nextorr® hv 100 hv.pdf · the saes group manufacturing companies are iso9001 certified and the...

NEXTorr®

HV 100

General Features

£High pumping speed for all active gases

£ Pumping speed for noble gases andmethane

£High sorption capacity and increasedlifetime

£ Constant pumping speed in HV andUHV

£Minimal power requirement duringoperations

£ Fast pumpdown after air venting andwithout baking

£ Suitable for viton sealed systems

£ Extremely compact and light pump

£ Reduced magnetic interference

£ Able to measure pressure lower than10‐9 mbar

Applications

£ Improvement of the ultimate vacuumin HV and UHV systems

£ Reduction of the footprint and weightof vacuum systems

£ Surface science analysis systems

£ Particle accelerators, synchrotronradiation sources and relatedequipment

£ Process pumps for vacuum devices anddeposition chambers

£ Thin films deposition systems

£ Portable vacuum instrumentations

£ Pumping, storing and releasinghydrogen isotopes

The NEXTorr® HV 100 is an extremely compact pump able to sorb gases very

effectively and with large capacities at operative pressures typical of High Vacuum

systems, starting from 10‐7 Torr. The getter cartridge consists of porous sintered non

evaporable getter (NEG) disks stacked in a highly efficient gas trapping structure on

a CF35 flange. The disks are made of the new ZAO1 getter alloy. An integrated

heater allows for the pump activation (500 °C × 1 h) and its operation in warm

conditions (≈ 200 °C). As a result, the NEXTorr® HV 100 can deliver large pumping

speed for H2, active gases like CO, CO2, O2, N2, H2O, air and hydrocarbon species in

vacuum systems characterized by large gas loads with minimum power requirement

(5.4 W at ≈ 200 °C). The NEXTorr® HV 100 can also be used in UHV regime by simply

operating the NEG element at room temperature (no power required). On the other

side of the same flange, a noble diode ion pump featuring 15 l/s for methane (CH4)

and 7 l/s for Argon (Ar) is connected. Gas flows from the vacuum system to the ion

pump through an optimized conductance. The optimized conductance and the

special internal design of the ion pump allow the maximum exploitation of the ion

pump sorption performances. The configuration of the ion pump with respect of the

getter cartridge provides additional pumping synergies. Gases released by the ion

pump during the operation are intercepted and removed by the getter element,

with a substantial reduction of backstreaming effects. For the same reasons,

increased pumping efficiency for H2 and CH4 are obtained. Fine titanium particles

which are known to be continuously emitted by ion pumps during operation are also

effectively trapped by the getter element, reducing potential contamination of the

vacuum system.

HIGHLIGHTS

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making innovat ion happen, together

81

75

O35 78

106,5 64,5

171

Dimensions in mm

Total pump weight (magnets included) 2.2 kg

Total pump volume 0.5 litre

Type of ion pump Noble Diode

Operation Voltage Ion Element 5.0 kVdc

NEXTorr HV 100_Layout 1 30/08/2018 10:17 Pagina 1

NEXTorr® HV 100

D.VS.170.0.18

Pumping speed curves for various gases

1

10

100

0,00001 0,0001 0,001 0,01 0,1 1 10 100

Ordering Information

*The power supply includes the input cable

**Other models , able to simultaneously drive up to four pumps, are available

***Longer output cables are available on requests

Product Product description CodeNEXTorr PUMP NEXTorr HV 100 5H0209

NEG element power supply* NEG POWER LP C1** 3B0521

ION element power supply SIP POWER 3B0506

Output cable NEG element NEG POWER‐NEXTORR D100/D200 OUTPUT CABLE ‐ 3 MT*** 3B0495

Output cable ION element NIOPS‐03 – OUTPUT CABLE ION – 3 MT*** 3B0410

The SAES Group manufacturing

companies are ISO9001

certified and the Italian

companies are also ISO14001

certified. Full information

about our certifications for

each company of the Group

are available on our website at:

www.saesgroup.com

SAES Group

www.saesgroup.com

neg_technology@saes‐group.com

oupgr

Sorbed Quantity [Torr l]

Pumping Speed [l/s]

NEXTorr HV 100

sorption test (according to ASTM F798-97)

Activation : 550°C x 60'

Sorption pressure: 1e-6 torr

Sorption temperature : 200°C

The NEXTorr® product line incorporates and exploits the patented concept of a combined pumping system comprising a getter

pump and an ion pump, and have global Intellectual Property Rights coverage with patents already granted in the US (8,287,247),

Europe (2,409,034), Japan (5,372,239), China (102356236).

