cmns nanoscale measurements 20070227

8/6/2019 CMNS Nanoscale Measurements 20070227

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Jason Chang

Institute of Physics, Academia [email protected]

http://http://www.phys.sinica.edu.tw/~nanowww.phys.sinica.edu.tw/~nano//

Nanoscale measurementsNanoscale measurements

NanoNanoSciSciLabLab

http://www.phys.sinica.edu.tw/TIGP-NANO/Course/2007_Spring.htm


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A. Introduction

B. Operational Principles:a.Electron b.X-ray c.Scanning Probe

C. From measuring to sensing

D. From measuring to manipulatingE. From measuring to fabricating

F. Considerations for making nanoscale

toolsG. Future development of nanoscale

measurements

H. Conclusions

OutlineOutlineNanoNanoSci

SciLabLab


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Optical lithography and planarOptical lithography and planarfabrication of VLICfabrication of VLIC

Intel Corp.



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Numbers of transistors in an ICNumbers of transistors in an IC

Intel Corp.



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Evolution of IC industry

Jean Hoerni

Nano

NanoSciSciLabLab


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Electronic properties ofElectronic properties ofa carbon nanotubea carbon nanotube



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SingleSingle-- walled CNT transistorwalled CNT transistor

S.J. Tans et al., Nature393, 49 (1998).



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1 100

/



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mev

Compton Scattering

Photon as a particlePhoton as a particle

E=h P=h/Einsteins proposal:



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Electron as a waveElectron as a wave

= h/E= h/Pde Broglies proposal:

LEED

e-Gun

Grids

Crystal20 200 eV

For electrons: (nm) = 1.22/E1/2(eV)



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Fundamentals of Quantum MechanicsFundamentals of Quantum Mechanics


1. Quantization

2. Tunneling

3. Statistics1

kT


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Size effectSize effect

Size



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Measurement of electronic statesMeasurement of electronic states

S. H. Pan et al., Rev. Sci.Instru. 40, 1459 (1999).

YBCOBaO CuO



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Properties of a nanostructureProperties of a nanostructure

SizeStructure

ShapeSymmetryDomainsDefects

.

.

.

MicroscopicAnalytical

CompositionStoichiometry

ElectronicMagneticThermalMechanical

.

.

.


photons, electron, ion, neutron, proximal nanoobjects


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Semiconducting quantum dots

(Reproduced from Quantum Dot Co.)



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Critical lengthsCritical lengths

C. Joachim et al., Nature408, 541 (2000).



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Characteristics ofCharacteristics ofelectron transportelectron transport

BallisticW,L < l

Diffusive

l< W,L < l

Classical

W

L

l


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MinituralizationMinituralization of length scaleof length scale

MacroMacro MicroMicro NanoNano

continualcontinual discretediscrete

scalablescalable nonscalablenonscalable

evolutionaryevolutionary revolutionaryrevolutionary

classicalclassical quantum mechanicalquantum mechanical



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Simulation ofSimulation of DNA dynamicsDNA dynamics



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Alternating and complementaryAlternating and complementarycontrastcontrast

3

1 3

4

5

II6

5I

1

34

5 6

W.B. Jian et al. PRL 90, 196603 (2003)



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0 1 2

L3 Ag / Type I (fcc)

(dI/dV)/(I/V)

Sample bias (V)

A=3.0 nm2

A=2.5 nm2

A=1.6 nm2

A=1.1 nm2


SizeSize-- dependent I/V spectra by STSdependent I/V spectra by STS

5 nm


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Shapes of Ag nanopucksShapes of Ag nanopucks

10 nm


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Triangular : Ag21

Hexagonal : Ag61

0 1 2

Triangular Ag21

dI/

dV

Sample bias (V)0 1 2

0

(dI/dV

)/(I/V)

Sample bias (V)

Hexagonal Ag61

SizeSize-- and shapeand shape-- dependent I/V spectradependent I/V spectra

10 nm


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Interaction betweenInteraction betweenee-- beam and samplebeam and sample

