cms pre-shower status at ncu
DESCRIPTION
CMS Pre-Shower Status at NCU. A.C. Chen, Y.H. Chang, Apollo Go, W.T. Lin + 3 full time R.A.s + 5 engineers from ERSO and Miracle Tech. Co. Status of Silicon Production Bonding Stage Plans. Summary of IV/CV tests. Date batch# depth of n+ majority I@V>V fd - PowerPoint PPT PresentationTRANSCRIPT
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National Central University
CMS Pre-Shower Statusat NCU
• Status of Silicon Production
• Bonding Stage
• Plans
A.C. Chen, Y.H. Chang, Apollo Go, W.T. Lin + 3 full time R.A.s+
5 engineers from ERSO and Miracle Tech. Co.
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National Central University
Summary of IV/CV testsSummary of IV/CV tests Date batch# depth of n+ majority I@V>Vfd
6/5 cms01 14 m 50-150 nA/strip
6/5 cms02 50-150 nA/strip
6/15 cms03 5 m 100-150 nA/strip
6/18 cms04 50-100 nA/strip
6/18 cms05 3 m 250-350 nA/strip
6/15 cms06 300-400 nA/strip
• More than one strip have high leakage current that sensor can not be accepted.• 20 accepted sensors : 17 from 03 and 04, 3 from 01 and 02• 23oC, Cstrip=38 - 42 pF, Vfd= 80 - 120 V
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National Central University
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National Central University
Measurement of Wafers
• Thickness of wafer 325 m
• Al : 2 m, oxide 1.5 m
• p+ 4.7 m, n+ 5 m
passivationaluminum
Oxide
p+n+
10x10 m2 window
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National Central University
Depth (m)4.7
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National Central University
Depth (m)5
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National Central University
2nd layer Thermal oxide 1 m + PECVD field oxide 0.5 m 3rd layer Aluminum 2 m4th and 5th PECVD Oxide and Nitride 0.5 and 0.7 m
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National Central University
Status of Silicon Production
• 4 batches of silicon wafers were delivered.
• Starting from batch 51, size of window was changed to 10x10m2 instead of 300x400m2
Batch number 10024 10040 10051 10060
Delivered cycle
7/25
32 days
9/17
30 days
10/24
37 days
11/23
10 days
Wafers in/out 12/11 10/10 10/10 24/23
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National Central University
IV measured at 25oC, 63% of humidity
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National Central University
Bonding Stage• New micro-stage has been installed and tested.
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National Central University
Plans
• ERSO and Miracle engineers are trying to improve the yield. If the yield is higher then 30%, then ERSO will start mass production.
• Plan to deliver all the 1,200 wafers in 6 months. We expect to start in early 2003.
• Keep the bonding stage alive.