© SAES Group. Printed in Italy. All rights reserved. SAES®and NEXTorr® are registered trademarks of SAES Group.

SAES Group reserves the right to change or modify product specifications at any timewithout notice.

Typical Pump Characteristics NEXTorr HV 100

Alloy Type ZAO1®

Alloy Composition Zr V Ti Al

Getter Mass (g) 45.5

Getter Surface (cm2) 136

CO2

H2

N2

Pumpingspeed (l/s) @ 200°C

Gas NEG activated NEG saturated

H2 80 5

O2 55 3

CO2 40 5

N2 25 3

CH4 15 8

Argon1 7 (0.7) 7 (0.7)

Sorption capacity (Torr·l)

GasSingle run capacity

Room temperature2Single run capacity

200°C3

H24 910 N/A

O2 1.0 43

CO2 0.25 10

N2 0.08 43

CH4 30 50000 hours at 10‐6 Torr

Number of runs (sorption cycles) ≥100 ≥20

Note:1Measured at 3×10‐6 Torr. Unsaturated pump (saturated pump)

2Capacity value with the NEG element at room temperature, corresponding to a drop of the pumping speed to 10% of its initial

value. A drop to 15% has been considered in the case of N2.

3The “single run” capacity at 200°C is intended as the recommended absorbed quantity per run allowing to perform at least 20

sorption cycles. Capacity values for the various gases are not additive (a getter fully reacted with one gas species will not sorb

another gas).

4After the getter element has reached its H2 capacity, it can be “regenerated”. Through the regeneration process it is possible

to extract the hydrogen stored in the getter. After a full regeneration process, the pump can start pumping hydrogen again.

O2

CH4


NEXTorr®

HV 200

General Features










£ Able to measure pressure lower than10‐9 mbar

Applications









The NEXTorr® HV 200 is an extremely compact pump able to sorb gases very

effectively and with large capacities at operative pressures typical of High Vacuum

systems, starting from 10‐7 Torr. The getter cartridge consists of porous sintered non

evaporable getter (NEG) disks stacked in a highly efficient gas trapping structure on

a CF35 flange. The disks are made of the new ZAO1 getter alloy. An integrated

heater allows for the pump activation (500 °C × 1 h) and its operation in warm

conditions (≈ 200 °C). As a result, the NEXTorr® HV 200 can deliver large pumping

speed for H2, active gases like CO, CO2, O2, N2, H2O, air and hydrocarbon species in

vacuum systems characterized by large gas loads with minimum power requirement

(6.5 W at ≈ 200 °C). The NEXTorr® HV 200 can also be used in UHV regime by simply

operating the NEG element at room temperature (no power required). On the other

side of the same flange, a noble diode ion pump featuring 15 l/s for methane (CH4)

and 7 l/s for Argon (Ar) is connected. Gas flows from the vacuum system to the ion

pump through an optimized conductance. The optimized conductance and the

special internal design of the ion pump allow the maximum exploitation of the ion

pump sorption performances. The configuration of the ion pump with respect of the

getter cartridge provides additional pumping synergies. Gases released by the ion

pump during the operation are intercepted and removed by the getter element,

with a substantial reduction of backstreaming effects. For the same reasons,

increased pumping efficiency for H2 and CH4 are obtained. Fine titanium particles

which are known to be continuously emitted by ion pumps during operation are also

effectively trapped by the getter element, reducing potential contamination of the

vacuum system.

