msc eth in micro and nanosystems

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Electronics / Electrical Engineering Mechanical Engineering Materials, Surfaces and Properties Modeling and Simulation Devices and Systems Energy Conversion and Quantum Phenomena Materials Physics, Chemistry, Biology Product Development and Innovation Management MSc ETH in Micro and Nanosystems An educational program that can cope with the challenges of a fast changing industrial and academic environment Jointly offered by D-MAVT and D-ITET

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Electronics / Electrical Engineering

MechanicalEngineering

Materials, Surfacesand Properties

Modeling and Simulation

Devices andSystems

Energy Conversionand

Quantum Phenomena

MaterialsPhysics, Chemistry, Biology

Product Developmentand Innovation Management

MSc ETH in Micro and NanosystemsAn educational program that can cope with the challenges of a fast changing industrial and academic environment

Jointly offered by D-MAVT and D-ITET

[Source: www.apple.com]

http://idw-online.de/de/image?id=64000&display_lang=de_DEhttp://www.tms.org/pubs/journals/JOM/0311/Byko-0311.html

[Source: Sensimed]

http://www.memsindustrygroup.org/files/public/April2010.htm

Micro and Nanosystems everywhereIncrease of functionality, performance, and application fieldsMicro and Nanosystems everywhereIncrease of functionality, performance, and application fields

Automotive Applications

Courtesy of Dr. Franz LärmerRobert Bosch GmbH

Automotive Applications

Emerging microsystems (examples)

Source: adapted from Yole Développement, Mournier (2010)status

Development Mature DeclineEmerging Technology

R&D

Productionstatus

Massproduction

Continuationof development

Legend:

Energyharvesting

µFuel cells

MEMS ID

Future

Microtips

Today

Inkjet headFilters

Microphones

Micromirrors

Micro bolometers

Autofocus/µZoom

RF Switches

Electroniccompass

µStructures

MEMS oscillatorsMEMS speakers

Pressure sensors

Accelero-meters

Gyroscopes

Microdisplays

zero power autonomous

systems

The Case for a Specialized Master• Be prepared for the ever-changing academic and industrial

landscape by an inter-disciplinary education.

• Have access to a broad and interconnected spectrum ofresearch areas.

• Study among other highly qualified students with similarinterests and varying backgrounds

The Case for a Specialized Master in Micro and Nanosystems

• Welcome day and apéros with tutors and other MNS students

• Talks with PhDs and start ups

• Social events for future, current and former MNS students

[email protected]

https://www.facebook.com/MNSETHZ

• •

International Contest of Applicationsin Nano-Micro Technologies (iCAN)

2014 Post disaster monitoring system

2nd Place in Sendai, Japan

2016µWINDfon

Finale in Paris, France

2015Alaska boots

2nd Place, Swiss competition

www.ican-contest.ch

• 2011 Siemens Mobility, Zürich: Communications and control systems for transportation

• 2011, 2015 Sensirion, Stäfa: Pressure and flow sensors, design, fabrication, shipping

• 2012 Kistler, Winterthur: Sensor design, fabrication andcharacterization facility.

• 2013 ABB, Lenzburg: Power semiconductors and waferfabrication process.

• 2014 Siemens Building Technologies, Zug: Fire detectors, sensors and controll systems for buildings

Excursions

> 200 companies and institutes in CH, A, F, D are working on/with micro andnanosystems

