vibrating capacitor and surface photovoltage measurements for semiconductor surface studies
DESCRIPTION
Vibrating capacitor and surface photovoltage measurements for semiconductor surface studies. BME-EET dr. Mizsei, János Berkeley, 2008. Budapest University of Technology and Economics, Department of Electron Devices. Part of the world heritage. Outline. Introduction Experimental methods - PowerPoint PPT PresentationTRANSCRIPT
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Vibrating capacitor and surface photovoltage measurements for semiconductor surface studiesBME-EET
dr. Mizsei, JnosBerkeley, 2008Budapest University of Technology and Economics, Department of Electron Devices
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Part of the world heritage
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OutlineIntroductionExperimental methodsvibrating capacitor: history and theoryC-V methods for characterisation of Metal-SiO2-Si systemvibrating capacitor (and SPV) for surface mappingResults from oxidized and native oxide covered surfacesExplanation: band diagrams, Fermi level pinningOther possibilities of the light excitation and capacitive probespn tester: a simplified SPV for conductivity type testsheet resistance tester by laser light excitation and SPV detectionstatic charge: touch free Q-V (C-V) diagram, passivation by static surface chargetemperature changing: modified Gray-Brown methode for Dit determination tunnel current (oxide thickness) testcontactless mapping of fotovoltaic structures and devicesVibrating capacitor for semiconductor gas sensorsConclusion
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Introductionthe semiconductor surfaces are extremely sensitive to the environment
thereforecharacterisation of the semiconductor surface (and bulk) properties
is extremely important !
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The CPD:zero electric field between the plates !CPD compensated:Lower work function (electron emission, positive surface charge)Higher work function (negative charge on the surface)A BSheet chargesdipole layer
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History: Volta: 1801.Lord Kelvin, 1880-90: Phil. Mag.
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Schematic draw:Experimental setup of Lord Kelvin
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Current to be detected:Capacitance:Charge:
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Up to date vibrating capacitor equipment: frequency selective amplifying, phase sensitive (multiply) demodulationfeedback of the DC voltage (automatic compensation)optical excitation for surface photovoltage measurementsdigital realisationsecond harmonics detection and feedback for distance controlsurface mapping (x-y scan).
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Ideal Voltmeter: I=0 !thus no galvanic contact is needed.Than how to measure?Detect the electrostatic field by vibrating reference electrode,compensate the electrostatic field, until the field is zero andread the compensating voltage!
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MOS structureminority carriers, lifetimet
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SiO2-Si structures: MOSEnergy band diagram
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HF C-V plot
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Traditional C-V methodspossibilities: Qf Qm Qot Dit Nd Na tadvantages: exact, well developed method, available equipmentdisadvantages: electrodes are needed (destructive process), mapping is difficult The surface charge analyser: it is an improved version.
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SiO2-Si structuresEnergy band diagram
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SiO2-Si structuresEnergy band diagram during high intensity light excitation
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Samples:
80 nm thermal oxide on the left side or450 nm thermal oxide on the left sidenative oxide on the right sideSurface:
P-0.01 ohmcmP-5-10 ohmcmN-35-60 ohmcm N-7-20 ohmcmN-0.001 ohmcmDoping:
51 mm diameter wafer
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Vibrating capacitor (Kelvin) methodwith transparent reference electrode
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Surface photo-voltage (SPV) measurements
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Vibrating capacitor and SPV results: P-5-10 ohmcm
P-0.01 ohmcm - = - =V - VFB = Y SPV
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Vibrating capacitor and SPV results: ohmcm N-35-60
N-7-20
N-0.001 V - VFB = Y SPV
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Band diagrams: moderately doped p Si SPV
V - VFB = Yinversionweak inversioninversion
-
Band diagrams: p+ Si SPV
V - VFB = Y
Vnear flat-band(depletion)near flat-band(depletion) near flat-band(depletion)
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Band diagrams: n+ Si SPV
V - VFB = Y
Vnear flat-band(accumulation)near flat-band(depletion) near flat-band(accumulation)
-
Band diagrams: moderately doped n Si SPV
V - VFB = Yaccumulationdepletionaccumulation
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Summary of the surface conditionsYYVVQSS>080nm SiO2 native SiO2
Doping
Surface layer
n+
n
p
p+
Real bare
accumulation
accumulation
inversion
(weak) depletion
Ultra thin oxide,
"bare"
(weak) depletion, near flat-band
depletion,
near intrinsic
inversion,
near intrinsic
(weak) depletion, near flat-band
Thick oxide
accumulation
accumulation
inversion
(weak) depletion
-
PN tester A simplified SPV for conductivity type test:Basis of operation: ultra thin insulator covered surfaces are in depletion (Fermi level pinning), thus the phase of the SPV signal is characteristic of the bulk conductivity type.
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Sheet resistance tester by SPV excitation and detection: model
r =5.10 ohmcm
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Sheet resistance tester by SPV excitation and detection: simplified model
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Sheet resistance tester by SPV excitation and detection: capacitive coupling
Test resulted in a good correlation!
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Sheet resistance tester by SPV excitation and detection
SHR four point probe
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Touch free C-V (Q-V) method:static charge on the surfaceby conducting polymerby corona dischargeby light excited tunnel currentwhich yields a bias, thusQf Qm Qot Dit , Nd Nacan be calculated !
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Calibration: static charge on the SiO2 surface by a conducting stamp 2.5, 1.5, -1.5 VMapping by 0.3 mmstep size
Diagram1
1.09
1.36
1.66
1.93
2.17
2.35
2.51
2.5
2.53
2.56
2.5
2.5
2.48
2.58
2.6
2.63
2.69
2.68
2.65
2.64
2.49
2.41
2.18
1.92
1.69
1.4
1.12
0.96
0.87
0.89
0.95
1.02
1.13
1.19
1.26
1.32
1.35
1.41
1.45
1.49
1.54
1.57
1.54
1.59
1.56
1.59
1.63
1.61
1.59
1.55
1.45
1.24
0.86
0.35
-0.23
-0.78
-1.2
-1.39
-1.48
-1.47
-1.49
-1.51
-1.48
-1.46
-1.51
-1.49
-1.43
-1.34
-1.25
-1.03
-0.8
-0.52
-0.29
-0.04
0.26
0.43
0.54
0.6
0.66
0.64
Munka1
1.09
1.36
1.66
1.93
2.17
2.35
2.51
2.5
2.53
2.56
2.5
2.5
2.48
2.58
2.6
2.63
2.69
2.68
2.65
2.64
2.49
2.41
2.18
1.92
1.69
1.4
1.12
0.96
0.87
0.89
0.95
1.02
1.13
1.19
1.26
1.32
1.35
1.41
1.45
1.49
1.54
1.57
1.54
1.59
1.56
1.59
1.63
1.61
1.59
1.55
1.45
1.24
0.86
0.35
-0.23
-0.78
-1.2
-1.39
-1.48
-1.47
-1.49
-1.51
-1.48
-1.46
-1.51
-1.49
-1.43
-1.34
-1.25
-1.03
-0.8
-0.52
-0.29
-0.04
0.26
0.43
0.54
0.6
0.66
0.64
Munka1
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
Munka2
Munka3
-
Q=00QfDYsDQ1 DQ2Vibrating capacitor Q-V, Q-Y , corona charged
Parameters
V-Q Curve Evaluation
4836060084492520000000
Semiconductor Parameters
qElementary Charge0Q
kBoltzmann's Constant0J/K
e0Dielectric Constant0F/m
eSiRelative Dielectric Constant for Si11.7
eoxRelative Dielectric Constant for SiO23.8
Input Parameters
TTemperature295K"=Editable"
NdDoping Concentation5.00E+14cm-3
Conduction Typep
Calculated General Parameters
EgEnergy Gap for Si1.126eV
niIntrinsic Concentration5821659136cm-3
LDiIntrinsic Debye Length37.63m
