thin film products
TRANSCRIPT
engineered process solutions
Thin Film Products
2
Thin Film Deposition
Thin film deposition of metallic, insulating,conductive and dielectric materials plays animportant role in a large number ofmanufacturing, production and researchapplications. Resistance heating and electronbeam heating are the processes most widelyused. Techniques employed to perform theseprocesses differ in degree of sophisticationand quality of film produced. A resistanceheated evaporation source is relatively simpleand inexpensive, but the material capacity is small.
Electron beam evaporation is the mostversatile means of vacuum deposition. Thistechnique allows the production of thin filmcoatings from pure elements, including mostmetals, as well as numerous alloys andcompounds. Electron beam evaporation offersseveral advantages over competing processesincluding precise control of low or highdeposition rates, excellent material utilization,co-deposition and sequential deposition and auniform low temperature deposition. Electronbeam offers higher evaporation rates,freedom from contamination, precise ratecontrol at very low deposition levels, precisefilm composition and cooler substratetemperatures. The materials used forevaporation are available in near limitlessshapes and forms, the most common beingpellets, slugs and disks.
Thin Film Applications
Thin film applications requiring electron beamevaporation are continually increasing.Applications are found in the medical,metallurgical, telecommunication, micro-electronic, optical , solar nanotechnology andsemiconductor industries. Electron beamevaporation sources are employed in theproduction of a multitude of low and hitechproducts including: sunglasses, cameralenses, optical filters, infrared detectors,superconductors, automotive decorative trim,costume jewelry, corrosion resistant surfacesand many others. Electron beam deposition isideal for research and production applicationsdue to its widespread material availability,efficient material utilization and unmatchedfilm purity and uniformity.
e-Vap® Summary
e-Vap sources are rugged, reliable and easyto maintain. Electron beam evaporation is anextremely versatile means of depositinguniform high-purity thin films. Cable ofreaching temperatures in excess of 3500
degrees C, evaporation of virtually anymaterial can be accomplished.
e-Vap sources are produced in our HaywardCalifornia factory. Our approach tomanufacturing e-Vap is unique to theevaporation source market. We build e-Vap asa standard product utilizing over 35 years ofexperience in vacuum componentmanufacturing. e-Vap products are producedusing established manufacturing, assembly,testing and quality control departments.Coupled with extensive sales and servicedepartment MDC e-Vap provides aprofessional and reliable alternative for allyour evaporation needs.
Don’t gamble with your process requirements
Other companies’ approach of small scalecustom shop manufacturing hinders theirability to provide reliable support and resultsin unpredictable delivery. This old schoolapproach of relying on specialized personneland complicated service techniques makesyour process vulnerable. A simple shift inpersonnel can leave you scrambling forsupport of your coating tool. Why takeunnecessary chances with the heart of yourprocess. MDC e-Vap provides properlyengineered solutions to your coating needswith standard parts and straight forwardservice.
e-Vap® sources are a modern solution forvacuum coating processes. Our Uniquedesign is compact, efficient and extremelystable. Modern thin film designs require ahigh degree of performance andrepeatability. Our superior magnetic designsoffer unparalleled performance with themost demanding materials.
MDC offers a complete line of e-Vapproducts. From miniature research sourcesto 400cc industrial sources we have theproducts to meet your requirement. Wehave a complete line of electronicsincluding power supplies, source controls,programmable sweep controls andindexing. We also offer rate monitors andcontrollers. MDC is a leading supplier ofvacuum feedthroughs, flanges, chambers,valves and general vacuum hardware. Wecan bundle complete packages and offerOEM versions for plug and play solutionsbased on your exact requirements.
Frame 6 Electron Beam Source
Mighty Source™ mounted on a 6-inch CF flange
XY Programmable Sweep Controller
CVS High Voltage Power Supply
Copyright © 2012 MDC Reproduction in any manner, in whole or in part, in English or
in other languages, is prohibited. All rights reserved.
