nextorr® hv 100 hv.pdf · the saes group manufacturing companies are iso9001 certified and the...
Post on 26-Oct-2019
13 Views
Preview:
TRANSCRIPT
NEXTorr®
HV 100
General Features
£High pumping speed for all active gases
£ Pumping speed for noble gases andmethane
£High sorption capacity and increasedlifetime
£ Constant pumping speed in HV andUHV
£Minimal power requirement duringoperations
£ Fast pumpdown after air venting andwithout baking
£ Suitable for viton sealed systems
£ Extremely compact and light pump
£ Reduced magnetic interference
£ Able to measure pressure lower than10‐9 mbar
Applications
£ Improvement of the ultimate vacuumin HV and UHV systems
£ Reduction of the footprint and weightof vacuum systems
£ Surface science analysis systems
£ Particle accelerators, synchrotronradiation sources and relatedequipment
£ Process pumps for vacuum devices anddeposition chambers
£ Thin films deposition systems
£ Portable vacuum instrumentations
£ Pumping, storing and releasinghydrogen isotopes
The NEXTorr® HV 100 is an extremely compact pump able to sorb gases very
effectively and with large capacities at operative pressures typical of High Vacuum
systems, starting from 10‐7 Torr. The getter cartridge consists of porous sintered non
evaporable getter (NEG) disks stacked in a highly efficient gas trapping structure on
a CF35 flange. The disks are made of the new ZAO1 getter alloy. An integrated
heater allows for the pump activation (500 °C × 1 h) and its operation in warm
conditions (≈ 200 °C). As a result, the NEXTorr® HV 100 can deliver large pumping
speed for H2, active gases like CO, CO2, O2, N2, H2O, air and hydrocarbon species in
vacuum systems characterized by large gas loads with minimum power requirement
(5.4 W at ≈ 200 °C). The NEXTorr® HV 100 can also be used in UHV regime by simply
operating the NEG element at room temperature (no power required). On the other
side of the same flange, a noble diode ion pump featuring 15 l/s for methane (CH4)
and 7 l/s for Argon (Ar) is connected. Gas flows from the vacuum system to the ion
pump through an optimized conductance. The optimized conductance and the
special internal design of the ion pump allow the maximum exploitation of the ion
pump sorption performances. The configuration of the ion pump with respect of the
getter cartridge provides additional pumping synergies. Gases released by the ion
pump during the operation are intercepted and removed by the getter element,
with a substantial reduction of backstreaming effects. For the same reasons,
increased pumping efficiency for H2 and CH4 are obtained. Fine titanium particles
which are known to be continuously emitted by ion pumps during operation are also
effectively trapped by the getter element, reducing potential contamination of the
vacuum system.
HIGHLIGHTS
oupgr
making innovat ion happen, together
81
75
O35 78
106,5 64,5
171
Dimensions in mm
Total pump weight (magnets included) 2.2 kg
Total pump volume 0.5 litre
Type of ion pump Noble Diode
Operation Voltage Ion Element 5.0 kVdc
NEXTorr HV 100_Layout 1 30/08/2018 10:17 Pagina 1
NEXTorr® HV 100
D.VS.170.0.18
Pumping speed curves for various gases
1
10
100
0,00001 0,0001 0,001 0,01 0,1 1 10 100
Ordering Information
*The power supply includes the input cable
**Other models , able to simultaneously drive up to four pumps, are available
***Longer output cables are available on requests
Product Product description CodeNEXTorr PUMP NEXTorr HV 100 5H0209
NEG element power supply* NEG POWER LP C1** 3B0521
ION element power supply SIP POWER 3B0506
Output cable NEG element NEG POWER‐NEXTORR D100/D200 OUTPUT CABLE ‐ 3 MT*** 3B0495
Output cable ION element NIOPS‐03 – OUTPUT CABLE ION – 3 MT*** 3B0410
The SAES Group manufacturing
companies are ISO9001
certified and the Italian
companies are also ISO14001
certified. Full information
about our certifications for
each company of the Group
are available on our website at:
www.saesgroup.com
SAES Group
www.saesgroup.com
neg_technology@saes‐group.com
oupgr
Sorbed Quantity [Torr l]
Pumping Speed [l/s]
NEXTorr HV 100
sorption test (according to ASTM F798-97)
Activation : 550°C x 60'
Sorption pressure: 1e-6 torr
Sorption temperature : 200°C
The NEXTorr® product line incorporates and exploits the patented concept of a combined pumping system comprising a getter
pump and an ion pump, and have global Intellectual Property Rights coverage with patents already granted in the US (8,287,247),
Europe (2,409,034), Japan (5,372,239), China (102356236).
