fundamentals and applications of vacuum microelectronics zhuowen sun ee 698a
Post on 20-Jan-2016
230 views
TRANSCRIPT
![Page 1: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/1.jpg)
Fundamentals and Applications of Vacuum Microelectronics
Zhuowen Sun
EE 698A
![Page 2: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/2.jpg)
Outline
• Introduction
• Field emission basics
• Spindt emitters and arrays
• Beyond Spindt emitters
• Field emission display
• Summary
![Page 3: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/3.jpg)
Introduction (I)
• What is vacuum microelectronics
[Ref. 1] [Ref. 1]
![Page 4: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/4.jpg)
Introduction (II)
• GoodPower handling abilityBallistic and coherent transport Resistance to radiation-induced defects
• BadFabrication difficultiesPackaging issues
![Page 5: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/5.jpg)
Field emission basics
F-N equation [Ref. 2]
![Page 6: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/6.jpg)
Spindt emitters and arrays (I)
E = β V E: electric field ( V/m) V: applied voltage (V)
β = R / (k r ( R – r )) ~ 1/ (k r ) when r << R [Ref . 3]
k: const. 1 < k < 5
Assuming field emission onsetE ~ 1x107 V/cm
Classical processing:R = 1mm , r = 2000Åβ = 5x104 / k cm-1
V = 1000 V
Micro-fabrication:R = 5000Å, r = 250Åβ = 4x105 / k cm-1
V = 100 V
![Page 7: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/7.jpg)
Spindt emitters and arrays (II)
[Ref. 3]
![Page 8: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/8.jpg)
Spindt emitters and arrays (III)
• Fields of a triode structure [Ref. 4]
![Page 9: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/9.jpg)
Spindt emitters and arrays (IV)• Structure parameter dependence [Ref. 5]
![Page 10: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/10.jpg)
Spindt emitters and arrays (V)
Before:ΔΦ = 1 eV Σ ~ 0.1%After:ΔΦ = 0.2 eV Σ ~ 20-40%
[Ref . 3]
[Ref . 6]
![Page 11: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/11.jpg)
Beyond Spindt emitters (I)
• Problems with simple Spindt emittersContaminationFocusingUniformity of array fabricationPower consumption
![Page 12: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/12.jpg)
Beyond Spindt emitters (II)
• SolutionsMetal-Insulator-Metal (MIM) emittersSurface Conduction Emitters (SCE)Diamond-coated emittersCarbon nanotube emitters
![Page 13: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/13.jpg)
Field emission display (I)
[Ref. 7] [Ref. 8]
![Page 14: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/14.jpg)
Field emission display (II)
• Beam focusing [Ref. 3]• Large array [Ref. 9]
![Page 15: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/15.jpg)
Field emission display (III)
• Spacers breakdown [Ref. 3]
• Getters [Ref. 3]
![Page 16: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/16.jpg)
Field emission display (IV)
[Ref. 3]
![Page 17: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/17.jpg)
Field emission display (V)
[Ref. 3]
![Page 18: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/18.jpg)
Summary
• An interesting device family
• Special design/fabrication considerations
• Complementary to conventional solid-state devices
• Important applications
![Page 19: Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A](https://reader034.vdocuments.site/reader034/viewer/2022050909/56649d355503460f94a0d477/html5/thumbnails/19.jpg)
References
[1] C. A. Spindt et al., J. Appl. Phys., 47 (1976) 5284
[2] F. Charbonnier, Appl. Surf. Sci., 94/95 (1996) 26
[3] W. Zhu, Vacuum Microelectronics, John Wiley & Sons, 2001
[4] W.Dawson et al., J. Vac. Sci. Tech. B, 11(2),(1993) 518
[5] E. G. Zaidman, Trans. Electron Dev., May 1993, 1009-1016
[6] K. L. Jensen, Naval Res. Lab.: Cathode Workshop, 2001
[7] http://www.pctechguide.com/07panels.htm
[8] T. S. Fahlen, Proc. IVMC, 1999, p. 56
[9] T. T. Doan et al., US patent 5229331, 1993