iee5328 nanodevice transport theory and computational tools prof. ming-jer chen dept. electronics...
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- Advanced Device Physics - Hands-on Calculations IEE5328 Prof. MJ Chen NCTU3 Two Elements of the CourseTRANSCRIPT
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IEE5328 Nanodevice Transport Theory and Computational Tools
Prof. Ming-Jer ChenDept. Electronics EngineeringNational Chiao-Tung UniversityFeb. 20, 2013
Lecture 1:
Introduction
1IEE5328 Prof. MJ Chen NCTU
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Can we survive in the highly-challenging but widely-controversial future?
IEE5328 Prof. MJ Chen NCTU 2
Motivation of this Nano Course
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- Advanced Device Physics
- Hands-on Calculations
IEE5328 Prof. MJ Chen NCTU 3
Two Elements of the Course
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• Industry Compatible
• ITRS Oriented
• Covering FETs down to 3-nm node
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ITRS : International Technology Roadmap for Semiconductors
Three Features of the Course:
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FETs Down-Scaling
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Polysilicon Gate Bulk Planar Extension• Strained Silicon Channel• Substrate/Channel Orientation
IEE5328 Prof. MJ Chen NCTU
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High-k Metal Gate Bulk Planar Extension• Strained Silicon Channel• Substrate/Channel Orientation
IEE5328 Prof. MJ Chen NCTU
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• Strained Silicon/Germanium/GaAs Channel• Substrate/Channel Orientation• Rsd issue
High-k Metal Gate FinFETs or Multi-Gate FETs
PlanarStructure
VerticalStructure
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TSMC 10, 14, and 16 nm
TSMC 20 nm
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ITRS Roadmap
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High-Performance NanoFETs projected by ITRS 2011 (http://www.itrs.net)
(Bulk and SOI)
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High-Performance FETs projected by ITRS 2011 (http://www.itrs.net)
(Bulk and SOI)
IEE5328 Prof. MJ Chen NCTU
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High-Performance FETs projected by ITRS 2011 (http://www.itrs.net)
(Multi-Gates and SOI)
IEE5328 Prof. MJ Chen NCTU
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High-Performance FETs projected by ITRS 2011 (http://www.itrs.net)(Multi-Gates and SOI)
IEE5328 Prof. MJ Chen NCTU
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Low-Power NanoFETs projected by ITRS 2011 (http://www.itrs.net)
(Bulk, SOI, and Multi-Gates)
IEE5328 Prof. MJ Chen NCTU
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Low-Power NanoFETs projected by ITRS 2011 (http://www.itrs.net)
(Bulk, SOI, and Multi-Gates)
IEE5328 Prof. MJ Chen NCTU
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• EOT down to around 0.5 nm
- Tunneling - Additional Mobility Degradation
• Feature Size (Channel Length) down to 3 nm
- Non-equilibrium Transport - DIBL Penetration - Tunneling
Two Key Projections by ITRS:
Printed Gate Length: as in layout phasePhysical Gate Length Lg: post-processing as determined by TEM or C-V fittingChannel Length L: Physical Gate Length Lg minus 2 times the overlap extension Lov
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The Purposes of the Course:
-Provide Advanced Device Physics for a working nanoFET
-Capture Key Points behind nanoFETs data and structures, simply through hands-on calculations
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You will do during this course:
-Capture Advanced Device Physics
-Read good papers
-Derive models and do calculations, given TCAD and/or experimental data
- Also run TCAD
-Establish Physical Pictures of your own 19IEE5328 Prof. MJ Chen NCTU
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Course Contents
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• MOS Energy Band Diagrams
• C-V
• Defects, Oxygen Vacancies
• Tunneling Paths
• Models, TCAD, Experimental Data, Calculation, and Fitting
1. High-k Metal-Gate Stacks: MOS Electrostatics
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2. High-k Metal-Gate FETs: Channel Mobility• Quantum Confinement
• Band Structure
• Coulomb Impurity Scattering, Phonon Scattering, Surface Roughness Scattering
• Remote Interface Plasmons Scattering, Remote Coulomb (Defects) Scattering, Remote Soft Phonon Scattering
• Models, TCAD, Experimental Data, Calculation, and FittingIEE5328 Prof. MJ Chen NCTU
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• Energy Band Diagrams
• Tunneling Paths
• Models, TCAD, Experimental Data, Calculation, and Fitting
3. Band-to-Band Tunneling
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4. Ballistic and Backscattering in Channel• Energy Band Diagrams
• 2-D versus 1-D
• Models, TCAD, Experimental Data, Calculation, and Fitting
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• Energy Band Diagrams
• Ballistic Mobility
• Scattering by Highly-Doped Source/Drain Plasmons
• Source Starvation
• Models, TCAD, Experimental Data, Calculation, and Fitting
5. Degraded Mobility and Saturation Current with Shrinking L
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6. Threshold Roll-off and DIBL Penetration (Electrostatics from Source and Drain)
• Energy Band Diagrams
• 2-D versus 1-D
• Models, TCAD, Experimental Data, Calculation, and Fitting
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• Ultrathin Source/Drain Extension Junction
• Components of Series Resistance Rsd
• Models, TCAD, Experimental Data, Calculation, and Fitting
7. Other Issues of Significance - I
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8. Other Issues of Significance - II• Alternative Channel Materials: Ge, GaAs, and Graphene
• Models, TCAD, Experimental Data, Calculation, and Fitting
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•Lecture Notes, Prof. Ming-Jer Chen, 2013.
•Literature Papers
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Course Material to be Delivered:
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Taken-Home Works and Reports Only
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Grading