HIGHLIGHTS

oupgr


81

75

O35

106,5 91

78

197,5

Dimensions in mm

Total pump weight (magnets included) 2.2 kg

Total pump volume 0.5 litre

Type of ion pump Noble Diode

Operation Voltage Ion Element 5.0 kVdc


NEXTorr® HV 200

D.VS.168.0.18


1

10

100

1000

0,00001 0,0001 0,001 0,01 0,1 1 10 100


*The power supply includes the input cable

**Other models , able to simultaneously drive up to four pumps, are available

***Longer output cables are available on requests

Product Product description CodeNEXTorr PUMP NEXTorr HV 200 5H0197

NEG element power supply* NEG POWER LP C1** 3B0521

ION element power supply SIP POWER 3B0506

Output cable NEG element NEG POWER‐NEXTORR D100/D200 OUTPUT CABLE ‐ 3 MT*** 3B0495

Output cable ION element NIOPS‐03 – OUTPUT CABLE ION – 3 MT*** 3B0410

The SAES Group manufacturing

companies are ISO9001

certified and the Italian

companies are also ISO14001

certified. Full information

about our certifications for

each company of the Group

are available on our website at:

www.saesgroup.com

SAES Group

www.saesgroup.com

neg_technology@saes‐group.com

oupgr


Pumping Speed [l/s]

NEXTorr HV 200

sorption test (according to ASTM F798-97)

Activation : 550°C x 60'

Sorption pressure: 1e-6 torr

Sorption temperature : 200°C

The NEXTorr® product line incorporates and exploits the patented concept of a combined pumping system comprising a getter

pump and an ion pump, and have global Intellectual Property Rights coverage with patents already granted in the US (8,287,247),


© SAES Group. Printed in Italy. All rights reserved. SAES®and NEXTorr® are registered trademarks of SAES Group.



Alloy Type ZAO1®

Alloy Composition Zr V Ti Al

Getter Mass (g) 84

Getter Surface (cm2) 252

CO2

H2

N2

Pumpingspeed (l/s) @ 200°C

Gas NEG activated NEG saturated

H2 155 5

O2 110 3

CO2 90 5

N2 50 3

CH4 15 8

Argon1 7 (0.7) 7 (0.7)

Sorption capacity (Torr·l)

GasSingle run capacity

Room temperature2Single run capacity

200°C3

H24 1680 N/A

O2 1.8 75

CO2 0.45 18

N2 0.15 75

CH4 30 50000 hours at 10‐6 Torr

Number of runs (sorption cycles) ≥100 ≥20

Note:1Measured at 3×10‐6 Torr. Unsaturated pump (saturated pump)

2Capacity value with the NEG element at room temperature, corresponding to a drop of the pumping speed to 10% of its initial

value. A drop to 15% has been considered in the case of N2.

3The “single run” capacity at 200°C is intended as the recommended absorbed quantity per run allowing to perform at least 20

sorption cycles. Capacity values for the various gases are not additive (a getter fully reacted with one gas species will not sorb

another gas).

4After the getter element has reached its H2 capacity, it can be “regenerated”. Through the regeneration process it is possible

to extract the hydrogen stored in the getter. After a full regeneration process, the pump can start pumping hydrogen again.

