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Recipe Management Experiences
Recipe Management Experiences
Lance Rist / ISMI
Austin, Texas
Advanced Materials Research Center, AMRC, International SEMATECH Manufacturing Initiative, and ISMI are servicemarks of SEMATECH, Inc. SEMATECH, the SEMATECH logo, Advanced Technology Development Facility, ATDF, and the ATDF logo are registered servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.
Improved Recipe ManagementImproved Recipe ManagementRaP capability represents a fundamental improvement
in factory automation
• ISMI has driven the development of this new recipe management capability
ISMI Member Company inputOpen input through standards process
• RaP Standard - SEMI E139Recipe and Parameter Management has been approved
• Successful PrototypingRaP “Accelerated Learning” prototype completedRoth & Rau commercial prototype completed
• Commercial Implementations Becoming AvailableSemitool Raider Platform demonstrated
• CollectCollecting data has long been a priority in Automation StandardsThe “EDA” effort has improved this capability significantly
• AnalyzeAnalysis and decision making takes place off-tool in this contextThis is an area where device makers seek competitive advantage
• ActThe “300mm” standards made remote equipment operation feasibleRecipe management is the missing link
This neglected area represents opportunity
Controlling The EquipmentControlling The Equipment
The Problems With RecipesThe Problems With Recipes• Recipes on equipment can change without notice
We can’t trust the recipes on the equipmentWe must download recipes over and over again
• Inadequate parameterization requires us to:Manage many nearly identical recipesNeglect some process control for lack of parameters“Hack” recipes to make changes (then download – again)
Recipes in-use are sometimes overwritten
• Multi-part recipes are not adequately supportedThey are necessary for multi-chamber equipmentWe cannot verify correct components will be used
• We can’t be sure exactly what happened during a jobTraceability is weak or non-existentMulti-part recipes and parameter values increase issue
Factory Goals & OpportunitiesFactory Goals & Opportunities$ Recipe Content Trusted
Guarantee that the recipe on the equipment is exactly the one the factory approved/downloaded/selectedDownload only once
$ Process Control EnhancedUser defines which settings become job parameters and when during processing they will be used
$ Number of Recipes ReducedIf they are parameterized, fewer recipes are needed
$ Multi-Part Recipes Explicitly Supported Enabling a practical method for reuse of recipe componentsEnsuring all needed recipe components are available
$ Traceability of Recipes EnabledUnique identifiers assigned to recipe components (and parameter values) are reportable via events
With RaP, equipment can support new, sophisticated host-side recipe management systems
Improved ConfidenceImproved ConfidenceThe right recipe will be used at the right time and
produce the expected results• The recipe identity is assured
Secured by the uuid* and checksum• The recipe is valid
Supported by a detailed verification process• The correct subcomponents are used
Multi-part recipe resolution supported
*universally unique identifier (ISO/IEC standard)
Parameterization OpportunitiesParameterization OpportunitiesThere are many sources for parameter values
• Five examples (there could be more)Feedback control
Run-to-run, wafer-to-wafer, downstream data
Feed forward controlProduct history, upstream data
Equipment matching supportRecipes shared between like equipment
Recipe mergingFor similar processes
Runtime optionsDiscrete choices
– For example: select which chamber to use
• Make a record of what happenedWhich job was run on what material?
Which wafer at what step?What PDE was used?What parameter values were used?