© SAES Group. Printed in Italy. All rights reserved. SAES®and NEXTorr® are registered trademarks of SAES Group.
SAES Group reserves the right to change or modify product specifications at any timewithout notice.
Typical Pump Characteristics NEXTorr HV 100
Alloy Type ZAO1®
Alloy Composition Zr V Ti Al
Getter Mass (g) 45.5
Getter Surface (cm2) 136
CO2
H2
N2
Pumpingspeed (l/s) @ 200°C
Gas NEG activated NEG saturated
H2 80 5
O2 55 3
CO2 40 5
N2 25 3
CH4 15 8
Argon1 7 (0.7) 7 (0.7)
Sorption capacity (Torr·l)
GasSingle run capacity
Room temperature2Single run capacity
200°C3
H24 910 N/A
O2 1.0 43
CO2 0.25 10
N2 0.08 43
CH4 30 50000 hours at 10‐6 Torr
Number of runs (sorption cycles) ≥100 ≥20
Note:1Measured at 3×10‐6 Torr. Unsaturated pump (saturated pump)
2Capacity value with the NEG element at room temperature, corresponding to a drop of the pumping speed to 10% of its initial
value. A drop to 15% has been considered in the case of N2.
3The “single run” capacity at 200°C is intended as the recommended absorbed quantity per run allowing to perform at least 20
sorption cycles. Capacity values for the various gases are not additive (a getter fully reacted with one gas species will not sorb
another gas).
4After the getter element has reached its H2 capacity, it can be “regenerated”. Through the regeneration process it is possible
to extract the hydrogen stored in the getter. After a full regeneration process, the pump can start pumping hydrogen again.
O2
CH4
NEXTorr HV 100_Layout 1 30/08/2018 10:17 Pagina 2
NEXTorr®
HV 200
General Features
£High pumping speed for all active gases
£ Pumping speed for noble gases andmethane
£High sorption capacity and increasedlifetime
£ Constant pumping speed in HV andUHV
£Minimal power requirement duringoperations
£ Fast pumpdown after air venting andwithout baking
£ Suitable for viton sealed systems
£ Extremely compact and light pump
£ Reduced magnetic interference
£ Able to measure pressure lower than10‐9 mbar
Applications
£ Improvement of the ultimate vacuumin HV and UHV systems
£ Reduction of the footprint and weightof vacuum systems
£ Surface science analysis systems
£ Particle accelerators, synchrotronradiation sources and relatedequipment
£ Process pumps for vacuum devices anddeposition chambers
£ Thin films deposition systems
£ Portable vacuum instrumentations
£ Pumping, storing and releasinghydrogen isotopes
The NEXTorr® HV 200 is an extremely compact pump able to sorb gases very
effectively and with large capacities at operative pressures typical of High Vacuum
systems, starting from 10‐7 Torr. The getter cartridge consists of porous sintered non
evaporable getter (NEG) disks stacked in a highly efficient gas trapping structure on
a CF35 flange. The disks are made of the new ZAO1 getter alloy. An integrated
heater allows for the pump activation (500 °C × 1 h) and its operation in warm
conditions (≈ 200 °C). As a result, the NEXTorr® HV 200 can deliver large pumping
speed for H2, active gases like CO, CO2, O2, N2, H2O, air and hydrocarbon species in
vacuum systems characterized by large gas loads with minimum power requirement
(6.5 W at ≈ 200 °C). The NEXTorr® HV 200 can also be used in UHV regime by simply
operating the NEG element at room temperature (no power required). On the other
side of the same flange, a noble diode ion pump featuring 15 l/s for methane (CH4)
and 7 l/s for Argon (Ar) is connected. Gas flows from the vacuum system to the ion
pump through an optimized conductance. The optimized conductance and the
special internal design of the ion pump allow the maximum exploitation of the ion
pump sorption performances. The configuration of the ion pump with respect of the
getter cartridge provides additional pumping synergies. Gases released by the ion
pump during the operation are intercepted and removed by the getter element,
with a substantial reduction of backstreaming effects. For the same reasons,
increased pumping efficiency for H2 and CH4 are obtained. Fine titanium particles
which are known to be continuously emitted by ion pumps during operation are also
effectively trapped by the getter element, reducing potential contamination of the
vacuum system.
