flexible and stretchable electronics and applications for...
TRANSCRIPT
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Flexible and Stretchable Electronics
and Applications for Biomedical Devices
School of Chemical and Biological Engineering
Seoul National University
Dae-Hyeong Kim
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Suffering Patients Doctors
How to bridge?
Bio-Integrated
Electronics ?
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Our Goals
* Connect medical doctors and suffering patients By
Using Bio-Integrated Electronic Devices/Systems.
* Develop high performance flexible and stretchable
electronic and optoelectronic devices using high
quality single crystal inorganic materials.
* Apply flexible and stretchable technologies to bio-
integrated electronic devices for the health monitor
and therapy systems.
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High Performance Flexible Devices
Polymer Amor. Si Poly. Si Single Si SC III-V
~0.1 ~1 ~100 ~500 ~1000 Electron Mobility (cm2/Vs)
R. Reuss et al. Proc. IEEE (2005)
1 10 100 1000
100KHz
1MHz
100MHz
1GHz
TFT Capability (mobility, cm2/Vs)
Sy
ste
m A
pp
lic
ati
on
s
Organic Semiconductors
α Si
Poly Si
Single Crystal Si
LCD
OLED
RFID
Computer
High Performance
Market Applications
Low Performance
Market Applications
S. Mack et al. Appl.
Phys. Lett. (2006)
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Ultrathin Flexible Silicons
300nm thick silicon ribbons
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Transfer Printing
Printed surface can be flexible
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Area Expansion
Can increase spacing between structures
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Flexible Transistors Using Silicon Nanomembranes
100m
IEEE Electron Device Letters 29, 73 (2008)
500m
Transfer Curve
Vg (V)-7 -6 -5 -4 -3 -2 -1 0
- I d
(m
A)
0.0
0.3
0.6
0.9
1.2
1.5
1.8
2m
4m
9m14m19m24m
Vg (V)
-6 -4 -2 0 2
Id (
A)
10-2
10-5
10-8
10-11
Vg(V)
- I d
(A)
-6 -4 -2 0 2
10-2
10-5
10-8
10-11
Typical IV Curve
Vd (V)-3.0 -2.5 -2.0 -1.5 -1.0 -0.5 0.0
- I d
(m
A)
0.0
0.3
0.6
0.9
1.2
1.5
1.8- 6V
- 5V
- 4V
- 3V
nMOS pMOS
nMOS
pMOS
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Flexible Si CMOS Circuits
0.3mm
Vin
VDD Vout
Vin (V)0 1 2 3 4 5
Vo
ut
(V)
0
1
2
3
4
5
6
Gain
0
40
80
120
160
Time (s)-2 -1 0 1 2
Vo
ut
(V)
-6.0
-3.0
0.0
3.0
6.0
0.5mm
VDD Vout
Vin
100m
Metal
Interconnect
NMOS
PMOS
BCB Polyimide
SiO2
Vin
VDD Vout
nMOS
pMOS
CMOS inverter
3 stage CMOS
Ring Oscillator
IEEE Electron Device Letters 29, 73 (2008).
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Bending, Folding and Stretching
http://www.nokia.com
stretching Folding (extreme bending)
bending
Robot skin
Smart surgical glove
Wearable computer
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Extreme Bendability – ‘Foldability’ – In Ultrathin Circuits
cover slip
etch holeSiO2
metal
PI
Si (p) Si (n)
<1.7m
Science 320, 507 (2008).
thickness
bending radius Strain ~
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Conformal Contact to Curvilinear Surfaces
unwrapped
wrapped
unwrapped
unwrapped
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‘Wavy’ Silicon Nanoribbons are Stretchable
10 m
Materials
Mechanics
‘Accordion’ Physics
Science 311, 208 (2006).
PNAS 104, 15607 (2007).
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Advanced Wavy CMOS ICs
0.5 mm
Science 320, 507 (2008).
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Stretching CMOS
Science 320, 507 (2008).
stretching
0% 2.5% 5.0%
releasing
300 m
0% 4.0% 8.8% 0%
0%
stretching releasing
y
x
y
x
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300m
Non-Coplanar Serpentine Interconnects
PNAS 105, 18675 (2008).
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Stretchable iLED
Nature Materials 9, 929 (2010).
Stretch
Release
0 10 20 30 40 50
0.0
0.2
0.4
0.6
0.8
1.0 Initial X stretch: 60.1 % Diagonal: 57.7 %
Release
Curr
ent (m
A)
Voltage (V)
1 10 100 1000 0
25
30
35
40
Cycle
V a
t I=
20 ㎂
(V
)
200 um 200 um
X-stretch: strain = 30.1 % Initial: Pre-strain = 20.0 %
Island
Pop-up
2 mm
X-direction initial
Diagonal direction initial
Strain = 33.3 %
X-direction stretched
Strain = 45.5 %
Diagonal direction stretched
Stretch
Release
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3D Deformations
Nature Materials 9, 929 (2010).
