msc eth in micro and nanosystems · greatcell solar sa, helbling technik ag, heptagon, hmt...

Electronics / Electrical Engineering

MechanicalEngineering

Materials, Surfacesand Properties

Modeling and Simulation

Devices andSystems

Energy Conversionand

Quantum Phenomena

MaterialsPhysics, Chemistry, Biology

Product Developmentand Innovation Management

MSc ETH in Micro and NanosystemsAn educational program that can cope with the challenges of a fast changing industrial and academic environment

Jointly offered by D-MAVT and D-ITET

world of memsconsumer electronics

automotive industryinternet of things

entertainmentenvironment

healthcarerobotics

digital micromirror device

thermoelectric generatorthermoelectric heat flux

silicon microphone

energy harvester

infrared camera

humidity sensor

AFM cantilever

Seebeck effect

accelerometer

piezoresistiveelectrostatic

ink jet head

bolometer ultrasound

thermopile

gyroscopedew point

capacitor

altimeter

The world of MEMSMicro and nanosystmes are all around us




roboticsdigital micromirror device


energy harvester

infrared camera

humidity sensor

AFM cantilever

Seebeck effect

accelerometer


ink jet head


thermopile

gyroscopedew point

capacitor

altimeter

The world of MEMSMicro and nanosystmes are all around us

healthcare

silicon microphone

The world of MEMSMEMS & Internet of Things – Humidity sensor

The Internet of Things is a network ofphysical devices that operate within theexisting internet infrastructure.

Environmental monitoringdevices can sense air qualitytemperature, humidity, noise,light, pressure, etc.

https://cubesensors.com/






energy harvester

infrared camera

humidity sensor

AFM cantilever

Seebeck effect

accelerometer


ink jet headt


thermopile

gyroscopedew point

capacitor

altimeter

The world of MEMSMicro and nanosystems are all around us

healthcare

silicon microphone

The world of MEMSMEMS in robotics – Heat flux sensors

Robotic laser welding enables joining anextended range of materials with high qualityand low weld footprint.

Thermoelectric heat fluxsensors measure laser power,enabling more reliable operation.

greenTEG gRAY Laser Power Detector Series






energy harvester

infrared camera

humidity sensor

AFM cantilever

Seebeck effect

accelerometer


ink jet head


thermopile

gyroscopedew point

capacitor

altimeter

The world of MEMSMicro and nanosystems are all around us

healthcare

silicon microphone

The world of MEMSMEMS in automotive industry - Gyroscope

Airbag control systems combine multiplesensor devices to predict accidents andsignificantly increase passenger safety.

Micromachined gyroscopesand accelerometers are keyelements in airbag controlsystems.

The world of MEMSMEMS in autonomous driving

Autonomous driving requires exactdetermination of the vehicle’s motionparameters and its environment to allowaccident-free driving.

Utilized MEMS sensors include:accelerometer, gyroscope, laserradar, ultrasound positioning, etc.

The Case for a Specialized Master• Be prepared for the ever-changing academic and industrial

landscape by an inter-disciplinary education.

• Have access to a broad and interconnected spectrum ofresearch areas.

• Study among other highly qualified students with similarinterests and varying backgrounds

The Case for a Specialized Master in Micro and Nanosystems

• Welcome day and apéros with tutors and other MNS students

• Talks with PhDs and start ups

• Social events for future, current and former MNS students

• Contact: Leon [email protected]

[email protected]://www.facebook.com/MNSETHZ

• •

International Contest of Applicationsin Nano-Micro Technologies (iCAN)

2014 Post disaster monitoring system

2nd Place in Sendai, Japan

2016µWINDfon

1st prize in Paris, France

2015Alaska boots

2nd Place, Swiss competition

www.ican-contest.ch

• 2011 Siemens Mobility, Zürich• 2011 Sensirion, Stäffa• 2012 Kistler, Winterthur• 2013 ABB, Lenzburg• 2014 Siemens Building Technologies, Zug• 2015 Sensirion, Stäffa• 2016 Sonova (Phonak), Stäffa• 2017 IST AG, Ebnat-Kappel

Excursions

> 200 companies and institutes in CH, A, F, D are working on/with micro andnanosystems

