semprex.com - your #1 source for precision … - your #1 source for precision microscope stages,...

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SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles! WWW.SEMPREX.COM CATALOG #27 1 ESTABLISHED 1966 CATALOG #27 MICROSCOPE STANDS & BASES Table Stands & Custom Bases D102 Microscope Stands Adapters & Accessories 2 3 4 X-Y STAGES Coaxial Knob Stages KL-Series Fine Positioning Stages KM-Series Micrometer Stages Coaxial Knob Measuring Stages KL-Series Measuring Stages KL-Series Motorized Stages 5 6 7 8 9 10 DISK INSPECTION X-Y-THETA STAGES KD-Series Coaxial Knob Stages KD-Series Measuring Stages KDL-Series Motorized Stages 11 12 13 BIOTECH X-Y STAGES Stereo Base Stages KP53 Modular Post Stage M4 Extended Knob Stage KM3 Micrometer Measuring Stage KPL53 Motorized Post Stage KL46 Motorized Stage 14 15 15 16 17 18 Z-AXIS Stages & Measurement Z-Axis Stage Z-Axis Measurement 19 19 MICROSCOPE MOUNTING For Semprex Stages 20 STAGE ACCESSORIES Mask & Wafer Holders Biotech Sample Holders 22 23 DIGITAL READOUTS & METROLOGY Micro-DRO <DISCONTINUED> Quadra-Chek Metrology DRO 24 25 MOTOR CONTROLLERS & SOFTWARE Servo & Stepper Motor Controllers AMICron Motion Software 26 27 PROBE & PUNCH NEEDLES For Probe Cards & Micro-Punching 28 TABLE OF CONTENTS Product availability and specifications subject to change without notice. Semprex” and the “ S” logo are registered trademarks of Semprex Corporation. All rights reserved.

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SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

WWW.SEMPREX.COM CATALOG #27 1

ESTABLISHED 1966

CATALOG #27

MICROSCOPE STANDS & BASES Table Stands & Custom Bases D102 Microscope Stands Adapters & Accessories

2 3 4

X-Y STAGES Coaxial Knob Stages KL-Series Fine Positioning Stages KM-Series Micrometer Stages Coaxial Knob Measuring Stages KL-Series Measuring Stages KL-Series Motorized Stages

5 6 7 8 9

10

DISK INSPECTION X-Y-THETA STAGES KD-Series Coaxial Knob Stages KD-Series Measuring Stages KDL-Series Motorized Stages

11 12 13

BIOTECH X-Y STAGES Stereo Base Stages KP53 Modular Post Stage M4 Extended Knob Stage KM3 Micrometer Measuring Stage KPL53 Motorized Post Stage KL46 Motorized Stage

14 15 15 16 17 18

Z-AXIS Stages & Measurement Z-Axis Stage Z-Axis Measurement

19 19

MICROSCOPE MOUNTING For Semprex Stages

20

STAGE ACCESSORIES Mask & Wafer Holders Biotech Sample Holders

22 23

DIGITAL READOUTS & METROLOGY Micro-DRO <DISCONTINUED>

Quadra-Chek Metrology DRO

24 25

MOTOR CONTROLLERS & SOFTWARE Servo & Stepper Motor Controllers AMICron Motion Software

26 27

PROBE & PUNCH NEEDLES For Probe Cards & Micro-Punching

28

TABLE OF CONTENTS

Product availability and specifications subject to change without notice. “Semprex” and the “S” logo are registered trademarks of Semprex Corporation. All rights reserved.

SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

2 CATALOG #27 SEMPREX CORPORATION

Table Stand with 4x4 Stage

MICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASES

TABLE STANDS • Simple stand consisting of 3.5” riser and base with

4 rubber feet • Provides mobile support for stages up to 8x8 inch

travel • Great for use with stereoscopes on boom stands

PART# DESCRIPTION

10-2301.00 Table Stand for 3-6” Stages

10-2301.80 Table Stand for 8” Stages

Aluminum Base with Component Mounting Holes

Granite Base Integrated with Stage & Post Assembly

CUSTOM BASES • Bases made from precision flat aluminum tool-

ing plate and granite surface plate • Designed and machined to meet customer’s

specific requirements as an integral part of a complete system

• Granite available in standard sizes of 9x12x2, 12x18x3, and 18x24x3 inches

• Aluminum available in sizes up to 24x36 inches and may be black, clear, or hard anodized, nickel plated, or painted

• Shock absorbing rubber feet included • Quoted individually based on size, number of holes,

treatment, and special fixture attachments as re-quired

SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

WWW.SEMPREX.COM CATALOG #27 3

D102 Bright-field Stand with Microscope Adapter, Post, and Micrometer Stage

MICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASES

D102 MICROSCOPE STANDS • Versatile stand providing stable base for micro-

scopes, video systems, and stages • Works with stereo microscopes, focus blocks, and

some compound microscopes • Preferred alternative to inadequate stands sup-

plied with many stereoscopes, allowing inspection of larger and/or heavier samples

• Available with variable 25 watt halogen internal illuminator for transmitted bright-field and/or dark-field backlighting

• Dark-field backlighting option useful in highlighting edges, rough surfaces, defects, etc.

• Available with internal mirror assembly for use with fiber-optic cable and illuminator for higher power bright-field backlighting

• Also available plain (no backlighting)

PART# DESCRIPTION

10-2501.00 D102 Stand, Plain (3-6” stages)

10-2501.80 D102 Stand, Plain (8” stages)

10-2502.00 D102 Bright-Field Stand for use with Fiber-Optic Illuminator (3-6” stages)

10-2502.80 D102 Bright-Field Stand for use with Fiber-Optic Illuminator (8” stages)

10-2503.00 D102 Bright-Field Stand with Variable 25W Halo-gen Illuminator (3-6” stages)

10-2503.80 D102 Bright-Field Stand with Variable 25W Halo-gen Illuminator (8” stages)

10-2504.00 D102 Bright-Field/Dark-Field Stand with Variable 25W Halogen Illuminator (3-6” stages)

10-2504.80 D102 Bright-Field/Dark-Field Stand with Variable 25W Halogen Illuminator (8” stages)

Ordering Notes: 1. A microscope/focus block adapter must be

specified (see page 4, 10-26##.##). For no adapter, use part# 10-2600.00.

2. For stands to be used with fiber-optic illumi-nators, specify diameter of fiber-optic cable output shank.

SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

4 CATALOG #27 SEMPREX CORPORATION

D102 Stand with 2 Dovetail Posts, Cross-Slider, Single Slider, and 8x8 Stage

D102 Stand and Various Adapters

MICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASES

D102 SCOPE/FOCUS BLOCK ADAPTERS • Large variety of interchangeable

adapters for stereo microscopes, video systems, and some compound microscopes

• Custom configurations available • To match with stand, specify # as

0 = 3-6” stages 8 = 8” stages

PART# DESCRIPTION

10-2612.#0 Wild M400-450— 25mm Round Post & L-Arm

10-2612.#2 Leica MZ/GZ— L-Arm for 3-hole mount Leica Post

10-2614.#0 Meiji EM Series— 20mm Round Post & L-Arm

10-2614.#1 Meiji FU1000— Rigid Dovetail Post & Adapter

10-2615.#0 Mitutoyo FS60/70— Rigid Dovetail Post & Adapter

10-2616.#0 Nikon SMZ 2-10— 24.5mm Round Post & L-Arm

10-2616.#1 Nikon Focus Block— Rigid Dovetail Post & Adapter

10-2616.#2 Nikon SMZU/1500— 32mm Round Post & L-Arm

10-2616.#3 Nikon Bonder/E-Arm— Rigid Dovetail Post & Adapter

10-2617.#0 Olympus BHMJ— Dovetail Post & 22mm Post Adapter

10-2617.#1 Olympus SZ3— 25mm Round Post & L-Arm

10-2617.#2 Olympus SZH— 32mm Round Post & L-Arm

10-2617.#3 Olympus Modular BX— Rigid Dovetail Post & Adapter

10-2617.#5 Olympus SZ-STB3— 32mm Round Post & L-Arm

10-2618.#0 Zeiss Stereoscopes— 32mm Round Post & L-Arm

10-2623.#1 Nissho— 20mm Round Post & L-Arm

10-2699.#0 Video Post, 24” Knob Adjustable, and Adapter with 1/4-20 Lock Screw (specify camera or lens center distance)