MDC www.mdcvacuum.com Phone 800-443-8817 3
Ver E ~ 07-06
Thin Film Deposition
Re-Vap™
Heater Elements
Coated Metal Foil Boat
5.00
7.25
.77
3.75
2.75
Resistive Heater Source Assembly
Oxide Crucible
Filament Coil
REFERENCEPART
NUMBERDESCRIPTION
RH-900
RH-PS-900
RH-F-900
RH-CEK-900
RH-PSPK-900
RH-MFB-900TU
RH-MFB-900TA
RH-MFB-900M
RH-CFB-900TU
RH-CFB-900M
RH-FC-900
RH-FB-900
RH-OC-900A
RH-OC-900BN
RH-OC-900Q
992626
991256
992625
992619
991257-08
992624-01
992624-02
992624-03
992623-01
992623-02
992622
992621
992620-01
992620-02
992620-03
COMPLETE SYSTEM 1
900W POWER SUPPLY
RESISTIVE SOURCE ASSEMBLY 2
CONDUCTOR EXTENSION KIT
POWER SUPPLY SPARE PARTS KIT
METAL FOIL BOAT, TUNGSTEN
METAL FOIL BOAT, TANTALUM
METAL FOIL BOAT, MOLYBDENUM
COATED FOIL BOAT, TUNGSTEN
COATED FOIL BOAT, MOLYBDENUM
FILAMENT COIL
FILAMENT BASKET
OXIDE CRUCIBLE, ALUMINA
OXIDE CRUCIBLE, BORON NITRIDE
OXIDE CRUCIBLE, QUARTZ
1 Includes power supply and resistive source assembly. 2 Includes filament coil heater element.
Conductor Extension Kit
Standard Elements
Re-Vap™ Source Assembly
Thermal Evaporation Systems
4 Phone 800-443-8817 www.mdcvacuum.com MDC
Re-Vap™
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004221-2.7x3.6
Thermal Evaporation Systems
Resistive Heater Evaporation
MDC’s Re-Vap™ resistive filament heater evaporation is an econom-ical and reliable method of depositing thin film coatings in vacuum.Current passing through a resistive element generates sufficientheat to melt and evaporate various coating materials. Materials com-monly evaporated using resistive heating include iron, nickel, alu-minum, copper, tin, silver, gold and platinum. Re-Vap™ resistiveevaporation can be used for decorative metallizing as well asdemanding research applications. Three basic resistive elementdesigns are offered: filament coil, metal foil boat and oxide crucibletypes. Filament coil designs are by far the most popular. Re-Vap™
heater elements are economical and disposable. They can be dis-carded after each use to prevent material contamination.
Re-Vap™ coiled filaments are typically three stranded tungsten wireslooped into coils. Multistrand filaments are generally used becausethey offer a greater surface area than single wire filaments. Underthese conditions, the evaporant charge should be small comparedwith the mass of the filament. The filament can hold up to 1 gram ofevaporant material which is formed into staple-like shapes and hungon the central helix of the tungsten filament. Upon melting, the evap-orant wets to the filament and is held in place by surface tension.Spreading of the molten evaporant across the wire is desirable toincrease evaporation surface area. This is accomplished by distrib-uting the initial charge evenly over the entire length of the filament
coil. To minimize dripping of the molten material, the filament coiltemperature must be increased rapidly to 1200-1500°C. Using thistechnique, the molten material will climb or cling to the hot wire andvaporize efficiently. Another type of element coil is the filament bas-ket, used to evaporate pellets or chips of materials which either sub-lime or do not wet the filament wire upon melting. If wetting occurs,the coils of the basket are shorted and the temperature of the sourcedrops.
Metal foil boat type resistive elements are yet another choice forsmall evaporation applications. Metal foil boats are made from thinrefractory metal stampings, usually tungsten, molybdenum or tanta-lum. These boats have dimples which hold the evaporation material.Their miniature size and small capacity make them ideal for smallevaporation jobs. Metal foil boats operate at very high temperaturesand may cause alloying to occur with certain types of evaporationmaterials. Wetting of the metal surface by the molten evaporant isdesirable in the interest of good thermal contact, however, themolten metal will lower the electrical resistance of the foil in the meltarea, thereby causing a drop in temperature. This problem can beeliminated by using a boat which has been coated with a thin layerof aluminum oxide. The oxide coating will not allow wetting of themolten metal evaporant to the metal foil element.