Austriamicrosystems, EV Group - E. Thallner GmbH, Femto Lasers, IMS Nanofabrication GmbH, MNA - Micro@Nanofabrication-Austria, NANONET Styria, NSTL - NanoScience and Technology Center Linz, Alcatel Vacuum Technology, Siemens VDO, Tronic’s Microsystems, ANSYS Germany GmbH, Carl Zeiss SMT AG, Continental Teves, DaimlerChrysler AG, ECPE Engineering Center for Power Electronics GmbH, Evotec OAI AG, GE Global Research, German Aerospace Center (DLR), Heidelberg Instruments Mikrotechnik GmbH, Infineon Technologies, Ing. Erich Pfeiffer GmbH, JEOL (Germany) GmbH, JPK, Instruments AG, Leica Microsystems GmbH, MTU Aero Engines GmbH, Nanofilm Technologie GmbH, NanoWorld Holding AG, NDI Europe GmbH, neosino nanotechnologies AG, nomat GmbH, OSRAM Opto Semiconductors Infrared, Paul Müller Industrie GmbH & Co. KG, PerkinElmer Optoelectronics, PI -Physikinstrumente GmbH & Co. KG, RAITH GmbH, Robert Bosch GmbH, Siemens AG, Siemens Medical Solutions, Solvay Infra Bad Hönningen GmbH, SUSS MicroTec, Wika Alexander Wiegand GmbH & Co. KG, XENOS Semiconductor Technologies GmbH, Zentro-Elektrik, STMicroeleclronics, OC Oerlikon, HILTISercalo Microtechnology Ltd., 3D AG Holographic Products It Services, ABB Schweiz, ABB Switzerland Ltd Corp. Research, Agilent Technologies (Schweiz)AG, Alpes Lasers SA, Alphasem AG, Asulab S.A., a company of the Swatch Group, AWM Mold Tech Ltd., Axpo Holding AG, Ayanda Biosystems SA, BitplaneAG, BMG Engineering AG, CarboGen AG, Ciba Specialty Chemicals Inc., Cicor Technologies, CLA Clinical Laboratory Automation SA, Codec SA,Colibrys (Switzerland) Ltd, Composites Busch SA, Concentris GmbH, Consenec AG, CPAutomation SA, CSEM - Centrec Suisse D'Électronique E deMicrotechnique, CSM-Instruments, DiagnoSwiss S.A., Didel SA, ECO Analytics AG, EM Microelectronic - Marin SA, Endress+Hauser Flowtec AG, EpiSpeedAG, ER Systems SA, ESCATEC Switzerland AG, E-Vision, Inc., Fastcom Technology SA, Ferrovac GmbH, Force Dimension LLC, Georg Fischer LtdGreatcell Solar SA, Helbling Technik AG, Heptagon, HMT microelectronic AG, HSW, HTceramix SA, IBM Research GmbH, IICS SA, inno-x gmbh, Insulation & Polymer Technologies, Intelliact AG, Intersema Sensoric SA, IR MICROSYSTEMS, Jacob Holm Industries GmbH, Leica Geosystems, Lyncée Tec SA, Magtrol SA, Manometer Ltd., Mecartex SA, Medlight SA, Microchemical Systems SA, Microcrystal, Microcut Ltd, MICRODUL AG, Micronas , Semiconductor Holding AG, Mikron Agie Charmilles AG, Mimotec SA, Mobile Information &Communication Systems, NanoFeel, Nanonis GmbH, Nanosensors, Nanosurf AG, NanoTechTools Company, NanoWorld AG, Netstal-Maschinen AG, Novartis Pharma AG, OMNISENS SA, Phonak AG, Photonfocus AG, POSIC S.A., Rieter Machine Works Ltd., Roche Diagnostics Microtechnology Center, Schoeller Textil AG, Schweizerische Gesellschaft für Reinraumtechnik, SELEXIS EUROPE, Sensile Holding, Sensile Technologies SA, Sensirion AG, SenTec AG, Shockfish SA, Siemens Schweiz AG, SIG Holding AG, SIG Pack Systems AG, Sinus-Point AG, Skan AG, SMARTDATA SA, Solaronix SA, STMicroelectronics, Sulzer Innotec, Sulzer Metco, Sunrise Luciol SaRL, Swiss Life Sciences Association, Swissbit AG, SwissProbe GmbH, Synopsis Switzerland LLC, Synthes GmbH, Tecan Schweiz AG, Technische Rundschau , TechPowder SA, Time-Bandwidth Products, Inc., trafag AG - Sensors & Controls, U-blox AG, Unaxis Switzerland Ltd, Unisensor AG, VHF-Technologies SA, WIKA - Manometer AG, WYLER AG -Inclination Measuring Systems, XEMICS SA Micro (Semtec), Xemtec AG, Xitact S.A., Zeptosens AG