PART# DESCRIPTION

10-2700.## Stop Collar for Round Posts

10-2702.00 Stop Clamp for Dovetail Posts

10-2710.## Upgrade to 16” Round Post (standard post 8-12”)

10-2790.00 Replacement 25W Bulb for D102 BF Stands

10-4707.00 Rigid Dovetail Post, 7” w/Endcap & Mount Holes

10-4714.00 Rigid Dovetail Post, 14” w/Endcap & Mount Holes

10-4718.00 Rigid Dovetail Post, 18” w/Endcap

10-4724.00 Rigid Dovetail Post, 24” w/Endcap

10-4814.00 Generic Post Base w/1” slots for four 1/4 screws

10-4911.00 Dovetail Slider w/Clamp & Attachment Holes

10-4912.00 Cross (90 deg) Dovetail Slider w/Clamps

POSTS & ACCESSORIES • Safety stops and extended length posts • Modular 4-sided dovetail posts provide superb ri-

gidity and strength—very important in high-power applications

• Cross-dovetail slider allows linking of multiple posts • For round post accessories, specify ## as

20=20mm, 24=24.5mm, 25=25mm, 32=32mm

SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

WWW.SEMPREX.COM CATALOG #27 5

XXX---Y STAGESY STAGESY STAGES

K300 Stage for Transmitted Light

PART# DESCRIPTION

11-4000.2# M4 Stage, 4x4 X-Y, Transmitted Light w/Glass Insert

11-4002.2# M4 Stage, 4x4 X-Y, Reflected Light

12-6400.n# K64 Stage, 6x4 X-Y, Transmitted Light w/Glass Insert

12-6402.n# K64 Stage, 6x4 X-Y, Reflected Light

12-6600.n# K66 Stage, 6x6 X-Y, Transmitted Light w/Glass Insert

12-6602.n# K66 Stage, 6x6 X-Y, Reflected Light

12-8800.4# K88 Stage, 8x8 X-Y, Transmitted Light w/Glass Insert

12-8802.4# K88 Stage, 8x8 X-Y, Reflected Light

12-1200.4# K300 Stage, 12x10 X-Y, Transm. Light w/Glass Insert

12-1202.4# K300 Stage, 12x12 X-Y, Reflected Light

13-1092.00 Optional Speed Handle for Quick Positioning

Model Top Plate Bottom Plate Glass Thick

A B C D E F

11-400x 10.00 5.88 4.45 7.02 4.5x4.5 1.00

12-6402 10.37 6.97 4.90 6.80 N/A 0.96

12-6600 11.70 9.45 6.60 11.55 6.5x6.5 0.96

12-6602 11.32 8.00 6.60 8.00 N/A 0.96

12-8800 14.95 11.50 7.60 8.00 8.5x8.5 1.17

12-8802 13.20 9.70 6.60 8.00 N/A 1.10

12-1200 18.82 14.00 8.34 12.65 12.5x10.5 1.48

12-1202 18.82 14.00 8.34 12.65 N/A 1.48

12-6400 10.37 6.97 4.90 8.50 6.5x4.25 0.96

COAXIAL KNOB STAGES • High quality stage for manual control applications • Thin cross-section (0.84-1.48") allows stage to eas-

ily adapt to most microscopes including Leica, Mi-tutoyo, Nikon, Olympus, and Zeiss

• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)

• Unique hardened steel friction drive for backlash-free operation proven to last much longer than rack and pinion systems

• Bearing slides made from single piece hardened steel use precision ball or cross-roller bearings for smooth, free running, consistent travel (other stages use split triangular wires)

Ordering Notes: 1. For bearing style, please specify n as

2 = ball bearings 4 = cross-roller bearings

2. For knob style, please specify # as 0 = rubber, short (1.5”) 1 = rubber, long (2.5”) 2 = large metal, short (1.5”) 3 = large metal, long (2.5”)

3. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.

4. For mask and wafer accessories, see p.22.

SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

6 CATALOG #27 SEMPREX CORPORATION

KL300 Leadscrew Stage for Reflected Light

XXX---Y STAGESY STAGESY STAGES

PART# DESCRIPTION

12-6480.#0 KL64 Leadscrew Stage, 6x4 X-Y, Transmitted Light w/Glass Insert

12-6482.#0 KL64 Leadscrew Stage, 6x4 X-Y, Reflected Light

12-6680.#0 KL66 Leadscrew Stage, 6x6 X-Y, Transmitted Light w/Glass Insert

12-6682.#0 KL66 Leadscrew Stage, 6x6 X-Y, Reflected Light

12-8880.40 KL88 Leadscrew Stage, 8x8 X-Y, Transmitted Light w/Glass Insert

12-8882.40 KL88 Leadscrew Stage, 8x8 X-Y, Reflected Light

12-1280.40 KL300 Leadscrew Stage, 12x10 X-Y, Transmitted Light w/Glass Insert

12-1282.40 KL300 Leadscrew Stage, 12x12 X-Y, Reflected Light

Model Top Plate Bottom Plate Glass Thick

A B C D E F

12-6480 8.40 6.97 4.90 6.80 6.5x4.25 0.96

12-6482 8.40 6.97 4.90 6.80 N/A 0.96

12-6680 9.00 9.45 6.57 8.00 6.5x6.5 0.96

12-6682 8.80 8.00 6.57 8.00 N/A 0.96

12-8880 10.80 11.50 7.57 9.70 8.5x8.5 1.17

12-8882 10.80 9.70 6.57 9.70 N/A 1.10

12-1200 15.50 14.00 8.84 14.00 12.5x10.5 1.48

12-1202 15.50 14.00 8.84 14.00 N/A 1.48

KL-SERIES FINE POSITIONING LEADSCREW STAGES • High quality precision stage for high-power manual

control applications • Individual X-Y leadscrew knobs for fine movement

and quick-release handles for rapid positioning • Thin cross-section (0.96-1.48") allows stage to easily

adapt to most microscopes including Leica, Mitutoyo, Nikon, Olympus, and Zeiss

• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flatness (other stages use 4 extra components bolted to-gether and are subject to assembly inaccuracies)

• Stainless steel ACME lead screws provide fine resolu-tion of 0.05” to 0.083” per revolution

• Bearing slides made from single piece hardened steel use precision ball or cross-roller bearings for smooth, free running, consistent travel (other stages use split triangular wires)

Ordering Notes: 1. For bearing style, please specify # as

2 = ball bearings 4 = cross-roller bearings

2. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.

3. For mask and wafer accessories, see p.22.

SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

WWW.SEMPREX.COM CATALOG #27 7

XXX---Y STAGESY STAGESY STAGES

Ordering Notes: 1. Micrometer adapter included with Stage —

select one for each axis. 2. A stage mount must be specified (see p.20-

21), otherwise D102 hole pattern used.

KM3 Stage with 2” Digital Micrometer Heads

• Low cost precision measuring stage • Special springs pre-load micrometer heads to

provide uniform backlash-free operation • High quality Mitutoyo digital or vernier mi-

crometer heads available • Thin cross-section (0.84") allows stage to easily

adapt to most microscopes including Leica, Mitutoyo, Nikon, Olympus, and Zeiss

• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flatness (other stages use 4 extra compo-nents bolted together and are subject to as-sembly inaccuracies)

• Bearing slides made from single piece hard-ened steel use cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)

PART# DESCRIPTION

12-3000.40 KM3 Stage, 3x3 X-Y, Transmitted w/Glass Insert

12-3002.40 KM3 Stage, 3x3 X-Y, Reflected Light

12-3090.40 KM3 Stage, 3” X Only, Transmitted w/Glass Ins.