– Note that the supplied values may change wafer-to-wafer and step-by-step
• Traceability enables run-time flexibilityMore sophisticated processing requires this flexibility
Multi-part recipes, complex flowsRun-to-run or wafer-to-wafer control…
TraceabilityTraceability
RaP Standards TimelineRaP Standards Timeline• 2004
E139 RaP Standard ApprovedE139.1 Recipe Transfer Form Approved
• 2005RaP “Accelerated Learning” PrototypeE139 Amended Based Upon Learnings
• 2006E139.2 SECS Protocol Mapping ApprovedRaP Commercial PrototypeInvitation to Demonstrate RaP
Two production equipment have demonstrated RaP capabilities
Commercial RaP Prototype
Phase 1
Commercial RaP Prototype
Phase 1
e-Manufacturing
IntroductionIntroduction• Recipe and Parameter Management (RaP)
This segment discusses the results of an ISMI project to demonstrate RaP on a commercial tool in a factory environment
Our results represent the cooperation of five companies to pioneer this new approach to recipe management
AIS Automation-Dresden, Infineon, Roth & Rau, Siemens, and ISMI
• Fundamental DifferenceRaP capability represents a fundamental difference in factory automation
This project demonstrates the commercial viability of this new capability
RaP Commercial PrototypeRaP Commercial PrototypeTask: Demonstrate RaP in a factory environment
• ISMI worked with AIS-Dresden to implement RaP on a commercial tool
Roth & Rau IonScan 800 was the selected toolThis is a 200 mm wafer etch toolConfigurations can include one or two process chambers
Siemens provided tools and consulting support
• Infineon contributed the Recipe Management System Goal was to integrate this RaP-enabled tool with the Infineon Recipe Management System
Seeking the recipe integrity benefit as first stepRecipe parameterization was left for a later step
Project ResultsProject Results• This project spanned ~3 months
Development time: 4.5-5 person-months• The result was demonstrated
In an Infineon factory On an installed IonScan 800Using the Infineon Recipe Management System
This prototype implementation was successful!
Approach – Development StepsApproach – Development Steps• RaP communication functions
Develop RaP communication objectIntegrate the RaP communication object into ToolLink
• RaP-compliant recipe managementAdapt the existing recipe editors and recipes
• Adaptation of existing recipe execution Integrate RaP parameters into process execution
• Integration of an off-tool recipe managementCell Controller representing the FICS
FICS ➙ Factory Information & Control SystemInfineon Recipe Management System
Prototype modification to support RaP
• Equipment ↔ FactoryThe existing SECS/GEM I/Fprovided base communications
• New Messages For RaPAdding new RaP Stream 19 messages was easily done
• Used Existing “Data Set Transfer”Stream 13 supports Data Set Transfer for large files
• Cell Controller ↔ Recipe ManagerStandard Infineon protocol for interfaceInfineon created a wrapper for existing Recipe Manager
Masked differences in RaP recipesNo real issues in this integration
RaP CommunicationRaP Communication
EQUIPMENTRECIPE EDITOR
FICS
Cell Controller
Recipe Manager
Data BaseAPC
settings history
RaP Y
Z
Key RaP ConceptsKey RaP Concepts• RaP adds to the recipe
Human and machine readable recipe headerChecksum protection for recipe contentUser selected parameters
• Transfer container optimizes recipe transfer
Provides for .zip compression
PDE (= Recipe Component)PDEheader
<<Documentation Part>>• Name• UID• GroupName• GID• Description• …
PDEbody<<Executable Part>>
Content is not specifiedand may be kept private
• Target Equipment• Antecedents• PDE References• External Parameters• User Info
PDEPDEPDE PDEbodyPDEbodyPDEbody
Manifestuid PDE PDEbody Locationxxx abc.xml abc.dat \productionyyy mno.xml <none> \maintenance…
VariableParameterso PDEparam1o PDEparam2
o etc…
PDE
PDE PDE
PDE PDE PDE
PDE PDE
Process Job
Master PDERCPSPEC/PPID
ProcessModule A
ProcessModule B
• User selects Variable Parameters during recipe creation
Adaptation Of Tool RecipesAdaptation Of Tool Recipes• Use the existing recipe
The recipe will be used as the recipe bodyNo change necessary or desired for execution
• Make the recipe format compliant to RaPRaP defines only additional data to describe the recipeUID will be added to each recipeVersion number added
– Merged with name to aid management
New recipes to include parameters and bounds
PDE
Body
+ UID, + Bounds…
ExistingRecipe
Header
ExistingRecipe
Adaptation Of Tool Recipe MgmtAdaptation Of Tool Recipe Mgmt• Necessary changes for tool recipe management
Global unique identifier for identification Database had to be changed
PDE Header Data, Additional body parameter
• Change the existing editorSome input fields must be added
For the PDE header dataEach time the PDE is changed a new UID will be created and the recipe version number will be increased (new PDE)Should all parameters be externally changeable?
Not definitely: Review carefully – this depends on the toolHowever, be open minded – parameter control is expanding rapidly
• Never change a running system?The recipe execution was not changedNecessary changes were done in execution preparationBe careful to guarantee the functionality of the tool
• Integrate the PDE parameter functionalityCopy the recipe into a special execution environmentMerging the parameter into the recipe copy
Adaptation Of Recipe ExecutionAdaptation Of Recipe Execution
HOST
EQUIPMENTSelection Logic
PPSelect: PDE Map, PDE Parameter
RecipeStorage
ExecutionStorage
Merge
Recipe Executor
1.