The Case for a Specialized Master• Be prepared for the ever-changing academic and industrial

landscape by an inter-disciplinary education.

• Have access to a broad and interconnected spectrum ofresearch areas.

• Study among other highly qualified students with similarinterests and varying backgrounds

• Set yourself apart by a further and specialized education: Transdisciplinary education, team oriented Modern technology for innovations System integration and applications

The Case for a Specialized Master in Micro and Nanosystems

Overview of Master categories structure

Category CP Description

Core Courses 36• Basis of the Master‘s Program• Providing core knowledge in the respective area of

specialization• Choice of courses in accordance with tutor

Multidisciplinary Courses 6 • Courses at ETH, Uni Zürich and HSG

• Choice of courses in accordance with tutor

„GESS Science in Perspective“ 2 • General-education courses in humanities, social and political

science from the course catalogue of D-GESS ETH Zürich

Semester Project 8 • Use of acquired technical knowledge• Provides experience in solving a specific engineering problem

Industrial Internship 8 • Min. 12-week internship in a Swiss or foreign company

Master´s Thesis 30 • Conclusion of the Master‘s Program• Independent and scientific work

http://www.mastermicronano.ethz.ch/

Core Courseshttp://www.master-micronano.ethz.ch/curriculum.html

Each tutor has particular areas of interest and offers every student an individualized curriculum within the relevant research area from the list of• recommended core courses and • elective core courses

Master curriculum structure

~ 6 months full-time work Subject with project plan Approved by the tutor Project at ETH and/or abroad

Master Thesis (30 ECTS)

Before starting thesis work, students must- have fulfilled all specific admission requirements;- have achieved 32 credit points in the category

core courses;- have acquired the credit points corresponding to

the Semester Project (8 cp)

Application for HS2018 / FS2019

Application period: 01 March – 31 March 2018

Apply online: https://www.ethz.ch/en/studies/registration-application/master/application/how-to-apply.html

No need of recommendation letters for ETH Bachelor students

No need of English test for ETH Bachelor students

For questions regarding the admission process: ETH Admission Office: [email protected]

ETH Zentrum Opening Hours during the semester: LEE K 208 Monday: 13:00 - 16:00Leonhardstrasse 21 Tuesday: 09:00 - 13:008092 Zürich Wednesday: 09:00 - 12:00

Thursday: 13:00 - 16:[email protected] Friday: 09:00 - 12:00

D-MAVT Studienadministration

Daniela Divljak Lorena Luzi Tsamcho Meier Dr. Maddalena Velonà

The Master program is tutor-drivenEach student is entitled to a tutor Tutor and student define an individualized curriculum Tutor coaches students in course planning, research, mobility, industrial

training and monitors progress Changing the tutor is possible

Tutor system

Learning Agreement

Prepare your Learning Agreement on the basis of your interests and the tutor’s sample curriculum• Submission: Within 3 weeks of the start

of the semester• Study Plan: For each semester or for the

whole study program • Updates: Always possible with tutor’s

approval• Final version: Before starting the

Master’s Thesis

Tutors in Micro and Nanosystems D-MAVT Jürg Dual Christofer Hierold Dennis Kochmann Brad Nelson David Norris Dimos Poulikakos Sotiris Pratsinis D-ITET Jürg Leuthold Janos Vörös Vanessa Wood D-PHYS Klaus Ensslin Thomas Ihn D-BSSE Andreas Hierlemann