0 degree: Flat
360 degrees
720 degrees
1 mm
0 10 20 30 40 50 60 70 80 90
0.0
0.2
0.4
0.6
0.8
1.0
Flat
360 Degrees 720 Degrees Back to Flat
Curr
ent
(mA
)
Voltage (V)
0 degree: Flat
360 degrees
720 degrees
1 mm Flat Inflated: 29.0 %
Pencil tip
1 mm
Balloon
Inflate
Deflate
Inflate
Deflate
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Stretchable Photovoltaic Array
Unpublished
patterning, doping, etching
p+
n+
PDMS
anchors
Si ribbon
Fabricate stretchable -cell
Transfer print silicon solar m-cells Transfer mesh array to biaxially
stretched PDMS substrate
L + ΔL
p+ n+
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Stretchable Energy Harvesting Device
Unpublished
x stretching
rele
asin
g
y stretching
rele
asin
g
0% 200m
30%
y
12.5 % Pre-strain
30%
0%
x
30 % stretching
0.0 0.1 0.2 0.3 0.4 0.5
0.0
2.0x10-5
4.0x10-5
6.0x10-5
8.0x10-5
1.0x10-4
1.2x10-4
Cu
rre
nt
(A)
Voltage (V)
0%
y-dir 30%
x-dir 30%
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Electronics on Various Substrates
bending
unfolding fo
ldin
g
1cm
1mm
Paper
1 mm
1 mm
Paper
1 mm
1 mm
Al foil
Adv Mater 21, 3703 (2009).
Nature Materials 9, 929 (2010).
Cycle0 250 500 7501000
Gain
0
50
100
150
200
VM
0
2
4
6
stretching
releasing
5mm
1mm
Stretched
5mm
vinyl glove
leather glove
Stretched
3 mm
Fabric
1 mm
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Bio-Integrated Electronics
Electrophysiology & Soft, Curvilinear
Tissues – High Performance
Flexible/Stretchable Electronics
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Current Technology for Epicardial Mapping
Conventional devices
- Single electrode mapping
- Iterative measurement for 2D map
(Long time EP procedures)
- High risk due to mapping delay
- Low resolution
(cannot pinpoint abnormal tissue)
Device Requirements
- High Resolution 2D Array
- Fast Mapping
- Large Area Coverage
Cardiac Electrophysiology (EP)
- aid diagnosis / guide therapy
for cardiac arrest or other
structural heart disease
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Flexible Electronics for Mapping
250 m
1.5 mm
Device Characteristics
- 1618, 800m spacing
- High Speed Silicon TRs
- ~15mm ~13mm
Flexible Electronics
- Conformal contact with
curvilinear, soft cardiac
tissues.
Science Translational Medicine 2, 24ra22 (2010)
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In-vivo Experiment with Swine Model
t = ~ 200 ms
1 cm
5 mm
5 mm
80-90 lb male Yorkshire pig
Expose epicardial surface through
sternotomy and pericardiotomy
Science Translational Medicine 2, 24ra22 (2010)
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High Resolution, Real-Time Mapping
10 m
V
400 ms
0.3
mV
20 ms
2D Graph 3
X Data
2100 2150 2200
Y D
ata
-0.4-0.20.00.20.40.60.81.0
Col 1
SNR ~ 50
Sci Transl Med 2, 24ra22 (2010)
(s)
0 200 400 600 800 1000 1200 1400 1600 1800-0.01
-0.005
0
0.005
0.01
2 4 6 8 10 12
2
4
6
8
10
12
14
16
0 200 400 600 800 1000 1200 1400 1600 1800-0.01
-0.005
0
0.005
0.01
2 4 6 8 10 12
2
4
6
8
10
12
14
16
0 200 400 600 800 1000 1200 1400 1600 1800-0.01
-0.005
0
0.005
0.01
2 4 6 8 10 12
2
4
6
8
10
12
14
16
0 200 400 600 800 1000 1200 1400 1600 1800-0.01
-0.005
0
0.005
0.01
2 4 6 8 10 12
2
4
6
8
10
12
14
16
-2 mV
+6 mV
-10 mV
800 m
t = 0 ms t = 11.2 ms
t = 14.4 ms t = 24 ms time
Raw data
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Neural Interface Application
Clinical mapping application for epileptic
seizure patients
• Diagnose and/or guide epilepsy surgery
• Pinpoint the location of onset of
epilepsy for patients whose epilepsy
location cannot be found with external
imaging techniques, such as MRI or CT
• Mapping brain functions before surgery
BCI neuroprosthetic application for paralyzed
patients with sensory or motor dysfunction
• Mapping and Decoding AP and LFP from
sensory and motor cortex
• Visual cortex/retina implantation
brings light back for blind people
• Cochlear prostheses restore hearing
• Face motor cortex implantation generates
machine languages
• Motor cortex implantation moves computer
cursors (below)
L. R. Hochberg et al., Nature (2006) 2 cm
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High Resolution over Large Area: EA with Multiplexers
IEEE Int. Symp. on Circuits and Systems, p 3115 (2007)
How to make a conformal contact??