12-3092.40 KM3 Stage, 3” X Only, Reflected Light

MT-3507.12 Digital Micrometer 1”/25mm, 1µm resolution w/LCD Display (.375” shank)

MT-1641.62 Digital Micrometer 2”/50mm, 1µm resolution w/LCD Display & Precision Knob (18mm shank)

MT-1512.21 Vernier Microm 25mm, 1µm res (12mm shank)

MT-1512.37 Vernier Micrometer 1”, 0.0001” res (.500” shank)

MT-1512.55 Vernier Microm 50mm, 10µm res (12mm shank)

MT-1512.71 Vernier Micrometer 2”, 0.001” res (.500” shank)

KM-SERIES MICROMETER MEASURING STAGES

Model Top Plate Bottom Plate Glass Thick

A B C D E F

12-3000 6.85 5.88 4.60 6.00 3.5x3.5 0.84

12-3002 6.85 5.88 4.60 6.00 N/A 0.84

SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

8 CATALOG #27 SEMPREX CORPORATION

XXX---Y STAGESY STAGESY STAGES

K88 Measuring Stage with Rotating Wafer Puck

PART# DESCRIPTION

12-6410.n# K64 Stage, 6x4 X-Y, Transmitted Light w/Glass Insert

12-6412.n# K64 Stage, 6x4 X-Y, Reflected Light

12-6610.n# K66 Stage, 6x6 X-Y, Transmitted Light w/Glass Insert

12-6612.n# K66 Stage, 6x6 X-Y, Reflected Light

12-8810.n# K88 Stage, 8x8 X-Y, Transmitted Light w/Glass Insert

12-8812.n# K88 Stage, 8x8 X-Y, Reflected Light

12-1210.n# K300 Stage, 12x10 X-Y, Transm. Light w/Glass Insert

12-1212.n# K300 Stage, 12x12 X-Y, Reflected Light

Model Top Plate Bottom Plate Glass Thick

A B C D E F

12-6410 10.37 6.97 4.90 8.50 6.5x4.25 0.96

12-6412 10.37 6.97 4.90 6.80 N/A 0.96

12-6610 11.70 9.45 6.60 11.55 6.6x6.5 0.96

12-6612 11.32 8.00 6.60 8.00 N/A 0.96

12-8810 14.95 11.50 7.60 8.00 8.5x8.5 1.17

12-8812 13.20 9.70 6.60 8.00 N/A 1.10

12-1210 18.82 14.00 8.34 12.65 12.5x10.5 1.48

12-1212 18.82 14.00 8.34 12.65 N/A 1.48

• High quality stage for manual measuring applica-tions with encoder resolutions from 20 to 0.5 µm

• Thin cross-section (0.96-1.48") allows stage to eas-ily adapt to most microscopes including Leica, Mi-tutoyo, Nikon, Olympus, and Zeiss

• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)

• Linear accuracy is laser calibrated to less than 1 µm error in 5000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000

• Repeatability within 2 µm • Unique hardened steel friction drive for backlash-

free operation outlasts rack and pinion systems • Bearing slides made from single piece hardened

steel use cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)

• Basic and metrology digital readouts available

Ordering Notes: 1. For resolution, please specify n as:

4 = 5 µm linear encoders 5 = 1 µm linear encoders

2. For knob style, please specify # as 0 = rubber, short (1.5”) 1 = rubber, long (2.5”) 2 = large metal, short (1.5”) 3 = large metal, long (2.5”)

3. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.

4. For mask and wafer accessories, see p.22. 5. For digital readouts & metrology, see p.24-25.

COAXIAL KNOB MEASURING STAGES

SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

WWW.SEMPREX.COM CATALOG #27 9

XXX---Y STAGESY STAGESY STAGES

• Precision stage for high-power manual measuring applications with encoder resolutions up to 0.5 µm

• Individual X-Y leadscrew knobs for fine movement and quick-release handles for rapid positioning

• Thin cross-section (0.96-1.48") allows stage to eas-ily adapt to most microscopes including Leica, Mi-tutoyo, Nikon, Olympus, and Zeiss

• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)

• Linear accuracy is laser calibrated to less than 1 µm error in 5000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000

• Repeatability within 2 µm • Stainless steel ACME lead screws provide fine reso-

lution of 0.05” to 0.083” per revolution • Single piece hardened steel bearing slides use

cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)

• Basic and metrology digital readouts available

KL88 Measuring Stage for Reflected Light

PART# DESCRIPTION

12-6490.#0 KL64 Leadscrew Stage, 6x4 X-Y, Transm. w/Glass

12-6492.#0 KL64 Leadscrew Stage, 6x4 X-Y, Reflected Light

12-6690.#0 KL66 Leadscrew Stage, 6x6 X-Y, Transm. w/Glass

12-6692.#0 KL66 Leadscrew Stage, 6x6 X-Y, Reflected Light

12-8890.#0 KL88 Leadscrew Stage, 8x8 X-Y, Transm. w/Glass

12-8892.#0 KL88 Leadscrew Stage, 8x8 X-Y, Reflected Light

12-1290.#0 KL300 Leadscrew Stg, 12x10 X-Y, Transm. w/Glass

12-1292.#0 KL300 Leadscrew Stage, 12x12 X-Y, Reflected Light

Model Top Plate Bottom Plate Glass Thick

A B C D E F

12-6490 8.40 6.97 4.90 6.80 6.5x4.25 0.96

12-6492 8.40 6.97 4.90 6.80 N/A 0.96

12-6690 9.00 9.45 6.57 8.00 6.5x6.5 0.96

12-6692 8.80 8.00 6.57 8.00 N/A 0.96

12-8890 10.80 11.50 7.57 9.70 8.5x8.5 1.17

12-8892 10.80 9.70 6.57 9.70 N/A 1.10

12-1290 15.50 14.00 8.84 14.00 12.5x10.5 1.48

12-1292 15.50 14.00 8.84 14.00 N/A 1.48

KL-SERIES FINE POSITIONING MEASURING STAGES

Ordering Notes: 1. For resolution, please specify # as:

5 = 1 µm linear encoders 6 = 0.5 µm linear encoders

2. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.

3. For mask and wafer accessories, see p.22. 4. For digital readouts, see p.24-25.

SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

10 CATALOG #27 SEMPREX CORPORATION

XXX---Y STAGESY STAGESY STAGES

KL88 Motor Stage for Reflected Light

PART# DESCRIPTION

12-6436.7# KL64 Motor Stage, 6x4 X-Y, Transm. w/Glass

12-6438.7# KL64 Motor Stage, 6x4 X-Y, Reflected Light

12-6636.7# KL66 Motor Stage, 6x6 X-Y, Transm. w/Glass

12-6638.7# KL66 Motor Stage, 6x6 X-Y, Reflected Light

12-8836.7# KL88 Motor Stage, 8x8 X-Y, Transm. w/Glass

12-8838.7# KL88 Motor Stage, 8x8 X-Y, Reflected Light

12-1236.7# KL300 Motor Stage, 12x10 X-Y, Transm. w/Glass

12-1238.7# KL300 Motor Stage, 12x12 X-Y, Reflected Light

Model Top Plate Bottom Plate Glass Thick

A B C D E F

12-6436 8.40 6.97 4.90 6.80 6.5x4.25 0.96

12-6438 8.40 6.97 4.90 6.80 N/A 0.96

12-6636 9.00 9.45 6.57 8.00 6.5x6.5 0.96

12-6638 8.80 8.00 6.57 8.00 N/A 0.96

12-8836 10.80 11.50 7.57 9.70 8.5x8.5 1.17

12-8838 10.80 9.70 6.57 9.70 N/A 1.10

12-1236 15.50 14.00 8.84 14.00 12.5x10.5 1.48

12-1238 15.50 14.00 8.84 14.00 N/A 1.48

KL-SERIES MOTORIZED STAGES

• Precision motorized stage for applications requiring automation and ergonomics

• Joystick and programmable software control • DC servo motors and rotary encoders in closed-loop

system for guaranteed positioning or microstepping motors in open-loop system

• Thin cross-section (0.96-1.48") allows stage to eas-ily adapt to most microscopes

• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)

• Linear accuracy is laser calibrated to less than 1 µm error in 3000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000

• Repeatability within 2 µm • Precision stainless steel ACME lead screws provide

fine resolution of 2 mm per revolution • Single piece hardened steel bearing slides use

cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)

Ordering Notes: 1. For motor type, please specify # as:

5 = servo, 0.5 µm encoders, 75 mm/sec 7 = stepper, 0.16 µm steps, 20 mm/sec

2. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.