Direct beam

Incident high kV beam

Visible light

CharacteristicX-raysAuger

electrons

Backscatteredelectrons

Secondary electrons

Bremsstrahlung

X-raysInelastically

scattered electronsElastically

scattered electrons

Specimen

Electron-hole pairsAbsorbed electrons



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Energy (eV)

Inte

nsity

E0E0-5050

400 500

dN/dE

Secondaryelectrons

Augerelectrons

Primaryelectrons

Plasma



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Cross section view of HRTEMCross section view of HRTEM


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(TEM)(TEM)NanoNanoSci

SciLabLab


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TEMTEM NanoNanoSci

SciLabLab


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QuickQuickBeamBeam SelectSelect SystemSystem


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Information from TEMInformation from TEM

Lattice imageLattice image

GaAs/AlAsGaAs/AlAs CBEDCBED

Electron DiffractionElectron DiffractionEDSEDS

EELS or GIFEELS or GIF

STEM+BF, HAADFSTEM+BF, HAADFMapping and ZMapping and Z--contrast imagecontrast image


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EDS wi t h spat i al r esol ut i onDS wi t h spat i al r esol ut i on

EDS mapping


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EDS mapping

STEM

Ti Al

Hi h l i EELSHi h l i EELS


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High resolution EELSHigh resolution EELS

Energy Filtered images of insulating layerEnergy Filtered images of insulating layer

10nm

Zero-Loss imageN

OSi

Quantitative profiles

Hi h l i STEM iHi h l ti STEM i


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WW--plug.plug.

Si

High resolution STEM imageHigh resolution STEM image


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Semiconducting quantum dotsand carbon nanotubes

(Reproduced from Quantum Dot Co.)

Peapod CNT


Multiwall CNT


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Scanning electron microscopyScanning electron microscopy(SEM)(SEM)NanoNanoSciSciLabLab


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SEM contrastSEM contrast

Scanning e beam

Secondaryelectrons



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XX--Ray MicroscopyRay MicroscopyNano

NanoSciSciLabLab


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3D X3D X--Ray ImageRay Image

J. Miao et al., PRL 89, 088303 (2002).

Nano

NanoSciSciLabLab


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Scanning Tunneling Microscopy (STM)

--- G. Binnig, H. Rohrer et al, (1982)

Near-Field Scanning Optical Microscopy (NSOM)

--- D. W. Pohl (1982)

Atomic Force Microscopy (AFM)

--- G. Binnig, C. F. Quate, C. Gerber (1986)

Scanning Thermal Microscopy (SThM)

--- C. C. Williams, H. Wickramasinghe (1986))

Magnetic Force Microscopy (MFM)

--- Y. Martin, H. K. Wickramasinghe (1987)Friction Force Microscopy (FFM or LFM)

--- C. M. Mate et al (1987)

Electrostatic Force Microscopy (EFM)

--- Y. Martin, D. W. Abraham et al (1988)

Scanning Capacitance Microscopy (SCM)

--- C. C. Williams, J. Slinkman et al (1989)

Force Modulation Microscopy (FMM)

--- P. Maivald et al (1991)

HistoricalHistorical

development ofdevelopment of SPMsSPMs

Nano

NanoSciSciLabLab


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(Scanning(Scanning

TunnelingTunneling

Microscopy)Microscopy)

Nano

NanoSciSciLabLab


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From one-dimensional tunnelingproblem tunneling current (eV


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UHV STMUHV STM

Nano

NanoSciSciLabLab


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Empty-state image Filled-state image

STM Images of Si(111)STM Images of Si(111)--(7(77)7)

Nano

NanoSciSciLabLab


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SiSiN4

20100nm

(DC)(AC)

(Atomic Force Microscopy, AFM)

Nano

NanoSciSciLabLab


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CD pits Integrated Circuit

Bacteria Chromosomes DNA

DVD pitsAFM imagesAFM images

Nano

NanoSciSciLabLab


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Probe/sample interactionProbe/sample interactionas function of distanceas function of distance