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Long Term Gliosis of Penetrating Electrodes
PNAS 2003, 100, 11041
Advantage
~ High resolution (50~150 m size, 2~10 mm length, ~500 m spacing), Good SNR
Disadvantage
~ Penetration causes mechanical tissue damage → activate immune functions of
brain → cause deposition of astrocytic/inflammatory tissues on electrodes (after
3~6 months)→ poor SNR → difficult long time mapping
Neurosci. Lett. 2006, 406, 81
normal
reactive astrocytic
components of the
scar
Gliosis is a proliferation of astrocytes in damaged areas of the central nervous system (CNS)
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High Density Neural Mapping Array
~ 20X18 HDN Sensor Array
~ 300X300µm, 500µm spacing
1 mm
300 m
Kapton (PI) 14.0 m
3.0 m
10.0 m SU8
multiple misaligned via
Si PI
NMP
pt
Pt Contact
Electrodes
Multilayer
Misaligned
Via Structure
Horizontal
/ Vertical
Interconnect
Doped Si
Ribbons on
Polyimide
Pt
Via
1st MT 2nd MT
Si
0.2 mm
Load TR Multiplexer
Output +V Row Slt.
Elect -rode
Vd (V)
0 1 2 3 4
I d (
mA
)
0.0
0.4
0.8
1.2
1.6
Vg (V)
-2 0 2 4 6
I d (
A)
1e-7
1e-6
1e-5
1e-4
Y A
xis
2
0
40
60
I d (
µA
)
20
Nature Neuroscience 14, 1599
(2011).
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Seizure Measurement with HDN In-Vivo
Seizure induced (picrotoxin) 2 mm
HDN array on
visual cortex
1 mm
Nature Neuroscience 14, 1599 (2011).
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Seizure Mapping : Spiral/Plane Waves
Dela
y in m
s
0
20
40
60
80
100
120
140
160
Counterclockwise spiral delay map
0 ms
165 ms
110 ms
55 ms
Dela
y in m
s
0
10
20
30
40
50
60
70
80
90
Clockwise spiral delay map
0 ms
90 ms
60 ms
30 ms
II IV
I II IV V III III
500 ms
2 m
V
iEEG
Nature Neuroscience 14, 1599 (2011).
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Bioresorbable Implantable System
Science 337, 1640 (2012).
c
2 mm
0 min 10 min 5 min
1 cm
top view
Mg electrode
MgO
dielectric
doped Si
silk substrate
Mg
electrode
tilted view
MgO
dielectric
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Transient Silicon Electronics
Science 337, 1640 (2012).
3 mm 5 mm
Voltage (V)
Cu
rre
nt
(mA
)
-1.0 -0.5 0.0 0.5 1.0
0.0
0.1
0.2
0.3
0.4
0.5
Diode Resistor 1
Resistor 2
Resistor 3
0 1 2 3 4 50
5
10
15
20
Vd (V) I d
(m
A)
5V
3V
1V
0 1 2 3-40
-20
0
Frequency (GHz)
S2
1 (
dB
)
Inductor
LC oscillator
Capacitor
3 mm S D
G
VDD
VOUT
VIN
VGND
VGND
VDD VIN
VOUT
Mg dep. (shadow mask)
1 mm
1 2 30
1
2
3
0
2
4
6
8
Vin (V)
Vo
ut (V
)
Ga
in
NOR to NAND Time
V (
V)
0
2
4
VB
VA
(0,0)1
(0,1)0 (1,0)0 (1,1)0 0
2
4
Time
V (
V)
(0,0)1 (0,1)1 (1,0)1
(1,1)0
VB
VA VDD VA
VB
VOUT
2 mm
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In-vivo Experiment of Transience
Science 337, 1640 (2012).