Crucible heaters are an open circular wound filament which allowcrucibles to be inserted inside the windings. The crucibles are com-monly manufactured from alumina, carbon, quartz and boron nitride.Crucibles have insulating properties which form a thermal barrierbetween the filament and melt, allowing a uniform melt temperature.Crucible evaporation is very stable because of its uniform heating. Awide range of low to moderate temperature metals like palladium,tin, selenium, arsenic, indium and organic materials evaporate wellfrom crucibles. Crucibles are less prone to failure compared to metalfoil boats because of the complete isolation between the evaporantand the heater element, thus eliminating shorting or alloying.
Features
■ 900W power supply■ 2-3/4" Del-Seal™ CF flange mount■ Ideal for organic material evaporation■ Contact factory for higher current models
Specifications
Cooling Air cooled
Input power 208 V ±10%, Single-phase, 50/60 Hz, 7 Amperes
Voltage output 0 to 6 VAC
Current output 0 to 150 A
Weight 45lb
Dimensions
Power Supply 16" W x 6" H x 12" L
Output Cable 2 AWG x 6' L
Re-Vap™ 900 Watt Power Supply
MDC www.mdcvacuum.com Phone 800-443-8817 5
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Thin Film Deposition
e-Vap®
Thermal Evaporation Systems
Features■ Industrial design■ Feedthroughs rated at 600 amps■ Removable snap-on ground shield protects
against coating build-up■ Z-bars allow installation of sources in difficult or
hard to reach locations■ Z-bars may be used singularly or in multiples■ Clamp designed for virtually any type of
commercial heater elements up to 1.25" wide ■ Ultra positive clamping method
Resistive Heater Evaporation
Re-Vap™ typical source installation, shown with two Z-bars and boat clamps
Typical Heater Elements
Metal Foil Boat
Typical Installation Schematic
Baffled Boat
Filament
Re-Vap™ clamp & Z-bar™ extension
Z-bar™
Resistive source
Silver platedairside clamps
1" Bolt hole mountfeedthrough
In-vacuumshield
Standard Elements
All dimensions are given in inchesunless specified otherwise.
• Only one Z-bar shown ~ may be used in multiples
Re-Vap™ rigid clampRe-Vap™ rigid clamp
REFERENCEPART
NUMBER
METAL FOIL
FILAMENT
BAFFLED
993037
993038
993039
6 Phone 800-443-8817 www.mdcvacuum.com MDC
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Thermal Evaporation Systems
.56 dia(2 places)
2.00
5.19
2.19 .94
1.00
.63
1.75Fits 3/4" conductor
1.25
.25
.375-16 bolt,nut and washer (x2)
1.00
Airside Clamps
Made of OFE copper with silverplate to minimize oxidation andcontact resistance. Two 9/16-inchholes are provided for fasteningeyelet-fitted power cables. Soldindividually.
Rigid clamp 1-1/4" width 3-1/2" length
.250-20 Thread in Helicoil insert
.50
.25
revision
REFERENCEPART
NUMBER
RIGID 992968-02
Boat clamps use thumbscrews forfast installation of boats or filaments.Two boat clamps are required.Includes bolts. Sold individually.
REFERENCEPART
NUMBER
HCC-750 640070
Boat Clamps
REFERENCEPART
NUMBER
1-IN. BOLT
32MM - 1"
992966
991813
High Current Feedthough
1.50 Hex
1.00 1.88
3/8-16 UNC-2A 1-14 UNS-2A
.75 dia.
2.253.32 4.68
Z-bar™
.500
1.625
1.000
1.8752 places .386
2 places
2.8132.8136.250
.500
.8132 places
R .188 typ. R .812 typ.
MDC Z-bar™ extensions are usedwhere normally an evaporationsource cannot be positionedbecause of spacing limitations. Maybe used singularly or in multiplesfor hard to reach locations. Soldindividually.
