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Page 1: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

The Cameron Clean Room

Page 2: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Clean Room TeamsWill Start This Week

Page 3: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

How to get to Cameron Hall

Shuttle Stop

Page 4: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

CAMERON HALL

Main entrance

Second floor

entrance

Page 5: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

CAMERON – Best entrance to the clean room

Craver Road

Parking Lot L-16

second floor

entrance

Page 6: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

What is a “clean room” A better name for a “clean room’ would be a “contamination

control” room The goal of a clean room is to minimize the contamination that

might effect a product and to provide a “clean” manufacturing environment for the fabrication of products

Clean rooms were originally exclusive to microelectronics manufacturing

Today clean rooms are used in many industries and applications1. Microelectronics2. Optoelectronics3. Pharmaceuticals4. Certain food packaging5. CD and DVD manufacturing6. Satellite assembly7. Many other industries

Intel microprocessors have design rules that space components 150 nm apart (.15 micron spacing)

An Intel advanced microprocessor is about the size of a thumb nail and many hundreds are produced simultaneously on 12” (304mm) silicon wafers

Page 7: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

In

microelectronics

size matters

The common unit

of measurement

in a clean room is

the micron or

micrometer

Page 8: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to
Page 9: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to
Page 10: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to
Page 11: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to
Page 12: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to
Page 13: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Simple Clean Room work area

Page 14: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

ECE Clean Room in CAMERONuses a membrane diffusion ceiling with

HEPA filters and through the wall returns

Page 15: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to
Page 16: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Special safety and working issues when in

the Cameron clean room

Page 17: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Material Safety Data Sheet - MSDS

Mandated by the Federal government Employees must have access All hazardous materials MUST have a MSDS associated

with it MSDS details all hazards, safety requirements, exposure

limits, spill or leakage procedures, etc. CARC Clean Room MSDS sheets are located in the

garment change area of the clean room You can view them in the clean room or you can get

them on-line from each manufacturer of the hazardous material

The safety office and Student Health Center do NOThave all of the MSDS sheets for the entire University. Each lab is responsible for their MSDS

Page 18: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Material Safety Data Sheet – MSDS

showing hazardous and required

protective equipment

Page 19: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Completed Clean Room Gown

After all gowning is complete you can now enter the clean room. You are not allowed into the clean room unless you are completely gowned

Page 20: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Material Safety Data Sheet - MSDS

Mandated by the Federal government Employees must have access All hazardous materials MUST have a MSDS associated

with it MSDS details all hazards, safety requirements, exposure

limits, spill or leakage procedures, etc. CARC Clean Room MSDS sheets are located in the

garment change area of the clean room You can view them in the clean room or you can get

them on-line from each manufacturer of the hazardous material

The safety office and Student Health Center do NOThave all of the MSDS sheets for the entire University. Each lab is responsible for their MSDS

Page 21: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Material Safety Data Sheet – MSDS

showing hazardous and required

protective equipment

Page 22: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

ECE Clean Room Safety

John’s office

Second floor

entrance to

Cameron

Manual pull fire alarm

Page 23: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

CAMERON’s Clean Room. The clean room is located

on the 2nd floor, room 201F, of the CARC building.

Access to the clean room is restricted.

Access is through a UNC –Charlotte ID card reader.

Engr1202 E01 students are not allowed without an instructor present

Front window of clean room

Front door to clean room

Card reader door lock

Entrance to clean room

Page 24: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Cameron Clean Room garment change area

Page 25: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

MSDS Binders in the garment change area of the clean room

Page 26: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Engr 1202 students sign in each time they enter the clean room on

the clipboard shown below

Page 27: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

ECE Clean Room Safety

Fire alarm includes strobe light and loud alarm

If the alarm sounds, you must leave the building

If an emergency condition exists, it is OK to leave the building with your clean room garments

If there appears to be no emergency – remove clean room garments before leaving the building

Most alarms are false alarms but all alarms must be treated as a serious condition

Fire alarm inside clean room

Page 28: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

ECE Clean Room Safety

Rear clean room exit

Rear fire alarm

Page 29: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

ECE Clean Room Safety

Inside the clean room is a safety station

1. Deluge shower

2. HF safety instructions

3. Burn and HF salve

4. First aid kit

5. Chemical spill kit

6. Eye wash

7. Hose wash

Page 30: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Deionized (DI) Water

Resistivity meter

City water feed

Supply and

return DI water

to CR

Carbon filters

UV sterilizer

DI water polisher,

set 1

DI water polisher,

set 2

Recirculation water pump

Page 31: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Gas Cylinders inside CARC Clean Room

Gas pressure regulators

Page 32: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Hazardous Gases used in Microelectronics

Hazardous gases in the CARC Clean Room – all high purity

1. Nitrogen2. Oxygen3. Helium4. Argon5. Hydrogen6. Ammonia7. Methane8. Chlorine9. Acetylene10. Carbon Dioxide11. Carbon Monoxide12. Freon

Hazardous gases NOT in the CARC Clean Room

1. Silane2. Phosphine3. Arsine4. Diborane5. Cyanide6. Fluorine

Page 33: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Hazardous Chemicals in the CARC Clean Room

Acids1. Hydrofluoric Acid2. Sulfuric Acid3. Acetic Acid4. Nitric Acid5. Hydrochloric Acid6. Chromic Acid7. Phosphoric Acid

Bases1. Photoresist Developer (NaOH)2. Potassium Hydroxide3. Ammonium Hydroxide

Oxidizers1. Hydrogen Peroxide

Flammable solvents1. Acetone2. Methanol3. Trichloroethyene-TCE4. Isopropanol5. Ethane

Light Sensitive1. Positive photoresist2. Negative photoresist

Page 34: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Chemical Storage

Chemical resistant plastic cabinets

Page 35: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Flammable storage inside CARC Clean Room

Metal fire-proof cabinets for flammables

Page 36: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Student working with chemicals

Fume exhaust laminar

flow work station

Chemical goggles

Chemical gloves

Face shield

Correctly labeled

containersFront

exhaust panels

Anyone not wearing eye protection when working with chemicals will be removed from the clean room

Page 37: The Cameron Clean Room · 2017-01-20 · What is a “clean room” A better name for a “clean room’ would be a “contamination control” room The goal of a clean room is to

Assignment – due before next class

Go to my Engr 1202 ECE web site, coefs.uncc.edu/jahudak/

Look under “guidelines” for the file on clean room safety

Complete the safety test that will be e-mailed to you. Highlight the correct answer in yellow.

Return to me at [email protected]

subject line of the e-mail to be clean room safety test

Use only your UNC-Charlotte e-mail account, no personal e-mail accounts

mailto:[email protected]

A basic design approach to Clean Room

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