Unit for Nano Fabrication

Clean Room Principles

July 2008

Safety - General

It is FORBIDDEN to enter the clean room without signing in with the personal ID card

Guests will receive “VISITOR” card The ID card is for the personal use ONLY Never work in the Clean Room alone Regular working hours: from 8AM to 5PM; work out of

working hours needs authorization All the chemicals going into the clean room must be

approved and cataloged by Noa Mazorsky

Safety – Alarms

Fire Alarm Security Alarm Exhaust Alarm

Go out from the clean room

Call for a UNF staff member

Safety – Emergency Exits

Safety– Emergency Electricity Breakers

Safety – Fire Extinguishers

Safety – Emergency Showers

Clean Room Protocol - Purpose Promote Successful Clean Room Operations Ensure Safety in the Clean Environment Provide Operational Conditions that Meet

Process & User Needs

Perspective

• The protocol provides basic awareness and general guidelines for clean room users

• Successful clean room operation relies on each user’s understanding, participation and self discipline

• The success of each user relies on trust, understanding and shared responsibility among all users

What is a Clean Room?

A clean environment designed to reduce the contamination of processes and materials. This is accomplished by removing or reducing contamination sources.

Principles of the Clean Environment Air is highly (HEPA) filtered

(99.99% @ 0.3) Layout should minimize

particle sources in filtered air stream

Air flow should remove most particles generated by process

Types of Contamination

ParticulateDust, skin, hair, makeup…

ChemicalOil, grease, metal ions, perfume…

BiologicalBacteria, fungi,

RadiationUltraviolet light…

Particle Characteristics

50 micron particles are visible Average human hair is about 100 microns Time to fall 1 meter in still air

33 seconds for 10 micron particle 48 minutes for 1 micron particle

Humans generate >1x105 particles per minute when motionless (fully gowned)

Humans can generate >1x106 particles when walking in the clean room

Contamination Sources

People ~75% Ventilation ~15% Room Structure ~5% Equipment ~5%

Contamination Control

Personnel Control Dress code Personal Hygiene Gowning

Environmental Control Entrance and exit Materials and supplies Cleaning and maintenance Atmospheric

Dress Code

No sleeveless shirts No shorts or skirts No slippers or sandals No jewelry that can puncture garments or

gloves Avoid clothing that sheds

Personal Hygiene

Control Dermatitis & Dandruff Do not smoke before entry

Wait at least 20 min. after smoking to enter the clean room

No chewing gum or tobacco No Cosmetics should be worn Facial hair will need to be covered

Gowning

Proper gowning order Hair cover Shoe covers Mouth cover (only for those with mustache or beard) Coverall Booties Gloves Safety Glasses

The use of gloves in the e-LINE room is not obligatory, but ONLY in this room.

Gowning Basics

Garments should not be removed from clean room unless in approved container

Don’t walk out of the clean room with your garments on

Change garments when soiled or showing any visible signs of wear

Don’t reach inside your garment while in the clean room

Garment Reuse and Storage

Reusable – Store in the Gowning Room Coveralls Booties (not the blue disposables) Safety Glasses

Not Reusable – Throw in trash Hair cover Blue disposable shoe covers Gloves Mouth cover

Entry & Exit

The use of the access card is a MUST (entry and exit)

Enter and exit quickly Each user must use their own access card

including visitors Use the passthrough access for small objects

Materials and Supplies

Do not carry non-clean room items into the clean room

Do not carry clean room items out of the clean room Do not use pencils or erasers Paper should be kept in a plastic sleeve Do not cut the clean room wipers Clean everything you carry into the clean room

Chemicals

Do not take new chemicals into the clean room without permission of Noa Mazurski

Always read MSDS for every chemical you use Large quantities of chemicals must be stored outside the

clean room Chemicals inside the clean room should be properly

stored in their storage cabinets All chemical containers should be clearly labeled with

their contents and Hazard Classification Unattended chemicals and experiments should be

labeled with the owners name, immediate contact number, list of all chemicals involved, and estimated time of return or completion.

Chemical Handling

Do not transport chemicals in open containers Chemicals should be used inside approved hoods Full apron, Trionic gloves and full face shield are

required for using all acids Gloves, lab coat, and safety glasses are considered

minimum personal protective equipment when handling ANY chemical

Chemical Handling

In case of a small spill Inform all users in the clean room Clearly mark the affected area Use appropriate absorbent material to clean up the spill

In case of large spill Inform all users in the clean room Clearly mark the affected area and evacuate Contact UNF staff immediately

Chemical Handling

Chemical waste should be properly disposed in the appropriate waste container into the hoods

No chemicals may be poured down the drains Waste containers should be properly marked as

such If you have questions about disposal contact a staff

member

In Case of Emergency

Always follow the rules set forth by UNF staff If an emergency requires evacuation, leave

the clean room immediately, do not stop to un-gown

Inform other users before leaving

Equipment use

All users must be trained before using any equipment

All equipment use should be scheduled Before operating any equipment check with UNF

staff if it is useable If you are unable to use scheduled time please

delete your reservation It is every users responsibility to report damaged or

malfunctioning equipment It is every users responsibility to properly operate

and clean each piece of equipment that they use

Housekeeping

Every user is responsible for keeping the clean room clean

Always clean your workspace before leaving Don’t leave or store items on or in equipment Store your personal items (samples, wafers, tools)

in the locker located in the clean room main corridor Do not set liquids on any equipment Properly store all materials before leaving the clean

room Last one out should make sure the room is in a safe

idle mode

Violations of Rules

First time Warning Report to Advisor

Second time Suspension of access Report to Advisor Retraining may be required

Third Offense Suspension of access Report to Advisor Access will not be renewed until an acceptable

resolution is reached by the UNF Managing Clean Room Protocol re-training will be required

Services rates

Clean room use: 5$ per hour In addition to the clean room fee, each system has its

own rate – consult the nanocenter website for details (http://www.nanoscience.huji.ac.il/unf/info.htm)

Incorrect use of the ID card for enter or exit the clean room confuses the doors control system. In case of uncertainty on the worked hours for an specific day, 8 hours will be taken into account.