VtThermal Voltage25.44mV
VbBuilt-in Voltage289mV
Calculated V-Q Curve ParametersTox[A]
ToxOxide Thickness805.00800
CoxOxide Capacitance0.04F/cm2
VfbFlat-Band Voltage-4184mV
VmbMid-Band Voltage-3089mV
VthThreshold Voltage-2127mV
VsurfSurface Voltage1592mV
VsSurface Potential808mV
VoxOxide Voltage784mV
QtotTotal Charge1093749979474.981/cm2
QnetNet Charge1172646069136.361/cm2
DitDensity of Interface States (Vs1 = 2Vb, Vs2 = 0)824276735.7558021/mVcm2
QitInterface Trapped Oxide Charge476532191484.581/cm2
Calculated Additional V-Q Curve Parameters
QfbCharge at Flat-Band Voltage-1093749979474.981/cm2
QmbCharge at Mid-Band Voltage-807360311938.511/cm2
QthCharge at Threshold Voltage-556016654940.0951/cm2
Qmb idealCharge at Mid-Band Voltage (Dit=0)41327316568.91761/cm2
Qth idealCharge at Threshold Voltage (Dit = 0)61201144152.5341/cm2
Dit1Density of Interface States (Vs1 = Vb, Vs2 = 0)847788239.6107361/mVcm2
Dit2Density of Interface States (Vs1 = 2Vb, Vs2 = Vb)800765231.9008691/mVcm2
Init Parameters
Evaluate V-Q Curve
Delete Data
V-Q Curve Data
ChargeDarkBrightCorrected BrightDark - Corr. BrightIdeal Q-V CurveNr Of PointsChargeVb2*Vb
-385-8.66-8.68-8.4210891724-0.238910675-0.235492721298-3850.28906080130.5781216025
-380-8.54-8.55-8.3015384674-0.2384614944-0.23426532751000.28906080130.5781216025
-375-8.41-8.43-8.1819896698-0.2280101776-0.2330089509
-370-8.29-8.3-8.0624389648-0.227560997-0.2317235768
-365-8.17-8.18-7.9428896904-0.2271103859-0.2304001749
-360-8.05-8.06-7.8233399391-0.2266602516-0.2290467024
-355-7.92-7.94-7.7037901878-0.2162098885-0.2276539654
-350-7.8-7.81-7.5842404366-0.2157597542-0.2262211591
-345-7.67-7.69-7.4646906853-0.205309391-0.2247490585
-340-7.55-7.57-7.345140934-0.2048592567-0.2232308239
-335-7.43-7.44-7.2255911827-0.2044086456-0.2216693461
-330-7.31-7.32-7.1060419083-0.2039580345-0.2200529724
-325-7.18-7.2-6.986492157-0.1935076714-0.2183916867
-320-7.06-7.07-6.8669424057-0.1930575371-0.2166659087
-315-6.94-6.95-6.7473926544-0.1926074028-0.2148852199
-310-6.81-6.83-6.6278429031-0.1821570396-0.213034749
-305-6.69-6.7-6.5082931519-0.1817069054-0.2111197561
-300-6.56-6.58-6.3887434006-0.1712565422-0.2091288567
-295-6.44-6.45-6.2691936493-0.1708064079-0.2070551962
-290-6.32-6.33-6.149643898-0.1703562737-0.2048960775
-285-6.19-6.21-6.0300941467-0.1599059105-0.2026427239
-280-6.07-6.08-5.9105443954-0.1594557762-0.2002760917
-275-5.95-5.96-5.7909946442-0.1590051651-0.197805196
-270-5.82-5.83-5.6714448929-0.1485552788-0.1951983422
-265-5.7-5.71-5.5518951416-0.1481046677-0.1924650222
-260-5.57-5.59-5.4323453903-0.1376547813-0.1895713061
-255-5.45-5.46-5.312795639-0.1372041702-0.1864961386
-250-5.32-5.34-5.1932458878-0.1267542839-0.1832240224
-245-5.2-5.21-5.0736961365-0.1263036728-0.1797338724
-240-5.08-5.09-4.9541463852-0.1258535385-0.1759878248
-235-4.95-4.96-4.8345966339-0.1154031754-0.171946153
-230-4.82-4.83-4.7150468826-0.104953289-0.1675509363
-225-4.7-4.71-4.5954971313-0.1045026779-0.1627546251
-220-4.57-4.58-4.4759473801-0.0940527916-0.1574561
-215-4.44-4.46-4.3563976288-0.0836024284-0.1515467614
-210-4.32-4.33-4.2368483543-0.0831518173-0.1448705792
-205-4.19-4.2-4.1172986031-0.0727014542-0.1372033954
-200-4.06-4.07-3.9977488518-0.062251091-0.1281690747
-195-3.93-3.94-3.8781991005-0.0518009663-0.1172794774
-190-3.8-3.81-3.7586493492-0.0413506031-0.1034599766
-185-3.66-3.68-3.6390995979-0.0209004879-0.0847676694
-180-3.52-3.54-3.5195498466-0.0004501343-0.0563095063
-175-3.4-3.4-3.400000095400
-170-3.24-3.27-3.28045034410.04045033450.1763878316
-165-3.09-3.13-3.16090059280.07090067860.5888694525
-160-2.94-2.99-3.04135084150.10135078430.6631671786
-155-2.79-2.85-2.92180109020.13180112840.6858050227
-150-2.64-2.71-2.8022513390.16225123410.700288415
-145-2.49-2.57-2.68270182610.19270181660.7111101151
-140-2.34-2.44-2.56315207480.22315216060.7198807597
-135-2.19-2.3-2.44360232350.25360226630.7272839546
-130-2.04-2.16-2.32405257230.28405261040.7336865067
-125-1.89-2.02-2.2045028210.31450283530.7393319607
-120-1.74-1.88-2.08495306970.34495306020.7443915009
-115-1.59-1.74-1.96540343760.37540340420.7489751577
-110-1.43-1.6-1.84585368630.41585373880.7531706691
-105-1.28-1.46-1.72630393510.44630396370.7570462823
-100-1.12-1.32-1.60675418380.4867541790.7606312037
-95-0.96-1.18-1.48720455170.52720457320.7639843822
-90-0.8-1.03-1.36765480040.56765478850.7671298981
-85-0.63-0.9-1.24810504910.61810505390.770082593
-80-0.47-0.76-1.12855529790.65855526920.7728741169
-75-0.32-0.62-1.00900554660.68900555370.7755167484
-70-0.17-0.49-0.88945579530.71945577860.7780250907
-65-0.03-0.35-0.7699060440.73990607260.7804213166
-600.098-0.22-0.65035653110.74835652110.7827010155
-550.228-0.09-0.53080677990.75880676510.7848870754
-500.3540.032-0.41125702860.76525700090.7869794369
-450.4820.16-0.29170727730.77370727060.7889905572
-400.6080.285-0.1721575260.78015750650.7909241319
-350.7320.412-0.05260777470.78460776810.7927865386
-300.8570.5350.06694197650.79005801680.7945868373
-250.9790.6590.18649172780.79250824450.7963168621
-201.1020.7810.30604147910.7959585190.797997117
-151.2270.9060.4255909920.80140900610.799620688
-101.3491.030.54514074330.80385923390.8011919856
-51.471.1510.66469049450.80530953410.8027216196
01.5921.2720.78424024580.80775976180.8042014241
51.7121.3980.90378999710.80821001530.8056403995
101.8341.5181.02333974840.8106602430.8070408702
151.9581.641.14288949970.8151104450.8084025979
202.0781.7661.26243925090.81556081770.8097289801
252.1971.8821.38198900220.81501102450.8110192418
302.3182.0061.50153875350.81646132470.8122804165
352.442.1211.62108850480.81891155240.8135099411
402.562.2431.74063825610.81936168670.8147107959
452.6822.3641.86018800740.82181191440.8158854246
502.8012.4831.97973775860.82126235960.8170326352
552.922.6062.09928703310.82071304320.8181526661
603.0412.7262.21883678440.8221631050.8192517161
653.1622.8482.33838653560.82361340520.8203236461
703.2812.9672.45793628690.8230636120.8213759661
753.4013.0892.57748603820.82351398470.8224061728
803.523.2072.69703578950.82296419140.8234158754
853.643.3272.81658554080.82341456410.824406445
903.7573.4492.93613529210.82086467740.8253751993
953.8783.5653.05568504330.82231497760.826331079
1003.9983.6863.17523479460.82276511190.8272634149
V-Q Curve Chart (2)
-8.66-8.68-8.4210891724-0.238910675-0.23549272120.5781216025
-8.54-8.55-8.3015384674-0.2384614944-0.23426532750.5781216025
-8.41-8.43-8.1819896698-0.2280101776-0.2330089509
-8.29-8.3-8.0624389648-0.227560997-0.2317235768
-8.17-8.18-7.9428896904-0.2271103859-0.2304001749
-8.05-8.06-7.8233399391-0.2266602516-0.2290467024
-7.92-7.94-7.7037901878-0.2162098885-0.2276539654
-7.8-7.81-7.5842404366-0.2157597542-0.2262211591
-7.67-7.69-7.4646906853-0.205309391-0.2247490585
-7.55-7.57-7.345140934-0.2048592567-0.2232308239
-7.43-7.44-7.2255911827-0.2044086456-0.2216693461
-7.31-7.32-7.1060419083-0.2039580345-0.2200529724
-7.18-7.2-6.986492157-0.1935076714-0.2183916867
-7.06-7.07-6.8669424057-0.1930575371-0.2166659087
-6.94-6.95-6.7473926544-0.1926074028-0.2148852199
-6.81-6.83-6.6278429031-0.1821570396-0.213034749
-6.69-6.7-6.5082931519-0.1817069054-0.2111197561
-6.56-6.58-6.3887434006-0.1712565422-0.2091288567
-6.44-6.45-6.2691936493-0.1708064079-0.2070551962
-6.32-6.33-6.149643898-0.1703562737-0.2048960775
-6.19-6.21-6.0300941467-0.1599059105-0.2026427239
-6.07-6.08-5.9105443954-0.1594557762-0.2002760917
-5.95-5.96-5.7909946442-0.1590051651-0.197805196
-5.82-5.83-5.6714448929-0.1485552788-0.1951983422
-5.7-5.71-5.5518951416-0.1481046677-0.1924650222
-5.57-5.59-5.4323453903-0.1376547813-0.1895713061
-5.45-5.46-5.312795639-0.1372041702-0.1864961386
-5.32-5.34-5.1932458878-0.1267542839-0.1832240224
-5.2-5.21-5.0736961365-0.1263036728-0.1797338724
-5.08-5.09-4.9541463852-0.1258535385-0.1759878248
-4.95-4.96-4.8345966339-0.1154031754-0.171946153
-4.82-4.83-4.7150468826-0.104953289-0.1675509363
-4.7-4.71-4.5954971313-0.1045026779-0.1627546251
-4.57-4.58-4.4759473801-0.0940527916-0.1574561
-4.44-4.46-4.3563976288-0.0836024284-0.1515467614
-4.32-4.33-4.2368483543-0.0831518173-0.1448705792
-4.19-4.2-4.1172986031-0.0727014542-0.1372033954
-4.06-4.07-3.9977488518-0.062251091-0.1281690747
-3.93-3.94-3.8781991005-0.0518009663-0.1172794774
-3.8-3.81-3.7586493492-0.0413506031-0.1034599766
-3.66-3.68-3.6390995979-0.0209004879-0.0847676694
-3.52-3.54-3.5195498466-0.0004501343-0.0563095063
-3.4-3.4-3.400000095400
-3.24-3.27-3.28045034410.04045033450.1763878316
-3.09-3.13-3.16090059280.07090067860.5888694525
-2.94-2.99-3.04135084150.10135078430.6631671786
-2.79-2.85-2.92180109020.13180112840.6858050227
-2.64-2.71-2.8022513390.16225123410.700288415
-2.49-2.57-2.68270182610.19270181660.7111101151
-2.34-2.44-2.56315207480.22315216060.7198807597
-2.19-2.3-2.44360232350.25360226630.7272839546
-2.04-2.16-2.32405257230.28405261040.7336865067
-1.89-2.02-2.2045028210.31450283530.7393319607
-1.74-1.88-2.08495306970.34495306020.7443915009
-1.59-1.74-1.96540343760.37540340420.7489751577
-1.43-1.6-1.84585368630.41585373880.7531706691
-1.28-1.46-1.72630393510.44630396370.7570462823
-1.12-1.32-1.60675418380.4867541790.7606312037
-0.96-1.18-1.48720455170.52720457320.7639843822
-0.8-1.03-1.36765480040.56765478850.7671298981
-0.63-0.9-1.24810504910.61810505390.770082593
-0.47-0.76-1.12855529790.65855526920.7728741169
-0.32-0.62-1.00900554660.68900555370.7755167484
-0.17-0.49-0.88945579530.71945577860.7780250907
-0.03-0.35-0.7699060440.73990607260.7804213166
0.098-0.22-0.65035653110.74835652110.7827010155
0.228-0.09-0.53080677990.75880676510.7848870754
0.3540.032-0.41125702860.76525700090.7869794369
0.4820.16-0.29170727730.77370727060.7889905572
0.6080.285-0.1721575260.78015750650.7909241319
0.7320.412-0.05260777470.78460776810.7927865386
0.8570.5350.06694197650.79005801680.7945868373
0.9790.6590.18649172780.79250824450.7963168621
1.1020.7810.30604147910.7959585190.797997117
1.2270.9060.4255909920.80140900610.799620688
1.3491.030.54514074330.80385923390.8011919856
1.471.1510.66469049450.80530953410.8027216196
1.5921.2720.78424024580.80775976180.8042014241
1.7121.3980.90378999710.80821001530.8056403995
1.8341.5181.02333974840.8106602430.8070408702
1.9581.641.14288949970.8151104450.8084025979
2.0781.7661.26243925090.81556081770.8097289801
2.1971.8821.38198900220.81501102450.8110192418
2.3182.0061.50153875350.81646132470.8122804165
2.442.1211.62108850480.81891155240.8135099411
2.562.2431.74063825610.81936168670.8147107959
2.6822.3641.86018800740.82181191440.8158854246
2.8012.4831.97973775860.82126235960.8170326352
2.922.6062.09928703310.82071304320.8181526661
3.0412.7262.21883678440.8221631050.8192517161
3.1622.8482.33838653560.82361340520.8203236461
3.2812.9672.45793628690.8230636120.8213759661
3.4013.0892.57748603820.82351398470.8224061728
3.523.2072.69703578950.82296419140.8234158754
3.643.3272.81658554080.82341456410.824406445
3.7573.4492.93613529210.82086467740.8253751993
3.8783.5653.05568504330.82231497760.826331079
3.9983.6863.17523479460.82276511190.8272634149
Dark
Bright
Corrected Bright
Dark - Corr. Bright
Ideal Q-V Curve
2*Vb
Corona charge (nC/cm2)
Kelvin voltage [V]
Potential barrier [V]
Q-V curves
V-Q Curve Chart
-8.66-8.68-8.4210891724-0.238910675-0.23549272120.5781216025
-8.54-8.55-8.3015384674-0.2384614944-0.23426532750.5781216025
-8.41-8.43-8.1819896698-0.2280101776-0.2330089509
-8.29-8.3-8.0624389648-0.227560997-0.2317235768
-8.17-8.18-7.9428896904-0.2271103859-0.2304001749
-8.05-8.06-7.8233399391-0.2266602516-0.2290467024
-7.92-7.94-7.7037901878-0.2162098885-0.2276539654
-7.8-7.81-7.5842404366-0.2157597542-0.2262211591
-7.67-7.69-7.4646906853-0.205309391-0.2247490585
-7.55-7.57-7.345140934-0.2048592567-0.2232308239
-7.43-7.44-7.2255911827-0.2044086456-0.2216693461
-7.31-7.32-7.1060419083-0.2039580345-0.2200529724
-7.18-7.2-6.986492157-0.1935076714-0.2183916867
-7.06-7.07-6.8669424057-0.1930575371-0.2166659087
-6.94-6.95-6.7473926544-0.1926074028-0.2148852199
-6.81-6.83-6.6278429031-0.1821570396-0.213034749
-6.69-6.7-6.5082931519-0.1817069054-0.2111197561
-6.56-6.58-6.3887434006-0.1712565422-0.2091288567
-6.44-6.45-6.2691936493-0.1708064079-0.2070551962
-6.32-6.33-6.149643898-0.1703562737-0.2048960775
-6.19-6.21-6.0300941467-0.1599059105-0.2026427239
-6.07-6.08-5.9105443954-0.1594557762-0.2002760917
-5.95-5.96-5.7909946442-0.1590051651-0.197805196
-5.82-5.83-5.6714448929-0.1485552788-0.1951983422
-5.7-5.71-5.5518951416-0.1481046677-0.1924650222
-5.57-5.59-5.4323453903-0.1376547813-0.1895713061
-5.45-5.46-5.312795639-0.1372041702-0.1864961386
-5.32-5.34-5.1932458878-0.1267542839-0.1832240224
-5.2-5.21-5.0736961365-0.1263036728-0.1797338724
-5.08-5.09-4.9541463852-0.1258535385-0.1759878248
-4.95-4.96-4.8345966339-0.1154031754-0.171946153
-4.82-4.83-4.7150468826-0.104953289-0.1675509363
-4.7-4.71-4.5954971313-0.1045026779-0.1627546251
-4.57-4.58-4.4759473801-0.0940527916-0.1574561
-4.44-4.46-4.3563976288-0.0836024284-0.1515467614
-4.32-4.33-4.2368483543-0.0831518173-0.1448705792
-4.19-4.2-4.1172986031-0.0727014542-0.1372033954
-4.06-4.07-3.9977488518-0.062251091-0.1281690747
-3.93-3.94-3.8781991005-0.0518009663-0.1172794774
-3.8-3.81-3.7586493492-0.0413506031-0.1034599766
-3.66-3.68-3.6390995979-0.0209004879-0.0847676694
-3.52-3.54-3.5195498466-0.0004501343-0.0563095063
-3.4-3.4-3.400000095400
-3.24-3.27-3.28045034410.04045033450.1763878316
-3.09-3.13-3.16090059280.07090067860.5888694525
-2.94-2.99-3.04135084150.10135078430.6631671786
-2.79-2.85-2.92180109020.13180112840.6858050227
-2.64-2.71-2.8022513390.16225123410.700288415
-2.49-2.57-2.68270182610.19270181660.7111101151
-2.34-2.44-2.56315207480.22315216060.7198807597
-2.19-2.3-2.44360232350.25360226630.7272839546
-2.04-2.16-2.32405257230.28405261040.7336865067
-1.89-2.02-2.2045028210.31450283530.7393319607
-1.74-1.88-2.08495306970.34495306020.7443915009
-1.59-1.74-1.96540343760.37540340420.7489751577
-1.43-1.6-1.84585368630.41585373880.7531706691
-1.28-1.46-1.72630393510.44630396370.7570462823
-1.12-1.32-1.60675418380.4867541790.7606312037
-0.96-1.18-1.48720455170.52720457320.7639843822
-0.8-1.03-1.36765480040.56765478850.7671298981
-0.63-0.9-1.24810504910.61810505390.770082593
-0.47-0.76-1.12855529790.65855526920.7728741169
-0.32-0.62-1.00900554660.68900555370.7755167484
-0.17-0.49-0.88945579530.71945577860.7780250907
-0.03-0.35-0.7699060440.73990607260.7804213166
0.098-0.22-0.65035653110.74835652110.7827010155
0.228-0.09-0.53080677990.75880676510.7848870754
0.3540.032-0.41125702860.76525700090.7869794369
0.4820.16-0.29170727730.77370727060.7889905572
0.6080.285-0.1721575260.78015750650.7909241319
0.7320.412-0.05260777470.78460776810.7927865386
0.8570.5350.06694197650.79005801680.7945868373
0.9790.6590.18649172780.79250824450.7963168621
1.1020.7810.30604147910.7959585190.797997117
1.2270.9060.4255909920.80140900610.799620688
1.3491.030.54514074330.80385923390.8011919856
1.471.1510.66469049450.80530953410.8027216196
1.5921.2720.78424024580.80775976180.8042014241
1.7121.3980.90378999710.80821001530.8056403995
1.8341.5181.02333974840.8106602430.8070408702
1.9581.641.14288949970.8151104450.8084025979
2.0781.7661.26243925090.81556081770.8097289801
2.1971.8821.38198900220.81501102450.8110192418
2.3182.0061.50153875350.81646132470.8122804165
2.442.1211.62108850480.81891155240.8135099411
2.562.2431.74063825610.81936168670.8147107959
2.6822.3641.86018800740.82181191440.8158854246
2.8012.4831.97973775860.82126235960.8170326352
2.922.6062.09928703310.82071304320.8181526661
3.0412.7262.21883678440.8221631050.8192517161
3.1622.8482.33838653560.82361340520.8203236461
3.2812.9672.45793628690.8230636120.8213759661
3.4013.0892.57748603820.82351398470.8224061728
3.523.2072.69703578950.82296419140.8234158754
3.643.3272.81658554080.82341456410.824406445
3.7573.4492.93613529210.82086467740.8253751993
3.8783.5653.05568504330.82231497760.826331079
3.9983.6863.17523479460.82276511190.8272634149
Dark
Bright
Corrected Bright
Dark - Corr. Bright
Ideal Q-V Curve
2*Vb
Corona charge (nC/cm2)
Kelvin voltage [V]
Potential barrier [V]
Q-V curves
-
Basic equations for the evaluation:
-
Surface and interface charges control the potential barrier
Dit
EMBED CorelDraw.Graphic.8
_984215327.unknown
-
Bands at different temperatures:Surface voltage mapping at T1 and T2 Dit can be calculated from the charge difference (dQss) and the work function shift (dW)
-
Calculation of Dit (modified Gray-Brown method): T2T1
2niLDi is 5.6x107 1/cm2 for silicon,
B2 -B1 is about 1 mV/K.
Test at different temperatures in dark, and in light, respectively:
-
Results: P 5 ohmcm, 80 nm oxide=====-----320 K 300 K 20 K
V2 V1 V2 -V1
VFB2 VFB1 VFB2 -VFB1 FB2 -FB1
Y2 Y1 Y2 - Y1
-=T2-T1
-
Interface state densities:
Y2Y1V2 -V1V2 -V1
Diagram1
3500000000000850000000000
93000000000002400000000000
97000000000002800000000000
140000000000004400000000000
53000000000001500000000000
60000000000001660000000000
2100000000000600000000000
33000000000001130000000000
1700000000000564000000000
1600000000000510000000000
1000000000000270000000000
2000000000000630000000000
1200000000000328000000000
1300000000000420000000000
1100000000000350000000000
1600000000000540000000000
2000000000000700000000000
2200000000000800000000000
980000000000360000000000
Diagram2
3500000000000850000000000
93000000000002400000000000
97000000000002800000000000
140000000000004400000000000
53000000000001500000000000
60000000000001660000000000
2100000000000600000000000
33000000000001130000000000
1700000000000564000000000
1600000000000510000000000
1000000000000270000000000
2000000000000630000000000
1200000000000328000000000
1300000000000420000000000
1100000000000350000000000
1600000000000540000000000
2000000000000700000000000
2200000000000800000000000
980000000000360000000000
Distance |mm|
Dit
Diagram4
-17-17
-16550000000000
-15690000000000
-14300000000000
120000000000330000000000
180000000000300000000000
175000000000280000000000
247000000000292000000000
226000000000315000000000
310000000000300000000000
286000000000311000000000
310000000000320000000000
110000000000250000000000
-4270000000000
-3230000000000
-2300000000000
-1300000000000
260000000000290000000000
650000000000310000000000
523000000000257000000000
420000000000220000000000
170000000000200000000000
100000000000176000000000
290000000000190000000000
240000000000170000000000
134000000000142000000000
142000000000131000000000
4470000000083000000000
1172000000000
1285000000000
1391000000000
1479000000000
15115000000000
16128000000000
1717
Dit from HF C-V
Distance |mm|
Dit
Munka1
ni1ni2niTh1Th2Thut1LdiLdi1Ldi2ut2utDistance [mm]Kelvin Voltage [V]Kelvin Voltage [V]Kelvin Voltage [V]
5.71E+092.93E+101.33E+102.95E+023.17E+023.06E+020.025443752.54E-033.87E-031.71E-030.027341250.0263925-25
-240.0480.3583-0.009
-230.07950.4014-0.0079
-220.11720.4053-0.0094
-210.15170.3909-0.0056
fib1fib2fibpszit1pszit2pszi-200.17240.4049-0.0049
-0.3351581587-0.3154404554-0.32532489160.3350.3770.356-190.21770.4111-0.0014
-180.26220.40370.0002
Fft1Fft2FfvVt1Vt2dFperdpsziDitklDitdiff-170.2970.39510.0021
2529.03253372881144.6631542571678.43845875681.0001.011-2546.1462942142-2.49777E+111.27914E+11-160.32450.38830.00475.50E+11
-150.33980.38830.00396.90E+11
2-140.35290.39030.00713.00E+11
-1-130.36090.38310.00661.20E+113.30E+11
771-120.36240.38090.00711.80E+113.00E+11
1000-110.36180.38140.00741.75E+112.80E+11
1377-100.36220.37840.00722.47E+112.92E+11
1335-90.35610.37310.00692.26E+113.15E+11
Nekq-80.35440.36770.00713.10E+113.00E+11
3.00E+1501.38E-231.60E-19-70.34980.36410.0072.86E+113.11E+11
-60.34460.35760.00693.10E+113.20E+11
-50.33880.35870.00811.10E+112.50E+11
-40.33570.36480.00772.70E+11
-30.3320.36030.00852.30E+11
-20.32910.35670.00733.00E+11
-10.32360.3540.00733.00E+11
00.32570.33880.00752.60E+112.90E+11
10.32860.32570.00736.50E+113.10E+11
20.32880.3290.00815.23E+112.57E+11
30.32990.33260.00894.20E+112.20E+11
40.33930.35520.00911.70E+112.00E+11
50.35020.37040.00971.00E+111.76E+11
60.35510.36530.00942.90E+111.90E+11
70.34960.36240.00992.40E+111.70E+11
80.34480.36240.01081.34E+111.42E+11
90.3430.35860.01121.42E+111.31E+11
100.34280.36490.01334.47E+108.30E+10
110.33740.36810.01397.20E+10
120.33610.36930.01328.50E+10
130.33660.37140.01299.10E+10
140.33620.37480.01357.90E+10
150.33680.37430.01181.15E+11
160.33490.37660.01131.28E+11
170.33340.37180.01
180.32330.35920.0081
190.30850.33540.0059
200.28620.29310.0041
210.28460.234-0.0014
220.27130.1956-0.0039
230.24930.1518-0.0076
240.24050.1077-0.0083
25
Munka1
0
0
n tipus
p tipus
Diagram1
3500000000000850000000000
93000000000002400000000000
97000000000002800000000000
140000000000004400000000000
53000000000001500000000000
60000000000001660000000000
2100000000000600000000000
33000000000001130000000000
1700000000000564000000000
1600000000000510000000000
1000000000000270000000000
2000000000000630000000000
1200000000000328000000000
1300000000000420000000000
1100000000000350000000000
1600000000000540000000000
2000000000000700000000000
2200000000000800000000000
980000000000360000000000
Diagram2
3500000000000850000000000
93000000000002400000000000
97000000000002800000000000
140000000000004400000000000
53000000000001500000000000
60000000000001660000000000
2100000000000600000000000
33000000000001130000000000
1700000000000564000000000
1600000000000510000000000
1000000000000270000000000
2000000000000630000000000
1200000000000328000000000
1300000000000420000000000
1100000000000350000000000
1600000000000540000000000
2000000000000700000000000
2200000000000800000000000
980000000000360000000000
Distance |mm|
Dit
Diagram4
-17-17
-16550000000000
-15690000000000
-14300000000000
120000000000330000000000
180000000000300000000000
175000000000280000000000
247000000000292000000000
226000000000315000000000
310000000000300000000000
286000000000311000000000
310000000000320000000000
110000000000250000000000
-4270000000000
-3230000000000
-2300000000000
-1300000000000
260000000000290000000000
650000000000310000000000
523000000000257000000000
420000000000220000000000
170000000000200000000000
100000000000176000000000
290000000000190000000000
240000000000170000000000
134000000000142000000000
142000000000131000000000
4470000000083000000000
1172000000000
1285000000000
1391000000000
1479000000000
15115000000000
16128000000000
1717
Dit from HF C-V
Distance |mm|
Dit
Munka1
ni1ni2niTh1Th2Thut1LdiLdi1Ldi2ut2utDistance [mm]Kelvin Voltage [V]Kelvin Voltage [V]Kelvin Voltage [V]
5.71E+092.93E+101.33E+102.95E+023.17E+023.06E+020.025443752.54E-033.87E-031.71E-030.027341250.0263925-25
-240.0480.3583-0.009
-230.07950.4014-0.0079
-220.11720.4053-0.0094
-210.15170.3909-0.0056
fib1fib2fibpszit1pszit2pszi-200.17240.4049-0.0049
-0.3351581587-0.3154404554-0.32532489160.3350.3770.356-190.21770.4111-0.0014
-180.26220.40370.0002
Fft1Fft2FfvVt1Vt2dFperdpsziDitklDitdiff-170.2970.39510.0021
2529.03253372881144.6631542571678.43845875681.0001.011-2546.1462942142-2.49777E+111.27914E+11-160.32450.38830.00475.50E+11
-150.33980.38830.00396.90E+11
2-140.35290.39030.00713.00E+11
-1-130.36090.38310.00661.20E+113.30E+11
771-120.36240.38090.00711.80E+113.00E+11
1000-110.36180.38140.00741.75E+112.80E+11
1377-100.36220.37840.00722.47E+112.92E+11
1335-90.35610.37310.00692.26E+113.15E+11
Nekq-80.35440.36770.00713.10E+113.00E+11
3.00E+1501.38E-231.60E-19-70.34980.36410.0072.86E+113.11E+11
-60.34460.35760.00693.10E+113.20E+11
-50.33880.35870.00811.10E+112.50E+11
-40.33570.36480.00772.70E+11
-30.3320.36030.00852.30E+11
-20.32910.35670.00733.00E+11
-10.32360.3540.00733.00E+11
00.32570.33880.00752.60E+112.90E+11
10.32860.32570.00736.50E+113.10E+11
20.32880.3290.00815.23E+112.57E+11
30.32990.33260.00894.20E+112.20E+11
40.33930.35520.00911.70E+112.00E+11
50.35020.37040.00971.00E+111.76E+11
60.35510.36530.00942.90E+111.90E+11
70.34960.36240.00992.40E+111.70E+11
80.34480.36240.01081.34E+111.42E+11
90.3430.35860.01121.42E+111.31E+11
100.34280.36490.01334.47E+108.30E+10
110.33740.36810.01397.20E+10
120.33610.36930.01328.50E+10
130.33660.37140.01299.10E+10
140.33620.37480.01357.90E+10
150.33680.37430.01181.15E+11
160.33490.37660.01131.28E+11
170.33340.37180.01
180.32330.35920.0081
190.30850.33540.0059
200.28620.29310.0041
210.28460.234-0.0014
220.27130.1956-0.0039
230.24930.1518-0.0076
240.24050.1077-0.0083
25
Munka1
0
0
n tipus
p tipus
-
Static charge by the strong light excitation:V maps by vibrating capacitor-=negative charge on the surface due to the tunnel current from the silicon.
-
1. equilibrium, steady state2. non-equilibrium,non-steady state3. non-equilibrium,steady state4. equilibrium,non-steady state
-
Charging up of an ultrathin oxide covered Si by intensive light excitationY
Diagram1
0.358128
0.358891
0.359349
0.160372
0.158998
0.159303
0.158388
0.159456
0.158083
0.319523
0.319065
0.159609
0.158998
0.160372
0.159609
0.160372
0.303043
0.304264
0.304569
0.160524
0.159609
0.159609
0.158998
0.158693
0.288395
0.289921
0.158388
0.157472
0.156557
0.156862
0.156557
0.274967
0.276035
0.15732
0.156099
0.155183
0.154268
0.15381
0.153505
0.260013
0.261844
0.154878
0.151674
0.151521
0.150453
0.150606
0.14969
0.14969
0.149232
0.149232
0.148164
0.14847
0.147401
0.147554
0.147249
0.146944
0.146638
0.146333
0.146486
0.145113
0.14496
0.144197
0.144044
0.143739
0.143739
0.143587
0.143129
0.142976
0.143129
0.142824
0.141756
0.142061
0.141603
0.209963
0.212252
0.213778
0.142824
0.141145
0.139772
0.138246
0.137941
0.138093
0.13672
0.137025
0.136567
0.135805
0.135042
0.135042
0.135042
0.134736
0.133516
0.133668
0.133668
0.133058
0.132753
0.132448
0.132448
0.132448
0.131837
0.13199
0.131074
0.130769
0.131532
0.131074
0.130922
0.130922
0.131379
0.131379
0.131227
0.130616
0.131074
0.130464
0.130616
0.184328
0.187533
0.132295
0.131227
0.130159
0.128785
0.128328
0.129396
0.128785
0.127107
0.128022
0.128022
0.126802
0.127412
0.127565
0.126802
0.127259
0.126954
0.126954
0.126954
0.126802
0.126649
0.125886
0.126191
0.126344
0.126039
0.125734
0.126802
0.128022
0.128022
0.127412
0.126802
0.126039
0.126649
0.126954
0.127565
0.127259
0.127717
0.127717
0.126344
0.126039
0.126344
0.127412
0.127259
0.127412
0.127259
0.12787
0.126344
0.126191
0.126039
0.125581
0.125734
0.126191
0.125581
0.125886
0.126802
0.126954
0.127107
0.127412
0.127565
0.127717
0.126649
0.127259
0.127565
0.127107
0.126191
0.126191
0.125734
0.126954
0.126649
0.126649
0.126802
0.125734
0.126039
0.126344
0.125428
0.125886
0.125734
0.125734
0.125734
0.126649
0.125734
0.125734
0.126039
0.125581
0.126191
0.126649
0.126191
0.126344
0.125886
0.125581
0.126497
0.126344
0.125734
0.126497
0.125886
0.125734
0.126191
0.126039
0.126497
0.125276
0.126649
0.125581
0.126497
0.126039
0.125581
0.126649
0.125886
0.125581
0.125428
0.126191
0.125886
0.125886
0.126039
V'FB
VFB
V
time/s
V/mV
I8P8TOLT
201.2108031.2118721.211872-1.2118720.358128
401.2112611.2111091.211109-1.2111090.358891
601.2101931.2106511.210651-1.2106510.359349
1001.4093231.4096281.409628-1.4096280.160372
1201.4106971.4110021.411002-1.4110020.158998
1401.4110021.4106971.410697-1.4106970.159303
1601.4117651.4116121.411612-1.4116120.158388
1801.4110021.4105441.410544-1.4105440.159456
2001.4119171.4119171.411917-1.4119170.158083
2201.2504771.2504771.250477-1.2504770.319523
2401.2506291.2509351.250935-1.2509350.319065
2601.4110021.4103911.410391-1.4103910.159609
2801.4096281.4110021.411002-1.4110020.158998
3001.4097811.4096281.409628-1.4096280.160372
3201.4099341.4103911.410391-1.4103910.159609
3401.4093231.4096281.409628-1.4096280.160372
3601.2672621.2669571.266957-1.2669570.303043
3801.2657361.2657361.265736-1.2657360.304264
4001.2652781.2654311.265431-1.2654310.304569
4201.4094761.4094761.409476-1.4094760.160524
4401.4106971.4103911.410391-1.4103910.159609
4601.4110021.4103911.410391-1.4103910.159609
4801.4106971.4110021.411002-1.4110020.158998
5001.4111541.4113071.411307-1.4113070.158693
5201.2816051.2816051.281605-1.2816050.288395
5401.2799271.2800791.280079-1.2800790.289921
5601.4108491.4116121.411612-1.4116120.158388
5801.4122221.4125281.412528-1.4125280.157472
6001.4128331.4134431.413443-1.4134430.156557
6201.4128331.4131381.413138-1.4131380.156862
6401.4139011.4134431.413443-1.4134430.156557
6601.2956441.2950331.295033-1.2950330.274967
6801.2939651.2939651.293965-1.2939650.276035
7001.4135961.412681.41268-1.412680.15732
7201.4142061.4139011.413901-1.4139010.156099
7401.4154271.4148171.414817-1.4148170.155183
7601.4163421.4157321.415732-1.4157320.154268
7801.4157321.416191.41619-1.416190.15381
8001.4169531.4164951.416495-1.4164950.153505
8201.3099871.3099871.309987-1.3099870.260013
8401.3073931.3081561.308156-1.3081560.261844
8601.4163421.4151221.415122-1.4151220.154878
8801.4177161.4183261.418326-1.4183260.151674
9001.4178681.4184791.418479-1.4184790.151521
9201.4187841.4195471.419547-1.4195470.150453
9401.4196991.4193941.419394-1.4193940.150606
9601.4198521.420311.42031-1.420310.14969
9801.420311.420311.42031-1.420310.14969
10001.420311.4207681.420768-1.4207680.149232
10201.4210731.4207681.420768-1.4207680.149232
10401.4213781.4218361.421836-1.4218360.148164
10601.421531.421531.42153-1.421530.14847
10801.4218361.4225991.422599-1.4225990.147401
11001.4218361.4224461.422446-1.4224460.147554
11201.4230561.4227511.422751-1.4227510.147249
11401.4232091.4230561.423056-1.4230560.146944
11601.4232091.4233621.423362-1.4233620.146638
11801.4241251.4236671.423667-1.4236670.146333
12001.4241251.4235141.423514-1.4235140.146486
12201.424431.4248871.424887-1.4248870.145113
12401.4245821.425041.42504-1.425040.14496
12601.4254981.4258031.425803-1.4258030.144197
12801.4258031.4259561.425956-1.4259560.144044
13001.4262611.4262611.426261-1.4262610.143739
13201.4262611.4262611.426261-1.4262610.143739
13401.4264131.4264131.426413-1.4264130.143587
13601.4277871.4268711.426871-1.4268710.143129
13801.4264131.4270241.427024-1.4270240.142976
14001.4276341.4268711.426871-1.4268710.143129
14201.4276341.4271761.427176-1.4271760.142824
14401.4279391.4282441.428244-1.4282440.141756
14601.4283971.4279391.427939-1.4279390.142061
14801.4280921.4283971.428397-1.4283970.141603
15001.3598841.3600371.360037-1.3600370.209963
15201.3580531.3577481.357748-1.3577480.212252
15401.3565271.3562221.356222-1.3562220.213778
15601.4277871.4271761.427176-1.4271760.142824
15801.4287021.4288551.428855-1.4288550.141145
16001.4303811.4302281.430228-1.4302280.139772
16201.4312961.4317541.431754-1.4317540.138246
16401.4322121.4320591.432059-1.4320590.137941
16601.4329751.4319071.431907-1.4319070.138093
16801.4334331.433281.43328-1.433280.13672
17001.4329751.4329751.432975-1.4329750.137025
17201.4335851.4334331.433433-1.4334330.136567
17401.4343481.4341951.434195-1.4341950.135805
17601.4354161.4349581.434958-1.4349580.135042
17801.4351111.4349581.434958-1.4349580.135042
18001.4346531.4349581.434958-1.4349580.135042
18201.4355691.4352641.435264-1.4352640.134736
18401.4363321.4364841.436484-1.4364840.133516
18601.4363321.4363321.436332-1.4363320.133668
18801.4372471.4363321.436332-1.4363320.133668
19001.4370951.4369421.436942-1.4369420.133058
19201.4369421.4372471.437247-1.4372470.132753
19401.4375521.4375521.437552-1.4375520.132448
19601.43741.4375521.437552-1.4375520.132448
19801.4386211.4375521.437552-1.4375520.132448
20001.4384681.4381631.438163-1.4381630.131837
20201.4386211.438011.43801-1.438010.13199
20401.4392311.4389261.438926-1.4389260.131074
20601.4393841.4392311.439231-1.4392310.130769
20801.4383151.4384681.438468-1.4384680.131532
21001.4383151.4389261.438926-1.4389260.131074
21201.4386211.4390781.439078-1.4390780.130922
21401.4392311.4390781.439078-1.4390780.130922
21601.4389261.4386211.438621-1.4386210.131379
21801.4390781.4386211.438621-1.4386210.131379
22001.4386211.4387731.438773-1.4387730.131227
22201.4389261.4393841.439384-1.4393840.130616
22401.4395361.4389261.438926-1.4389260.131074
22601.4392311.4395361.439536-1.4395360.130464
22801.4392311.4393841.439384-1.4393840.130616
23001.3865871.3856721.385672-1.3856720.184328
23201.3836881.3824671.382467-1.3824670.187533
23401.4372471.4377051.437705-1.4377050.132295
23601.4381631.4387731.438773-1.4387730.131227
23801.4401461.4398411.439841-1.4398410.130159
24001.4413671.4412151.441215-1.4412150.128785
24201.4425881.4416721.441672-1.4416720.128328
24401.4409091.4406041.440604-1.4406040.129396
24601.4418251.4412151.441215-1.4412150.128785
24801.4435031.4428931.442893-1.4428930.127107
25001.4425881.4419781.441978-1.4419780.128022
25201.4424351.4419781.441978-1.4419780.128022
25401.4436561.4431981.443198-1.4431980.126802
25601.4431981.4425881.442588-1.4425880.127412
25801.4430461.4424351.442435-1.4424350.127565
26001.4422831.4431981.443198-1.4431980.126802
26201.4425881.4427411.442741-1.4427410.127259
26401.4427411.4430461.443046-1.4430460.126954
26601.4431981.4430461.443046-1.4430460.126954
26801.4433511.4430461.443046-1.4430460.126954
27001.4436561.4431981.443198-1.4431980.126802
27201.4430461.4433511.443351-1.4433510.126649
27401.4435031.4441141.444114-1.4441140.125886
27601.4435031.4438091.443809-1.4438090.126191
27801.4439611.4436561.443656-1.4436560.126344
28001.4442661.4439611.443961-1.4439610.126039
28201.4435031.4442661.444266-1.4442660.125734
28401.4427411.4431981.443198-1.4431980.126802
28601.4427411.4419781.441978-1.4419780.128022
28801.442131.4419781.441978-1.4419780.128022
29001.4431981.4425881.442588-1.4425880.127412
29201.4441141.4431981.443198-1.4431980.126802
29401.4435031.4439611.443961-1.4439610.126039
29601.4438091.4433511.443351-1.4433510.126649
29801.4431981.4430461.443046-1.4430460.126954
30001.4424351.4424351.442435-1.4424350.127565
30201.4425881.4427411.442741-1.4427410.127259
30401.4422831.4422831.442283-1.4422830.127717
30601.4424351.4422831.442283-1.4422830.127717
30801.4435031.4436561.443656-1.4436560.126344
31001.4436561.4439611.443961-1.4439610.126039
31201.4436561.4436561.443656-1.4436560.126344
31401.4436561.4425881.442588-1.4425880.127412
31601.4425881.4427411.442741-1.4427410.127259
31801.4424351.4425881.442588-1.4425880.127412
32001.4427411.4427411.442741-1.4427410.127259
32201.442131.442131.44213-1.442130.12787
32401.4441141.4436561.443656-1.4436560.126344
32601.4431981.4438091.443809-1.4438090.126191
32801.4436561.4439611.443961-1.4439610.126039
33001.4447241.4444191.444419-1.4444190.125581
33201.4436561.4442661.444266-1.4442660.125734
33401.4433511.4438091.443809-1.4438090.126191
33601.4442661.4444191.444419-1.4444190.125581
33801.4444191.4441141.444114-1.4441140.125886
34001.4438091.4431981.443198-1.4431980.126802
34201.4428931.4430461.443046-1.4430460.126954
34401.4428931.4428931.442893-1.4428930.127107
34601.4427411.4425881.442588-1.4425880.127412
34801.4430461.4424351.442435-1.4424350.127565
35001.4428931.4422831.442283-1.4422830.127717
35201.4430461.4433511.443351-1.4433510.126649
35401.4428931.4427411.442741-1.4427410.127259
35601.4428931.4424351.442435-1.4424350.127565
35801.4422831.4428931.442893-1.4428930.127107
36001.4431981.4438091.443809-1.4438090.126191
36201.4438091.4438091.443809-1.4438090.126191
36401.4448771.4442661.444266-1.4442660.125734
36601.4427411.4430461.443046-1.4430460.126954
36801.4431981.4433511.443351-1.4433510.126649
37001.4438091.4433511.443351-1.4433510.126649
37201.4428931.4431981.443198-1.4431980.126802
37401.4444191.4442661.444266-1.4442660.125734
37601.4439611.4439611.443961-1.4439610.126039
37801.4441141.4436561.443656-1.4436560.126344
38001.4442661.4445721.444572-1.4445720.125428
38201.4444191.4441141.444114-1.4441140.125886
38401.4439611.4442661.444266-1.4442660.125734
38601.4441141.4442661.444266-1.4442660.125734
38801.4438091.4442661.444266-1.4442660.125734
39001.4433511.4433511.443351-1.4433510.126649
39201.4441141.4442661.444266-1.4442660.125734
39401.4441141.4442661.444266-1.4442660.125734
39601.4435031.4439611.443961-1.4439610.126039
39801.4445721.4444191.444419-1.4444190.125581
40001.4435031.4438091.443809-1.4438090.126191
40201.4435031.4433511.443351-1.4433510.126649
40401.4441141.4438091.443809-1.4438090.126191
40601.4431981.4436561.443656-1.4436560.126344
40801.4442661.4441141.444114-1.4441140.125886
41001.4442661.4444191.444419-1.4444190.125581
41201.4435031.4435031.443503-1.4435030.126497
41401.4439611.4436561.443656-1.4436560.126344
41601.4444191.4442661.444266-1.4442660.125734
41801.4433511.4435031.443503-1.4435030.126497
42001.4442661.4441141.444114-1.4441140.125886
42201.4444191.4442661.444266-1.4442660.125734
42401.4433511.4438091.443809-1.4438090.126191
42601.4438091.4439611.443961-1.4439610.126039
42801.4441141.4435031.443503-1.4435030.126497
43001.4436561.4447241.444724-1.4447240.125276
43201.4431981.4433511.443351-1.4433510.126649
43401.4439611.4444191.444419-1.4444190.125581
43601.4439611.4435031.443503-1.4435030.126497
43801.4441141.4439611.443961-1.4439610.126039
44001.4439611.4444191.444419-1.4444190.125581
44201.4438091.4433511.443351-1.4433510.126649
44401.4447241.4441141.444114-1.4441140.125886
44601.4445721.4444191.444419-1.4444190.125581
44801.4442661.4445721.444572-1.4445720.125428
45001.4442661.4438091.443809-1.4438090.126191
45201.4445721.4441141.444114-1.4441140.125886
45401.4444191.4441141.444114-1.4441140.125886
45601.4442661.4439611.443961-1.4439610.126039
I8P8TOLT
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
id/s
V/mV
2.3x10-11 A/cm2
3.9x10-12 A/cm2
-
Discharge by the tunnel currentV'FBV'V
Diagram1
127.918983
127.308037
126.392982
126.088051
127.308037
118.916061
117.085007
116.321945
116.168999
117.237953
116.017006
115.559006
116.017006
117.389938
117.085007
116.168999
117.237953
117.695
117.543007
118.153
118.611
118.000053
118.305946
119.526054
120.746994
120.288994
120.442055
121.052048
120.594048
121.968056
120.746994
121.663002
123.036049
121.663002
123.188995
123.646042
122.730995
123.036049
123.340988
123.950981
124.714043
123.798988
124.408981
125.324989
124.714043
125.630043
126.240036
126.088051
126.698044
127.308037
127.002975
126.392982
126.85099
126.546051
127.460983
128.83403
128.070969
128.070969
128.682037
128.986984
128.070969
128.986984
129.444977
128.83403
130.208038
130.360031
130.664963
129.750031
131.276031
130.51297
130.51297
130.818039
131.734039
131.734039
131.428024
132.496979
132.038971
131.734039
132.496979
132.038971
132.496979
132.190964
133.716965
133.258957
132.648972
133.412033
133.258957
133.564972
133.412033
134.022018
134.632965
134.022018
133.564972
134.328033
134.632965
134.784958
133.716965
135.396027
135.854034
134.938019
135.242966
135.242966
134.784958
135.090973
136.310959
135.396027
135.548019
136.006027
136.768967
136.616013
136.006027
136.922028
136.310959
137.07402
136.616013
136.46402
137.532013
137.532013
138.294952
137.532013
138.142014
137.07402
137.684967
138.294952
137.378952
138.448029
138.904953
137.990021
137.83696
138.142014
138.142014
138.75296
139.820953
138.904953
138.448029
139.210007
138.75296
139.210007
139.516022
139.820953
138.75296
139.058014
140.584015
139.516022
139.820953
140.584015
139.972946
138.600021
140.278961
140.584015
139.362961
140.430954
140.126007
140.584015
140.430954
141.498947
141.498947
141.042023
141.652008
140.126007
141.498947
141.346954
140.584015
140.584015
141.346954
141.804962
140.430954
140.736008
142.414948
141.498947
141.346954
141.498947
141.652008
141.498947
142.110016
141.804962
142.262009
141.956955
142.872955
142.110016
142.262009
141.652008
141.498947
142.262009
143.024948
141.956955
142.872955
143.024948
142.720001
142.262009
143.178009
142.720001
143.636017
142.414948
142.720001
143.024948
143.330002
143.78801
142.720001
144.092941
144.246002
144.70401
145.162018
145.008942
146.382004
145.466949
145.923996
146.687057
146.839996
146.99295
147.449997
147.449997
148.365997
148.671051
148.518951
149.739044
150.043991
150.65506
150.501984
149.739044
150.501984
151.875046
151.417999
152.333038
151.723053
152.485992
153.707047
153.249054
152.944
154.469986
154.775055
155.079987
155.537994
155.689972
155.689972
155.689972
156.911041
156.911041
156.911041
157.215973
157.521027
159.199982
159.047028
159.047028
159.351974
159.351974
160.267975
161.031036
160.421036
161.031036
161.183029
162.861969
162.251968
163.167023
163.625031
163.167023
165.151031
165.151031
165.913971
165.455963
166.677017
166.371964
167.135025
167.287018
167.287018
169.271011
167.745026
168.813019
169.729019
169.575958
170.643951
170.797012
170.33902
171.865005
172.169952
173.391006
173.542999
174.459
175.374054
175.221939
174.610992
175.832062
175.527008
176.289948
177.662994
178.121002
177.662994
178.578995
179.646988
179.342056
179.188995
179.798981
180.714996
180.714996
182.088043
182.394058
182.546051
183.156036
183.766983
183.614044
184.224991
185.750992
186.056046
186.056046
187.276031
187.124039
187.582047
188.954971
189.106964
188.344986
190.022964
190.328033
190.786026
190.93898
192.006973
192.006973
192.770035
193.38002
192.770035
193.684967
194.14296
194.906021
196.126968
196.432022
196.736954
196.890015
197.042007
197.958023
198.110016
199.940948
198.872955
198.872955
200.094009
200.856949
201.01001
201.314957
202.688004
201.924942
202.535065
203.908951
203.298004
203.908951
203.604004
205.129059
205.281998
206.807999
206.503052
207.417984
207.875992
208.485992
208.943985
209.555054
209.707047
210.011978
210.623047
210.927994
211.079987
211.843033
212.911987
212.301041
213.06398
213.521988
214.131973
215.047974
215.047974
215.199966
215.963028
217.183975
216.879028
216.725967
216.725967
218.709976
218.709976
219.319962
219.319962
219.625977
221.151016
220.541031
221.30397
221.609024
221.913956
222.983032
222.829956
223.135025
223.593018
225.119019
225.119019
224.965958
226.187012
225.881958
227.101944
227.865005
227.101944
227.865005
228.475952
228.627945
229.391006
230.307007
230.765015
230.917007
234.732056
239.766983
243.276978
247.244019
251.97496
256.246948
258.994019
263.114014
266.471039
270.285034
274.099976
277.305023
281.119019
284.781952
288.139008
291.037933
295.61499
299.124969
301.56604
304.922974
309.042969
312.552948
314.993988
316.672943
320.639984
324.149994
326.439056
329.185028
331.169037
334.52597
336.96701
338.645966
341.087006
343.987
347.496063
349.174988
351.462982
354.362976
356.346039
358.330048
360.924042
362.90802
365.348969
366.570007
369.926941
371.91095
373.436005
376.488007
378.777039
380.30304
382.743988
385.79599
386.407043
388.085022
390.527039
392.357971
394.189026
396.477966
398.155945
400.445007
401.665955
404.412048
404.71698
407.922058
408.532043
410.97406
412.346985
415.094055
415.856995
417.230042
419.366028
420.892029
422.41803
424.248962
425.622009
426.384949
427.91095
429.436951
431.420959
432.488953
433.862
435.235992
437.219055
438.593048
439.355042
440.423981
441.187042
443.017975
443.781036
445.459045
447.747986
447.901031
448.663025
451.409973
451.409973
450.951965
453.08902
453.699005
455.377014
457.055939
458.58194
459.649933
460.412994
460.717957
461.328064
462.244049
463.922058
464.684998
466.210999
466.516998
466.822052
467.432037
469.26297
469.874054
470.942047
472.162048
472.162048
474.604034
474.298981
475.21402
475.976959
476.740021
477.044952
479.028961
479.638947
480.860016
481.470001
481.776031
483.45401
484.522003
484.522003
486.048004
485.74295
487.420929
487.420929
488.794952
488.18399
490.931061
490.931061
491.694
491.845978
492.457062
493.525055
494.593048
494.89798
494.89798
496.272003
496.577057
497.491974
498.103058
498.865997
499.017975
499.171051
501.307037
501.001984
500.697052
501.459991
502.527985
502.833038
503.901031
504.511017
504.817047
505.579987
504.969025
506.189972
506.495026
506.799957
508.021027
509.08902
509.393951
509.699951
509.851959
510.615021
511.531006
512.293945
512.445923
512.751038
513.208984
513.666992
514.429932
513.513977
514.125
515.802979
515.192993
515.651001
516.870972
516.565918
517.481934
517.634033
518.549927
519.007935
519.160034
519.464966
520.075928
519.922974
519.618042
520.838989
521.296021
521.602051
522.670044
526.178955
529.230957
534.418945
537.470947
540.369995
542.658936
546.778931
549.983032
551.813965
553.797974
556.391968
560.817017
563.105957
565.853027
569.209961
570.887939
573.63501
576.838989
578.518005
580.348999
583.094971
585.688965
587.367981
591.182983
591.640015
593.472046
595.150024
597.286011
598.354004
600.643005
601.864014
603.390015
605.374023
607.51001
607.205017
609.341003
611.47699
612.697998
613.460999
614.987
616.359985
616.817993
618.496033
620.632996
620.785034
622.769043
624.295044
623.990051
626.736023
627.804016
628.262024
629.17804
629.63501
630.856018
630.704041
630.704041
632.992004
632.535034
632.535034
633.298035
634.213013
635.129028
636.960022
637.112
639.096008
640.468994
641.231995
640.927002
643.062988
643.520996
643.368958
644.894043
645.962952
646.572998
647.946045
649.319946
649.472046
650.998047
649.930054
651.30304
652.371033
653.592041
655.575989
655.270996
655.728027
656.949036
657.712036
658.322021
658.932983
659.54303
660.000977
660.611023
661.374023
662.594971
662.594971
663.51001
664.578979
664.883972
665.646973
666.10498
665.799011
666.409973
667.172974
667.019958
667.172974
667.019958
668.393005
668.240967
668.698975
670.376953
670.529968
670.529968
670.376953
670.682007
670.376953
669.156006
669.919006
670.376953
669.766968
669.919006
670.223999
669.766968
669.461975
669.766968
670.376953
669.30896
669.30896
670.682007
669.613953
669.30896
669.919006
669.003967
669.30896
669.766968
669.919006
670.529968
670.07196
671.75
669.461975
670.834961
670.07196
670.376953
671.292969
671.139954
671.292969
672.817993
673.123962
673.428955
673.581055
673.276001
672.665955
674.344055
674.496948
675.107056
675.259949
676.175049
675.565002
675.107056
676.632996
677.549011
677.70105
677.243958
677.395996
677.854004
677.395996
677.854004
679.380005
679.075012
679.075012
679.075012
680.143005
680.295044
679.98999
678.921997
679.98999
679.22699
678.312012
light/dark
0
300
600
time/s
V/mV
F10P8KIC
1127.918983
2127.308037
3126.392982
4126.088051
5127.308037
6118.916061
7117.085007
8116.321945
9116.168999
10117.237953
11116.017006
12115.559006
13116.017006
14117.389938
15117.085007
16116.168999
17117.237953
18117.695
19117.543007
20118.153
21118.611
22118.000053
23118.305946
24119.526054
25120.746994
26120.288994
27120.442055
28121.052048
29120.594048
30121.968056
31120.746994
32121.663002
33123.036049
34121.663002
35123.188995
36123.646042
37122.730995
38123.036049
39123.340988
40123.950981
41124.714043
42123.798988
43124.408981
44125.324989
45124.714043
46125.630043
47126.240036
48126.088051
49126.698044
50127.308037
51127.002975
52126.392982
53126.85099
54126.546051
55127.460983
56128.83403
57128.070969
58128.070969
59128.682037
60128.986984
61128.070969
62128.986984
63129.444977
64128.83403
65130.208038
66130.360031
67130.664963
68129.750031
69131.276031
70130.51297
71130.51297
72130.818039
73131.734039
74131.734039
75131.428024
76132.496979
77132.038971
78131.734039
79132.496979
80132.038971
81132.496979
82132.190964
83133.716965
84133.258957
85132.648972
86133.412033
87133.258957
88133.564972
89133.412033
90134.022018
91134.632965
92134.022018
93133.564972
94134.328033
95134.632965
96134.784958
97133.716965
98135.396027
99135.854034
100134.938019
101135.242966
102135.242966
103134.784958
104135.090973
105136.310959
106135.396027
107135.548019
108136.006027
109136.768967
110136.616013
111136.006027
112136.922028
113136.310959
114137.07402
115136.616013
116136.46402
117137.532013
118137.532013
119138.294952
120137.532013
121138.142014
122137.07402
123137.684967
124138.294952
125137.378952
126138.448029
127138.904953
128137.990021
129137.83696
130138.142014
131138.142014
132138.75296
133139.820953
134138.904953
135138.448029
136139.210007
137138.75296
138139.210007
139139.516022
140139.820953
141138.75296
142139.058014
143140.584015
144139.516022
145139.820953
146140.584015
147139.972946
148138.600021
149140.278961
150140.584015
151139.362961
152140.430954
153140.126007
154140.584015
155140.430954
156141.498947
157141.498947
158141.042023
159141.652008
160140.126007
161141.498947
162141.346954
163140.584015
164140.584015
165141.346954
166141.804962
167140.430954
168140.736008
169142.414948
170141.498947
171141.346954
172141.498947
173141.652008
174141.498947
175142.110016
176141.804962
177142.262009
178141.956955
179142.872955
180142.110016
181142.262009
182141.652008
183141.498947
184142.262009
185143.024948
186141.956955
187142.872955
188143.024948
189142.720001
190142.262009
191143.178009
192142.720001
193143.636017
194142.414948
195142.720001
196143.024948
197143.330002
198143.78801
199142.720001
200144.092941
210144.246002
220144.70401
230145.162018
240145.008942
250146.382004
260145.466949
270145.923996
280146.687057
290146.839996
300146.99295
310147.449997
320147.449997
330148.365997
340148.671051
350148.518951
360149.739044
370150.043991
380150.65506
390150.501984
400149.739044
410150.501984
420151.875046
430151.417999
440152.333038
450151.723053
460152.485992
470153.707047
480153.249054
490152.944
500154.469986
510154.775055
520155.079987
530155.537994
540155.689972
550155.689972
560155.689972
570156.911041
580156.911041
590156.911041
600157.215973
610157.521027
620159.199982
630159.047028
640159.047028
650159.351974
660159.351974
670160.267975
680161.031036
690160.421036
700161.031036
710161.183029
720162.861969
730162.251968
740163.167023
750163.625031
760163.167023
770165.151031
780165.151031
790165.913971
800165.455963
810166.677017
820166.371964
830167.135025
840167.287018
850167.287018
860169.271011
870167.745026
880168.813019
890169.729019
900169.575958
910170.643951
920170.797012
930170.33902
940171.865005
950172.169952
960173.391006
970173.542999
980174.459
990175.374054
1000175.221939
1010174.610992
1020175.832062
1030175.527008
1040176.289948
1050177.662994
1060178.121002
1070177.662994
1080178.578995
1090179.646988
1100179.342056
1110179.188995
1120179.798981
1130180.714996
1140180.714996
1150182.088043
1160182.394058
1170182.546051
1180183.156036
1190183.766983
1200183.614044
1210184.224991
1220185.750992
1230186.056046
1240186.056046
1250187.276031
1260187.124039
1270187.582047
1280188.954971
1290189.106964
1300188.344986
1310190.022964
1320190.328033
1330190.786026
1340190.93898
1350192.006973
1360192.006973
1370192.770035
1380193.38002
1390192.770035
1400193.684967
1410194.14296
1420194.906021
1430196.126968
1440196.432022
1450196.736954
1460196.890015
1470197.042007
1480197.958023
1490198.110016
1500199.940948
1510198.872955
1520198.872955
1530200.094009
1540200.856949
1550201.01001
1560201.314957
1570202.688004
1580201.924942
1590202.535065
1600203.908951
1610203.298004
1620203.908951
1630203.604004
1640205.129059
1650205.281998
1660206.807999
1670206.503052
1680207.417984
1690207.875992
1700208.485992
1710208.943985
1720209.555054
1730209.707047
1740210.011978
1750210.623047
1760210.927994
1770211.079987
1780211.843033
1790212.911987
1800212.301041
1810213.06398
1820213.521988
1830214.131973
1840215.047974
1850215.047974
1860215.199966
1870215.963028
1880217.183975
1890216.879028
1900216.725967
1910216.725967
1920218.709976
1930218.709976
1940219.319962
1950219.319962
1960219.625977
1970221.151016
1980220.541031
1990221.30397
2000221.609024
2010221.913956
2020222.983032
2030222.829956
2040223.135025
2050223.593018
2060225.119019
2070225.119019
2080224.965958
2090226.187012
2100225.881958
2110227.101944
2120227.865005
2130227.101944
2140227.865005
2150228.475952
2160228.627945
2170229.391006
2180230.307007
2190230.765015
2200230.917007
2300234.732056
2400239.766983
2500243.276978
2600247.244019
2700251.97496
2800256.246948
2900258.994019
3000263.114014
3100266.471039
3200270.285034
3300274.099976
3400277.305023
3500281.119019
3600284.781952
3700288.139008
3800291.037933
3900295.61499
4000299.124969
4100301.56604
4200304.922974
4300309.042969
4400312.552948
4500314.993988
4600316.672943
4700320.639984
4800324.149994
4900326.439056
5000329.185028
5100331.169037
5200334.52597
5300336.96701
5400338.645966
5500341.087006
5600343.987
5700347.496063
5800349.174988
5900351.462982
6000354.362976
6100356.346039
6200358.330048
6300360.924042
6400362.90802
6500365.348969
6600366.570007
6700369.926941
6800371.91095
6900373.436005
7000376.488007
7100378.777039
7200380.30304
7300382.743988
7400385.79599
7500386.407043
7600388.085022
7700390.527039
7800392.357971
7900394.189026
8000396.477966
8100398.155945
8200400.445007
8300401.665955
8400404.412048
8500404.71698
8600407.922058
8700408.532043
8800410.97406
8900412.346985
9000415.094055
9100415.856995
9200417.230042
9300419.366028
9400420.892029
9500422.41803
9600424.248962
9700425.622009
9800426.384949
9900427.91095
10000429.436951
10100431.420959
10200432.488953
10300433.862
10400435.235992
10500437.219055
10600438.593048
10700439.355042
10800440.423981
10900441.187042
11000443.017975
11100443.781036
11200445.459045
11300447.747986
11400447.901031
11500448.663025
11600451.409973
11700451.409973
11800450.951965
11900453.08902
12000453.699005
12100455.377014
12200457.055939
12300458.58194
12400459.649933
12500460.412994
12600460.717957
12700461.328064
12800462.244049
12900463.922058
13000464.684998
13100466.210999
13200466.516998
13300466.822052
13400467.432037
13500469.26297
13600469.874054
13700470.942047
13800472.162048
13900472.162048
14000474.604034
14100474.298981
14200475.21402
14300475.976959
14400476.740021
14500477.044952
14600479.028961
14700479.638947
14800480.860016
14900481.470001
15000481.776031
15100483.45401
15200484.522003
15300484.522003
15400486.048004
15500485.74295
15600487.420929
15700487.420929
15800488.794952
15900488.18399
16000490.931061
16100490.931061
16200491.694
16300491.845978
16400492.457062
16500493.525055
16600494.593048
16700494.89798
16800494.89798
16900496.272003
17000496.577057
17100497.491974
17200498.103058
17300498.865997
17400499.017975
17500499.171051
17600501.307037
17700501.001984
17800500.697052
17900501.459991
18000502.527985
18100502.833038
18200503.901031
18300504.511017
18400504.817047
18500505.579987
18600504.969025
18700506.189972
18800506.495026
18900506.799957
19000508.021027
19100509.08902
19200509.393951
19300509.699951
19400509.851959
19500510.615021
19600511.531006
19700512.293945
19800512.445923
19900512.751038
20000513.208984
20100513.666992
20200514.429932
20300513.513977
20400514.125
20500515.802979
20600515.192993
20700515.651001
20800516.870972
20900516.565918
21000517.481934
21100517.634033
21200518.549927
21300519.007935
21400519.160034
21500519.464966
21600520.075928
21700519.922974
21800519.618042
21900520.838989
22000521.296021
22100521.602051
22200522.670044
23200526.178955
24200529.230957
25200534.418945
26200537.470947
27200540.369995
28200542.658936
29200546.778931
30200549.983032
31200551.813965
32200553.797974
33200556.391968
34200560.817017
35200563.105957
36200565.853027
37200569.209961
38200570.887939
39200573.63501
40200576.838989
41200578.518005
42200580.348999
43200583.094971
44200585.688965
45200587.367981
46200591.182983
47200591.640015
48200593.472046
49200595.150024
50200597.286011
51200598.354004
52200600.643005
53200601.864014
54200603.390015
55200605.374023
56200607.51001
57200607.205017
58200609.341003
59200611.47699
60200612.697998
61200613.460999
62200614.987
63200616.359985
64200616.817993
65200618.496033
66200620.632996
67200620.785034
68200622.769043
69200624.295044
70200623.990051
71200626.736023
72200627.804016
73200628.262024
74200629.17804
75200629.63501
76200630.856018
77200630.704041
78200630.704041
79200632.992004
80200632.535034
81200632.535034
82200633.298035
83200634.213013
84200635.129028
85200636.960022
86200637.112
87200639.096008
88200640.468994
89200641.231995
90200640.927002
91200643.062988
92200643.520996
93200643.368958
94200644.894043
95200645.962952
96200646.572998
97200647.946045
98200649.319946
99200649.472046
100200650.998047
101200649.930054
102200651.30304
103200652.371033
104200653.592041
105200655.575989
106200655.270996
107200655.728027
108200656.949036
109200657.712036
110200658.322021
111200658.932983
112200659.54303
113200660.000977
114200660.611023
115200661.374023
116200662.594971
117200662.594971
118200663.51001
119200664.578979
120200664.883972
121200665.646973
122200666.10498
123200665.799011
124200666.409973
125200667.172974
126200667.019958
127200667.172974
128200667.019958
129200668.393005
130200668.240967
131200668.698975
132200670.376953
133200670.529968
134200670.529968
135200670.376953
136200670.682007
137200670.376953
138200669.156006
139200669.919006
140200670.376953
141200669.766968
142200669.919006
143200670.223999
144200669.766968
145200669.461975
146200669.766968
147200670.376953
148200669.30896
149200669.30896
150200670.682007
151200669.613953
152200669.30896
153200669.919006
154200669.003967
156200669.30896
157200669.766968
158200669.919006
159200670.529968
160200670.07196
161200671.75
162200669.461975
163200670.834961
164200670.07196
165200670.376953
166200671.292969
167200671.139954
168200671.292969
169200672.817993
170200673.123962
171200673.428955
172200673.581055
173200673.276001
174200672.665955
175200674.344055
176200674.496948
177200675.107056
178200675.259949
179200676.175049
180200675.565002
181200675.107056
182200676.632996
183200677.549011
184200677.70105
185200677.243958
186200677.395996
187200677.854004
188200677.395996
189200677.854004
190200679.380005
191200679.075012
192200679.075012
193200679.075012
194200680.143005
195200680.295044
196200679.98999
197200678.921997
198200679.98999
199200679.22699
200200678.312012
F10P8KIC
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0