dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · nonvolatile...

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Flash Memory 충북대학교 전자정보대학 2011.3.1 .. Email: [email protected] 전자정보대학 김영석 1

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Page 1: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

Flash Memoryy

김 영 석김 영 석

충북대학교 전자정보대학

2011.3.1. .

Email: [email protected]

전자정보대학 김영석 1

Page 2: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

ContentsVolatile Memory

Nonvolatile Memory

VTH of Floating Gate EEPROM

Fl h MFlash Memory

NOR Flash

NAND FlashNAND Flash

Limitations

Scalability

전자정보대학 김영석 2

Page 3: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

Volatile Memory1) DRAM(Dynamic Random Access Memory)

2) SRAM(Static Random Access Memory)

전자정보대학 김영석 3

Page 4: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

Nonvolatile Memory1) ROM (Mask Programmable Read Only Memory)

전자정보대학 김영석 4

Page 5: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

Nonvolatile Memory2) EPROM(UV Erasable Programmable ROM)

Floating Gate

Hot Electron Injection Program

TLVVVV 2090@7512UV Erase

nmTmLVVVV oxDCG 20,9.0@7,5.12 ==== μ

전자정보대학 김영석 5

Page 6: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

Nonvolatile Memory3) EEPROM(Electrically Erasable and Programmable ROM)

TVVVFl tVVVnmTVVVVVV oxsubDSCG

10@020:Erase10@0,20:Program =====

Program/Erase: FN(Fowler-Nordheim) Tunneling

nmTVVVFloatVVV oxsubCGSD 10@0,,20:Erase =====

4) Flash EEPROM

Erased at one time like EPROM

전자정보대학 김영석 6

cf. EEPROM: Byte Erase

Page 7: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

HCIE>100kV/cm => Hot Electrons

Lucky Electron Model

eIIII chsubchGi/~/ /ΦΦ−

VeVi

2.3~energybarrier injection :6.1~energy thresholdionization:

ΦΦ

전자정보대학 김영석 7

Page 8: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

FN TunnelingFowler-Nordhein Tunning Current

Oxide through Field Electric

/2

=⋅= −

FeFAJ FB

F~10MV/cm (J=0.1A/cm2)F 1 MV/cm (J .1A/cm2)

Program time (~ 1ms) : 12 order shorter than Retention Time (~ 1yr)

전자정보대학 김영석 8

Page 9: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

VTH of Floating Gate EEPROMElectrons (injected by HCI or FN tunneling) Increase Threshold Voltage

0@ DSFGpp

CGFG VVQCVV ==+= @

FGTHiTH

DSoxppoxpp

CGFG

CCQVV

CCCC

+−=

++

)22(2 0 FFSBTHdep

FFBTHi

oxpp

VVCQ

VV

CC

φφγφ −++=−+=

+

oxC

전자정보대학 김영석 9

Page 10: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

Flash Memory (or EEPROM)Non-volatile Memory

Electrically Erased and Programmed (Same as EEPROM)

Flash EEPROM: Erase at Once => Cost Effective/Dominant Technology

(N Fl h) EEPROM B t E(Non-Flash) EEPROM: Byte Erase

Applications: Memory Cards, USB Flash Drive, Mobile Phone, SSD

Widely Used instead of EEPROM and SRAMWidely Used instead of EEPROM and SRAM

Fast Read Access Time (Not As Fast As Volatile DRAM)

Better kinetic Shock Resistance than Hard Disks

Memory Card: Durable, Resistant to Intense Pressure, Extreme Temperature, Even in Water

전자정보대학 김영석 10

Page 11: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

Flash MemoryFloating-gate Transistor

Control Gate (CG) on top

Floating Gate (FG) bet. CG and Channel

Fl ti G tFloating-Gate

Electrically Isolated

Electrons are Placed => VTH IncreaseElectrons are Placed > VTH Increase

Not Discharge Electrons ~ 10 years

Read

Erased State: No Electrons on FG, VTH Low

Programmed State: Electrons on FG, VTH High

TType

NOR Flash

NAND FlashNAND Flash

전자정보대학 김영석 11

Page 12: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

NOR FlashIntel Introduced in 1988

One end to GND, the other end to Bit Line

Acts like NOR Gate: If One of the Word Lines High, the Storage Transistor pulls Bit Line LowTransistor pulls Bit Line Low

전자정보대학 김영석 12

Page 13: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

NOR FlashProgramming: Hot Carrier Injection

Erasing: FN Tunneling

Block-Wise Erase

전자정보대학 김영석 13

Page 14: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

NOR FlashRequire Internal Charge Pumps to get High Voltage from Battery

전자정보대학 김영석 14

Page 15: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

NAND FlashToshiba (Dr. Masuoka) Introduced in 1980

Resembles a NAND Gate: If All word lines High, the Bit Line Pulled Low

Denser Layout than NOR FlashDenser Layout than NOR Flash

FN Tunneling for Write/Erase

USB Flash Drives, Memory Cards, Solid-State Drivesy

전자정보대학 김영석 15

Page 16: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

Comparisons between NOR and NAND

전자정보대학 김영석 16

Page 17: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

LimitationsEndurance

Data Retention

전자정보대학 김영석 17

Page 18: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

Flash Market RankingsFlash Types/Company

Flash Market Share

전자정보대학 김영석 18

Page 19: dev8 flash.ppt [호환 모드]bandi.chungbuk.ac.kr/~ysk/devnot8.pdf · 2011-04-09 · Nonvolatile Memory 2) EPROM(UV Erasable Programmable ROM) Floating Gate Hot Electron Injection

Flash ScalabilityDesign Rule=30nm @2011

½ Shrink every 2 years

Cf. Moore’s Law: ½ Shrink every 3 years

Mi i F t Si 20Minimum Feature Size ~ 20nm

Further Flash Density Increases will be MLC, 3-D Stacking

전자정보대학 김영석 19