panasonic confidential oursolutions,yourvalue 1...fcb3 full auto psx30 f&k stm6 stm6 ir s t e r...
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![Page 1: Panasonic Confidential OurSolutions,YourValue 1...FCB3 Full Auto PSX30 F&K STM6 STM6 IR S t e r e o Cure Moni Oven Cure VACOven Pack VAC Pack Dry Box Cupboard Cupboard Shear Test Chair](https://reader036.vdocuments.site/reader036/viewer/2022071418/6115c3b50b90d574733e899c/html5/thumbnails/1.jpg)
Our Solutions,YourValue 1Panasonic Factory Solutions Co., LTD. Panasonic Confidential
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Our Solutions,YourValue 2Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Main Fraunhofer Gesellschaft building Hansastr. 27c / entrance with main Foyer
OurMicroelectronicTechnology Center
Panasonic M-TeCe
Main Fraunhofer IZM (Munich) building Fraunhofer IZM (Munich) lobby Opening Panasonic M-TeCe
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Our Solutions,YourValue 3Panasonic Factory Solutions Co., LTD. Panasonic Confidential
As of 21st May, 2007
Tuesday 15th of May10:00 10:15 Official Tape Cutting Ceremony (IZM Lobby GF)10:15 10:45 Introductory Words by Panasonic (2nd floor 2.44)
PFSC President Factory Solutions: Mr. Kanzaki (5 min)PFSC Director Microelectronics: Mr. Neal Okuda (20 min)PFSE Sales Microelectronic Europe: Reinhard Windemuth
10:45 - 11:15 Introductory Words by Fraunhofer IZM :Prof. Dr.-Ing. Dr. E.h. Herbert Reichl (15min)Dr.-Ing. Karlheinz Bock (15min)
11:15 12:00 Small tour to Panasonic Microel. Tech. Center (1st floor 1.15 / 1.19)
12:15 13:30 Lunch (Fingerfood buffet) in Cafeteria (1st floor)14:00 15:00 Technical presentations in seminar room (2nd floor)
(Plasma Cleaning, Thermosonic Gold to Gold Interconnect GGI, Flipchip)
15:00 17:00 Explain Technology & Equipment (room 1.15)
Wednesday 16th of May9:30 h - 16:00h Technical Workshop
Agenda of official opening
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Our Solutions,YourValue 4Panasonic Factory Solutions Co., LTD. Panasonic Confidential
M-TeCe Laboratory
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Our Solutions,YourValue 5Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Tape cutting ceremony:Dr. Bock; Dr. D.Lang; Prof.Dr.Dr. Reichl; Mr. Kanzaki; Mr. Okuda; Mr. Kawase
Opening Ceremony
Prof. Dr. Dr. Reichl / Mr. Kanzaki
Shake hands
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Our Solutions,YourValue 6Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Opening speaches
Dr. BockMr. Kanzaki / Mr. Sato Prof. Dr. Dr. Reichl
Mr. Okuda Audience
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Our Solutions,YourValue 7Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Panasonic Laboratory
Further Pictures
Lunch buffet
Fraunhofer IZM cleanroom
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PFAE Intro_E (G1M)
www .Panasonic-industrial.com
Panasonic ideas for lifePanasonic Factory Solutions Co., LTD. Our Solutions,YourValue 8Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Reference
1 m2
Possible Area For Extension
FCB3Full Auto
FCB3Full Auto
PSX303PSX303
F&K
STM6STM6
IR
Stereo
MonitorCureOven
CureOvenVAC
Pack
VACPack
DryBox
CupboardCupboard
ShearTest
Chair
Chair
Chair
TableTable
Panaboard
TableTable
0,73
Chair
Chair
RoomL1.15
M-TeCe Floor Plan
Main equipment List:Panasonic Plasma Cleaner PSX303
Panasonic Flipchip Bonder FCB3
Stereo microscope Olympus SZX10
High resolution measurementmicroscope Olympus STM6
IR microscope Olympus BX51
Sheartester Dage BT24
Pulltester / Wirebonder / Bumper: F&K 5610
programmable oven: Binder
Vacuum packing unit: Komet Vacuboy
Granit table: TMC
Keithley Multimeter + Multiplexer: Type 2700
Contact angle measurement: Krüss
Nitrogen cabinet with humiditycontrol
Low temperature Refrigerator -50°C
High Speed industrial PC for datacollection
PlasmaCleanerPSX303
FlipchipBonderFCB3
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Our Solutions,YourValue 9Panasonic Factory Solutions Co., LTD. Panasonic Confidential
FCB3 Flip Chip Bonder
FC Technology: High Flexibility
High accuracy : Chip Placement +/-3µm at 3sigma
UPH: 2000 components / hour (1,8 sec dry cycle)
Process: Thermosonic & Thermocompression
Bond Force: up to 490N
Substrate Size: 50 x 50 mm to 320 x 250mm
Supply Method: 12 wafer, Tray 2 & 4
Chip Size: 0,3 mm to 20 mm sq.
Dipping option: Flux and Ag Paste transfer
Ultrasonics: 60KHz, 0.01sec increments
Footprint: 1.65m x 1.38m
Apps.O2: Med I/O (to 100 pins) (CMOS Image Sensor, HB-LEDs, Memory)
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Our Solutions,YourValue 10Panasonic Factory Solutions Co., LTD. Panasonic Confidential
PSX303-MR Plasma Cleaner
Technology: In-Line Parallel Plate Plasma Cleaner
Gas : Argon (etching); Oxygen (surface modification)
UPH: 360 (Ar gold etching 5nm)
Cycle Time: Typically 30 seconds ,Ar etching
Substrate Size: 50x20mm to 250 x 270mm
Substrate thickness: 0.1mm to 2mm
RF Generator : 13.56Mhz, up to 600W
Footprint: 1.67m x 1.0m
Vacuum Chamber: down to 3 pascals
Argon: Au bond pad cleaning, Thin gold etching,
Oxygen: Underfill, mold adhesion on organics
Gas Flow Rates (typically): Ar 5ml/min, O2 100ml/min
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Our Solutions,YourValue 11Panasonic Factory Solutions Co., LTD. Panasonic Confidential
PFSEEurope2007
PFSCJapan1980
PFSAUSA2006
PICSSingapore
2006
Techology Centers Worldwide
FactoryDemo Lab
Sales
Demo LabSales
Demo LabSales
Demo LabSales
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Our Solutions,YourValue 12Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Please contact for further info:
Dipl.-Ing. Reinhard Windemuth(Sales Manager Microelectronics Europe)
Panasonic Factory Solutions Europea Division of Panasonic Industrial Europe GmbH
Hans-Pinsel-Straße 2D-85540 Haar
Tel.: + 49 (0) 89 / 46159 365Mobile: + 49 (0) 173 / 6 259 225
Fax: 49 (0) 89 / 46159 - 260e-mail: [email protected]