Lennard-Jones potential (r) = - A/r6 + B/r12

1) 2)

1) 2) 3) 4)

Nano

NanoSciSciLabLab


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1) Pauli 2)

Nano

NanoSciSciLabLab


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Nan

o

NanoSciSciLabLab


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Reaction of probe to the forceReaction of probe to the force



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Detection

mechanism Display

Local probe

X-Y-Z Piezo transducer

(Fine positioning)

Sample

Coarse approach

and positioning

Vibration isolation

Feedback

mechanism

Basic configuration of AFMBasic configuration of AFM

Cantilever



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Tip andcantilever

Laser

Detector

PiezoelectricTube Scanner

Sample

Core components of an AFMCore components of an AFMNanoNano

SciSciLabLab


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Probes for the tapping modeProbes for the tapping mode

Typical Tip Dimension:150m x 30m x 3mfr ~ 100 kHzMaterials: Si



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100 nm(0.2 ~ 0.3 nm)ScanningProbe MicroscopeSPM80



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(OM)

(SEM)

(TEM)

(SPM)

300 1

20 10

1 1 0.1 0.1

NanoNano

SciSciLabLab

Molecular ScaleMolecular Scale NanomechanicsNanomechanics


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Mechanical Sensing in Nature

Molecular ScaleMolecular Scale NanomechanicsNanomechanics

Driving Force in BioDriving Force in Bio--systemssystems

At the fundamentallevel, all interactions

in biology andchemistry aremechanical innature

Hair bundle:frogs inner ear

Micro and Nano cantilever arraysMicro and Nano cantilever arrays --


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Micro and Nano cantilever arraysc o a d a o ca t e e a ays

Emulating natureEmulating nature

Ideal displacement sensor

Sub nm sensitivity Displacement ~ force

Surface stress, temperature

Mass loading

Sesitivity:

Function of dimensions

Selectivity:Function of coatings

Mass production

Microcantilevers:Microcantilevers:


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Microcantilevers:Microcantilevers:

Getting the signal outGetting the signal out

Optical

Piezoresistivity

Piezoelectricity

Capacitance


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Microcantilevers To NanocantileversMicrocantilevers To Nanocantilevers Increased Sensitivity High Resonance

Frequency Small Spring

Constants

Single MoleculeDetection

Challenges:Signal TransductionMass production

(Craig Prater, DI)


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NanoelectromechanicalNanoelectromechanicaloscillatoroscillator


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Molecular sensingMolecular sensing

NanoNano

SciSciLabLab


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S. S. Wong et al., Nature394, 52 (1998).

ChemicalChemical nanoprobenanoprobeNanoNano

SciSciLabLab


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Manipulation methodManipulation methodNanoNano

SciSciLabLab


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Ultimate goal of nanotechnologyUltimate goal of nanotechnology

M.F. Crommie et al.,Science262, 218 (1993).

5 nm

NanoNano

SciSciLabLab


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Quantum MirageQuantum Mirage

H. C. Manoharan et al.,Nature403, 512 (2000).

NanoNanoSci

SciLabLab


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Molecular unfoldingMolecular unfoldingNanoNanoS

ciSciLabLab


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TEM

2.5 mm

3 mm

Tip Sample

Pb/Si(111)

1200nm

Tip with a nanotube Mesa structure for holding

the nano-object

STM

UHV HRTEM/STMUHV HRTEM/STMNanoNanoS

ciSciLabLab


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Point contact of Au wirePoint contact of Au wire

H. Ohnishi et al.Nature 395, 780 (1998).

NanoNanoSci

SciLabLab


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Periodic nanostructuresPeriodic nanostructuresby eby e-- beam lithographybeam lithography

~30 kV

~30 kV

NanoNanoSci

SciLabLab

Procedures of eProcedures of e-- beam lithographybeam lithography

NN


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e-beam(a) (b)

(c) (d)

deposition

After development

After lift-off

Procedures of eProcedures of e beam lithographybeam lithographyNanoNanoSci

SciLabLab

NN


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NanoNano--Lithography with an AFM tipLithography with an AFM tip

NanoNanoSci

SciLabLab

NaNa


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Electrical LithographyElectrical Lithography

F.S.-S. Chien et al.APL 75, 2429 (1999)

NanoNanoSci

S

ciLabLab

NanNano


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C.A. Mirkin et al.Science 288, 1808 (2000)

NanoplotterNanoplotterNanoNanoS

ci

S

ciLabLab

NanoNano


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Image of polycarbonate film on silicon surface

(1.2m 1.2m) (2.5m 2.5m)

Nanolithography of TappingNanolithography of Tapping--Mode AFMMode AFM

NanoNanoS

ci

SciLabLab

NanoNanoSS


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NanodriveNanodriveNanoNanoSc

i

SciLabLab

NanoNanoSS


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The Millipede concept: foroperation of the device,

the storage medium - a thin filmof organic material

(yellow) deposited on a silicon"table" - is brought intocontact with the array of silicon

tips (green) andmoved in x- and y-direction forreading and writing.Multiplex drivers (red) allowaddressing of each tip

individually.

IBM-Zurich

MillipedeMillipedeanoanoSc

i

SciLabLab

Cantilever arrayCantilever arrayNanoNanoSS


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Millipede cantilevers and tips: electron microscope views ofthe 3 mm by 3 mm cantilever array (top), of an array sectionof 64 cantilevers (upper center), an individual cantilever

(lower center), and an individual tip (bottom) positioned at thefree end of the cantilever which is 70 micrometers (thousandsof a millimeter) long, 10 micrometers wide, and 0.5micrometers thick. The tip is less than 2 micrometers highand the radius at its apex smaller than 20 nanometers(millionths of a millimeter).

14 mm

7 mm

yynooSci

SciLabLab

Considerations forConsiderations forNanoNanoScSc


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1. Size compatibility2. Force compatibility

3. Mechanical Properties

4. Chemical Properties

5. Precision movement

6. Integratible coarse movement

7. Environment interferences

making nanoscale toolsmaking nanoscale toolsSc

i

SciLabLab

NanoNanoScSc


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Maneuvering toolsManeuvering tools

250m

10 mm

Sci

SciLabLab

NanoNanoScSc


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Operation ofOperation of nanonano tweezerstweezers

P. Kim and C.M. Lieber,Science286, 2148 (1999).

Sci

SciLabLab

NanoNanoScSc


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Nano Lett. 2, 101 (2002)

Science292, 1897 (2001)

ZnO Nanobelts

Science281, 973 (1998)

GaN NanowireFET

Science291, 1947 (2001)

ZnO Nanowires

SiC/SiO2 Nanocable

Nano wires and beltsNano wires and beltsci

ciLabLab

NanoNanoScSci


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Precision stepperPrecision stepper

x100 x1000

10x15x2 mm3

ci

ciLabLab

Considerations forConsiderations forNanoNanoScSci


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environmental factorsenvironmental factors

EMIshield

Acoustic

isolation

Temp.,humidity &

ventilation control Dust filtering

iLabLab

Vibrationdamping

NanoNanoSciSci


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Goals for next 5Goals for next 5--10 years10 years

Instruments for analysis of supramolecules,biomolecules, and polymers.

3-D structure determination.

Nanostructure chemical identification.

In situfunctional measurements.

Functional parallel probe arrays.

Standardization and metrology.

New nano-manipulators.

LabLab

NanoNanoSciSci

L bL b


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LabLab

NanoNanoSciSci

LabLab


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ReferencesReferences

http://www.di.com/

http://www.topometric.com/

1. Scanning Tunneling Microscopy II,

eds. R. Wiesendanger and H.-J.Guntherodt (Springer-Verlag, Berlin,1992).

2. M. Stark and R. Guckenberger, Rev.

Sci. Instru. 70, 3614 (1999).

LabLab

cmns nanoscale measurements 20070227

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