3. For mask and wafer accessories, see p.22. 4. For controllers and software, see p.26-27.

SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!

WWW.SEMPREX.COM CATALOG #27 11

DISK INSPECTION XDISK INSPECTION XDISK INSPECTION X---YYY---THETA STAGESTHETA STAGESTHETA STAGES

KD64 Disk Stage for Transmitted Light

PART# DESCRIPTION

12-9046.2# KD64 Disk Stage, 6x4x360 X-Y-Theta, Transm. Light

12-9048.n# KD64 Disk Stage, 6x4x360 X-Y-Theta, Reflected Light

12-9068.n# KD66 Disk Stage, 6x6x360 X-Y-Theta, Reflected Light

13-9058.05 Hub for 7 mm / 25 mm I.D. Disks

13-9058.30 Hub for 20 mm / 25 mm I.D. Disks

13-9058.40 Hub for 25 mm / 40 mm I.D. Disks

13-9458.00 Vacuum System for Disk Stages w/Valve & Hoses

13-9458.25 Vacuum Hub for 20 mm I.D. Disks (13-9458.00 req’d)

13-9458.35 Vacuum Hub for 25 mm I.D. Disks (13-9458.00 req’d)

13-1092.00 Optional Speed Handle for Quick Positioning

Model Top Plate Bottom Plate Opening Thick

A B C D E F

12-9046 10.37 6.97 4.90 6.80 4.00 1.77

12-9048 10.37 6.97 4.90 6.80 N/A 1.90

12-9068 11.85 8.00 6.60 8.00 N/A 1.90

KD-SERIES COAXIAL KNOB STAGES

• High quality stage for inspection of aluminum, glass and plastic hard disks

• Specially designed rotary axis provides 360 de-grees of precise concentric motion

• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)

• Unique hardened steel friction drive for backlash-free operation proven to last much longer than rack and pinion systems

• Bearing slides made from single piece hardened steel use precision ball or cross-roller bearings for smooth, free running, consistent travel (other stages use split triangular wires)

Ordering Notes: 1. For bearing style, please specify n as

2 = ball bearings 4 = cross-roller bearings

2. For knob style, please specify # as 0 = rubber, short (1.5”) 1 = rubber, long (2.5”) 2 = large metal, short (1.5”) 3 = large metal, long (2.5”)

3. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.

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12 CATALOG #27 SEMPREX CORPORATION

DISK INSPECTION XDISK INSPECTION XDISK INSPECTION X---YYY---THETA STAGESTHETA STAGESTHETA STAGES

KD64 Measuring Stage for Reflected Light

KD-SERIES COAXIAL KNOB MEASURING STAGES • High quality stage for inspection of aluminum, glass

and plastic hard disks • Specially designed rotary axis provides 360 de-

grees of very precise concentric motion • Proprietary KORE-FRAME links X-Y axes in a single

piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)

• Linear accuracy is laser calibrated to less than 1 µm error in 5000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000

• Repeatability within 2 µm • Unique hardened steel friction drive for backlash-

free operation proven to last much longer than rack and pinion systems

• Bearing slides made from single piece hardened steel use cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)

• Basic and metrology digital readouts available

Ordering Notes: 1. For measuring axes, please specify * as:

1 = X-Theta (2-axis, includes Y-axis Lock) 3 = X-Y-Theta (3-axis)

2. For resolution, please specify n as: 4 = 5 µm linear & .025º rotary encoder 5 = 1 µm linear & .025º rotary encoder

3. For knob style, please specify # as 0 = rubber, short (1.5”) 1 = rubber, long (2.5”) 2 = large metal, short (1.5”) 3 = large metal, long (2.5”)

4. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern used.

5. For digital readouts, see p.24-25.

Model Top Plate Bottom Plate Opening Thick

A B C D E F

12-9148 10.37 6.97 4.90 6.80 N/A 1.90

12-9168 11.85 8.00 6.60 8.00 N/A 1.90

PART# DESCRIPTION

12-9*48.n# KD64 Disk Stg, 6x4x360 X-Y-Theta, Refl. Light

12-9*68.n# KD66 Disk Stg, 6x6x360 X-Y-Theta, Refl. Light

13-9058.05 Hub for 7 mm / 25 mm I.D. Disks

13-9058.30 Hub for 20 mm / 25 mm I.D. Disks

13-9058.40 Hub for 25 mm / 40 mm I.D. Disks

13-9458.00 Vacuum System for Disk Stages w/Valve, Hoses

13-9458.25 Vacuum Hub 20 mm ID Disks (13-9458.00 req’d)

13-9458.35 Vacuum Hub 25 mm ID Disks (13-9458.00 req’d)

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DISK INSPECTION XDISK INSPECTION XDISK INSPECTION X---YYY---THETA STAGESTHETA STAGESTHETA STAGES

KD88 Motor Stage for Transmitted Light

KDL-SERIES MOTORIZED STAGES

• Precision motorized stage for disk inspection appli-cations requiring automation and ergonomics

• Joystick and programmable software control • DC servo motors and rotary encoders in closed-loop

system for guaranteed positioning • Specially designed rotary axis provides 360 de-

grees of very precise concentric motion • Proprietary KORE-FRAME links X-Y axes in a single

piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)

• Resolution of 0.5 µm X(Y), .025º Theta • Smooth velocities from 6 mm/sec to 75 mm/sec • Linear accuracy is laser calibrated to less than 1

µm error in 3000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000

• Repeatability within 2 µm • Precision stainless steel ACME lead screws provide

fine resolution of 2 mm per revolution • Single piece hardened steel bearing slides use

cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)

Ordering Notes: 1. For motorized axes, please specify # as:

2 = X-Theta (2-axis, manual Y-axis w/stop) 4 = X-Y-Theta (3-axis)

2. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.

3. For controllers and software, see p.26-27.

Model Top Plate Bottom Plate Opening Thick

A B C D E F

12-9248 8.40 6.97 4.90 6.80 N/A 1.90

12-9268 8.80 8.00 6.60 8.00 N/A 1.90

PART# DESCRIPTION

12-9#48.75 KDL64 Mtr Stg, 6x4x360 X-Y-Theta, Reflected Light

12-9#68.75 KDL66 Mtr Stg, 6x6x360 X-Y-Theta, Reflected Light

13-9058.05 Hub for 7 mm / 25 mm I.D. Disks

13-9058.10 Hub for 12 mm / 20 mm I.D. Disks

13-9058.30 Hub for 20 mm / 25 mm I.D. Disks

13-9058.40 Hub for 25 mm / 40 mm I.D. Disks

13-9458.00 Vacuum System for Disk Stages w/Valve & Hoses

13-9458.25 Vacuum Hub for 20 mm I.D. Disks (13-9458.00 req’d)

13-9458.35 Vacuum Hub for 25 mm I.D. Disks (13-9458.00 req’d)

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14 CATALOG #27 SEMPREX CORPORATION

BIOTECH STAGESBIOTECH STAGESBIOTECH STAGES

SBS120 Stage shown on stereo microscope base

STEREO BASE STAGES • High quality manual control stage for use with most

stereo microscope bases with or without internal illuminators

• Special thin cross-section places sample mere milli-meters above light source opening for improved lighting effect (especially for darkfield mode)

• Sample holders available for slides, petri dishes, well plates, and other small parts. Custom holders can be made on request

• Unique hardened steel friction drive for backlash-free operation proven to last much longer than rack and pinion systems

• Bearing slides use hardened steel precision ball bearings for smooth, free running, consistent travel

PART# DESCRIPTION

11-0120.00 SBS120 Stage, 120x75 X-Y for Transmitted/Reflected Light Bases, Horizontal Metal Knobs

11-0122.20 SBS122 Stage, 125x80 X-Y for Transmitted Light Bases, Drop-Down Rubber Knobs

Ordering Notes: 1. Stage adaptation to most stereo bases available

(see p.20-21); for microscopes not listed, please specify make & model. In some cases, base must be sent to our factory for retrofitting.