REFERENCEPART
NUMBER
Z-BAR 992969
High current feedthroughs are avail-able for mounting to baseplates inthree standard sizes. A removableshield protects ceramic insulatorfrom contamination during deposi-tion.An adapter is available to mount a1-inch bolt feedthrough to a 32mmbolt hole. Adapter not shown.Two feed throughs required. Sold individually.
Standard 1" bolt mount
Boat Clamps
MDC www.mdcvacuum.com Phone 800-443-8817 7
Ver E ~ 07-06
Thin Film Deposition
e-Vap®
Thermal Evaporation Systems
Features
■ 3000 Watt outputDesigned for industrial / production applications
■ Compact size - mounts underneath chamber■ High frequency switching power supply■ Connects to Sycon or Inficon rate controllers —
making it stand-alone capable■ CE compliant■ 6000 Watt stack option
Re-Vap™ Power Supply
MDC’s high powered Re-Vap™ resistive evaporation system is a highlyindustrial, robustly designed, economical method of depositing thin filmcoatings. The current passing through a resistive element (filament, boat,etc.) is produced by a unique high current, low voltage switch-mode highfrequency power supply that produces ample amounts of current needed toevaporate materials such as iron, nickel, aluminum, copper, silver, gold andplatinum. Silicon-monoxide, magnesium fluoride, as well as zinc selenideare readily evaporated.
Re-Vap™ Power Supply & Controller
MDC has taken advantage of its extensive knowledge of high frequencysolid-state switching power supplies by incorporating that technology into apatent applied high-powered 3000 watt Re-Vap™ power supply. Tremendoussize and weight reductions are the result. With overall dimensions of 5" x 8"x 13" and a total weight of 20-pounds, the power supply can be mountedunderneath the vacuum coating system just inches away from the high cur-rent feedthroughs. The power supply is only one-eighth the size and one-tenth the weight of a typical 3000 watt resistive power supply. Two uniqueadvantages include higher power efficiency and floor space savings. Powerefficiency is greater because the output cable length is reduced with aresulting lower power loss. The Re-Vap™ controller is a half-rack width dis-play module displaying the current, voltage, safety interlock and status/oper-ation indicators. For automated coating processes, it may be connected to a
rate/thickness controller for precise control. Power can also be controlledthrough the front panel or with the hand-held remote control.
Re-Vap™ clamp, High Current feedthrough and Z-bar™ extensions
The Re-Vap™ positive clamping method is universally designed for heavy useand quick-change capability. Thumbscrews are provided for fast installationof boats or filaments. Air-side clamping uses silver-plated battery clamp-style hard copper connections designed for maximum surface contact andhigh current carrying capacity.
The Re-Vap™ high current 3/4-inch feedthroughs are rated at 600 amps. Ituses high purity alumina ceramic as the dielectric material, which is her-metically sealed to a flexible metal transition using vacuum grade brazealloys in a vacuum brazing furnace. Additionally, a removable snap-onground shield provides protection from line-of-sight coating on exposedceramic surfaces. Re-Vap™ feedthroughs are fitted with Del-Base™ base-plate mounts in standard one-inch, 32mm or 34mm sizes for use in mostvacuum coating systems, including Balzers and Leybold systems.
Z-bar™ extensions are used in cases where normally an evaporation sourcecannot be positioned because of spacing limitations. The modular Z-bar™
extensions allow you to maneuver your evaporation sources around fixedequipment inside your vacuum coating system. Its versatility allows you touse them singularly or in multiples for those hard to reach locations.
Power Supply Specifications
Cooling Air cooled
Input power 208/220/240 VAC, Single-phase, 50/60 Hz, 25 Amperes
Cable 6-foot cable included
Weight 30 lb shipping
Dimensions 5" W x 8" H x 13" D
Weighs only20 pounds
Weighs only20 pounds
Power Supply
Description
REFERENCEPART
NUMBERWEIGHT
DESCRIPTION POUNDS
RV-3000-PS 991301POWER SUPPLY 30
8 Phone 800-443-8817 www.mdcvacuum.com MDC
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Material Samples
Silica (SiO2)
Typical e-Vap® Installation
Magnesium Fluoride (MgF2)
Hafnia (HfO2)
Silica (SiO2) Carousel Source
Introductione-Vap®
MDC www.mdcvacuum.com Phone 800-443-8817 9
Ver E ~ 07-06
Thin Film Deposition
Custom source and source assemblies can be designed to fit anexisting chamber or for a special application. Contact MDC fordetails regarding custom source assemblies or custom sources.