Prof. Jürg LeutholdD-ITET, Institute of Electromagnetic Fields (IEF)

www.ief.ethz.ch

Main Research Interests:Design – Fabrication – System-level testing- Optoelectronic devices for communications- Sources and detectors for sensing- Plasmonic devices

100 Gbit/s plasmonic transmitter.

Wireless antenna usingnanotechnolgical devices

Novel nonlinearlight sources

Prof. Brad NelsonD-MAVT, Institute of Robotics and Intelligent Systems

www.iris.mavt.ethz.ch

Main Research Interests:- Making sub-mm intelligent machines- Manipulating sub-mm scale objects

HC Berg, J. Bact., (2000)

Prof. Christofer HieroldD-MAVT, Micro and Nanosystems

www.micro.mavt.ethz.ch

Main Research Interests:- Advanced microsystems:

e.g. thermoelectric generators, acoustic sensors , and microsystems for medical applications

- Nanotransducers and nanosensors: e.g. ultra low power carbon based sensors

dry active EEG electrode

Prof. Sotiris PratsinisD-MAVT, Particle Technology Laboratory

www.ptl.mavt.ethz.ch

Fundamentals (Prof. Mavrantzas, Goudeli, Kelesidis)

Catalysis (Dr. Büchel, Koirala, Fujiwara)

Biomaterials (Dr. Sotiriou, Spyrogianni, Blattmann, Starsich) Devices (Güntner, Schädli)

www.lbb.ethz.ch

Main Research Interests: Stretchable bioelectronic devices Biosensors Interfacing biology with FluidFM nanopipette Building controlled neuron networks

Prof. Janos VörösD-ITET, Laboratory of Biosensors and Bioelectronics

Prof. Jürg DualD-MAVT, Institute of Mechanical Systems

www.zfm.mavt.ethz.ch

Main Research Interests:- Ultrasonic Particle Manipulation- Wave Propagation in Microsystems- Fluid Sensing in Microsystems

Prof. Dennis M. KochmannD-MAVT, Mechanics & Materials

www.mm.ethz.ch

Main Research Interests:- modeling across length and time scales:

bridging from atoms to devices- engineered (meta)materials

with controllable properties- materials by design: linking

microstructure to properties

Prof. Dennis M. KochmannD-MAVT, Mechanics & Materials

Prof. Dimos PoulikakosD-MAVT, Laboratory of Thermodynamics in Emerging Technologies

www.ltnt.mavt.ethz.ch

Main Research Interests:- Energy conversion, transport and fluidics- Biothermofluidics- Energy and the environment

Prof. Andreas HierlemannD-BSSE, Bio Engineering Laboratory

www.bsse.ethz.ch/bel

Main Research Interests:- Neuroelectronic interfacing- Microfluidics and microtissues

3 mm

10 µm

Prof. David NorrisD-MAVT, Optical Materials Engineering Laboratory

www.omel.mavt.ethz.ch

Main Research Interests:- Synthesis/characterization of quantum dots- Thermal plasmonics for thermophotovoltaics- Quantum plasmonics

Prof. Vanessa WoodD-ITET, Laboratory for Nanoelectronics

www.lne.ethz.ch

Main Research Interests:- Optical and electronic measurement techniques on

nano- and micro-size materials & structures- Nano- and micron-size materials with new electronic

or ionic properties- Applications: LEDs, solar cells, batteries

Materials Devices Analytics

Opt

oele

ctro

nic

& E

lect

roch

emic

al

Prof. Klaus EnsslinD-PHYS, Nanophysics

www.nanophys.ethz.ch

Main Research Interests:- Nanostructures of GaAs family and Graphene- Superconductor/Semiconductor hybrids- Transport in mesoscopic structures

Prof. Thomas IhnD-PHYS, Nanophysics

www.nanophys.ethz.ch

Main Research Interests:- Electron and spin transport in quantum

dots and quantum rings- Scanning probes techniques applied to

semiconductor nanostructures

http://www.mastermicronano.ethz.ch/For more information, contact us or visit:For more information, contact us or visit:

msc eth in micro and nanosystems · greatcell solar sa, helbling technik ag, heptagon, hmt...

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