2. For standard sample holders, please provide specifications. For custom sample holders, please provide a drawing and/or sample.

SBS122 Stage

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BIOTECH STAGESBIOTECH STAGESBIOTECH STAGES

M4 Stage for Inverted Microscope

M4 EXTENDED KNOB STAGE FOR INVERTED MICROSCOPES • Low cost, quality stage for precise manual X-Y mo-

tion applications on inverted microscopes • Thin cross-section and offset mount with open sam-

ple area allows unobstructed operation of micro-scope’s controls, high-power objectives, and trans-mitted and reflected lighting

• Unique hardened steel friction drive for backlash-free operation proven to last much longer than rack and pinion systems

• Extended length flexible knob for ergonomic control • Bearing slides made from single piece hardened

steel use precision ball bearings for smooth, free running, consistent travel (other stages use split triangular wires)

• Cross-roller bearings available for extra precision and rigidity

• Travel up to 100x100 mm — depends on micro-scope model.

PART# DESCRIPTION

11-4010.22 M4 Extended Knob Stage f/Inverted Microscope

13-1092.00 Optional Speed Handle for Quick Positioning

Note: Stage adaptation to most inverted microscopes available (see p.20-21); for microscopes not listed, please specify make & model.

KP53 MANUAL POST STAGE • Unique stage for precise manual motion appli-

cations on inverted and upright microscopes • Stage is mounted on post off to one side of mi-

croscope for simple installation and unob-structed operation of microscope’s controls, high-power objectives, and transmitted and reflected lighting

• Post mount provides quick vertical adjustment and X-Y alignment of stage

• Unique hardened steel friction drive for back-lash-free operation proven to last much longer than rack and pinion systems

• Extended flexible knob for ergonomic control • Bearing slides made from single piece hard-

ened steel use precision ball bearings for smooth, free running, consistent travel (other stages use split triangular wires)

• Cross-roller bearings available for extra preci-sion and rigidity

KP53 Stage with Post Mounted to Base Plate

PART# DESCRIPTION

12-5307.14 KP53 Manual Post Stage, 120x90 mm X-Y, w/350 mm Post, Locking Z-Slide, Base Mount, Specimen Adapter

12-5307.54 (same as above, but with Cross-Roller Bearings)

13-1092.00 Optional Speed Handle for Quick Positioning

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16 CATALOG #27 SEMPREX CORPORATION

BIOTECH STAGESBIOTECH STAGESBIOTECH STAGES

KM3 Stage shown without micrometer heads

• Low cost precision measuring stage • Special springs pre-load micrometer heads to pro-

vide uniform backlash-free operation • High quality Mitutoyo digital or vernier micrometer

heads available • Thin cross-section (0.84") allows stage to easily

adapt to most microscopes including Leica, Mitu-toyo, Nikon, Olympus, and Zeiss

• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)

• Bearing slides made from single piece hardened steel use cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)

PART# DESCRIPTION

12-3005.00 KM3 Stage, 3x3 X-Y, Transmitted w/Glass Insert

MT-3507.12 Digital Micrometer 1”/25mm, 1µm resolution. w/LCD Display (.375” shank)

MT-1641.62 Digital Micrometer 2”/50mm, 1µm resolution w/LCD Display & Precision Knob (18mm shank)

MT-1512.21 Vernier Micrometer 25mm, 1µm res (12mm shank)

MT-1512.37 Vernier Micrometer 1”, 0.0001” res (.500” shank)

MT-1512.55 Vernier Micrometer 50mm, 10µm res (12mm shank)

MT-1512.71 Vernier Micrometer 2”, 0.001” resolution (.500” shank)

KM3 MICROMETER MEAS-URING STAGE FOR INVERTED MICROSCOPES

Ordering Notes: 1. Micrometer adapter included with Stage — specify

one for each axis. 2. Stage adaptation to most inverted microscopes

available (see p.20-21); for microscopes not listed, please specify make & model.

3. For biotech sample holders, see p.23.

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BIOTECH STAGESBIOTECH STAGESBIOTECH STAGES

KPL53 MOTORIZED POST STAGE • Unique stage for automation of biotech appli-

cations on inverted and upright microscopes • Microstepping motors in open-loop system or

DC servo motors and rotary encoders in closed-loop system for guaranteed positioning

• Stage is mounted on post off to one side of mi-croscope for simple installation and unob-structed operation of microscope’s controls, high-power objectives, and transmitted and reflected lighting

• Post mount provides quick vertical adjustment and X-Y alignment of stage

• High quality ball screws provide fine resolution of 2 mm per revolution and recirculating ball nuts are pre-loaded to eliminate backlash

• Bearing slides made from single piece hard-ened steel use precision cross-roller bearings for smooth, free running, consistent travel (other stages use split triangular wires)

PART# DESCRIPTION

12-5367.1# KPL53 Stepper Motor Stage, 120x90 mm X-Y, w/350 mm Post, Locking Z-Slide, Base Mount, & Specimen Adapter

Ordering Notes: 1. For motor type, please specify # as:

4 = stepper, 0.16 µm steps, 20 mm/sec 5 = servo, 0.5 µm enc, 75 mm/sec

2. For biotech sample holders, see p.23. 3. For controllers and software, see p.26-27.

KPL53 Motorized Stage with Post Mounted to Base Plate

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18 CATALOG #27 SEMPREX CORPORATION

Ordering Notes: 1. For motor type, please specify # as:

4 = stepper, 0.16 µm steps, 20 mm/sec 5 = servo, 1 µm enc, 15 mm/sec

2. Stage adaptation to most inverted microscopes available (see p.20-21); for microscopes not listed, please specify make & model.

3. For biotech sample holders, see p.23. 4. For controllers and software, see p.26-27.

BIOTECH STAGESBIOTECH STAGESBIOTECH STAGES

• Precision motorized stage for biotech applica-tions requiring automation and ergonomics

• Joystick and programmable software control • Microstepping motors in open-loop system or

DC servo motors and rotary encoders in closed-loop system for guaranteed positioning

• Thin cross-section (0.84") allows stage to work with most inverted microscopes

• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flatness (other stages use 4 extra compo-nents bolted together and are subject to as-sembly inaccuracies)

• Linear accuracy is laser calibrated to less than 1 µm error in 2500; flatness and straightness better than 1 in 4000; orthogonality exceeds 1 in 8,000

• Repeatability within 2 µm • Precision stainless steel ACME lead screws

provide fine resolution of 2 mm per revolution • Single piece hardened steel ball bearing slides

provide smooth, free running, consistent travel (other stages use split triangular wires)

• Actual travel depends on microscope model

PART# DESCRIPTION

12-4637.7# KL46 Biotech Motor Stage, up to 120x60mm travel, Transmitted 90mm diameter

KL46 MOTOR STAGE FOR INVERTED MICROSCOPES

KL46 Motorized Stage

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ZZZ---AXIS STAGE & MEASUREMENTAXIS STAGE & MEASUREMENTAXIS STAGE & MEASUREMENT

MODULAR Z-AXIS STAGE • Leadscrew drive stage suitable for focusing and

fine Z-axis adjustment of small microscopes, video systems, stages, and more

• Built-in dovetail slider with clamp provides coarse vertical adjustment

Modular Z-Axis Stage on 14” Post w/Generic Base

Z-AXIS MEASURING SYSTEM

Z-Axis Indicator with Microscope, X-Y Measuring Stage, and 3-Axis Digital Readout

• Linear indicator can be retrofitted to almost any microscope, focus block, or Z-stage for po-sitioning and measurement applications

• 0.1 um resolution • 30 mm travel range • Linear accuracy better than 1 in 30,000 • Use with a digital readout and with or without

any X-Y or X-theta encoded stage for either a 1-axis or 3-axis measuring system

PART# DESCRIPTION

14-3009.80 Z-Axis Linear Indicator, 0.1 um res., 30 mm travel

Ordering Notes: 1. Mounting hardware included—please specify

microscope/focus block make and model. 2. For digital readouts, see p.24-25. 3. In most cases, microscope frame/focus block

must be sent to our factory for retrofitting.