Standard Multi Pocket Sources that havebeen identified by our customers as themost popular sources are listed to the right.MDC is has made a commitment with sub-component inventory to offer reduced leadtimes for standard multipocket sources.
Custom Sources and Assemblies
FRAME NUMBER VOLUME MAXIMUMSIZE OF POCKETS PER POCKET POWER
4 4 2cc 3kW
4 4 6cc 6kW
5 4 15cc 10kW
5 4 25cc 10kW
5 6 12cc 10kW
5 1 150cc 10kW
6 4 40cc 15kW
6 4 75cc 15kW
6 1 400cc 15kW
6 6 40cc 15kW
REFERENCEPART
NUMBER
EV-MS
EV-4000-66UHV
EV-4000-1015
EV-4000-1025
EV-6000-1012
EV-4000-150CA
EV-4000-1540
EV-4000-1575
EV-4000-400CA
EV-6000-1540
993400
991700
991900
991800
992100
992523
992405
992406
993101
993100
Single-PocketCentered
Multi-Pocket 44@90°
Multi-Pocket 66@60°
Carousel360° Pan
Crucible / Pocket Geometry
1x270°, 1@45°
Custom configurationsStandard configurations
Shown above is one of many possibilities.Contact factory for special geometries.
Custom source and source assemblies■ 7 standard Source models
Single, Multipocket or Carousel CruciblesCustom Crucible configurations available
Standard Features
■ Crucible sizes from 6cc to 400cc■ Power ratings from 6kW to 15kW■ Direct or indirect water cooling■ OEM versions available
Options■ Source Options are available-Consult with MDC for existing
designs, availability and list prices.
■ Miniature Sources
■ Single Pocket Sources (Frame 1 and Frame 2) UHV com-patible sources, volumes 7cc to 100 cc.
■ UHV Rotary Mechanism (Frame 4 and Frame 5) allows forUHV operation of the multi pocket sources.
■ Direct and Indirect Cooling (Frame 5 and Frame 6) optionfor both of these frame sizes. direct cooling allows for higherpower levels to be applied during deposition, the water sealmust be disturbed to change the crucible. Indirect coolingallows the crucible to be removed without disturbing the waterto vacuum seal, however maximum power levels are lower withindirect cooling.
■ Custom Crucibles Can be machined with various pocketsizes and configurations depending upon your application. MDCwill manufacture any custom crucible that is required includiingsingle, four pocket, six pocket, pan carousel and bananas.
e-Vap® Modular Evaporation Sources
e-Vap®
Modular Evaporation Sources
10 Phone 800-443-8817 www.mdcvacuum.com MDC
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Filament Assembly
■ Filament is shielded from ion bombardment■ No shorting■ Longer filament life■ Reduced coating of ceramic insulators■ Reduced arcing
Emitter Assembly
■ 270° arc emitter module■ Heat sunk emitter■ Consistent electrostatic field■ Longer life anode and beam former■ Reduced filament distortion■ Modular plug-in emitter design■ Simple maintenance■ Simple filament replacement■ Minimal adjustment...
only requires verification of filament tolerance
Open Cathode Design
■ No space charging■ Increased emission■ Cooler operating filament...
requires only 42 amps for 15 kW
Shielded High Voltage Ceramics
■ Reduces coating of ceramic insulators■ Prevents arcing■ Unique high voltage insulator design.
