EDAX on the XL-30
Tutorial #3Introduction to Using the X-ray
Analysis Program
Remember Purpose• Purpose of these tutorials is to enable the
user to understand the basics of OPERATING the XL-30 to obtain Secondary Electron and Back Scattered Electron Images, and to obtain an Energy Dispersive X-Ray Spectrum.
• Very little theory is given.• If the user’s requirements demand further
instruction, he or she should seek further formal instruction.
Assumptions
• This tutorial assumes that you have reviewed the previous tutorials;
• That you are familiar with and competent to use the XL-30 SEM;
• You have a sample loaded in the SEM chamber;
• You have the SEM operational.
Working Distance for EDS
• The optimum analytical working distance is 10 mm. This means that you sample should be in focus at a 10 mm working distance.
Start the EDS (DX) program
• Always start the XL-30 microscope control program before the EDS program
eDX Opening Screen
Collect a spectrum
• Place the beam where you want to collect of spectrum. – If it is from a spot you will need to use spot mode
in the Microscope Control.• I find it easier to control the beam using the XL-30
microscope control program than to try to control the beam from the eDX program.
– If you want to scan an area to collect a spectrum, scan on the area you wish to collect from.
Start the Collection
Stop the Collection
Identifying the Peaks
Quantify Results
Menus and Buttons
• The next slides will give a quick overview of the menus and buttons on the graphic interface.
• REMEMBER – IF YOU NEED MORE INFORMATION START WITH THE HELP FILES.
File Menu
Edit Menu
View Menu No. 1
View Menu No. 2
Qual Menu
Quant Menu
Proc Menu
Auto Menu
Setup Menu
Options, Window, and Help Menus
• There is only one option – SEM• Windows menu is self explanetory.• Help Menu – see this for more information.
Window Menu
Help Menu
Icons
Peak ID Page
Quantify Page
Microscope Control Page
That’s all
• You are less likely to use the other pages, but feel free to explore.
• To start, I suggest that you analyze some samples that you know the composition. That way you can tell if you have a problemor not.