon black is separated from the gases.
The carbon black powder then is bound with water to create
larger beads or granules, which are passed through a dryer
and packaged for delivery to customers in every part of the
world.
Actual measurement
Example: Carbon black
Plot of the experimental amplitude function S i(S) for carbon black
RDF of carbon black
X-ray Reflectivity
X-ray reflectivity is a precise and non-destructive method used to determine the layer thickness, density and roughness of a layer on a substrate.
11
2
refracted beam
incident beamreflected beam
n1 – air
n2 – sample
Sample
Air
X-ray Reflectivity
An X-ray-beam that strikes a solid-surface at a small angle (0-2°) is totally reflected.
Above the critical angle of total reflectance c the beam penetrates the sample, whereby the angle of refraction 2 is smaller than the angle of incidence 1 (the refractive index of X-rays in solids is smaller than that in air).
The refractive index for X-ray radiation is given by the formula:
According to Snell´s law of refraction:
1nn – refractive index, – term, that specifies the dispersion of the x-ray beam.
1
2
122211 coscoscoscos
n
nnn
if n1 – index of refraction of air ~ 1n2 – index of refraction in solid < 1 then 12
X-ray Reflectivity
Below critical angle total reflection occurs:
The density of the sample can be calculated from the critical angle and using the following equation:
j
jj
j
jA fZA
rN
2
2
02
222
12221
2
221arccos
11cos0coscos
0
C
CC nnnn o
o
since
then
NA – Avogadro-Numberr0 – classical radius of an electron – wavelengthj – density of the atom j in the compoundAj – atomic mass of the atom jZj – atomic number of the atom jf‘j – correction factor for the dispersion for the atom j
Incident angle (deg)
21.91.81.71.61.51.41.31.21.110.90.80.70.60.50.40.30.20.10
Inten
sity (c
ounts
/s)
0
1
10
100
1,000
10,000
100,000
1,000,000
X-ray Reflectivity
Reflectivity curve for Si
critical angle
beamprimarytheofIntensity
beamreflectedtheofIntensityR tyReflectivi
X-ray Reflectivity from Thin Layers
If the sample contains a thin layer, x-rays are reflected from the air/layer as well as from the layer/substrate interfaces.
11
2
incident beamreflected beam
n1 – air
n2 – layer
Samplen3 – substrate
t
A
B C D
path difference: BCD
Incident angle (deg)
21.91.81.71.61.51.41.31.21.110.90.80.70.60.50.40.30.20.10
Inte
nsity
(cou
nts/
s)
0
1
10
100
1,000
10,000
100,000
1,000,000
X-ray Reflectivity from Thin Layers
Positions of the maxima can be calculated using Bragg’s law:
222 sin2sinsin tttCDBCnL
SiO2/Si
B DC
1
2t
X-ray Reflectivity from Thin Layers
Some simplifications and approximations:
2sintCDBC
B DC
1
2t
if is small sin
using Snell’s law of refraction (n1 ~ 1):
221221 cos1coscoscos n
2
2
1
2
12
2
12 2
1
cosarccos
1
coscos
2
2
12 2
2
2
12 22sin2 ttnL
2
2
2
2
1 24
nt
y = a x + b
Incident angle (deg)
0.50.40.30.2
Intensi
ty (cou
nts/s)
5,000
50,000
500,000
Example: Si on Ta
2
2
2
2
1 24
nt
y = a x + b
4 6 8 10 12 14 16 18 20
Example: Si on Ta
0 4 6 8 10 12 14 16 18 20
0.1
0.2
0.3
0.4
0.5
n
1
(de
g)
2
2
2
2
1 24
nt
y = a x + b
a
b
a
b
2
4
222
2
0
2
2
2
02
t
fZrN
A
t
fZA
rN
A
A
NA – Avogadro-Numberr0 – classical radius of an electron – wavelengthj – density of the atom j in the compoundAj – atomic mass of the atom jZj – atomic number of the atom jf ‘j – correction factor for the dispersion for the atom j