HIGHLIGHTS
oupgr
making innovat ion happen, together
81
75
O35
106,5 91
78
197,5
Dimensions in mm
Total pump weight (magnets included) 2.2 kg
Total pump volume 0.5 litre
Type of ion pump Noble Diode
Operation Voltage Ion Element 5.0 kVdc
NEXTorr HV 200_Layout 1 30/08/2018 10:16 Pagina 1
NEXTorr® HV 200
D.VS.168.0.18
Pumping speed curves for various gases
1
10
100
1000
0,00001 0,0001 0,001 0,01 0,1 1 10 100
Ordering Information
*The power supply includes the input cable
**Other models , able to simultaneously drive up to four pumps, are available
***Longer output cables are available on requests
Product Product description CodeNEXTorr PUMP NEXTorr HV 200 5H0197
NEG element power supply* NEG POWER LP C1** 3B0521
ION element power supply SIP POWER 3B0506
Output cable NEG element NEG POWER‐NEXTORR D100/D200 OUTPUT CABLE ‐ 3 MT*** 3B0495
Output cable ION element NIOPS‐03 – OUTPUT CABLE ION – 3 MT*** 3B0410
The SAES Group manufacturing
companies are ISO9001
certified and the Italian
companies are also ISO14001
certified. Full information
about our certifications for
each company of the Group
are available on our website at:
www.saesgroup.com
SAES Group
www.saesgroup.com
neg_technology@saes‐group.com
oupgr
Sorbed Quantity [Torr l]
Pumping Speed [l/s]
NEXTorr HV 200
sorption test (according to ASTM F798-97)
Activation : 550°C x 60'
Sorption pressure: 1e-6 torr
Sorption temperature : 200°C
The NEXTorr® product line incorporates and exploits the patented concept of a combined pumping system comprising a getter
pump and an ion pump, and have global Intellectual Property Rights coverage with patents already granted in the US (8,287,247),
Europe (2,409,034), Japan (5,372,239), China (102356236).
© SAES Group. Printed in Italy. All rights reserved. SAES®and NEXTorr® are registered trademarks of SAES Group.
SAES Group reserves the right to change or modify product specifications at any timewithout notice.
Typical Pump Characteristics NEXTorr HV 200
Alloy Type ZAO1®
Alloy Composition Zr V Ti Al
Getter Mass (g) 84
Getter Surface (cm2) 252
CO2
H2
N2
Pumpingspeed (l/s) @ 200°C
Gas NEG activated NEG saturated
H2 155 5
O2 110 3
CO2 90 5
N2 50 3
CH4 15 8
Argon1 7 (0.7) 7 (0.7)
Sorption capacity (Torr·l)
GasSingle run capacity
Room temperature2Single run capacity
200°C3
H24 1680 N/A
O2 1.8 75
CO2 0.45 18
N2 0.15 75
CH4 30 50000 hours at 10‐6 Torr
Number of runs (sorption cycles) ≥100 ≥20
Note:1Measured at 3×10‐6 Torr. Unsaturated pump (saturated pump)
2Capacity value with the NEG element at room temperature, corresponding to a drop of the pumping speed to 10% of its initial
value. A drop to 15% has been considered in the case of N2.
3The “single run” capacity at 200°C is intended as the recommended absorbed quantity per run allowing to perform at least 20
sorption cycles. Capacity values for the various gases are not additive (a getter fully reacted with one gas species will not sorb
another gas).
4After the getter element has reached its H2 capacity, it can be “regenerated”. Through the regeneration process it is possible
to extract the hydrogen stored in the getter. After a full regeneration process, the pump can start pumping hydrogen again.
