EDAX on the XL-30

Tutorial #3Introduction to Using the X-ray

Analysis Program

Remember Purpose• Purpose of these tutorials is to enable the

user to understand the basics of OPERATING the XL-30 to obtain Secondary Electron and Back Scattered Electron Images, and to obtain an Energy Dispersive X-Ray Spectrum.

• Very little theory is given.• If the user’s requirements demand further

instruction, he or she should seek further formal instruction.

Assumptions

• This tutorial assumes that you have reviewed the previous tutorials;

• That you are familiar with and competent to use the XL-30 SEM;

• You have a sample loaded in the SEM chamber;

• You have the SEM operational.

Working Distance for EDS

• The optimum analytical working distance is 10 mm. This means that you sample should be in focus at a 10 mm working distance.

Start the EDS (DX) program

• Always start the XL-30 microscope control program before the EDS program

eDX Opening Screen

Collect a spectrum

• Place the beam where you want to collect of spectrum. – If it is from a spot you will need to use spot mode

in the Microscope Control.• I find it easier to control the beam using the XL-30

microscope control program than to try to control the beam from the eDX program.

– If you want to scan an area to collect a spectrum, scan on the area you wish to collect from.

Start the Collection

Stop the Collection

Identifying the Peaks

Quantify Results

Menus and Buttons

• The next slides will give a quick overview of the menus and buttons on the graphic interface.

• REMEMBER – IF YOU NEED MORE INFORMATION START WITH THE HELP FILES.

File Menu

Edit Menu

View Menu No. 1

View Menu No. 2

Qual Menu

Quant Menu

Proc Menu

Auto Menu

Setup Menu

Options, Window, and Help Menus

• There is only one option – SEM• Windows menu is self explanetory.• Help Menu – see this for more information.

Window Menu

Help Menu

Icons

Peak ID Page

Quantify Page

Microscope Control Page

That’s all

• You are less likely to use the other pages, but feel free to explore.

• To start, I suggest that you analyze some samples that you know the composition. That way you can tell if you have a problemor not.