Austriamicrosystems, EV Group - E. Thallner GmbH, Femto Lasers, IMS Nanofabrication GmbH, MNA - Micro@Nanofabrication-Austria, NANONET Styria, NSTL - NanoScience and Technology Center Linz, Alcatel Vacuum Technology, Siemens VDO, Tronic’s Microsystems, ANSYS Germany GmbH, Carl Zeiss SMT AG, Continental Teves, DaimlerChrysler AG, ECPE Engineering Center for Power Electronics GmbH, Evotec OAI AG, GE Global Research, German Aerospace Center (DLR), Heidelberg Instruments Mikrotechnik GmbH, Infineon Technologies, Ing. Erich Pfeiffer GmbH, JEOL (Germany) GmbH, JPK, Instruments AG, Leica Microsystems GmbH, MTU Aero Engines GmbH, Nanofilm Technologie GmbH, NanoWorld Holding AG, NDI Europe GmbH, neosino nanotechnologies AG, nomat GmbH, OSRAM Opto Semiconductors Infrared, Paul Müller Industrie GmbH & Co. KG, PerkinElmer Optoelectronics, PI -Physikinstrumente GmbH & Co. KG, RAITH GmbH, Robert Bosch GmbH, Siemens AG, Siemens Medical Solutions, Solvay Infra Bad Hönningen GmbH, SUSS MicroTec, Wika Alexander Wiegand GmbH & Co. KG, XENOS Semiconductor Technologies GmbH, Zentro-Elektrik, STMicroeleclronics, OC Oerlikon, HILTISercalo Microtechnology Ltd., 3D AG Holographic Products It Services, ABB Schweiz, ABB Switzerland Ltd Corp. Research, Agilent Technologies (Schweiz)AG, Alpes Lasers SA, Alphasem AG, Asulab S.A., a company of the Swatch Group, AWM Mold Tech Ltd., Axpo Holding AG, Ayanda Biosystems SA, BitplaneAG, BMG Engineering AG, CarboGen AG, Ciba Specialty Chemicals Inc., Cicor Technologies, CLA Clinical Laboratory Automation SA, Codec SA,Colibrys (Switzerland) Ltd, Composites Busch SA, Concentris GmbH, Consenec AG, CPAutomation SA, CSEM - Centrec Suisse D'Électronique E deMicrotechnique, CSM-Instruments, DiagnoSwiss S.A., Didel SA, ECO Analytics AG, EM Microelectronic - Marin SA, Endress+Hauser Flowtec AG, EpiSpeedAG, ER Systems SA, ESCATEC Switzerland AG, E-Vision, Inc., Fastcom Technology SA, Ferrovac GmbH, Force Dimension LLC, Georg Fischer LtdGreatcell Solar SA, Helbling Technik AG, Heptagon, HMT microelectronic AG, HSW, HTceramix SA, IBM Research GmbH, IICS SA, inno-x gmbh, Insulation & Polymer Technologies, Intelliact AG, Intersema Sensoric SA, IR MICROSYSTEMS, Jacob Holm Industries GmbH, Leica Geosystems, Lyncée Tec SA, Magtrol SA, Manometer Ltd., Mecartex SA, Medlight SA, Microchemical Systems SA, Microcrystal, Microcut Ltd, MICRODUL AG, Micronas , Semiconductor Holding AG, Mikron Agie Charmilles AG, Mimotec SA, Mobile Information &Communication Systems, NanoFeel, Nanonis GmbH, Nanosensors, Nanosurf AG, NanoTechTools Company, NanoWorld AG, Netstal-Maschinen AG, Novartis Pharma AG, OMNISENS SA, Phonak AG, Photonfocus AG, POSIC S.A., Rieter Machine Works Ltd., Roche Diagnostics Microtechnology Center, Schoeller Textil AG, Schweizerische Gesellschaft für Reinraumtechnik, SELEXIS EUROPE, Sensile Holding, Sensile Technologies SA, Sensirion AG, SenTec AG, Shockfish SA, Siemens Schweiz AG, SIG Holding AG, SIG Pack Systems AG, Sinus-Point AG, Skan AG, SMARTDATA SA, Solaronix SA, STMicroelectronics, Sulzer Innotec, Sulzer Metco, Sunrise Luciol SaRL, Swiss Life Sciences Association, Swissbit AG, SwissProbe GmbH, Synopsis Switzerland LLC, Synthes GmbH, Tecan Schweiz AG, Technische Rundschau , TechPowder SA, Time-Bandwidth Products, Inc., trafag AG - Sensors & Controls, U-blox AG, Unaxis Switzerland Ltd, Unisensor AG, VHF-Technologies SA, WIKA - Manometer AG, WYLER AG -Inclination Measuring Systems, XEMICS SA Micro (Semtec), Xemtec AG, Xitact S.A., Zeptosens AG

The Case for a Specialized Master• Be prepared for the ever-changing academic and industrial

landscape by an inter-disciplinary education.

