Challenges and solutions for

Impedance measurements

Gustaaf Sutorius

Application

Engineer

1

2

Introduction & Objectives for today

Challenges and solutions for Impedance measurements

3

Challenges and solutions for Impedance measurements

Agenda

1. Introduction

2. Impedance Basics & Measurement Methods

3. LCR Meters

4. Impedance Analyzers

5. Accessories/test-fixtures

6. Vector Network Analyzers

• E5061B VNA as Impedance Analyzer

7. Reference Documents + Q&A

4

Agenda

1. Introduction

2. Impedance Basics & Measurement Methods

3. LCR Meters

4. Impedance Analyzers

5. Accessories/test-fixtures

6. Vector Network Analyzers

• E5061B VNA as Impedance Analyzer

7. Reference Documents + Q&A

5

Objectives

• Review Impedance Measurement Methods

• LCR meter vs Impedance analyzer vs Network

Analyzer

• Review E5061B Network Analyzer/Impedance

Analyzer.

• “It’s also the test-fixture”

6

Impedance Measurement Applications

www.agilent.com/find/impedance

Auto-balancing Bridge

Transformer

Measurements

Capacitor

Measurements

Inductor

Measurements

Resistor

Measurements

Material

Measurements

On-wafer C-V

Measurements

Resonator

Measurements

In-circuit

Tests

MOS FET

Measurements Diode

Measurements

Battery

Measurements

RF I-V LCR Meters Impedance Analyzers (ZA) Wide Variety of Test Fixtures

Cable

Measurements

7

Solutions for Measuring Impedance

‘60

‘70

‘80

‘90

‘00

‘10

Low-Cost

LCR Meter ZA RF ZA

High-Performance

LCR Meter Capacitance

Meter RF LCR Meter

4270A

E4991A

4291A/B

E4980A

E4982A

4294A

4263A/B 4284A/85A

4278A

4192A

4194A

4260A

4271A

4261A

4274A/75A

4262A

4272A/73A

4268A/88A

E4981A

4286A

4287A

4191A

4276A/77A

Installed Base of Legacy Products E4980AL

8

Agenda

1. Introduction

2. Impedance Basics & Measurement Methods

3. LCR Meters

4. Impedance Analyzers

5. Accessories/test-fixtures

6. Vector Network Analyzers

• E5061B VNA as Impedance Analyzer

7. Reference Documents + Q&A

9

Impedance

Z = R + jX (rectangular-coord)

Z = |Z| (polar form)

R = |Z| cos

X = |Z| sin

|Z| = R2 + X2

Imaginary axis

X

R Real axis

|Z|

Z (R,

X)

= tan-1(X/R)

Unit of impedance: ohm ()

Z: Total opposition a device or circuit offers to the flow of AC

+j

10

Series and Parallel Combinations

Real and imaginary

components are

connected in series

Z = R + jX

(Impedance is easier to express)

Y = G + jB

(Admittance is easier)

R

jX

G

jB

R jX

(Impedance is too complex)

R + jX

jRX =

RX2 R2X + j Z =

R2 + X2 R2 + X2

Real and imaginary

components are

connected in parallel

Unit of admittance: Siemens (S) conductance, G and the susceptance, B

11

Inductive and Capacitive Reactance

L (Inductance) C (Capacitance)

XL= 2fL = L C

XC = 2fC

1 =

1

R jXL R -jXC

Q = quality factor

(a) Inductive vector

on impedance plane

(b) Capacitive vector

on impedance plane

XL

R =

-XC

R =

= tan

Z jXL

R

Z -jXC

R

tan

= D dissipation factor = 1

Q =

: Angular frequency (= 2f)

12

Parasitics

• No real components are purely resistive or reactive

Capacitor Equivalent Circuit

• Every component is a combination of R, C and L elements

• The unwanted elements are called parasitics

Unwanted

R and L of

leads

Unwanted R and C

of dielectric

Intrinsic C

13

Series and Parallel Models

High-Impedance Device

(Small C, Large L; |Z| 10 k)

Capacitor Equivalent

Circuit

Series

Model

Parallel

Model R

s

C

s

R

p

C

p Low-Impedance Device

(Large C, Small L; |Z| 10 )

14

Equivalent circuit models of components

15

Relationship between Series and Parallel mode

16

Component Dependency Factors

• Test signal frequency

• Test signal level

• DC voltage and current bias

• Environment

• Measurement conditions that determine the measured

impedance value

• Effects depend on component materials and manufacturing

processes

• Four major factors:

17

X versus Test Signal Frequency

|X|

Frequency ()

XL = L

XC =

1

C

Capacitor

Resonant

Frequency

XC = XL

L C

18

Impedance versus Frequency

C

1

L

fs

|Z|

Example Capacitor Resonance

19

C versus Test Signal Level

AC Test Signal level (Vac)

Low K

Mid K

High K

C

AC voltage dependency of ceramic SMD capacitors

for various values of dielectric constant (K)

Capacitance change due to

AC voltage dependence of

K value

20

C versus DC Voltage Bias

Type I

C0G or NPO (Low K)

0

Type II

X7R,Y5V, or Z5U (High K)

DC bias voltage

C

DC bias voltage dependency of

type I and II SMD capacitors

Capacitance change due to

DC voltage dependence of K value

21

L versus DC Current Bias

L

0

DC bias current

DC bias current dependency of

cored inductors

Inductance roll-off due to

magnetic saturation of inductor core

22

C versus Temperature

C

0

High K

Mid K

Temperature (C)

|

25

Temperature dependency of ceramic

capacitors for different K values

K: Dielectric Constant

23

Agenda

1. Introduction

2. Impedance Basics & Measurement Methods

3. LCR Meters

4. Impedance Analyzers

5. Accessories/test-fixtures

6. Vector Network Analyzers

• E5061B VNA as Impedance Analyzer

7. Reference Documents + Q&A

24

(1) Auto-Balancing Bridge method

V

-

+

2

V 1

DUT

V2 =

Z = V1

Ir =

V1 Rr

V2

HIGH LOW

R r

I r

Virtual ground (driven at 0 V)

I I = I r

- Ir Rr

-

Signal

Source

Measurement Principle

25

(2) RF I-V method

Zx= = ( - 1) V R Vv

I 2 Vi

Vi

Vv

R/2

R DUT Voltage

detection

Current detection

Test Head (High-Impedance type)

Z

x V

I

R

R = 50

Signal

Source

Measurement Principle

As V = Vv – Vi and I = 2Vi /R

26

(3) Network Analysis method

DUT

Vr

Vr

VINC

ZX - Z0 = = ZX +

Z0

VINC

ZX

V

Incident

Signal

Reflected

Signal

Directional Bridge

or Coupler

OSC

V VINC Vr

Zo: 50 or 75

Measurement Principle

27

Summary of Measurement Methods

Method Frequency

Range

Impedance

Range

Terminal

Connections

# of

Ports

1 m Z 100 M

(10% acc)

0.2 Z 20 k

(10% acc)

Z Z0 f 300 kHz

1 MHz f 3 GHz

20 f 110 MHz

Network

Analysis

RF I-V

Auto-

Balancing

Bridge

7 mm, N-type

7 mm

4-terminal pair,

BNC

N 1

1

1

Impedance (

)

Frequency (Hz)

Network An.

Auto-Balancing Bridge

RF I-V

28

Network Analysis

RF I-V

Measurement Method Agilent Product Frequency Range

Auto-Balancing

Bridge

4263B LCR Meter

E4981A C Meter

E4980A Precision LCR Meter

4285A Precision LCR Meter

4294A Precision Impedance Analyzer

100 Hz to 100 kHz spot

120 Hz/1 kHz/1 MHz spot

20 Hz to 2 MHz

75 kHz to 30 MHz

40 Hz to 110 MHz

E4982A RF LCR Meter

E4991A Impedance/Material Analyzer

1 MHz to 3 GHz

1 MHz to 3 GHz

5 Hz to 20 GHz ENA Series

Vector Network Analyzers

300 kHz to 1.1 THz PNA Series

uW Vector Network Analyzers

Measurement Methods and Agilent products

29

Impedance Measurement Methods and Instrument selection

1) Frequency

2) DUT impedance

3) Required measurement accuracy

4) Electrical test conditions

5) Measurement parameters

6) Physical characteristics of DUT

These determine the most

suitable method

These determine the proper

instrument and test fixture

30

Agenda

1. Introduction

2. Impedance Basics & Measurement Methods

3. LCR Meters

4. Impedance Analyzers

5. Accessories/test-fixtures

6. Vector Network Analyzers

• E5061B VNA as Impedance Analyzer

7. Reference Documents + Q&A

31

Historical Product Overview Over 40 Years Experience

‘60

‘70

‘80

‘90

‘00

‘10

Low-Cost

LCR Meter ZA RF ZA

High-Performance

LCR Meter Capacitance

Meter RF LCR Meter

4270A

E4991A

4291A/B

E4980A

E4982A

4294A

4263A/B 4284A/85A

4278A

4192A

4194A

4260A

4271A

4261A

4274A/75A

4262A

4272A/73A

4268A/88A

E4981A

4286A

4287A

4191A

4276A/77A

ZA LCR

Installed Base of Legacy Products E4980AL

32

Current Product Portfolio for Impedance

4294A

Precision impedance analyzer

E4980A

precision LCR meter

4263B

LCR meter E5071C

ENA network analyzer

E4991A

RF impedance/material analyzer

E4981A

Capacitance meter

LCR meter Impedance Analyzer Network Analyzer

E4982A

LCR meter

E5061B

ENA-L network analyzer

E4980AL

precision LCR meter

www.agilent.com/find/impedance

33

Product Overview LCR Meters & Impedance Analyzers & Network Analyzers

LCR Meters & Impedance Analyzers Network Analyzers

Specialized to measure LCR & impedance

High impedance accuracy

Wide impedance measurement range

Main target application:

• Capacitors, inductors, resonators

• Materials

• Semiconductor

• In-circuit (4294A w/42941A)

Measure S-parameter, also can be used for

impedance measurement

Higher Frequency range

Main target application:

• Filters, Antennas

• DC-DC converters

• Amplifiers, Mixers

34

Product Overview LCR Meters & Impedance Analyzers Product Portfolio

Main

Usage R

&D

La

b

Genera

l P

urp

ose

Hig

h V

olu

me

Ma

nu

factu

rin

g

$10k

Unit Price [$]

$20k $30k $40k $50k

4263B

LCR meter

100 Hz – 100 kHz

E4981A

Capacitance meter

120 Hz, 1 kHz, 1 MHz

E4982A

RF LCR meter

1 MHz – 3 GHz

4339B

High-R meter

4285A

Precision LCR meter

75 kHz – 30 MHz

4294A

Precision impedance analyzer

40 Hz – 110 MHz

E4991A

RF impedance/material analyzer

1 MHz – 3 GHz

+ Wide Variety of

Accessories

ZA

LCR

E4980AL E4980A Precison LCR meter

20 Hz – 300 kHz/500 kHz/1 MHz/2 MHz

35

LCR Meters

4294A

precision impedance analyzer

E4991A

RF impedance/material analyzer

LCR meter Impedance Analyzer Network Analyzer

E5071C

ENA network analyzer

E5061B

ENA-L network analyzer

E4980A

precision LCR meter

4263B

LCR meter

E4981A

capacitance meter

E4982A

LCR meter

4339B

high-R meter

E4980AL

precision LCR meter

36

LCR Meters What Is LCR & Impedance Measurement?

Capacitance

(Cs, Cp)

Inductance

(Ls, Lp)

Phase ()

Z

R

X

Reactance (X)

Resistance (R)

Measure Z, then calculate LCR value…

δ

D, Q

E4980A

(Cp-D measurement)

37

LCR Meters Overview

Frequency (Hz)

10 100 1k 10k 100k 1M 10M 100M 1G 10G

20 Hz – 2 MHz

100 Hz – 100 kHz

1 MHz – 3 GHz

120 Hz, 1 kHz, 1 MHz

E4980A precision LCR meter

4263B LCR meter

E4981A capacitance meter

E4982A LCR meter

• Spot frequency measurement

• Numeric only display

• Low cost

• High speed

• Application specific E4982A Measurement Display E4980A Measurement Display

20 Hz – 300 kHz/500 kHz/1 MHz E4980AL precision LCR meter

38

LCR Meters List Sweep : the poor mans Impedance Analyzer”

• Instrument: E4980A

• DUT: 100 nF ceramic capacitor & 100 uH chip inductor

• Key Word:

– Adapter Compensation

– ALC function

– List Sweep

39

LCR Meters Key Products Overview

E4982A LCR Meter 1 MHz to 3 GHz

• An industrial standard in RF impedance/material measurements up to 3 GHz

• Target applications – passive components

• Target customers – manufacturing

• Migration opportunities – 4286A, 4287A

E4980AL/A Precision LCR Meter 20 Hz to 300 kHz, 500 kHz, 1 MHz / 2 MHz

• A new standard for low-frequency impedance measurements up to 2 MHz

• Target applications – passive components, semiconductors, MEMS, materials

• Target customers – R&D, manufacturing, QA, incoming inspection

• Migration opportunities – 4279A, 4284A

E4981A Capacitance Meter 120/1k/1MHz

• A new standard for ceramic capacitor (C) production tests

• Target applications – capacitors

• Target customers – manufacturing

• Migration opportunities – 4278A, 4268A, 4288A

4263B Low-Cost LCR Meter 100/120/1k/10k/100kHz (20kHz option)

• Cost effective solution for low-frequency impedance measurements up to 100 kHz

• Target applications – passive components, transformers, electrolytic capacitors

• Target customers – R&D, manufacturing

• Migration opportunities – 4263A

40

Agenda

1. Introduction

2. Impedance Basics & Measurement Methods

3. LCR Meters

4. Impedance Analyzers

5. Accessories/test-fixtures

6. Vector Network Analyzers

• E5061B VNA as Impedance Analyzer

7. Reference Documents + Q&A

41

Impedance Analyzers

4294A

precision impedance analyzer

E4991A

RF impedance/material analyzer

LCR meter Impedance Analyzer Network Analyzer

E5071C

ENA network analyzer

E5061B

ENA-L network analyzer

E4980A

precision LCR meter

4263B

LCR meter

E4981A

capacitance meter

E4982A

LCR meter

4339B

high-R meter

E4980AL

precision LCR meter

42

• No real components are purely resistive or reactive

Capacitor Equivalent Circuit

• Every component is a combination of R, C and L elements

• The unwanted elements are called parasitics

Unwanted

R and L of

leads

Unwanted R and C

of dielectric

Intrinsic C

Impedance Analyzers Parasitics

43

Impedance Analyzers X versus Test Signal Frequency

Frequency ()

XL = L

XC =

1

C

Resonant

Frequency

C L Im

ped

an

ce |

X|

44

Impedance Analyzers Example Capacitor Resonance

Impedance versus Frequency

C

1

L

|Z|

45

Impedance Analyzers Overview

Frequency (Hz)

10 100 1k 10k 100k 1M 10M 100M 1G 10G

• Sweeps parameter, displays graphics

– Frequency

– DC Bias

– AC level

• Use model

– Frequency characteristics analysis

– Resonant analysis

– Circuit modeling

40 Hz – 110 MHz

1 MHz – 3 GHz

4294A precision impedance analyzer

E4991A RF impedance/material analyzer

46

Impedance Analyzers 4294A Impedance Analyzer

Frequency range: 40 Hz ～ 110 MHz

Basic measurement accuracy: 0.08 %

Key numbers…

A

L

Ca

R

B

Ca

L R

C

Ca

L

R

L Ca R

Cb

L Ca R

E D

EQV R 38.6347 mΩ EQV L 2.19795 nH

EQV Ca 82.1028 nF

EQV Cb F

C

DC LVL

C

AC LVL

Z-Q

Frequency

Frequency Sweep DC Bias Sweep AC Level Sweep

Versatile Analysis Functions

Equivalent Circuit Calculation

47

– Frequency dependency of the capacitor

– Influence of the residual inductance

– Resonant frequency

– Equivalent circuit simulation

– Limit Test

Impedance Analyzers allow to measure:

48

Impedance Analyzers Key Products Overview

E4991A RF Impedance/Material Analyzer 1 MHz to 3 GHz

• An industrial standard in RF impedance/material measurements

• Target applications – passive components, semiconductors, materials

• For – R&D, QA, incoming inspection

• Replaces 4291A

4294A Precision Impedance Analyzer 40 Hz to 110 MHz

• An industrial standard in mid-freq. impedance measurements

• Target applications – passive components, semiconductors, materials, in-circuit

• For– R&D, QA, incoming inspection

• Replaces – 4192A, 4194A

49

Summary: Impedance Analyzer versus LCR Meter

Impedance Analyzer LCR Meter

• Full measurement conditions

• Freq/Osc/DC bias sweep

• Wide frequency coverage

• Versatile analysis capability

• Markers, List Sweep, Limit

Test, EQT CKT, IBASIC, LAN

• Graphic display

• Measurement traces

Suitable for deep evaluation or

multipurpose use

• Limited measurement conditions

• No or limited sweep

• Spot/multiple frequencies

• Limited analysis capability

• GO/NO GO testing

• Numerical display

• Only numbers displayed

Suitable for simple testing

50

Summary:

Frequency range Impedance Analyzer & LCR Meter

100 1k 10k 100k 1M 10M 100M 1G (Hz)

Low-cost

LCR 4263B 0.1%

4285A

E4982A

Precision

LCR

E4980A 0.05%

0.1%

1%

4294A Impedance

Analyzer 0.08%

40 Hz

3 GHz

110 MHz

100 kHz

20 Hz

30 MHz 75 kHz

1 MHz

100 Hz

E4991A 0.8% 3 GHz 1 MHz

2 MHz

51

Agenda

1. Introduction

2. Impedance Basics & Measurement Methods

3. LCR Meters

4. Impedance Analyzers

5. Accessories/test-fixtures

6. Vector Network Analyzers

• E5061B VNA as Impedance Analyzer

7. Reference Documents + Q&A

52

Accessories Introduction

• MUST be used to connect DUTs

– Fixtures, Probes

– Test leads

– DC bias

– Cal std…

• Benefits of Agilent Accessories

– Minimum residual error for better accuracy

– Clearly defined error compensation for

error correction

– Strict measurement specifications

53

Accessories Wide Variety of Fixtures to Cover Various Applications

54

Accessories Top 3 Fixtures for Auto balancing Bridge Instruments

16334A SMD/chip Tweezers

Frequency: ≤15 MHz

Maximum dc bias: ±42 V

Applicable SMD size: Minimum 1.6 (L) ´ 0.8 (W) mm

16089B Medium Kelvin Clip Leads

Clip type: Kelvin alligator clips (small)

Frequency: 5 Hz to 100 kHz

Maximum dc bias: ±42 V peak

Cable length: 0.94 m

16047A Test Fixture (Axial and Radial)

Frequency: ≤13 MHz

Maximum dc bias: ±35 V

Four-terminal (Kelvin) contacts

55

Agenda

1. Introduction

2. Impedance Basics & Measurement Methods

3. LCR Meters

4. Impedance Analyzers

5. Accessories/test-fixtures

6. Vector Network Analyzers

E5061B VNA as Impedance Analyzer

7. Reference Documents + Q&A

56

Vector Network Analyzers for measuring Impedance one of the 3 Key Impedance Measurement Methods

4294A

Precision impedance analyzer

E4980A

precision LCR meter

4263B

LCR meter E5071C

ENA Network Analyzer

E5061A/62A

ENA-L Network Analyzer

E4991A

RF impedance/material analyzer

E4981A

Capacitance meter

LCR meter Impedance Analyzer Network Analyzer

4287A

RF LCR meter

E5061B

ENA LF Network Analyzer

• High accuracy and wide impedance range

• HF and RF

• Variety of fixture selections

• Lower frequency range is limited by the transformer

used in the test head

RF I-V

• Covers highest

frequencies

• High accuracy

around the

characteristic

impedance (Z0)

• Narrow impedance

measurement range

• Low accuracy in Q

(D) measurement

Network Analysis

Auto-Balancing Bridge

• Wide frequency coverage (LF to HF)

• High accuracy over a wide impedance range

• Variety of fixture selections

• Higher frequency range not available

57

Imp

ed

an

ce

(Ω

)

Frequency (Hz)

Auto-Balancing Bridge

Network Analysis Measurement Range Impedance Accuracy versus frequency

100M

10M

1M

100k

10k

1k

100

10

1

100m

10m

1m

10 100 1k 10k 100k 1M 10M 100M 1G 10G

RF I-V

Network Analysis

10% accuracy range for each measurement technique

4294A E4980A/AL 4263B E4981A

E4991A E4982A

E5061B E5071C

Note: PNA Network Analyzer

covers 300 kHz to 1.1 THz

58

Measurement Frequency Range Summary

Product

Type Purpose Frequency Range

Basic

Accuracy

Z Meas. Range

(10% Accy. Range) Model

Measurement

Method

Network

Analyzer

S-parameter/

Impedance 9 kHz/100 kHz – 20 GHz

N/A NA

E5071C Network

S-parameter/

Gain–phase/

Impedance

5 Hz – 3GHz E5061B Network

Impedance

Analyzer

High performance/

Multi function 1 MHz – 3 GHz 0.8 % 130 m – 20 kohm E4991A RF I-V

High performance/

Multi function 40 Hz – 110 MHz 0.08 % 25 m – 40 Mohm 4294A ABB

LCR Meter

Inductor

measurement 1 MHz – 3 GHz 0.8 % 140 m – 4.8 kohm E4982A RF I-V

High performance/

Multi function 20 Hz – 2 MHz 0.05 % 10 m – 100 Mohm E4980A ABB

Low cost/

Multi function

20 Hz – 300 kHz/500

kHz/1 MHz 0.05 % 10 m – 100 Mohm E4980AL ABB

Low cost/

Multi function

100 Hz/120 Hz/1 kHz/10

kHz/20 kHz/100 kHz 0.1 % 1 m – 100 Mohm 4263B ABB

Capacitance

Meter

Capacitor

measurement 120 Hz/1 kHz/1 MHz 0.07 % 0.001 p to 2 mF E4981A ABB

Note: PNA Network Analyzer covers 300 kHz to 1.1 THz

59

E5061B-3L5 LF-RF Network Analyzer

• 5 Hz to 3 GHz

• Wide dynamic range

• Built-in DC bias source (0 to ±40 Vdc, max 100 mAdc)

• A S-parameter test port (5 Hz to 3 GHz, 50 Ω)

• B Gain-phase test port (5 Hz to 30 MHz, Zin=1 MΩ / 50 Ω switchable)

• C Impedance analysis function (Option 005)

Gain-phase test port

S-parameter test port

R T

Zin

ATT

R1

T1

R2

T2

R

Zin

ATT

T

LF OUT

Port-1 Port-2

DC bias source

E5061B-3L5

Gain-phase test port (5 Hz to 30 MHz)

S-parameter test port (5 Hz to 3 GHz)

Zin=1 MΩ #1 or 50 ohm

ATT=20 dB or 0 dB

60

6 A: E5061B as VNA for S-Parameters (5Hz to 3GHz) - Filter

- Antenna

- Amplifier

- Cable

61

6 B: E5061B as gain-phase analyzer (5 Hz – 30 MHz)

Detail: E5061B’s R and T receiver ports are semi-floated This eliminates the measurement error associated with the source-to-receiver test

cable ground loop. As receivers are semi-floated with the impedance |Zg|, which is

about 30 Ω in the lowfrequency range below 100 kHz. Similarly to the case of

using the magnetic core, we can intuitively understand that the shield current is

blocked with the impedance |Zg|. More details in appnote

http://cp.literature.agilent.com/litweb/pdf/5990-5578EN.pdf

Freq

DUT’s true attenuation

Measured attenuation Easy & accurate solution for

• High attenuation DUTs (<-80 dB)

• milliohm-|Z| of LF PDN components

|Zg| = about 30 Ω at low freq. range

Rc2 = 10 mΩ or several 10 mΩ

Common-mode noise

VT

VR

Rc2

Vo

AC current

T port

Zg

R port

LF OUT

V=Vc2

Va

Zg

VT = Vo + Vc2

= Vo + (Va/(Zg+Rc2)) x Rc2

= Vo, because Zg >> Rc2

Zsh

62

6 C: E5061B as Impedance Analyzer using Option E5061B-005 ZA firmware

• Fully supports basic functions of

impedance analyzer (ZA)

• Displays Z parameters

• Calibration + Fixture compensation

• Equivalent circuit analysis

• Covers variety of ZA applications

with multiple meas. techniques

Reflection

method

(for low to mid-Z)

Series-thru

method

(for mid to high-Z)

Shunt-thru

method

(for very low-Z)

Advantages of Z measurement with E5061B

NA plus ZA in one box

Milliohm Z-measurement

Very broad freq range

63

E5061B Impedance Measurement methods

Both test ports are available for impedance measurements

S-Parameter test port Gain-Phase test port

S-Parameter

5 Hz - 3 GHz

• Reflection

• Series-thru

• Shunt-thru

Gain-Phase

5 Hz - 30 MHz

• Series-thru

• Shunt-thru

Test port

Frequency range

Measurement

configurations

Port 1 Port 2 T LF OUT R

64

Reflection method

Z = 50 x ((1 + S11) / (1 - S11))

S-Parameter S11

VS VDUT

-50

-40

-30

-20

-10

0

1.E-01 1.E+00 1.E+01 1.E+02 1.E+03 1.E+04

VT/V

R (S

11

, S

21

, T

R)

[dB

]

Impedance [Ω]

0.1 1 10 100 1k 10k

50Ω

Vector voltage ratio relationship to impedance

Mid-Z

65

Series-thru method

Z = (50 x 2) x ((1 - S21) / S21)

S-Parameter

Gain-Phase

S21

T/R

V I

V I

Vector voltage ratio relationship to impedance

-50

-40

-30

-20

-10

0

1.E-01 1.E+00 1.E+01 1.E+02 1.E+03 1.E+04

VT/V

R (S

11

, S

21

, T

R)

[dB

]

Impedance [Ω]

0.1 1 10 100 1k 10k

Mid to High-Z

66

Shunt-thru method

Z = (50 / 2) x (S21 / (1 - S21))

S-Parameter

Gain-Phase

S21

T/R

VS VDUT

VS VDUT -50

-40

-30

-20

-10

0

1.E-01 1.E+00 1.E+01 1.E+02 1.E+03 1.E+04

VT/V

R (S

11

, S

21

, T

R)

[dB

]

Impedance [Ω]

0.1 1 10 100 1k 10k

Vector voltage ratio relationship to impedance

Low to Mid-Z

67

Measurement method & impedance range

Shunt-thru

Reflection

Series-thru

Applicable impedance range

Mid

Mid - High

Low - Mid

100 k 10 k 1 k 100 10 1 100 m 10 m 1 m

Configuration

Covers wide impedance range: mΩ to 100 kΩ

using 3 methods in combination

Impedance [ohm]

68

1.E-04

1.E-03

1.E-02

1.E-01

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+06

1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04 1.0E+05 1.0E+06 1.0E+07 1.0E+08 1.0E+09 1.0E+10

10% measurement accuracy range

10 Hz 100 Hz 1 kHz 10 kHz 100 kHz 1 MHz 10 MHz 100 MHz 1 GHz

100 kΩ

10 kΩ

1 kΩ

100 Ω

10 Ω

1 Ω

100 mΩ

10 mΩ

1 mΩ

Imp

ed

ance

[O

hm

]

Frequency [Hz]

Port 1-2 Series

Port 1 Refl

Port 1-2 Shunt

S-Parameter test port

Supplemental performance data (SPD): It is not guaranteed by the product warranty.

Represents the value of a parameter that is most likely to occur; the expected mean or average.

69

1.E-04

1.E-03

1.E-02

1.E-01

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+06

1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04 1.0E+05 1.0E+06 1.0E+07 1.0E+08 1.0E+09 1.0E+10

100 kΩ

10 kΩ

1 kΩ

100 Ω

10 Ω

1 Ω

100 mΩ

10 mΩ

1 mΩ

10% measurement accuracy range

10 Hz 100 Hz 1 kHz 10 kHz 100 kHz 1 MHz 10 MHz 100 MHz 1 GHz

Imp

ed

ance

[O

hm

]

Frequency [Hz]

GP Series

GP Shunt

Supplemental performance data (SPD): It is not guaranteed by the product warranty.

Represents the value of a parameter that is most likely to occur; the expected mean or average.

Gain-Phase test port

70

Measurement Methods Summary

Shunt-thru,

Low - Mid

Reflection,

Mid

Series-thru,

Mid - High

Test port & Method

S-Parameter (5 Hz - 3 GHz) Gain-Phase (5 Hz - 30 MHz)

Configuration &

Impedance range

(Splitter)

Port 1-2 Series GP Series (T: 50Ω, R: 1MΩ)

Port 1 Refl

Port 1-2 Shunt GP Shunt (T: 50Ω, R: 50Ω)

User

User User

7-mm

4-terminal pair

71

Test Fixtures (1)

16092A

16201A

16047E

Series-thru method

(Gain-Phase, T 50Ω, R 1MΩ)

5 Hz to 30 MHz

7 mm test fixture with

16201A

4-terminal pair test

fixture

Reflection method

(S-Parameter, Port 1)

5 Hz to 3 GHz

72

Test Fixtures (2) S-Parameter test port (Reflection method)

Test Fixtures available in actual FW: (None), 16191A, 16192A, 16193A, 16194A, 16196A/B/C, 16197A,

(User)

73

Test Fixtures (3) Gain-Phase test port (Series-thru method)

74

E5061B demonstration

Next pages contain slides for supporting discussion during

demonstration

75

Calibration and Fixture Compensation (1)

76

Calibration and Fixture Compensation (2)

Impedance calibration The impedance calibration executes the

open/short/load (and optional low-loss-C)

calibration in the impedance domain after

the measured S-parameter or gain-phase

ratio data is converted to impedance. [Cal] > Calibrate > Impedance Calibration

Fixture compensation - The open/short (and optional load)

compensation eliminates the fixture’s

residual impedance and stray admittance.

-The electrical length compensation

(selecting fixture type, or Z port extension)

eliminates the phase shift error that occurs

at 7 mm fixtures in the RF range. [Cal] > Fixture Compen > Compensate

Low-Loss Capacitor Calibration

When you measure Q, D, and ESR of RF

capacitors and RF inductors by using the

reflection method (with the 16201A), performing

the low-loss capacitor (LLC) calibration in

addition to the open/short/load improves the

accuracy at high frequencies over 1GHz. The

LLC provides a reference for calibration with

respect to the 90°-phase component of

impedance. LLC is available with 16195B CalKit.

Open/Short Compensation and Z Port

Extension

The recommended fixture compensation method

up to a few hundreds of MHz is the open/short

compensation.

For the measurement at higher frequencies over

a few hundreds of MHz, it is recommended to

perform the combination of the fixture electrical

length compensation and the open/short

compensation.

77

Z measurement with Network Analyzer (1)

Reflection method Middle Zdut

Zdut VT VR

50

50

50

50

50

S11=VT/VR

78

VNA Uncertainties Calculator

0

0.01

0.02

0.03

0.04

0.05

0 0.2 0.4 0.6 0.8 1

Un

cert

ain

ty (

Lin

ear)

Reflection Coefficient (Linear)

S11 Magnitude Accuracy

1MHz

S21 = S12 = 0; Cal power = -10 dBm; Meas power = -10 dBm

E5061B 3L5 (RSS) with 85033E Calibration Kit

IF Bandwidth = 1 Hz; Average Factor = 1

79

Impedance Uncertainty

0.0

5.0

10.0

15.0

20.0

25.0

30.0

1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04

Un

cert

ain

ty (

%)

Impedance (Ohm)

Reflection method: Impedance Uncertainty

80

Reflection method

16201A/001) +

16195B

1609x test fixture

• For middle Z-range

• Need Open/Short/Load cal

DUT

20*log |Z| [dB]

Ls [henry]

|Z| [ohm]

60 dB (=1 kohm)

1 kohm

10 uH

10 uH inductor measurement Test freq=100 kHz to 100 MHz Source= -10 dBm, IFBW=Auto / 100 Hz-limit

Configuration example

P/N 0699-2829 SMD 50 ohm

short

Open/Short/Load cal at fixture

81

Typical configuration examples for S-Parameter Reflection method (Low-Mid Z, up to 3 GHz)

- E5061B options

E5061B Network Analyzer

E5061B-3L5 LF-RF NA with DC bias

E5061B-005 Impedance analysis function for LF-RF NA (*1)

---------------------------------------------------------------

E5061B-1E5 High stability time base

E5061B-020 Standard hard disk drive

E5061B-810 Add key board

E5061B-820 Add mouse

- Adapter for connecting fixtures

16201A 7 mm terminal adapter kit

16201A-001(*2) 7 mm terminal adapter kit for E5061B

- 7 mm calibration kit

16195B (open/short/load + low-loss capacitor)

- 7 mm test fixtures

16092A (SMD & leaded component, 500 MHz)

(*1) E5061B-005 is not applicable to the E5061B RF NA option: 1x5 / 2x5 / 1x7 / 2x7.