We get:
t = 181 nm = 2.2 g/cm3
X-ray Reflectivity from Thin Layers
Vladimir Kogan, PANalytical
Incident angle (deg)
3.83.63.43.232.82.62.42.221.81.61.41.210.80.60.40.2
Inten
sity (
coun
ts/s)
0
1
10
100
1,000
10,000
100,000
X-ray Reflectivity: Simulation
Reflectivity can be calculated completely using Fresnell equations
2
4
21
4
21
22
22
1
ti
ti
eRR
eRRR
Simple version for substrate + one layer
R1 and R2 reflectivities of air/layer and layer/substrate interfaces:
2
221
24
21
21
eR
– surface roughness
PbTiO3/SrTiO3
Incident angle (deg)
3.83.63.43.232.82.62.42.221.81.61.41.210.80.60.40.2
Inten
sity (c
ounts
/s)
0
1
10
100
1,000
10,000
100,000
X-ray Reflectivity: Roughness
PbTiO3 on SrTiO3
Calculation with roughness = 0
Measured Reflectivity
X-ray Reflectivity: Roughness
Smooth surface Rough surface
X-ray Reflectivity: Roughness
Reflectivity of water
Braslau et al. Phys. Rev. Lett. 54 114 (1985)
Fresnel Reflectivity
Measured Reflectivity
Difference between experiment and theory due to roughness
Incident angle (deg)
3.83.63.43.232.82.62.42.221.81.61.41.210.80.60.40.2
Intensi
ty (cou
nts/s)
0
1
10
100
1,000
10,000
100,000
X-ray Reflectivity: Density
PbTiO3 on SrTiO3
Overestimated density
Measured Reflectivity
X-ray Reflectivity: Density
PbTiO3 on SrTiO3
Densities are similar
Incident angle (deg)
3.83.63.43.232.82.62.42.221.81.61.41.210.80.60.40.2
Inten
sity (c
ounts
/s)
0
1
10
100
1,000
10,000
100,000
X-ray Reflectivity: Thickness
PbTiO3 on SrTiO3
Overestimated thickness
Measured Reflectivity
X-ray Reflectivity: Fitting
PbTiO3 on SrTiO3
Incident angle (deg)
3.83.63.43.232.82.62.42.221.81.61.41.210.80.60.40.2
Intensi
ty (cou
nts/s)
0
1
10
100
1,000
10,000
100,000
X-ray Reflectivity: Simulation
Self-Assembled Monolayers C18H37SH on Au
Vladimir Kogan, PANalytical
Specular Reflectivity Curve Reflectivity Map, Diffuse Scattering
Determined thickness of the layers:C18H37SH - 1.6nmAu1 - 0.6nmAu2 - 19.0nmSi > 100,000nm
Determined:Average Lateral Correlation Length: 2.5nm
X-ray Reflectivity
10 X (D1 1nm + D2 1nm)10 X (D1 2nm + D2 2nm)
10 X (D1 10nm + D2 10nm) 25 X (D1 2nm + D2 2nm)
X-ray Reflectivity25 X (D1 2nm + D2 2nm)
25 X (D1 2nm + D2 2nm)+ Roughness
1 - D1 2nm
2 - D2 5nm
3 - D1 3nm
4 - D2 15nm
5 - D1 25nm
6 - D2 7nm
7 - D1 14nm
8 - D2 6nm
9 - D1 3nm
10 - D2 11nm
11 - D1 14nm
12 - D2 5nm
Multilayer
X-ray Reflectivity
Small Angle Scattering
Using 2D detector
Epitaxial Layer
Structure
Epitaxial Layer
Structure
Thin Filmsepitaxial
polycrystallineamorphous
Rocking Curve
Analysiswith high resolution
optics
Reciprocal Space Mapsusing triple-axis analyzer
Reflectometry and thin film
phase analysiscomposition, layer
thickness and interface quality
SchematicSample
Schematic Beam Path Applications Example
In-plane diffractionfrom very thin films.
Depth sensitivity
Phase analysis and
Omega-stress
with Bragg-Brentano geometry
Phase analysis and
Omega-stress
with parallel beam optics
Very thin films
Polycrystalline material. Flat
surface
Polycrystalline material.
Rough surface
SchematicSample
Schematic Beam Path Applications Example
Very small sample. Spot on a sample
Solid sample
Psi-stress and texture
analysisusing point focus with lens and
parallel plate collimator
optics
Spot analysis on small and
inhomogeneous samples
using mono-capillary optics
SchematicSample
Schematic Beam Path Applications Example