Beam Sweep Coil Assembly
■ Helmholtz design principle produces a uniformmagnetic field
■ No tunneling■ Beam maintains constant density and shape
when swept across crucible
Magnet Assembly
■ Permanent magnets■ 270° arc beam deflection...
with positive beam containment■ Reliable beam positioning■ Efficient magnetic field generation■ Beam travels vertically through crucible
Crucible Module / Replaceable Modules
■ Capacity from 2cc to 400cc■ Flush-top design■ No contamination from flaking condensate■ Complete utilization of vapor cone during
deposition... no shadowing■ Reduced cross-contamination during changes of
evaporant material
Individual Source
MDC modular e-Vap® sources are state-of-the-art electron-beamevaporation sources designed for the demanding and exacting worldof vacuum coatings. This unprecedented selection of electron-beamevaporation sources provides vacuum coating solutions for most appli-cations including medical, metallurgical, telecommunications, micro-electronics and optics.
Modular sources are offered in seven standard sizes and are standalone components for maximum installation flexibility in existing vac-uum systems. For those desiring standard off-the-shelf solutions,complete horizontal and vertical flange mounted systems are alsoavailable.
Features
Modular sources are fitted with direct watercooled crucibles. Selectmodels have indirectly cooled crucibles that allow the user to changecrucibles without interrupting the flow of water to the source andwithout having to disassemble the source. Modular sources areoffered with material capacities from 2cc to 400cc in a multitude ofpocket geometries and arrangements. They are available in bothfixed and rotary pocket mechanisms for high and ultrahigh vacuumenvironments. e-Vap® modular sources are designed for optimumperformance with e-Vap® power supplies, controls and electronics.Other essential components and hardware required for the installa-tion of e-Vap® modular sources are detailed starting on page __.Contact the MDC technical sales engineers for custom electron-beam evaporation requirements.
e-Vap®
Modular Evaporation Sources
MDC www.mdcvacuum.com Phone 800-443-8817 11
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Thin Film Deposition
REFERENCEPART
NUMBERDESCRIPTION
EV-CE-3000
EV-SA-3000
EV-PS-CE-3000
EV-FIL-3000
EV-A-3000
EV-BF-3000
EV-IBF-3000
EV-IHV-3000
EV-PS-SPK-3000
992600
992601
991221
992610
991929
991922
990529
991921
991257-03
COMPLETE SYSTEM 1
SOURCE ASSEMBLY
3000W POWER SUPPLY
FILAMENT SET, 5 ea.
ANODE
BEAM FORMER
BEAM FORMER INSULATOR
HIGH VOLTAGE INSULATOR
POWER SUPPLY SPARE PARTS KIT1 Includes source and power supply
e-Vap 3kW Power Supply Source Assembly
3.75 2.75
7.25
7.87
9.00
2 cc Crucible
Source Assembly
Source Detail Filament Detail
e-Vap® evaporation sources. These liners offer improved thermalstability while reducing the transfer of heat to the crucible. Linersprovide the ability to easily and quickly switch evaporant materialswithout removing the crucible for cleaning. They also reduce powerrequirements to achieve specific evaporation rates. See page 26 fora detailed list of crucible liner materials.
2.75 Del-Seal™ CF
Flange
Source fits within
a 1.38 inside diameter tube
• Source can be installed in a portwith 2-3/4" Del-Seal™ CF flanges
Miniature Evaporation Systemse-Vap®
12 Phone 800-443-8817 www.mdcvacuum.com MDC
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SpecificationsMaximum Power 3000 watts
Operating Voltage 5000 volts
Beam Current 600 milli-amperes
Compatible Vacuum 2 x 10E-8 torr
Water Flow 65 psi or .62 gpm
XY Sweep Frequency 0 – 50Hz, 1.0 amps
Beam Spot Size 3-4 mm
Crucible Material OFE copper
Bakeout Temperature 150oC
Crucible Geometry 2.0 cc volume crucibles x 4
Weight 6 lbsDimensions 2.4" H x 4.1" L x 2.8” W
Description
Practical, low-cost, and highly reliable electron beamdeposition sources are the future as we know it today. MDCintroduces the e-Vap® “Mighty Source™”– a 4 pocket x 2ccrotary electron beam source. Affordable and extremelycompact, it stands just 2.4-inches tall by 4-inches long by 2.8-inches wide. Is there anything smaller out there? The MightySource™ is rated for 3 kilowatts of power which makes it anideal deposition tool for evaporating metals, oxides, metal-oxides, and magnetic materials. Designed into the source bodyare two hermetically-sealed XY-axis sweep coils that allow youto sweep the electron beam across the crucible pocket,resulting in the maximization of your coating process in termsof material stability and consistency. The Mighty Source™
design is specifically tailored for the following uses – pilotproduction, lab /R&D applications, and the universitymarketplace. Its compact design features allow it to bemounted onto a 2-3/4-inch Del-Seal CF flange or onto a 6-inchor 10-inch Del-Seal CF flange in either horizontal or verticalconfigurations. To complete this product system, MDC alsooffers a 3kw power supply and low cost XY sweep controller.