2.
3.4.
5.
6.
Cell Controller
Commercial RaP Prototype
Phase 2XML/SOAP Interface
Demonstration
Commercial RaP Prototype
Phase 2XML/SOAP Interface
Demonstration
e-Manufacturing
Phase 2 AdditionsPhase 2 Additions• XML Messaging
Builds on EDA standard approachProvides working example as basis for SEMI standard
Ballot for XML mapping anticipated later this year
• Off-tool Recipe EditorStandard interface allows editor to exist anywhere on the factory network
Can connect to the tool or to the factory RMSInterface support first step towards universal recipe editor
• Completed Recipe Integrity ImplementationImplemented checksum and canonicalization process
The XML AdvantageThe XML Advantage• Equipment control
over SECS continuesNeeds basic RaP messaging
• Secure transport addedSame technology as EDARecipe content protected
• Multiple clients allowedEquipment Recipe Store management could migrate to a separate client
Move from “job setup” to “look-ahead”
Off-tool editors are clients
EQUIPMENT RECIPE EDITOR
FICS
StationController
Recipe Manager
Data BaseAPC
settings history
SECS XML XML
XML
RaP Prototype DemonstrationAvailable Upon Request
RaP Prototype DemonstrationAvailable Upon Request
e-Manufacturing
Prototype ConclusionsPrototype ConclusionsWhat did we learn?• RaP can be implemented on a real tool
Impact on the tool is manageable• The value-to-effort ratio to add RaP to a tool is high
Less than 5 person-months development effort for SECS-IICan be even less (~2 person-months) with use of a third-party product
• A RaP-enabled tool can be integrated with an existing recipe management system
Realizing some factory-side RaP benefits can be done quicklyAdditional benefits can be phased-in
• XML messaging offers advantagesEquipment can handle job-oriented inquiries via SECS while transferring recipes over separate XML connectionOff-tool recipe editors can seamlessly connect to any appropriate RaP-enabled recipe store
Factory, equipment, or even other editors
Additional RaP-enabled EquipmentAdditional RaP-enabled Equipment• ISMI has created a supplier opportunity
See our “Invitation to Demonstrate RaP”http://ismi.sematech.org/emanufacturing/prototype.htm
Reference implementation expected in 2007This will enhance our ability to assist/assess suppliers
• Semitool demonstrated RaP-enabled equipment to ISMIOctober 2006
• Semitool Raider PlatformUsed for their single-wafer clean and electrochemical deposition (ECD) tools
• Commercial AvailabilityExpected early 2007Batch tools ~mid-2007
RaP Implementation AssistanceRaP Implementation Assistance• ISMI has published a new Guidline document
To assist suppliers’ RaP implementationsRequirements
Emphasize key requirementsClarifications (might ➔ shall)Additional Requirements
Documents Operational ScenariosCommon tasks of Device MakersError handling considerations
Provides Implementation AdviceFrom implementation experiences
Download from:http://ismi.sematech.org/docubase/abstracts/4801aeng.htm
• Other questions: Industry ForumsRaP Forum now available
See Equipment Integration and Automation Standards Discussionhttp://ismi.sematech.org/emanufacturing/forums.htm
Device Maker ReadinessDevice Maker Readiness• Factories are highly “risk averse”
No one wants to be first to use new technology“Prove it works, then we will consider it”
• Device makers must sell technology internallyCompany strategists say “This will bring us value”
Supports creation of new capability like RaP
Factories say “Prove it in the other factory”
• Move to RaP must be supportedTransition planRaP-enabled factory systemsWorking examples – proof it works
Next StepsNext Steps• 2007 focus for RaP is device maker readiness
Expect first pilot factory installationsShow how factory can leverage equipment support for RaP
Common requirementsFactory recipe management systems (RMS)
Transition strategies
• Continue to encourage supplier implementationInvite more suppliers to demonstrate RaP
Leverage 3rd-party software suppliers
Create reference implementation
RaP is Ready The Industry Is ReadyRaP is Ready The Industry Is Ready• At SEMICON Europa 2005, STMicroelectronics:
“RaP is a key component to the realization of a Centralized Recipe Management solution”“New Paradigm: Managing all human configurable data taking part in the process repetition"