1 cm
suture
Transistor
Implant Sutured 3 weeks 3 weeks
300 µm
A
B
C
4 mm
1-Re for
inner coil
2-Re for
outer coil
23
26
Turn on both coils
IR image
0 5 10 15 200
2
4
6
8
Time (day)
Q f
ac
tor
experiment
modeling
1 2 3
-12
-8
-4
0
in air
in silk
day 0
day 4
day 8
day 15
Re
fle
cti
on
(S
11
) d
B
Frequency (GHz)
5 mm
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Current Non-invasive Skin Electrophysiology
* Current procedure needs cleaning with alcohol wipes and
conductive gel, which is significantly UNCOMFORTABLE.
* Skin electrophysiology using gel is in LIMITED TIME USE
only, since conductive gel dries out over several hours.
* Electrodes and amplifying equipments are BULKY.
www.ucc.ie / openeeg.sourceforge.net
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Epidermal Electronic System
Science 333, 838 (2011).
antenna LED
wireless power coil RF coil
temp. sensor strain gauge
RF diode ECG/EMG sensor
0.5mm 0.5cm
undeformed state
stretched
boundary
compressed
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Serpentine Functional Units: Non-invasive Sensors,
Wireless Power Supply, Wireless Communications 0.5mm
S
D
G
Si res.
S D G
Si R
0.3mm
Pt CPDMS
cap.
ind.
0.5mm
S
D
G
S D
G
0.3mm
RB
RD
CIN COUT
RIN
ROUT
NMOS
VOUT
VIN
VDD
GND Frequency (GHz)0.0 0.5 1.0 1.5 2.0
Ca
pa
cit
or
S2
1 (
dB
)
-60
-40
-20
0
0.7085nF1.5nF2.204nF2.969nF
Frequency (GHz)0.0 0.5 1.0 1.5 2.0
Ind
uc
tor
S2
1 (
dB
)-30
-20
-10
0
Ind
uc
tor
S1
1 (
dB
)
-15
-10
-5
0
Capacitance (nF)0.5 1.0 1.5 2.0 2.5 3.0
Os
cil
. F
req
. (G
Hz)
0.4
0.5
0.6
0.7
0.8
0.9
0.5mm
Frequency (GHz)0.0 0.5 1.0 1.5 2.0
S11 (
dB
)
-40
-30
-20
-10
0
10
S21 (
dB
)
-120
-90
-60
-30
0
30
S11 fwdS11 rvsS21 fwd S21 rvs
1mm
0.3mm
P N
I
high voltage connection
Si
1 mm
LED
photo- detector
1
3
5
7
10-6
J/m3
Frequency (Hz)10-3 10-1 101 103 105
Ga
in
0.0
0.4
0.8
1.2
1.6
CIN=1F
CIN=220pF
CIN=
Science 333, 838 (2011).
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ECG and EMG (Leg and Neck) Recordings
Time (sec)0 5 10 15
Am
plitu
de (
V)
-100
0
100
200
up right
left down
Time (sec)0 5 10 15 20
Am
p. (
V)
-100
0
100
Time (sec)0 5 10 15 20
Am
p. (
V)
-100
0
100EES dry conv.
w/ gel
Time (sec)0.0 0.2 0.4
Am
plitu
de (
V)
-100
0
100
200
Q S
R
base
Time (sec) Time (sec) Time (sec) Time (sec)
up down left right
0 1 2 3 0 1 2 3 0 1 2 3 0 1 2 3
10
100
200
Fre
qu
en
cy (
Hz)
250
150
50
20
20
Fre
qu
en
cy (
Hz)
10
200
10
200
0 10 5 15
active
passive
0 10 5 15
walk stand
walk stand
100
100
Fre
qu
en
cy (
Hz)
Time (sec) 103
Science 333, 838 (2011).
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EEG (Forehead) Recordings: Alpha Rhythms
Frequency (Hz)5 10 15 20 25 30
DF
T C
oeff
icie
nt
0
10
20
30
eye close
eye open
103
Fre
qu
en
cy (
Hz)
Time (s) 0 4 8 12 16 20
5
10
20
15
0~10s eye close 10~20s eye open
opening blinking alpha
rhythm
1cm
bare skin
0.5 cm
skin patch
- When large ensembles of neurons fire synchronously, a large electric field is
generated and can be measured on scalp, called Electroencephalography (EEG).
- Alpha range neural activity (8~12Hz) reflects the attention to visual environment.
- When subjects gain visual attention focus, amplitude of alpha oscillation decreases,
while amplitude increases by losing visual attention focus (ex. eye close).
Science 333, 838 (2011).
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Suffering Patients Doctors
How to bridge?
Bio-Integrated
Electronics ?
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