e-Vap® Mighty Source™ 4 Pocket Evaporation Source
MODULAR SOURCE SERIES
e-Vap® Mighty Source™ Horizontal Source Assembly (6-inch CF flange)
4 inches
DESCRIPTION REFERENCE
Ref# EV-MS* (Mighty Source™)
Ref# EV-MS-F275-H
Ref# EV-MS-F1000
Ref# EV-MS-F600H
EV-PS-CE-3000
EV-PS-SPK-3000
EV-FIL-3000
EV-A-3000
EV-BF-3000
EV-IBF-3000
EV-IHF-3000
Ref# ERK-MS
Ref# CSRK-MS
Cajon Fitting Gasket
Fil Clamp Sleeve-MS
Stand Alone Source
3/4" Del Seal CF Flange (horizontal mount)
10" Del Seal CF Flange (vertical mount)
6" Del Seal CF Flange (horizontal mount)
Power Supply
Power Supply (spare parts kit)
Filament (pack of 5)
Anode
Beam Former
Beam former Insulator
High Voltage Insulator
Emitter Rebuild Kit1 (Mighty Source)
Crucible Seal Rebuild Kit (Mighty Source)
Gasket (1/8” VCR
Filament Clamp Sleeve
993400
993450
993431
993430
991221
991257-03
992610
991929
991922
990529
991921
993410
993439
042064
993415
PART #
*MS indicates Mighty Source™
1 includes 2 filaments, high voltage insulator, beam form, fasteners
e-Vap®
Miniature Evaporation Systems
MDC www.mdcvacuum.com Phone 800-443-8817 13
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Thin Film Deposition
Frame 2
Source Size Large
Source Type Fixed Pocket
Maximum Power 15kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume
Single-Pocket 75 & 100cc
X-Y Sweep Frequency 200Hz
Large Fixed Pocket
Evaporation Rate of Aluminum
50,000Å/min @15kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material OFHC Copper
Bakeout Temperature 200°C
Materials UHV Compatible
Compatible Vacuum 2x10-11 Torr
Water Flow
3GPM and / or 65PSIG inlet-outlet differential
Dimensions 6.60L x 5.50W x 2.25H
Weight 10 lbs
Specifications
CRUCIBLE MAXIMUMVOLUME POWER
7cc 6kW
15cc 10kW
25cc 10kW
40cc 15kW
REFERENCE PARTNUMBER
EV-1000-67
EV-1000-1015
EV-1000-1025
EV-1000-1540
990598
990599
990597
990600
CRUCIBLE MAXIMUMVOLUME POWER
75cc 15kW
100cc 15kW
REFERENCE PARTNUMBER
EV-1000-1575
EV-1000-15100
992250
992430
Frame 1
Source Size Small
Source Type Fixed Pocket
Maximum Power 15kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume
Single-Pocket 7, 15, 25 & 40cc
X-Y Sweep Frequency 200Hz
Small Fixed Pocket
Evaporation Rate of Aluminum
50,000Å/min @14kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material OFE Copper
Bakeout Temperature 200°C
Materials UHV Compatible
Compatible Vacuum 2x10-11 Torr
Water Flow
3GPM and / or 65PSIG inlet-outlet differential
Dimensions 6.60L x 4.90W x 2.10H
Weight 9 lbs
Specifications
Modular Evaporation Sourcese-Vap®
14 Phone 800-443-8817 www.mdcvacuum.com MDC
Thin
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one-Vap®
Modular Evaporation Sources
Frame 4
Source Size Small
Source Type UHV Rotary Pocket
Maximum Power 6kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume
Multi-Pocket 4x 6cc
X-Y Sweep Frequency 200Hz
Small UHV Rotary Pocket
Evaporation Rate of Aluminum