PART# DESCRIPTION

10-3601.00 Modular Z-Axis Leadscrew Stage, 1” Travel, w/Integrated Dovetail Slider & Clamp

10-3631.7# Motorized Modular Z-Axis Leadscrew Stage, 1” Travel, w/Integrated Dovetail Slider & Clamp

10-4707.00 Rigid Dovetail Post, 7” w/Endcap & Mount Holes

10-4714.00 Rigid Dovetail Post, 14” w/Endcap & Mount Holes

10-4718.00 Rigid Dovetail Post, 18” w/Endcap

10-4724.00 Rigid Dovetail Post, 24” w/Endcap

10-4814.00 Generic Post Base w/1” slots for four 1/4” screws

10-2702.00 Stop Clamp for Dovetail Posts

NOTE: For motor type, please specify # as: 5 = servo, 0.5 µm encoder, 15 mm/sec 7 = stepper, 0.16 µm steps, 4 mm/sec

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20 CATALOG #27 SEMPREX CORPORATION

STAGE MOUNTING ADAPTERSSTAGE MOUNTING ADAPTERSSTAGE MOUNTING ADAPTERS

MICROSCOPE MOUNTING FOR SEMPREX STAGES NOTE: Add suffix part# to stage part# when ordering. Stages ordered without suffix# will have Semprex standard D102 or D104 hole pattern in bottom plate. Footnotes in brackets indicate the following: [1] 3x3, 4x4 travel stages only [2] 6x4 travel stages only [3] 6x6 travel stages only [4] 8x8 travel stages only [5] 10x10 travel stages only [6] 12x12 travel stages only [A] Stage requires long knobs [B] For X-Y stages with paddles and disk

stages [C] For X-Y stages without paddles—plain top

(no disk stages) [D] For reflected light stages only [E] For transmitted light stages only [F] Stage requires short knobs [G] For biotech stages only (except SBS series)

P# SUFFIX DESCRIPTION

-CH4 Custom Hole Pattern (drawing required, 2-4 holes)

-CR0 Riser Pedestal for Base Plate [1,2,3,D]

-CS0 Stereo Base Insert Adapter (drawing req’d)

-L100 Leica INM100 Hole Pattern [4]

-L200 Leica INM200 Hole Pattern [4]

-L300 Leica INM300 Hole Pattern [4,5,6,D]

-L301 Leica INM300 Hole Pattern w/Enlarged Cutout in Stage Bottom Plate [4,5,6,E]

-LE0 Leitz Ergolux Spacer [3]

-LE2 Leica DME Hole Pattern [1,2]

-LL0 Leica DM1000 / DM2000 / DM2500 / DM3000 / DML-M Replacement Bracket [1,2,D]

-LL1 Leica DM1000 / DM2000 / DM2500 / DM3000 / DML-M Adapter & Carrier Mod [2,E]

-LM40 Leica DM4000 / DM6000 Spacer & BP Mod [2,F]

-LP88 Reichert Polylite 88 Adapter [4]

-LR0 Leica DMR-M Hole Pattern & Carrier Modification [2,E]

-LR1 Leica DMR-M Replacement Bracket [1,2,D]

-LS0 Leica HL Stereo Base Adaptation [SBS120/122 only]

-LS1 Leica Plain Stereo Bases Adaptation [SBS120 only]

-M110 Mitutoyo FS110 Hole Pattern [3,4,B]

-M111 Mitutoyo FS110 Spacer [3,4,C]

-N082 Nikon Eclipse 80i / 90i Adapter & Carrier Mod. [1,2]

-N100 Nikon Optiphot 100 / M Adapter [1,2]

-N150 Nikon Optiphot 150 Hole Pattern [3,F]

-N151 Nikon Eclipse L150 Adapter & Carrier Mod. [1,2]

-N152 Nikon LV100 / LV150 Adapter & Carrier Mod. [1,2]

-N200 Nikon Optiphot 200 Adapter [4]

-N201 Nikon L200 Adapter [4]

-N300 Nikon Optiphot 300 Adapter [4,6]

-N600 Nikon Eclipse ME600 / E400 Replacemnt Bracket [1,2,D]

-N601 Nikon Eclipse ME600 / E400 Adaptr & Carrier Mod [1,2,E]

-N66 Nikon IC66 Hole Pattern [3,B w/o DIC] [3,C w/DIC] [3,4 w/scope modification, call for quote]

-N67 Nikon IC66 (w/o DIC) Spacer [3,C]

-NI2 Nikon TE2000 Adapter [G]

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THROAT DEPTH A microscope’s throat depth limits the size of stage that can be used. As a general rule, the distance “D” must be at least one inch greater than the Y-axis travel of the stage. Sometimes small stages cannot be used because the mounting bracket is wider than the stage’s bot-tom plate.

WORKING DISTANCE The working distance “W” of a microscope must be large enough to accommodate the stage thickness and any accessories, plus the speci-men thickness, plus the objective lens focal distance.

STAGE MOUNTING ADAPTERSSTAGE MOUNTING ADAPTERSSTAGE MOUNTING ADAPTERS

P# SUFFIX DESCRIPTION

-OA70 Olympus AX70 Replacement Bracket [3,D]

-OB50 Olympus BX40 / BX50 / BX60 Replacemnt Brackt [1,2,D]

-OB51 Olympus BX40 / 50 / 60 Adapter & Carrier Mod [1,2,A,E]

-OH10 Olympus BHM / BHN Adapter [1,2]

-OH20 Olympus BH2 / BHS Adapter [1,2]

-OH21 Olympus BH2MJL Adapter [3]

-OH30 Olympus BH3MJL-T4 Adapter [3,4,5,6]

-OM40 Olympus MX40 / MX51 Spacer [3,F]

-OM50 Olympus MX50 / MX61 Adapter [4]

-OM51 Olympus MX50L / MX61L Adapter [4,6]

-OX70 Olympus IX51 / IX71 / IX81 Adapter [G]

-OC41 Olympus CKX31 / CKX41 Adapter [G]

-OG71 Olympus GX71 Adapter [G]

-OG51 Olympus GX41 / GX51 Adapter [G]

-OS10 Olympus MVX10 Stereo Base Adaptation [SBS120 only]

-ZE0 Zeiss Axiotech Replacement Bracket [1,2,D]

-ZE1 Zeiss Axiotech Adapter & Carrier Modification [1,2,E]

-ZI2 Zeiss Axiovert 100 / 200 Adapter [G]

-ZM2 Zeiss AxioImager Hole Pattern & Carrier Mod [2,A,E]

-ZM3 Zeiss AxioImager Replacement Bracket [1,2,D,F]

-ZP0 Zeiss Axioplan / Axiophot Adapter [1,2,E]

-ZP1 Zeiss Axioplan / Axiophot Replacement Bracket [1,2,D]

-ZR2 Zeiss Axiotron 2 Hole Pattern [3,4,F]

-ZS1 Zeiss Axioskop 1 Hole Pattern [1,2]

-ZS2 Zeiss Axioskop 2 Hole Pattern & Carrier Mod. [2,A,E]

-ZS3 Zeiss Axioskop 2 Replacement Bracket [1,2,D,F]

-ZU0 Zeiss Universal Adapter [1,2]

-ZV0 Zeiss Vario Riser Pedestal [1,2] [3,4 w/scope modifica-tion, call for quote]

MICROSCOPE MOUNTING FOR SEMPREX STAGES NOTE: Add suffix part# to stage part# when ordering. Stages ordered without suffix# will have Semprex standard D102 or D104 hole pattern in bottom plate. Footnotes in brackets indicate the following: [1] 3x3, 4x4 travel stages only [2] 6x4 travel stages only [3] 6x6 travel stages only [4] 8x8 travel stages only [5] 10x10 travel stages only [6] 12x12 travel stages only [A] Stage requires long knobs [B] For X-Y stages with paddles and disk

stages [C] For X-Y stages without paddles—plain top

(no disk stages) [D] For reflected light stages only [E] For transmitted light stages only [F] Stage requires short knobs [G] For biotech stages only (except SBS series)

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22 CATALOG #27 SEMPREX CORPORATION

STAGE ACCESSORIESSTAGE ACCESSORIESSTAGE ACCESSORIES

MASK & WAFER HOLDERS • Holders support mask/wafers on precision flat

surface • Include cutouts for edge-grip tools or vacuum

wands, allowing easy placement and removal • Multiple holders are easily interchangeable on

one stage using paddle guide set

Standard Mask Paddle

M8 Rotating Puck Paddle, 8” w/6” Add-on

PART# DESCRIPTION

FOR 4” STAGES:

13-4014.00 M4 Paddle Guide Set, Front Load (n/a Mtr/Ldscr Stgs)

13-4015.00 M4 Paddle Guide Set, Side Load

13-40##.00 M4 Mask Paddle

13-4033.00 M4 Wafer Paddle, 4” Wafers

13-4233.00 M4 Rotating Puck Paddle, 4” Wafers

13-4243.02 M4 Rot. Vacuum Puck Pad. w/Valve/Hose, 2-4” Wafers

FOR 6” STAGES:

13-6014.00 M6 Paddle Guide Set, Front Load (n/a Mtr/Ldscr Stgs)

13-6015.00 M6 Paddle Guide Set, Side Load

13-60##.00 M6 Mask Paddle

13-60nn.00 M6 Wafer Paddle

13-62nn.00 M6 Rotating Wafer Puck Paddle

13-6245.02 M6 Rot. Vacuum Puck Pad. w/Valve/Hose, 4-6” Wafers

13-2031.02 Vacuum Chuck w/Valve/Hose, Knob Rot., 4-6” Wafers

FOR 8” STAGES:

13-8014.00 M8 Paddle Guide Set, Front Load (n/a Mtr/Ldscr Stgs)

13-8015.00 M8 Paddle Guide Set, Side Load (Reflected Stages)

13-8015.10 M8 Paddle Guide Set, Side Load (Transm. Stages)

13-80##.00 M8 Mask Paddle

13-80nn.00 M8 Wafer Paddle

13-82nn.00 M8 Rotating Wafer Puck Paddle

13-8246.02 M8 Rot. Vacuum Puck Pad. w/Valve/Hose, 5-8” Wafers

13-2041.02 Vacuum Chuck w/Valve/Hose, Knob Rot., 5-8” Wafers

FOR 12” STAGES:

13-1214.00 M300 Paddle Guide Set, Front Load

13-1248.02 M300 Rot. Vac. Puck Pad. w/Valve/Hose, 8-12” Wafers

ADDITIONAL ATTACHMENTS:

13-0021.02 Add-on 2” Wafer Guide on 4” Puck

13-0021.03 Add-on 3” Wafer Guide on 4” Puck

13-0021.04 Add-on 4” Wafer Guide on 6” Puck

13-0021.05 Add-on 5” Wafer Guide on 6” Puck

13-0041.05 Add-on 5” Wafer Guide on 8” Puck

13-0041.06 Add-on 6” Wafer Guide on 8” Puck

13-0041.08 Add-on 8” Wafer Guide on 12” Puck

13-1468.00 Paddle Alignment Stop (mounts on stage)

Ordering Notes: 1. For mask size, please specify ## as:

17 = 2.5” (M4-M8) 20 = 4” (M4-M8) 21 = 4.5” (M6-M8) 22 = 5” (M6-M8) 24 = 6” (M6-M8) 26 = 7” (M8)

2. For wafer/puck size, please specify nn as: 33 = 4” (M4-M8) 35 = 6” (M6-M8) 36 = 8” (M8)

3. Order one paddle guide with one or more paddles per stage.

4. Vacuum Chuck mounts directly to stage top plate and includes precision rotation knob.

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STAGE ACCESSORIESSTAGE ACCESSORIESSTAGE ACCESSORIES

BIOTECH SAMPLE HOLDERS • Interchangeable holders drop down into top plate

recess of Semprex biotech stages, bringing sam-ples closer to objective lens for proper focus

• Holders are precision machined from black delrin and will not scratch samples

• Custom holders available per request can be de-signed for a single sample or multiple samples

• Spring clamping option recommended for high pre-cision motorized applications

96 Well Microplate Holder

Two Slide Holder with Spring Clamp

PART# DESCRIPTION

13-5300.12 Plain Solid Insert for SBS120/122 stages

13-5318.01 Single Slide Holder for KP53/KL46/M4 stages

13-5318.31 Single Slide Holder for KM3 stage

13-5318.02 Dual Slide Holder w/Spring Clamp for KP53/KL46/M4

13-5318.32 Dual Slide Holder with Spring Clamp for KM3 stage

13-5318.04 Four Slide Holder for KP53/KL46/M4 stages

13-5330.06 Petri-Dish Holder, 60mm for KP53/KL46/M4 stages

13-5330.36 Petri-Dish Holder, 60mm for KM3 stage

13-5396.00 96 Well Microplate Holder for KP53/KL46/M4 stages

Ordering Notes: 1. For manual biotech stages, see p.14-16. 2. For motorized biotech stages, see p.17-18.

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PC-DRO Metrology Software Main Screen

3 axis Micro-DRO

DIGITAL READOUTS & METROLOGYDIGITAL READOUTS & METROLOGYDIGITAL READOUTS & METROLOGY

PART# DESCRIPTION

14-2902.10 Micro-DRO, 2 axis X-Y

14-2902.20 Micro-DRO, 2 axis X-Theta

14-2903.10 Micro-DRO, 3 axis X-Y-Z

14-2903.20 Micro-DRO, 3 axis X-Y-Theta

14-2903.30 Micro-DRO, 3 axis X-Z-Theta

14-2910.00 Optional PC-DRO Metrology Software

MICRO-DRO • Large, bright green LED digits (11 mm) for 1, 2, or 3 axes operation

• Use with encoded Semprex measuring stages or 2-phase 5V TTL encoders (may require adapter)

• Displays in millimeters, inches, and degrees • Individual X, Y, and Z reset buttons • Positive/negative direction toggle • Print button for output of position data directly to

serial port printer • RS232C serial port interface allows for custom soft-

ware development and integration • Low power, vibration free operation (no fans) • 15 watt power supply included • PC-DRO Metrology Software available (see below)

Ordering Notes: 1. Specify X-Y resolution of 10, 5, 1, or 0.5 µm 2. Specify Theta resolution of 0.025° or 0.0125° 3. Specify Z resolution of 1, 0.5, 0.25, or 0.1 µm 4. Custom resolutions available on request

PC-DRO METROLOGY SOFTWARE • Display rectangular or polar coordinates in mil-

limeters, inches, and degrees • Use with Semprex digital readout and Windows

or DOS compatible computer • Functions include: De-Skew, Distance, Radius,

Angle, Roundness, and Concentricity • Absolute and relative coordinate systems • Configure origin and direction • Set linear calibration factors to improve en-

coder accuracy • Save up to 1000 coordinates, add comments,

and import data into spreadsheets • Coordinate statistics include: Average, Maxi-

mum, Minimum, and Standard deviation

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DIGITAL READOUTS & METROLOGYDIGITAL READOUTS & METROLOGYDIGITAL READOUTS & METROLOGY

Quadra-Chek 200 DRO

QUADRA-CHEK METROL-

OGY DIGITAL READOUTS

PART# DESCRIPTION

EL-0110.00 QC-110 Basic Digital Readout, 1 axis Z

EL-0111.00 QC-111 Basic Digital Readout, 2 axis X-Theta

EL-0120.00 QC-120 Basic Digital Readout, 2 axis X-Y

EL-0121.00 QC-121 Basic Digital Readout, 3 axis X-Y-Theta

EL-0130.00 QC-130 Basic Digital Readout, 3 axis X-Y-Z

EL-0211.00 QC-211 Metrology Digital Readout, 2 axis X-Theta

EL-0220.00 QC-220 Metrology Digital Readout, 2 axis X-Y

EL-0221.00 QC-221 Metrology Digital Readout, 3 axis X-Y-Theta

EL-0230.00 QC-230 Metrology Digital Readout, 3-axis X-Y-Z

60-0230.04 Calibration Using Segmented Linear Error Correction at 10mm Intervals to NIST traceable laser

EL-0276.91 Keypad with 8-functions

EL-0281.60 Footswitch with 2-functions

• Full featured, multi-axis digital position readout • High visibility backlit 5.7” LCD with large 1/2”

digits • Familiar, intuitive interface conventions sim-

plify repetitive tasks and expedite training • Zero each axis individually • Displays in millimeters, inches, and degrees • Incremental and absolute origins • Segmented linear error correction feature can

be used to greatly improve accuracy of measur-ing stages

• Communication ports allow data to be downloaded to PC, printer, or handheld device

• Two large easy-to-reach hot keys can be pro-grammed to trigger an operator’s most fre-quent data entry steps

• Use with encoded Semprex measuring stages or almost any 2-phase TTL digital or analog en-coders (some connectors additional charge)

• Slender housing requires minimal space and can be tilted for seated or standing operation

• Low power, vibration free operation (no fans) Additional features of Quadra-Chek 200 series:

• Measure Magic® feature accelerates the meas-urement process with tools that automatically complete complex work steps

• Metrology functions include Point, Line, Ra-dius, Circle, Angle with Vertex, Distance, Min/Max Distance between features, Data Cloud, and Intersections

• Unique Geometric Tolerance feature to in-stantly view pass/fail results

• Make repetitive measurement sequences easy for operators by creating step-by-step part pro-grams

• Store measurement data with the ability to view both numerical and graphical results

• Skew function corrects any angular misalign-ment of samples, eliminating need for time consuming mechanical rotary alignment

• Toggle between cartesian (XY) and polar (R-Theta) display coordinates

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26 CATALOG #27 SEMPREX CORPORATION

MOTOR CONTROLLERS & SOFTWAREMOTOR CONTROLLERS & SOFTWAREMOTOR CONTROLLERS & SOFTWARE

ADVANCED SERVO MOTOR CONTROLLER • 2 or 4-axis programmable controller features ad-

vanced closed loop motor-encoder control system • PID filter uses sophisticated math to automatically

compensate for variations in friction and load, pro-ducing exceptionally smooth, accurate velocity and settle times under 1/2 second

• Safety features include obstruction sensing and power overload protection

• Use with Semprex advanced motor stages or with other closed loop DC servo motor-encoder control systems (see input/output below)

• Powerful, user-friendly AMICron motion soft-ware included (see AMICron, p.27)

• Dynamic Link Library (DLL) included for easy programming into new or existing applications

Specifications: Power Input: 110 or 220 VAC, 120 W (internal switch) Motor Output: 24 VDC, 4 A max (standard) 12 VDC, 5 A max (optional) Encoder Input: 2-phase 5 VDC TTL Interface: RS232C (38.4 kbps)

Advanced Motor Controller with Ergonomic Joystick

STEPPER MOTOR CONTROLLER • Versatile 4-axis micro-stepping controller for inde-

pendent and simultaneous axis control • Positive/negative drive sense, multiple acceleration

profiles, backlash correction, & limit switch sensing • Safety features incl. thermal & current protection • Resolution of 1/64 full-step (0.028 deg w/200

step/rev motor) • From 32 Hz to 512 KHz velocity (micro-steps/sec) • Compatible with Image-Pro/Scope-Pro software Specifications: Power Input: +5/+12/-12 VDC from PC Supply Motor Output: 10-28 VDC, 1.4 A x phase current x number axes Interface: PCI Bus

PART# DESCRIPTION

17-2358.00 Advanced 2-axis Servo Motor Controller with AMICron Software (PC w/RS232 required)

EL-5902.00 Ergonomic Joystick for Servo Controller

17-2358.04 Advanced 4-axis Servo Motor Controller with AMICron Software (PC w/RS232 required)

EL-0740.09 OASIS 4i 4-axis Stepper Motor Controller with Stage Cable (PC w/PCI-slot required)

17-0742.02 2-Axis Ergonomic Joystick for Stepper Controller

17-0742.03 3-Axis Ergonomic Joystick for Stepper Controller

17-0746.04 Auto-focus & Video Processing Module

17-2360.10 Adapter, Servo Controller to QC Readout, X-Y

17-2360.20 Adapter, Servo Controlr to QC Readout, X-Theta

17-4760.10 Adapter, Stepper Motor Stg to QC Readout, X-Y

17-4760.20 Adapter, Steppr Mtr Stg to QC Readout, X-Theta

OASIS 4i Microstepping Motor Controller

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MOTOR CONTROLLERS & SOFTWAREMOTOR CONTROLLERS & SOFTWAREMOTOR CONTROLLERS & SOFTWARE

AMICRON MOTION CONTROL SOFTWARE

AMICron Software Main Screen

• Sophisticated stage motion software included with Semprex Advanced Servo Motor Controller

• Manual, programmable, and joystick control of stage movement

• Hand enter absolute and relative position movements

• Set velocity and acceleration from very slow smooth scanning at 6 µm/sec to rapid high speed positioning at 60 mm/sec

• Zero each axis individually or simultaneously • Toggle between polar and rectangular coordi-

nate systems • Display in millimeters, micrometers, inches,

degrees, and sectors • Metrology functions include Distance, Circle

Radius with Center, and Angle with Intersection • De-skew function corrects part misalignment

and compensates axes for linear motion • Maintain up to 4 different origins plus 1 tempo-

rary origin • Store special positions with descriptions in one

of 8 “quick buttons” (i.e. “Load”, “Start”, etc.) • Customize up to 8 joystick button functions • Store up to 5,000 coordinates along with

notes, measurement results, and classifica-tions

• Customize classification text for each of 6 coor-dinate storage buttons

• Save coordinate data on disk to recall at a later date, and import or export data to other appli-cations such as a spreadsheet for further analysis

• Powerful motion sequencer makes repetitive tasks efficient, allowing for automatic relative and abso-lute positioning, timed waits, repeat loops, subrou-tines, operator instruction prompts, and more

• Build a library of commonly used sequences by sav-ing macros to disk, allowing operators to simply “load and go”

• Send ASCII commands to other RS232 communica-tion ports (could be used to trigger other devices such as a camera)

Minimum System Requirements: Windows 9x/NT/2000/XP Computer 16 MB RAM, 4 MB Disk Space One RS232 serial communications port VGA Color Display (at least 800x600 recommended)

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28 CATALOG #27 SEMPREX CORPORATION

PROBE NEEDLESPROBE NEEDLESPROBE NEEDLES

MATERIAL DIAMETER (D) TIP ANGLE (θ) TIP RADIUS (R) *** LENGTH (L)

TYPE P/N INCH P/N DEG P/N INCH P/N INCH P/N

Tungsten 31- .013 0 5* 0 .0001* 0 0.500 1

Carbide .015 1 8 1 .00025 2 0.625 2

Beryllium 33- .020 2 10 2 .0005 3 0.750 3

Copper** .025 3 15 3 .00075 4 0.875 4

Tool Steel 35- .0275 4 18 4 .001 5 1.00 5

.028 5 20 5 .0025 6 1.25 6

Customer 39- .031 6 25 6 .005 7 1.50 7

Supplied 30 7 .0075 8 1.75 8

9 2.00 9

Tolerances >> +/- 0.0002 +/- 0.5 +/- 0.0001 +/- 0.025

* Tungsten Carbide may include either 5 degree tip angle OR .0001” tip radius, but NOT BOTH. All other materials may include NEITHER of these specifications. ** Beryllium Copper minimum diameter is 0.020”. *** For FLAT TIP, specify “.1” at end of part number (i.e. 31-2345 becomes 31-2345.1 ).

PROBE & PUNCH NEEDLES • Finest quality needles available • Special, proprietary machining technique used

to grind needles accurately and consistently • Machine grinding creates smooth, straight sur-

faces (unlike chemical etching which can result in pits and concave surfaces)

• Tungsten carbide and flat tip recommended for punching applications

31-5203 Needle (0.0001 inch radius Tip)

Example Specification 31-2345 = Tungsten Carbide, 0.020 diameter, 15 degree tip angle, 0.00075 tip radius, 1.000 length