bóbî &b b·b b1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 b1 qb.aî7 b]btb bjb b-/~1b...

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Page 1: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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Page 2: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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Page 3: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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Page 4: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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Page 5: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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Silicon On Insulator

Page 6: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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0

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Force

[ N]

Displacement [ m]

10 15

Page 7: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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Page 8: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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ICMEMS

MEMS

Page 9: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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Page 10: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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Page 11: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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Page 12: BóBî &B B·B B1 .f&¦: · 2017. 2. 17. · :w:w"á ¡1 B1 QB.Aî7 B]BtB BjB B-/~1b 92)'"B¶5 B » B. -ÐB--]'ÎBU É IB AîB B¨BvBt w BG æ B1 ¨ 1¡ {BU- B Aî û1jB1/~1b 92)'"B¶5

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B1 B… · B1 B B1 B TOTAL FLOOR AREAS Type B 1130 sq. ft. approx. With Optional Sunroom 1230 sq. ft. approx. Type B1 1180 sq. ft. approx. With Optional Sunroom 1280 sq. ft.O approx

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