• Have access to a broad and interconnected spectrum ofresearch areas.

• Study among other highly qualified students with similarinterests and varying backgrounds

• Set yourself apart by a further and specialized education: Transdisciplinary education, team oriented Modern technology for innovations System integration and applications

The Case for a Specialized Master in Micro and Nanosystems

Overview of Master categories structure

Category CP Description

Core Courses 36• Basis of the Master program• Providing core knowledge in the respective area of

specialization

Multidisciplinary Courses 6 • Student’s choice of courses at ETH, Uni Zürich and HSG

• Can be recommended by tutor

„Pflichtwahlfach GESS“ 2 • General-education courses in humanities, social and political

science from the course catalogue of D-GESS ETH Zürich

Semester Project 8 • Use of acquired technical knowledge • Provides experience in solving a specific engineering problem

Industrial Internship 8 • Min. 12-week internship in a Swiss or foreign company

Master´s Thesis 30 • Conclusion of the Master program• Independent and scientific work

http://www.mastermicronano.ethz.ch/

Recommended Core Courseshttp://www.mastermicronano.ethz.ch/curriculum/core_courses/recommended

Each tutor has particular areas of interest and offers every student an individualized curriculum within the relevant research area from the list of• recommended core courses and • elective core courses

Master curriculum structure

~ 6 months full-time work Subject with project plan Approved by the tutor Project at ETH and/or abroad

Master Thesis (30 ECTS)

Before starting thesis work, students must- have fulfilled all specific admission requirements;- have achieved 32 credit points in the category

core courses;- have acquired the credit points corresponding to

the Semester Project (8 cp)

Industrial training for at least 12 weeks Internship can be in a company in Switzerland or abroad Internship prior to the start of the master program is recommended Students find the internships by their own. Tutors often support their

students in finding a suitable internship position. Further supported by the D-MAVT internship services

Industrial internship (8 ECTS)

D-MAVT Student Administration

Student Administration:ETH- CenterBuilding: LEERoom: K 208Business hours:During the semester: Tue, 09:00 - 13:00, Thu 13:00 - 16:00, Wed&Fri 09:00-12:00

www.mavt.ethz.ch

Administration and Internship Coordinator of Studies

Roman Huber Dr. Maddalena VelonàDaniela HaasTsamcho Meier

The Master program is tutor-drivenEach student is entitled to a tutor Tutor and student define an individualized curriculum Tutor coaches students in course planning, research, mobility, industrial

training and monitors progress Changing the tutor is possible

Tutor system

Tutor Agreement

Prepare your tutor agreement on the basis of your interests and the tutor’s sample curriculum• Submission: Within 3 weeks of the

start of the semester• Study Plan: For each semester or for

the whole study program • Updates: Always possible with tutor’s

approval• Final version: Together with the degree

request

Tutors in Micro and Nanosystems D-MAVT Jürg Dual Christofer Hierold Brad Nelson David Norris Hyung Gyu Park Dimos Poulikakos Sotiris Pratsinis D-ITET Jürg Leuthold Gerhard Tröster Janos Vörös Vanessa Wood D-PHYS Klaus Ensslin Thomas Ihn D-BSSE Andreas Hierlemann

Prof. Jürg LeutholdD-ITET, Institute of Electromagnetic Fields (IEF)

www.ief.ethz.ch

Main Research Interests:Design – Fabrication – System-level testing- Optoelectronic devices for communications- Sources and detectors for sensing- Plasmonic devices

100 Gbit/s plasmonic transmitter.

Wireless antenna usingnanotechnolgical devices

Novel nonlinearlight sources

Prof. Brad NelsonD-MAVT, Institute of Robotics and Intelligent Systems

www.iris.mavt.ethz.ch

Main Research Interests:- Making sub-mm intelligent machines- Manipulating sub-mm scale objects

