kine vibsens
DESCRIPTION
ZiMTRANSCRIPT
MEMS Vibration Sensor 1. General Description
This sensor module provides a two axis accelerometer for the detection of structure-born noise in a certain frequency range. Acceleration at frequencies outside the sensitive range is attenuated. It prevents overdrive of the preamplifier and sensor and it offers an easy spectral sensitive readout without FFT. The sensor module simplifies the test of prototypes of a new two axis MEMS accelerometer chip. The sensor chip and the amplifier electronics are commonly packaged. It can be mounted by a screw using the central hole and/or glue to the object being measured. A power supply of -12V (7mA) and +12V is necessary for the operation.
2. Features
• Two axis frequency selective accelerometer with integrated preamplifier
• Capacitive detection • ±10 g span • Low-cost sensor chip application • Robust mounting adapter
Fig. 1: Sensor module with mounting adapter
2.5 5.0 7.5 100
50
100
75
25
0
Frequency [kHz]
Sen
sitiv
ity [m
V/m
s-2]
Fig. 2: Frequency transfer functions
3. Application
• Structure-born noise detection • Monitoring of machines, engines and tools • Pump monitoring
Fig. 3: SEM structures of the comb structure in detail
4. Characteristics
Parameter value Span ± 10 g Center frequencies
2.0/3.0/4.5/6.0 kHz
Sensitivity 75 mV/ms-2 Chip dimension 2.5 x 2.5 mm2 Supply voltage ±12V Supply current 7mA
GndX-out
Y-out
V-
V+ Guard
Power Supply
OscilloscopeSignal Analyzer
-12V +12V
Cable length <10m
Sensor
whitebrown
yellow
grey
pink
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black redblue
greenBNC BNC
Fig. 4: Electric circuit for application 5. Contact
Dr. Steffen Kurth Tel.: +49 (0) 371/531-35862 Fax: +49 (0) 371/531-835862 E-Mail: [email protected]