O2

CH4


NEXTorr®HV 300

General Features










£ Able to measure pressures lower than10‐9 mbar

Applications









The NEXTorr® HV 300 is an extremely compact pump able to sorb gases veryeffectively and with large capacities at operative pressures typical of High Vacuumsystems, starting from 10‐7 Torr. The getter cartridge consists of porous sintered non evaporable getter (NEG) disksstacked in a highly efficient gas trapping structure on a CF63 flange. The disks aremade of the new ZAO1 getter alloy. An integrated heater allows for the pumpactivation (500 °C x 1 h) and its operation in warm conditions (≈ 200 °C). Thanks tothe flexibility of the ZAO1 technology, the benefits of NEG pumping can be extendedto the high vacuum regime (1 • 10‐9 Torr to 1 • 10‐7 Torr). Operating the NEXTorr®HV 300 at approximately 200 °C, active gas as well as hydrocarbon species can bedissociated onto the surface of the ZAO1 disks and partially diffused into the bulk.As a result, the NEXTorr® HV 300 can deliver large pumping speeds for H2, activegases, like CO, CO2, O2, N2, H2O, air and hydrocarbon species in vacuum systemscharacterized by large gas loads with minimum power requirement (12 W at ≈200°C). The NEXTorr® HV 300 can also be used in UHV regime by simply operatingthe NEG element at room temperature (no power required). The pump integrates athermocouple to measure the temperature during the activation and the operationat 200°C. On the other side of the same flange, a noble diode ion pump featuring 14l/s for methane (CH4) and 6 l/s for Argon (Ar) is connected. Gas flows from thevacuum system to the ion pump through an optimized conductance. The optimizedconductance and the special internal design of the ion pump allow the maximumexploitation of the ion pump sorption performances. The configuration of the ionpump with respect of the getter cartridge provides additional pumping synergies.Gases released by the ion pump during the operation are intercepted and removedby the getter element, with a substantial reduction of backstreaming effects. For thesame reasons, increased pumping efficiency for H2 and CH4 are obtained. Finetitanium particles which are known to be continuously emitted by ion pumps duringoperation are also effectively trapped by the getter element, reducing potentialcontamination of the vacuum system.

HIGHLIGHTS

oupgr


Dimensions in mm


NEXTorr® HV 300

D.VS.152.1.17


1

10

100

1000

0,0001 0,001 0,01 0,1 1 10 100 1000


* The power supply includes the input cable** Other models, able to simultaneously drive up to four pumps, are available*** Longer output cables are available on request

Product Product description CodeNEXTorr PUMP NEXTorr HV 300 5H0231NEG element power supply* NEG POWER LP C1** 3B0521ION element power supply* SIP POWER 3B0506NEG element Output cable Cable supply output with KTC/3MT V1.1HT*** 3B0420ION element Output cable NIOPS04‐06 ‐ OUTPUT CABLE ION ‐ 3 MT*** 3B0418

The SAES Group manufacturingcompanies are ISO9001certified and the Italiancompanies are also ISO14001certified. Full informationabout our certifications foreach company of the Groupare available on our website at:www.saesgroup.com

SAES Groupwww.saesgroup.comneg_technology@saes‐group.com

oupgr


Pu

mp

ing

Sp

eed

[l/s]

NEXTorr HV 300

sorption test (according to ASTM FT98-97)

Activation: 550°C x 60'

Sorption temperature: 200°C

Sorption pressure: 1e-6Torr

The NEXTorr® product line incorporates and exploits the patented concept of a combined pumping system comprising a getterpump and an ion pump, and have global Intellectual Property Rights coverage with patents already granted in the US (8,287,247),


© SAES Group. Printed in Italy. All rights reserved. SAES®and NEXTorr® are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice.

Number of runs (sorption cycles) >20


Alloy Type ZAO®

Alloy Composition Zr V Ti AlGetter Mass (g) 200Getter Surface (cm2) 600

Pumping Speed (l/s)@200 °C

H2 300O2 260CO2 190N2 130

Sorption Capacity (Torrll)

H2 4000O2 Single run at 200 °C 190

CO2 Single run at 200 °C 45

N2 Single run at 200 °C 190

Note: Pumping speed data refer to the initial values .The “Single run” capacity is intended as the recommended absorbed quantity per run allowing toperform more than 20 sorption cycles at 1e‐6 Torr. In case of operation under much lower gas loadsor at RT, the pump can be reactivated 100 times or more.

CO2

H2

O2

N2


HIGHLIGHTS

oupgr

SIP POWER

Controller


Line Voltage

�24Vdc +/‐20%

�110/240 Vac 50/60 Hz

�Maximum input current 2.0 Adc

High voltage output

�Voltage 600Vdc – 6KVdc

�Maximum current to the pump 65mAmax

@ 350Vdc

�Fixed maximum value

�Maximum peak current 3.0 Apk @ 6KV

� Instrument Protection

Dimensions

�70x127x230 (HxWxD)

� sub‐rack 3U 14TE 230mm deep

Weight

�1,3 kg

�Remote control through RS485 with

Modbus protocol (RTU)

�Remote control through standard

Ethernet interface

�Up to 128 SIP Power units can be

simultaneously controlled


Product description Code

SIP POWER* 3B0506

SIP POWER LEDS RS485** 3B0509

NIOPS03‐OUTPUT CABLE ION‐3MT*** 3B0410

SIP POWER Controller

The SIP POWER controls the NEXTorr ion pump modules. The controller features an

internal system for measuring the ionization current along with an autoranging system.

The current (in nA) can be communicated with an external device through a serial

interface. The voltage can also be communicated with an external device. Up to 128 SIP

Power units can be simultaneously controlled through LAN using a dedicated program.

The SIP Power is protected by two security features: the SAFE connector and the

INTERLOCK.

Features:

SAFE connector and INTERLOCK

Optional alphanumeric display

Status LEDs and an RS485 interface on the version without the alphanumeric display

Data interface:

Remote control through Ethernet

Recording of the device parameters via USB

Remote control through RS485 (only available in the version without alphanumeric

display)

*with display

**without alphanumeric display

***other cable lengths available upon request

��

��

Main features

SIP POWER and NIOPS_Layout 1 21/01/2016 16:52 Pagina 1

oupgr


Single controller for low-power SAES® NEG pumps

NEG POWER MINI is a single-channel electronic unit specifically designed to control the activation

and conditioning processes of low-power SAES NEG pumps (see the table below).

NEG POWER MINI provides:

Adjustable DC voltage, up to 35 V

Current up to 5 A

Power up to 150 W

LAN remote control

NEG POWER MINI can be operated locally by push buttons, or can be remotely controlled with

Modbus protocol over Ethernet or RS232 interface.

The controller can monitor the temperature of NEG pumps equipped with thermocouple.

(*) Other length cables are available on request(§) Bakeable cables up to 250 °C, and radiation resistant (1000 Mrad)

NEG POWER MINI

HIGHLIGHTS

Input:

£Supply voltage: 100-240 VAC, ±10%

£Frequency: 50-60 Hz, ±10%

Output:

£Power: 175 W

£Overload protection

£Voltage: 0-35 VDC

£Current: up to 5 A

Dimensions:

£3U 28TE, depth 270 mm

Weight

£ 1.6 kg

Main features

£ Single controller foractivation/conditioning of low-powerSAES NEG pumps

£ Tunable output voltage, ramp time,power off time

£ Temperature monitoring of NEG pumpsequipped with thermocouple

£ Local control by push buttons

£ Remote control with Modbus protocol(LAN/RS232)

£ Free Windows and Linux remote controlsoftware

£ Start/Stop from I/O interface

£ Interlock

£USB port for automatic data logging

n

n

n

n


Product description Code Pump Models

NEG POWER MINI 3B0110

CapaciTorr: D 50, D 100, D 200, D 400, Z 100,

Z 200, Z 400, HV 200;

NEXTorr: D 100, D 200, D 300, D 500,

Z 100, Z 200, Z 300, HV 100, HV 200,

HV 300;

GP: GP 50, GP 100;

NEG modules: HV 400, UHV 700

NEG cable 3P5A 3MT*§ 3B0598

CapaciTorr D 50, D 100, D 200, Z 100,

Z 200;

NEXTorr D 100, D 200, Z 100, Z 200,

HV 100, HV 200.

NEG cable 4P10A 3MT*§ 3B0601 CapaciTorr D 400, Z 400, HV 200

NEG cable 6P5A 3MT*§ 3B0854 NEXTorr D 300, D 500, Z 300, HV 300

NEG cable 6P10A 3MT*§ 3B0602 GP 100

NEG cable for GP50 3MT* 3B0370 GP 50

www.saesgroup.com

[email protected]

D.VS.139.2.19

The SAES Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are also ISO14001 certified.

Full information about our certifications for each company of the Group is available on our website at: www.saesgroup.com

© SAES Group. Printed in Italy. All rights reserved. SAES® is a registered trademarks of SAES Group.


NEG POWER MINI_Layout 1 27/02/2019 08:17 Pagina 1

nextorr® hv 100 hv.pdf · the saes group manufacturing companies are iso9001 certified and the...

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