lam research confidential slide - 1 transfer calibration lrt training center shaw wang

Lam Research Confidential Slide - 1

Transfer Calibration

LRT Training Center

Shaw Wang

http://lamweb.lamrc.com/corpcomm/corp_marketing/Templates_Forms/standard_presentation.html

Lam Research Confidential Slide - 2(v3)

Theory of Operation

All wafer locations throughout the system are defined as stations. Each robot must be calibrated (“taught”) to each station. Stations are typically defined by the wafer center at each location. The wafer center position is defined by a radial (R) and theta (T) coordinate relative

to the robot being taught. The vertical position (Z or BTO) is defined relative to the robot being taught. Which is typically defined as the wafer height that the wafer can freely enter and exit the station.

Stations with multiple slots must define the number of slots (slot) and the pitch (p) between the slots.

For stations not radially located from the robot center, the wafer path to and from the station must also be defined (via points).

For stations which require mapping, map positions must also be defined. These positions are typically defined with radial, theta and wrist coordinates.

Reference– “Transfer Calibration procedure”, 202-012898-001 Rev G

202-012898-001_g.pdf



Transfer Calibration Fixtures

Chamber fixture

Airlock fixture

CDM (Control display module) Dummy wafer (Carbon wafer)

Dynamic Alignment ATM arm position

ATM Aligner fixture FOUP fixture Refer document:202-012898-001 version G



Transfer Calibration Fixtures



System Block Diagram

Motor Power

Signal Cable

Null Modem Cable

24VDC Power

Misc IOMisc IO

24VDC Power

RS-232 Serial Cable(SIO 1)

(SIO 2)

RS-232 Serial Cable

ATM Robot ControllerTerminal

Server

VTM Robot

VTM Mother Board

Aligner

ATMRobotDrive

ATM ROBOT COVER SWITCHES

LPM 1, LPM 2, LPM 3

Aligner Window

A/L1 Window, A/L2 Window

Right Side Window (Bottom)

Right Side Window (Top) Newer Systems

ATM ROBOT COVER SWITCHES

LPM 1, LPM 2, LPM 3

Aligner Window

A/L1 Window, A/L2 Window

Right Side Window (Bottom)

Right Side Window (Top) Newer Systems



Loadport Switch 1 ,2 & 3

A/L 1 Window

Alinger Window

A/L 2 Window

Right side Window

ATM Robot Cover Switches



Station Numbering

ATM 3Right FOUP

ATM 2Middle FOUP

ATM 1Left FOUP

ATM 7Aligner

ATM 4IMM

ATM / VTM 5Right Airlock (2)

ATM / VTM 6Left Airlock (1)

ATM 9 ATM 8

ATM 10

VTM 4PM 4

VTM 3PM 3

VTM 2PM 2

VTM 1PM 1



Wafer Flow

Serial Processing– Poly, Exelan



Wafer Flow

Parallel Processing– Metal/Strip, Poly/Strip



ATM Calibration

Module station positions (R, T, Z) are taught by the user using the CDM and a fixture that is placed in the module.

Intermediate points are defined by calculations based on the nominal positions. – Intermediate points include via positions, map positions, & map via positions.– Nominal points are based off of a defined home position.

Constants are defined where possible and set based on nominal positions or values.



VTM Calibration

Module station positions (R, T, Z) are taught by the user using the CDM and a fixture that is placed in the module.

Constants are defined were possible and set based on nominal positions or values. Each VTM position is optimized using Dynamic Alignment (can be done at

atmosphere or vacuum)– A wafer is perfectly centered in the station

• Wafer is centered either by a fixture (PM) or by the aligner (LL)– Routine is run through system software to adjust the station

• The wafer is picked• Dynamic Alignment reports a radial and theta offset (wafer center offset).• Station position (R and T) is adjusted so that the arm and the wafer line up.



Prepare the System

2300 software ready. ATM /VTM Robots had installed. System must be leveled. Robots and aligner had been setup. Pin lifter calibrated.



Leveling Procedure

ATM Robot Leveling. Aligner Leveling. Airlock Buffer/Cool Station Leveling. 25 slots Buffer station Leveling. LPM Installation and Leveling. KLA Metrology Station Leveling. VTM Robot End Effector Leveling for SCARA Arm. ATM Robot vacuum switch set up.



ATM/VTM Robots Calibration

ATM-LPM. ATM-KLA Metrology Station. ATM-Airlocks. ATM-Aligner. ATM-Buffer/Cool station. VTM-Airlocks. VTM-PMs. After finished all the station, do the ironman test.

– To identify the reliability of transfer.



Diagnose\Iron ManDiagnose\Iron Man



Calibration Parameters

Lam Research Confidential Slide - 17

Backup – WPS System



WPS System

Dynamic Alignment is a wafer location and centering algorithm used during wafer transfer in the VTM. Dynamic Alignment uses two sensors on each facet to determine the location of the wafer.

200mm use sensor 2 for wafer presence. 300mm use sensor 1 for wafer presence.

300mm Wafer

200mm Wafer



WPS System

200 mm SystemConnect to Emitter Connect to Detector

AL1 S2RAL1 S2T

AL1 S1RAL1 S1T

AL2 S1RAL2 S1T

AL2 S2RAL2 S2T

PM1 S1RPM1 S1T

PM2 S1RPM2 S1T

PM3 S1RPM3 S1T

PM4 S1RPM4 S1T

PM1 S2RPM1 S2T

PM2 S2RPM2 S2T

PM3 S2RPM3 S2T

PM4 S2RPM4 S2T

WPS controlPCB

P2

P4

P6

P8

P10

P12 P11

P1

P3

P5

P7

P9

Sensor optical 12

Sensor optical 11

Sensor optical 10

Sensor optical 8

Sensor optical 7

Sensor optical 9

Sensor optical 6

Sensor optical 5

Sensor optical 4

Sensor optical 2

Sensor optical 1

Sensor optical 3

VTM Mother PCB



WPS System

300mm System

AL1 S1TAL1 S1T

AL1 S3RAL1 S3T

AL2 S3RAL2 S3T

AL2 S1RAL2 S1T

PM1 S3RPM1 S3T

PM2 S3RPM2 S3T

PM3 S3RPM3 S3T

PM4 S3RPM4 S3T

PM1 S1RPM1 S1T

PM2 S1RPM2 S1T

PM3 S1RPM3 S1T

PM4 S1RPM4 S1T

WPS controlPCB

P2

P4

P6

P8

P10

P12 P11

P1

P3

P5

P7

P9

Sensor optical 12

Sensor optical 11

Sensor optical 10

Sensor optical 8

Sensor optical 7

Sensor optical 9

Sensor optical 6

Sensor optical 5

Sensor optical 4

Sensor optical 2

Sensor optical 1

Sensor optical 3

VTM Mother PCB

Connect to Emitter Connect to Detector



WPS System

Location



Component

Transducers– 24 VDC to provide light source for fiberoptics– Convert light energy into 5 VDC signal– LEDs

• Green - DC Power ON• Amber - OFF when Blocked

– Gain Adjustment - Factory Set

Transducers

Gain Adjustment

LEDs

Center Finding PCB



Component

Detector– Receive light if not blocked by wafer

Emitter– Send light

DetectorEmitter



DA function

Theory of Operation

lam research confidential slide - 1 transfer calibration lrt training center shaw wang

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