(*2) Option 001 is the only option for the 16201A. Must choose this option when ordering the 16201A.

16092A

82

Reflection method: Home-made fixtures

SMA receptacle

DUT (soldered between

center pin and GND)

Copper foil (GND)

Cal devices

Open Short Load 50 ohm resistor

To Port-1

83

Z measurement with Network Analyzer (2)

Series-thru method Middle to large Zdut, no grounded DUT

VT VR

50

50

50

50

50 S21=VT/VR

Zdut

84

10% measurement accuracy range (E5061B, S-Parameter test

port)

1.E-04

1.E-03

1.E-02

1.E-01

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+00 1.E+01 1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10

Imp

ed

an

ce [

Oh

m]

Frequency [Hz]

100

kΩ

10 kΩ

1 kΩ

100 Ω

10 Ω

1 Ω

100

mΩ

10 mΩ

1 mΩ

10 Hz 100

Hz 1 kHz 10 kHz

100

kHz 1 MHz 10 MHz

100

MHz 1 GHz

E5061B (SPD) S-Parameter, Reflection

E5061B (SPD) S-Parameter, Series-thru

Definitions - Specification (Spec): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution,

measurement uncertainties, and changes in performance due to environmental conditions.

- Supplemental performance data (SPD): Represents the value of a parameter that is most likely to occur; the expected mean or average. It is not

guaranteed by the product warranty.

For more details about conditions for defining accuracy, please refer to the Data Sheet.

85

1.E-04

1.E-03

1.E-02

1.E-01

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+00 1.E+01 1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10

Imp

ed

an

ce [

Oh

m]

Frequency [Hz]

10% measurement accuracy range (E5061B, Gain-Phase test

port) 100

kΩ

10 kΩ

1 kΩ

100 Ω

10 Ω

1 Ω

100

mΩ

10 mΩ

1 mΩ

10 Hz 100

Hz 1 kHz 10 kHz

100

kHz 1 MHz 10 MHz

100

MHz 1 GHz

E5061B (SPD) Gain-Phase, Series-thru

Definitions - Specification (Spec): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution,

measurement uncertainties, and changes in performance due to environmental conditions.

- Supplemental performance data (SPD): Represents the value of a parameter that is most likely to occur; the expected mean or average. It is not

guaranteed by the product warranty.

For more details about conditions for defining accuracy, please refer to the Data Sheet.

4-terminal pair test

fixture

86

Series-thru method with gain-phase test port (<=30 MHz)

VT

50

Zdut

VR

+

Internal DC bias

applicable to

capacitive DUTs

P/N 0699-2014 Axial-lead 50 ohm (ESL = approx. 14 nH with minimum lead length)

P/N 0699-2829 SMD 50 ohm

50 ohm R

Calibration

open

short bar

4TP fixture 4-Terminal-Pair type fixture

• For middle to large Z-range

• Need Open/Short/Load cal at fixture

Hc Hp Lc Lp

Examples of load:

Zin=50 ohm Zin=1 Mohm 1 nF capacitor measurement Test freq=100 Hz to 30 MHz Source=7 dBm, IFBW=Auto / 20 Hz-limit

20*log(|Z|) [dB]

Cp [farad]

|Z| [ohm]

100 kohm

100 dB (=100 kohm)

1 nF

T R LF OUT

87

Typical configuration examples for Gain-Phase Series-thru method (Mid-High Z, up to 30 MHz)

- E5061B options

E5061B Network Analyzer

E5061B-3L5 LF-RF NA with DC bias

E5061B-005 Impedance analysis function for LF-RF NA (*1)

---------------------------------------------------------------

E5061B-720 50 Ω resistor set

E5061B-1E5 High stability time base

E5061B-020 Standard hard disk drive

E5061B-810 Add key board

E5061B-820 Add mouse

- 4-terminal pair test fixtures

16047E (leaded component)

16034E (SMD), or 16034G (for SMD)

(*1) E5061B-005 is not applicable to the E5061B RF NA option: 1x5 / 2x5 / 1x7 / 2x7.

E5061B-720 50 Ω resistor set contains the following items for

the impedance calibration at the test fixture:

- SMD 50 Ω (0699-2929), 10 ea

- Leaded 50 Ω (5012-8646), 2 ea

- Tweezers (8710-2018), 1 ea

16047E 16034E

88

Terminal block

BNC(f) receptacle

Copper board (GND)

50 ohm resistor short

wire

DUT

From LF OUT

To R-port (Zin=1 Mohm)

To T-port (Zin=50 ohm)

Series-thru method: Home-made fixtures

Cal devices

89

Z measurement with Network Analyzer (3)

Shunt-thru method Small Zdut

Zdut VT VR

50

50

50

50

50

S21=VT/VR

90

10% measurement accuracy range (E5061B, S-Parameter test

port)

1.E-04

1.E-03

1.E-02

1.E-01

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+00 1.E+01 1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10

Imp

ed

an

ce [

Oh

m]

Frequency [Hz]

100

kΩ

10 kΩ

1 kΩ

100 Ω

10 Ω

1 Ω

100

mΩ

10 mΩ

1 mΩ

10 Hz 100

Hz 1 kHz 10 kHz

100

kHz 1 MHz 10 MHz

100

MHz 1 GHz

E5061B (SPD) S-Parameter, Shunt-

thru

E5061B (SPD) S-Parameter,

Reflection

Definitions - Specification (Spec): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution,

measurement uncertainties, and changes in performance due to environmental conditions.

- Supplemental performance data (SPD): Represents the value of a parameter that is most likely to occur; the expected mean or average. It is not

guaranteed by the product warranty.

For more details about conditions for defining accuracy, please refer to the Data Sheet.

91

1.E-04

1.E-03

1.E-02

1.E-01

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+00 1.E+01 1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10

Imp

ed

an

ce [

Oh

m]

Frequency [Hz]

10% measurement accuracy range (E5061B, Gain-Phase test

port) 100

kΩ

10 kΩ

1 kΩ

100 Ω

10 Ω

1 Ω

100

mΩ

10 mΩ

1 mΩ

10 Hz 100

Hz 1 kHz 10 kHz

100

kHz 1 MHz 10 MHz

100

MHz 1 GHz

E5061B (SPD) Gain-Phase, Shunt-

thru

Definitions - Specification (Spec): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution,

measurement uncertainties, and changes in performance due to environmental conditions.

- Supplemental performance data (SPD): Represents the value of a parameter that is most likely to occur; the expected mean or average. It is not

guaranteed by the product warranty.

For more details about conditions for defining accuracy, please refer to the Data Sheet.

92

Shunt-thru method

20*log(|Z|) [dB]

|Z| [ohm]

(Linear scale)

Z-phase [deg] S21 [dB]

MLCC (Multi-layer ceramic chip)

measurement in broad freq. range - Test freq=100 Hz to 1 GHz.

• For small Z-range (down to milliohms / sub-

milliohms)

• Calibration method depending on measurement configuration and test freq

T: Zin=50 ohm R: Zin=50 ohm

With S-param. test port (<= 3 GHz):

For most of capacitors, and PCB measurements

With gain-phase test port (<= 30 MHz):

For very-large capacitors (milli-farad order), DC-DC converters

Test board

93

Equivalent Circuit Analysis (1) Equivalent

Circuit Analysis

e.g., Ceramic

Resonator (Type E

circuit)

# Equivalent Circut

# ----C0----

# -| |-

# -L1-C1-R1-

Type, E

R1, 6.94624374266e+000

L1, 6.79827222119e-003

C1, 2.45000000000e-011

C0, 3.47238726000e-010

Simulate =

“ON”

memory trace

94

Equivalent Circuit Analysis (2) Equivalent

Circuit

Analysis

Inductors with high core

loss

Inductors with high winding resistance

or resistors with low resistance value

Resistors with high resistance

value

Capacitors

Resonator

Generally suitable for…

*1.

*2.

*1

*1

*1

*1

*2

Typical freq. characteristics

95

End of E5061B demonstration

96

Methods and Fixtures Summary

Port 1-2 Shunt

Port 1 Refl / Port 2 Refl

Port 1-2 Series

S1

1

S2

1

S21

1MΩ input TR

Power

splitter TR

GP Shunt (T 50Ω, R 50Ω)

GP Series (T 50Ω, R 1MΩ)

S-Parameter (5 Hz - 3 GHz)

Gain-Phase (5 Hz - 30 MHz)

Re

fle

cti

on

S

eri

es

S

hu

nt

7-mm type fixtures

4-Terminal Pair type

fixtures

User fixtures are required

Con

figu

ration

Test port

Applicable

Z-range

Mid

Mid -

High

Low -

Mid

Shunt Series

Mid-Z Low-Z High-Z

1 Ω 1 kΩ 1 mΩ ~ ~ 100

kΩ

97

Summary of Impedance measurement methods

98

Impedance Analysis (E5061B-005) Summary

NA+ZA in one box Supports ZA functions

Provides comprehensive solutions as general R&D

tool:

- Characterize components (ZA)

- Evaluate system performance (NA: S21, T/R)

- Cost effective 5 Hz to 3 GHz impedance analyzer

with moderate performance

Fully supports traditional ZA functions as shown

below:

- Display Z parameters (Z, θz, Ls, Cp, Rs, D, Q, …)

- Impedance Cal. & Fixture Compen

- Equivalent circuit analysis

Migrate legacy combo analyzer (4195A, 4395/96x, 4194A, 4192A)

Covers moderate Z range

Easy to migrate by supporting conventional test

fixtures:

- 7 mm test fixtures (S-Parameter Reflection

method)

- 4TP test fixtures (Gain-Phase Series-thru method)

Covers various ZA applications with three

measurement techniques using both S-Parameter

and Gain-Phase test ports (up to several tens kΩ,

down to around mΩ):

- Reflection method (S-Para.)

- Series-thru method (S-Para./Gain-Phase)

- Shunt-thru method (S-Para./Gain-Phase)

99

Agenda

1. Introduction

2. Impedance Basics & Measurement Methods

3. LCR Meters

4. Impedance Analyzers

5. Accessories/test-fixtures

6. Vector Network Analyzers

• E5061B VNA as Impedance Analyzer

7. Reference Documents + Q&A

100

Key Reference Document Selection Guide

Brief introduction of Agilent

LCR and Impedance

measurement solution

Test accessories / fixtures

compatibility chart

5952-1530E: Agilent LCR Meters, Impedance Analyzers, and Test Fixtures Selection Guide

101

Key Reference Document Accessories Selection Guide

5965-4792E: Accessories Selection Guide For Impedance Measurements

Tips for selecting

appropriate

accessories

Detailed information on

each accessories

102

Key Reference Document Impedance Measurement Handbook

5950-3000; Impedance Measurement Handbook

Deep discussion on each

measurement method

Tips for accurate fixturing

103

Thank You!

104