O2
CH4
NEXTorr HV 200_Layout 1 30/08/2018 10:16 Pagina 2
NEXTorr®HV 300
General Features
£High pumping speed for all active gases
£ Pumping speed for noble gases andmethane
£High sorption capacity and increasedlifetime
£ Constant pumping speed in HV andUHV
£Minimal power requirement duringoperations
£ Fast pumpdown after air venting andwithout baking
£ Suitable for viton sealed systems
£ Extremely compact and light pump
£ Reduced magnetic interference
£ Able to measure pressures lower than10‐9 mbar
Applications
£ Improvement of the ultimate vacuumin HV and UHV systems
£ Reduction of the footprint and weightof vacuum systems
£ Surface science analysis systems
£ Particle accelerators, synchrotronradiation sources and relatedequipment
£ Process pumps for vacuum devices anddeposition chambers
£ Thin films deposition systems
£ Portable vacuum instrumentations
£ Pumping, storing and releasinghydrogen isotopes
The NEXTorr® HV 300 is an extremely compact pump able to sorb gases veryeffectively and with large capacities at operative pressures typical of High Vacuumsystems, starting from 10‐7 Torr. The getter cartridge consists of porous sintered non evaporable getter (NEG) disksstacked in a highly efficient gas trapping structure on a CF63 flange. The disks aremade of the new ZAO1 getter alloy. An integrated heater allows for the pumpactivation (500 °C x 1 h) and its operation in warm conditions (≈ 200 °C). Thanks tothe flexibility of the ZAO1 technology, the benefits of NEG pumping can be extendedto the high vacuum regime (1 • 10‐9 Torr to 1 • 10‐7 Torr). Operating the NEXTorr®HV 300 at approximately 200 °C, active gas as well as hydrocarbon species can bedissociated onto the surface of the ZAO1 disks and partially diffused into the bulk.As a result, the NEXTorr® HV 300 can deliver large pumping speeds for H2, activegases, like CO, CO2, O2, N2, H2O, air and hydrocarbon species in vacuum systemscharacterized by large gas loads with minimum power requirement (12 W at ≈200°C). The NEXTorr® HV 300 can also be used in UHV regime by simply operatingthe NEG element at room temperature (no power required). The pump integrates athermocouple to measure the temperature during the activation and the operationat 200°C. On the other side of the same flange, a noble diode ion pump featuring 14l/s for methane (CH4) and 6 l/s for Argon (Ar) is connected. Gas flows from thevacuum system to the ion pump through an optimized conductance. The optimizedconductance and the special internal design of the ion pump allow the maximumexploitation of the ion pump sorption performances. The configuration of the ionpump with respect of the getter cartridge provides additional pumping synergies.Gases released by the ion pump during the operation are intercepted and removedby the getter element, with a substantial reduction of backstreaming effects. For thesame reasons, increased pumping efficiency for H2 and CH4 are obtained. Finetitanium particles which are known to be continuously emitted by ion pumps duringoperation are also effectively trapped by the getter element, reducing potentialcontamination of the vacuum system.
HIGHLIGHTS
oupgr
making innovat ion happen, together
Dimensions in mm
NEXTorr HV 300_Layout 1 05/06/2017 13:54 Pagina 1
NEXTorr® HV 300
D.VS.152.1.17
Pumping speed curves for various gases
1
10
100
1000
0,0001 0,001 0,01 0,1 1 10 100 1000
Ordering Information
* The power supply includes the input cable** Other models, able to simultaneously drive up to four pumps, are available*** Longer output cables are available on request
Product Product description CodeNEXTorr PUMP NEXTorr HV 300 5H0231NEG element power supply* NEG POWER LP C1** 3B0521ION element power supply* SIP POWER 3B0506NEG element Output cable Cable supply output with KTC/3MT V1.1HT*** 3B0420ION element Output cable NIOPS04‐06 ‐ OUTPUT CABLE ION ‐ 3 MT*** 3B0418
The SAES Group manufacturingcompanies are ISO9001certified and the Italiancompanies are also ISO14001certified. Full informationabout our certifications foreach company of the Groupare available on our website at:www.saesgroup.com
SAES Groupwww.saesgroup.comneg_technology@saes‐group.com
oupgr
Sorbed Quantity [Torr l]
Pu
mp
ing
Sp
eed
[l/s]
NEXTorr HV 300
sorption test (according to ASTM FT98-97)
Activation: 550°C x 60'
Sorption temperature: 200°C
Sorption pressure: 1e-6Torr
The NEXTorr® product line incorporates and exploits the patented concept of a combined pumping system comprising a getterpump and an ion pump, and have global Intellectual Property Rights coverage with patents already granted in the US (8,287,247),
Europe (2,409,034), Japan (5,372,239), China (102356236).
© SAES Group. Printed in Italy. All rights reserved. SAES®and NEXTorr® are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice.
Number of runs (sorption cycles) >20
Typical Pump Characteristics NEXTorr HV 300
Alloy Type ZAO®
Alloy Composition Zr V Ti AlGetter Mass (g) 200Getter Surface (cm2) 600
Pumping Speed (l/s)@200 °C
H2 300O2 260CO2 190N2 130
Sorption Capacity (Torrll)
H2 4000O2 Single run at 200 °C 190
CO2 Single run at 200 °C 45
N2 Single run at 200 °C 190
Note: Pumping speed data refer to the initial values .The “Single run” capacity is intended as the recommended absorbed quantity per run allowing toperform more than 20 sorption cycles at 1e‐6 Torr. In case of operation under much lower gas loadsor at RT, the pump can be reactivated 100 times or more.