HC Berg, J. Bact., (2000)

Prof. Christofer HieroldD-MAVT, Micro and Nanosystems

www.micro.mavt.ethz.ch

Main Research Interests:- Advanced microsystems:

e.g. thermoelectric generators, acoustic sensors , and microsystems for medical applications

- Nanotransducers and nanosensors: e.g. ultra low power carbon based sensors

dry active EEG electrode

Prof. Sotiris PratsinisD-MAVT, Particle Technology Laboratory

www.ptl.mavt.ethz.ch

Fundamentals (Prof. Mavrantzas, Goudeli, Kelesidis)

Catalysis (Dr. Büchel, Koirala, Fujiwara)

Biomaterials (Dr. Sotiriou, Spyrogianni, Blattmann, Starsich) Devices (Güntner, Schädli)

www.lbb.ethz.ch

Main Research Interests: Stretchable bioelectronic devices Biosensors Interfacing biology with FluidFM nanopipette Building controlled neuron networks

Prof. Janos VörösD-ITET, Laboratory of Biosensors and Bioelectronics

Prof. Hyung Gyu ParkD-MAVT, Nanoscience for Energy Technology and Sustainability

www.nets.ethz.ch

Main Research Interests:- Carbon nanofluidics for energy and clean

technologies- Plasmonics for sensors and energy - Multiscale manufacturing

Efficient transport in nanotubes Ultimate permeation across graphene Plasmonic detection of toxicity Nano-to-macro scale manufacture

Prof. Gerhard TrösterD-ITET, Wearable Computing Laboratory

www.wearable.ethz.ch

Main Research Interests:- Wearable, mobile computing, also on smart

textiles- Personal health and context recognition- Flexible electronics for textiles and sports

Prof. Jürg DualD-MAVT, Institute of Mechanical Systems

www.zfm.mavt.ethz.ch

Main Research Interests:- Ultrasonic Particle Manipulation- Wave Propagation in Microsystems- Fluid Sensing in Microsystems

Prof. Dimos PoulikakosD-MAVT, Laboratory of Thermodynamics in Emerging Technologies

www.ltnt.mavt.ethz.ch

Main Research Interests:- Energy conversion, transport and fluidics- Biothermofluidics- Energy and the environment

Prof. Andreas HierlemannD-BSSE, Bio Engineering Laboratory

www.bsse.ethz.ch/bel

Main Research Interests:- Bioelectronics- Biosensors- Microfluidics and cell handling

Prof. David NorrisD-MAVT, Optical Materials Engineering Laboratory

www.omel.mavt.ethz.ch

Main Research Interests:- Synthesis/characterization of quantum dots- Thermal plasmonics for thermophotovoltaics- Quantum plasmonics

Prof. Vanessa WoodD-ITET, Laboratory for Nanoelectronics

www.lne.ethz.ch

Main Research Interests:- Optical and electronic measurement techniques on

nano- and micro-size materials & structures- Nano- and micron-size materials with new electronic

or ionic properties- Applications: LEDs, solar cells, batteries

Materials Devices Analytics

Opt

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ctro

nic

& E

lect

roch

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Prof. Klaus EnsslinD-PHYS, Nanophysics

www.nanophys.ethz.ch

Main Research Interests:- Nanostructures of GaAs family and Graphene- Superconductor/Semiconductor hybrids- Transport in mesoscopic structures

Prof. Thomas IhnD-PHYS, Nanophysics

www.nanophys.ethz.ch

Main Research Interests:- Electron and spin transport in quantum

dots and quantum rings- Scanning probes techniques applied to

semiconductor nanostructures

Online-portal for admission

• www.lehrbetrieb.ethz.ch/eApply• Registration for login (ETH students can use the personal university account)• Fill out the application form• Recommendation letter (not for ETH)• Print the completed application form• Send it to ETH Zurich• Deadline: March 31, 2016

http://www.mastermicronano.ethz.ch/For more information, contact us or visit:For more information, contact us or visit: