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Vacuum Valve Overhaul
Pressure Control Valve Repair
Slit Valves Valve Repair
Isolation Valve Repair
Vacuum Valve Overhaul
TEL Unity Gate Valve Repair
TEL P/N :3M80-000227-12
Model: UXG846H-KL-04
VAT Pendulum (APC) Valve Repair
Use machine : Novellus Vector Home
P/N:04-146459 Home
Valve control Open Angle
Simulator
H P iti t t C l t t Open position confirmHome Position test Cycle test Open position confirm
Pendulum Valve Components
Valve Assembly Body Motor AssemblyMotor Assembly
Pendulum Unit Control Board Heater Actuator Seals
Pendulum Plate Isolation set Pendulum Shaft Close set
VAT Pendulum Isolation Valve RepairRepair details
1. Problem check : Function and leak test before repair2. Disassembly & Check : Disassembly all of valve and check each components one by one3. Clean , Replace damaged & all seals and bearings4. Assemblyy5. Leak Test : Vacuum leak , Isolation Leak and CDA Leak test6. Function test : Control simulate verify and cycle test7 Final check packing : heater test and packing Control7. Final check packing : heater test and packing Control
Simulator
Leak Test Simulate Control & Cycle test
Leak Test
Leak Test ByComplete Leak Leak Test By RGA
Complete Leak Test
Function Test
Valve operation and functions test
V-TEX Rollcam Slit Valve O h lOverhaul
Slit ValveSlit Valve
VETEX Gate Valve Repair
Repair Details :Repair Details : 1. Replace damaged Partsa Valve Bellow (Welding Bellowa. Valve Bellow (Welding Bellow
or Formed Bellow)b. Cylinder Assemblyc. Bearingsd. Tube Adapter2. Recover all of malfunctions3. Clean & Check all of
tcomponents4. Function Test5 L k T t5. Leak Test
Load-lock Slit Valve Repair
Use Machine : Novellus Vector , 300mm
Description : Gate Valve Assembly , L-Type
Novellus P/N : 63-136020-01
Valves Overhaul
200 cylinder slit ValveVAT Gate Valve O/H
200 cylinder slit Valve
MKS Th ttl lMKS Throttle valve Overhaul
SMC Gate Valve O/H 300 Cylinder slit Valve O/H
MKS Throttle Valve Overhaul
Repair Model :Repair Model :All MKS Type 253 and 683B Throttle Valve
Model : 683B-23421 253B-15186
Normal Defect Condition : ASMNormal Defect Condition :
1. Pressure can’t servo or servo unstable2. Valve jammed3 V l l t l
ASM
3. Valve lose control4. Valve can’t reach initial position
ASM E-10
Producer RTPNovellusProducer SE
MKS Throttle Valve Overhaul
Gear assembly Slip PlateGear damaged Slip Plate damaged
Slip Plate Damaged Damaged
Motor Gear & Bushing damaged
Gear Bushing Damaged
Gear Box Damaged
Shaft Damaged
Vacuum Valve Repair
MKS Valve MKS Valve Nor-Cal Valve
IKC Valve SMC Valve MDC ValveIKC Valve SMC Valve MDC Valve
Valve Overhaul , SCV
Valve Assembly, SCV Valve (VEP Valve) )
Angle type In-Line Type
Cylinder assembly Valve Housing assemblyCylinder assembly Valve Housing assembly
Valve Overhaul , SCV,
CylinderCylinder & Spring Housing Piston
Shaft & Bellow Screw Fix Screws Internal Heater & T/CShaft & Bellow Screw Fix Screws Internal Heater & T/C
Valve Overhaul , SCV,
Valve Bellow &Valve Bellow & Cylinder Seal Internal T/C
Disassembly
Position Sensor Thermal Switch l Repair Details pReplace Parts : Valve Bellow , Seals , Cylinder Seals , Thermal Switch Repair Parts (Option ) : Internal T/C , Internal Heater, External T/C & Heater, Position Sensor
p ( p ) , , ,
Valve Overhaul , SCV
Test :Test : a. Vacuum Leak Testb. Operation Testc Position Sensor Testc. Position Sensor Testd. T/C Teste. Heater Function Test
SMC Isolation Valve Repair
SMC Isolation Valve Repair
Size form NW16 to ISO160
Repair details :
a. Replace of bellow, Cylinder seal ,O-ring
b. Leak Test
c. Function test cycle 100 times.
SMC Isolation Valve Repairp
Repair Details : 1. Cylinder Repairy pa. Replace sealb. Replace Housingp g
2. Valve Repaira. Replace Valve Bellow
b. Valve Housing Repair
3. Testa. Function Testb. Leak Test
PS SMC Valve can be modify to higher Pumping speedPS. SMC Valve can be modify to higher Pumping speed
Pressure Control Valve Repair
Use Machine : Novellus Vector , 300mm
Description : Valve, S65, DN100, VAT
Novellus P/N : 60-106440-00
SMC Isolation Valve Repair
SMC Isolation Valve Repair
Size form NW16 to ISO160
Repair details :
a. Replace of bellow, Cylinder seal ,O-ring
b. Leak Test
c. Function test cycle 100 times.
Valve Modify For AMAT Producer
Before Modify
OpenCloseResultMKS Valve:1)V l b d 1071)Valve body 107 mm2)Housing 38 mm3)Open時, 只開 10 mm
MKS Valve (Modified):
4)只開21% ((10/47.4)x 100%)
( )1)Valve body 135 mm2)Housing 108 mm3)Open時 全開40mm3)Open時, 全開40mm4)全開84%
Aft M difAfter Modify
Nor-Cal IPV Valve RepairpNor-Cal Isolation Pendulum Valve
R iRepair
1. Replace all of mechanism partsp p
2. Replace all of damaged pats
3. Function & Leak test
Nor-Cal IPV Valve Repairp
Nor-Cal IPV Valve Repair
Extra Hard stop for test
Function and cycle test
stop for test
Function and cycle test
Leak Test
VAT Gate Valve Repair
VAT Gate Valve Repairp
DN63 ~DN300
VAT Valves Repair
Pressure Control Gate Valve Gate Valve Slit Valve