CO2
H2
O2
N2
NEXTorr HV 300_Layout 1 05/06/2017 13:54 Pagina 2
HIGHLIGHTS
oupgr
SIP POWER
Controller
making innovat ion happen, together
Line Voltage
�24Vdc +/‐20%
�110/240 Vac 50/60 Hz
�Maximum input current 2.0 Adc
High voltage output
�Voltage 600Vdc – 6KVdc
�Maximum current to the pump 65mAmax
@ 350Vdc
�Fixed maximum value
�Maximum peak current 3.0 Apk @ 6KV
� Instrument Protection
Dimensions
�70x127x230 (HxWxD)
� sub‐rack 3U 14TE 230mm deep
Weight
�1,3 kg
�Remote control through RS485 with
Modbus protocol (RTU)
�Remote control through standard
Ethernet interface
�Up to 128 SIP Power units can be
simultaneously controlled
Ordering Information
Product description Code
SIP POWER* 3B0506
SIP POWER LEDS RS485** 3B0509
NIOPS03‐OUTPUT CABLE ION‐3MT*** 3B0410
SIP POWER Controller
The SIP POWER controls the NEXTorr ion pump modules. The controller features an
internal system for measuring the ionization current along with an autoranging system.
The current (in nA) can be communicated with an external device through a serial
interface. The voltage can also be communicated with an external device. Up to 128 SIP
Power units can be simultaneously controlled through LAN using a dedicated program.
The SIP Power is protected by two security features: the SAFE connector and the
INTERLOCK.
Features:
SAFE connector and INTERLOCK
Optional alphanumeric display
Status LEDs and an RS485 interface on the version without the alphanumeric display
Data interface:
Remote control through Ethernet
Recording of the device parameters via USB
Remote control through RS485 (only available in the version without alphanumeric
display)
*with display
**without alphanumeric display
***other cable lengths available upon request
���
���
Main features
SIP POWER and NIOPS_Layout 1 21/01/2016 16:52 Pagina 1
oupgr
making innovat ion happen, together
Single controller for low-power SAES® NEG pumps
NEG POWER MINI is a single-channel electronic unit specifically designed to control the activation
and conditioning processes of low-power SAES NEG pumps (see the table below).
NEG POWER MINI provides:
Adjustable DC voltage, up to 35 V
Current up to 5 A
Power up to 150 W
LAN remote control
NEG POWER MINI can be operated locally by push buttons, or can be remotely controlled with
Modbus protocol over Ethernet or RS232 interface.
The controller can monitor the temperature of NEG pumps equipped with thermocouple.
(*) Other length cables are available on request(§) Bakeable cables up to 250 °C, and radiation resistant (1000 Mrad)
NEG POWER MINI
HIGHLIGHTS
Input:
£Supply voltage: 100-240 VAC, ±10%
£Frequency: 50-60 Hz, ±10%
Output:
£Power: 175 W
£Overload protection
£Voltage: 0-35 VDC
£Current: up to 5 A
Dimensions:
£3U 28TE, depth 270 mm
Weight
£ 1.6 kg
Main features
£ Single controller foractivation/conditioning of low-powerSAES NEG pumps
£ Tunable output voltage, ramp time,power off time
£ Temperature monitoring of NEG pumpsequipped with thermocouple
£ Local control by push buttons
£ Remote control with Modbus protocol(LAN/RS232)
£ Free Windows and Linux remote controlsoftware
£ Start/Stop from I/O interface
£ Interlock
£USB port for automatic data logging
n
n
n
n
Ordering Information
Product description Code Pump Models
NEG POWER MINI 3B0110
CapaciTorr: D 50, D 100, D 200, D 400, Z 100,
Z 200, Z 400, HV 200;
NEXTorr: D 100, D 200, D 300, D 500,
Z 100, Z 200, Z 300, HV 100, HV 200,
HV 300;
GP: GP 50, GP 100;
NEG modules: HV 400, UHV 700
NEG cable 3P5A 3MT*§ 3B0598
CapaciTorr D 50, D 100, D 200, Z 100,
Z 200;
NEXTorr D 100, D 200, Z 100, Z 200,
HV 100, HV 200.
NEG cable 4P10A 3MT*§ 3B0601 CapaciTorr D 400, Z 400, HV 200
NEG cable 6P5A 3MT*§ 3B0854 NEXTorr D 300, D 500, Z 300, HV 300
NEG cable 6P10A 3MT*§ 3B0602 GP 100
NEG cable for GP50 3MT* 3B0370 GP 50
www.saesgroup.com
neg_technology@saes-group.com
D.VS.139.2.19
The SAES Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are also ISO14001 certified.
Full information about our certifications for each company of the Group is available on our website at: www.saesgroup.com
© SAES Group. Printed in Italy. All rights reserved. SAES® is a registered trademarks of SAES Group.
SAES Group reserves the right to change or modify product specifications at any timewithout notice.
NEG POWER MINI_Layout 1 27/02/2019 08:17 Pagina 1
top related