Transcript
- 1
- 2
- 3
2
- 4
3
- 5
Silicon On Insulator
- 6
0
1000
2000
3000
4000
5000
0 5
Force
[ N]
Displacement [ m]
10 15
- 7
- 8
ICMEMS
MEMS
- 9
- 10
- 11
- 12
- 1
- 2
- 3
2
- 4
3
- 5
Silicon On Insulator
- 6
0
1000
2000
3000
4000
5000
0 5
Force
[ N]
Displacement [ m]
10 15
- 7
- 8
ICMEMS
MEMS
- 9
- 10
- 11
- 12