• At SEMICON West 2005, AMD:“We have gone to great lengths to work around the limitations of GEM-style recipe management”“We are all about process control, and RaP will enable more sophistication”“We are requesting RaP now”
• At AEC/APC Europe 2006, Infineon:“We intend to deploy RaP into factory operation late 2006”
• At ISMI Symposium 2006, 300 Prime/450 mmPresentation cites RaP as low risk “Small Evolution”solution for existing fabs
RaP is Recognized as Providing Productivity Gains
Final ConclusionsFinal Conclusions• RaP is rapidly maturing as a factory capability
Prototyping shows readiness for implementationAt least one Device Maker is ready to deploy RaP3rd party support for equipment implementation is available
• In the next year, the growing interest in a maturing RaP is expected to yield more and more implementations
ISMI will continue to assist RaP implementersFor example, see our “Invitation to Demonstrate RaP”
– http://ismi.sematech.org/emanufacturing/prototype.htmIn 2007, we transition to assist host-side implementations
ISMI publishes guidance to assist implementersRaP Supplier Implementation Guidelines available
– http://ismi.sematech.org/industry/emanufacturing.htm2007 work will yield more shared learnings and collective direction
Now is the time to place RaP on your roadmap!
Supplemental MaterialsSupplemental Materials
e-Manufacturing
All Clipart Copyright © 1998 Corel Corporation and its licensors. All rights reserved.The AIS symbol is the trademark of AIS Automation Dresden; the Siemens symbol is the trademark of Siemens AG; the Infineon symbol is the trademark of Infineon Technologies AG; the Roth & Rau symbol is the trademark of Roth & Rau AG.
PrototypeAcknowledgements
PrototypeAcknowledgements
• AIS Automation DresdenPrime Contractor and Developer
Organized the CooperationVAC NT/32 Automation platform
• Infineon & QimondaFactory System / Recipe ManagerAccess to Factory for Integration
• SiemensToolLink Integration ProductConsulting & Support
• Roth & RauAccess to Ion Scan Control SoftwareAdvice and Cooperation
Thanks to the many contributors:
RaP Unique IdentifierRaP Unique Identifier• Unique identification for each recipe
Each recipe is tagged with a unique identifier (uid)Based on ISO standard defining “uuid”The uuid value is guaranteed unique – regardless of source
Different recipes have a different uidname not a unique identifier – user definedRaP does not define a “Version” – left to Recipe ManagerA checksum over recipe contents ensures integrityCorrect recipe can be used with certainty
Process history can be expressed in terms of uid’s
44BBA855-CC51-11CF-AAFA-00AA00B6015C
Recipe
Transfer ContainerTransfer Container
• TransferContainer bundles PDEs for transfer
Optimizes the transfer process
Supports compression
Can be used to group related PDEs
TransferContainer
PDEPDEPDEPDEbodyPDEbodyPDEbody
Manifestuid PDE PDEbody Locationxxx abc.xml abc.dat \productionyyy mno.xml <none> \maintenance…
Transition To RaPTransition To RaP• Existing recipes can be preserved (in many cases)
Original recipe can be maintained as a separate (nearly unchanged) “opaque” entityPDE can act as a descriptive wrapper on the original recipeExecution on equipment may not need to changeEquipment recipe management must adjust to new structures
• Communication services very similar to current onesPull or push recipes, directory, verify, delete (add get-header)
• Within the context of E40:Define the name to be used in the RCPSPEC field of Stream 16 SECS II messagesDefine the name to be used in the RCPPARNM field of Stream 16 SECS II messages
Prototype Integration ChallengesPrototype Integration Challenges• Interaction between the new RaP Stream 19 and the
old Stream 13 (Data Set Transfer)Existing Stream 13 object was dedicated to a different useImplemented on tool and cell controller
• Adaptation of existing equipment recipe managementWrapping of existing recipes
• PDE Parameters need input fields to define boundariesExtension of recipe editor for PDE header dataAdditional recipe body data
• Add PDE Parameters without changing executionMust resolve parameter values before the recipe is executed
• Infineon Recipe System required an adapterMust mask recipe header data from the main system