8,000Å/min @6kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material OFHC Copper
Bakeout Temperature 200°C
Materials UHV Compatible
Compatible Vacuum 2x10-11 Torr
Water Flow
1.75GPM or 65PSIG inlet-outlet differential
Dimensions 8.37L x 5.37W x 3.37H
Weight 17 lbs
Specifications
CRUCIBLE MAXIMUMVOLUME POWER
4 X 6cc 6kW
REFERENCE PARTNUMBER
EV-4000-66UHV 991700
Frame 3
Source Size Small
Source Type Rotary Pocket
Maximum Power 6kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume
Multi-Pocket 4x 6cc, 6x 3cc
Carousel 360°, 15cc
X-Y Sweep Frequency 200Hz
Small Rotary Pocket
Evaporation Rate of Aluminum
8,000Å/min @6kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material OFHC Copper
Bakeout Temperature 150°C
Materials HV Compatible
Compatible Vacuum 2x10-8 Torr
Water Flow
2GPM and / or 65PSIG inlet-outlet differential
Dimensions 5.32L x 5.12W x 2.46H
Weight 10 lbs
Specifications
CRUCIBLE MAXIMUMVOLUME POWER
4 X 6cc 6kW
6 X 3cc 6kW
REFERENCE PARTNUMBER
EV-4000-66
EV-6000-66
991600
992166
MDC www.mdcvacuum.com Phone 800-443-8817 15
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CRUCIBLE MAXIMUM COOLINGVOLUME POWER
4 X 15cc
4 X 15cc
4 X 25cc
4 X 30cc
6 X 12cc
4 X 15cc
4 X 25cc
4 X 30cc
1 X 150cc
1 X 150cc
10kW
10kW
10kW
10kW
10kW
6kW
6kW
6kW
6kW
10kW
Direct
Direct
Direct
Direct
Direct
Indirect
Indirect
Indirect
Indirect
Direct
REFERENCEPART
NUMBER
EV-4000-1050
EV-6000-1015UHV
EV-4000-1025
EV-4000-1030
EV-6000-1012
EV-4000-615iEV-4000-625iEV-4000-630iEV-4000-150CARiEV-4000-150CAR
991900
992700
991800
992408
992100
992525
992500
992585
992502
992523
Frame 5
Source Size LargeSource Type HV Rotary Pocket
UHV Rotary PocketMaximum Power 10kWOperating Voltage 6kV to 10kVFilament 12VACCrucible Geometry / VolumeMulti-Pocket 4x... 15, 25 & 30cc, 6x 12ccCarousel 360° 150ccCombination Custom designs available
Large HV & UHV Rotary Pocket
Evaporation Rate of Aluminum30,000Å/min @10kW with a source tosubstrate distance of 250mmX-Y Sweep Frequency 200HzBeam Spot Size 7mmCrucible Material OFE CopperBakeout Temperature 150°CMaterials HV CompatibleCompatible Vacuum 2x10-8 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 6.20L x 5.62W x 3.25HWeight 27 lbs
Specifications
Modular Evaporation Sourcese-Vap®
CRUCIBLE MAXIMUM COOLINGVOLUME POWER
Frame 6
Source Size Extra-LargeSource Type Rotary PocketMaximum Power 15kWOperating Voltage 6kV to 10kVFilament 12VACCrucible Geometry / VolumeMulti-Pocket 4x... 40, 60 & 75cc, 6x 40ccCarousel 360° 400ccCombination Custom designs availableX-Y Sweep Frequency 200Hz
Evaporation Rate of Aluminum50,000Å/min @15kW with a source tosubstrate distance of 250mmSource-Substrate Distance 250mmBeam Spot Size 7mmCrucible Material OFE CopperBakeout Temperature 150°CMaterials HV CompatibleCompatible Vacuum 2x10-8 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 8.50L x 6.87W x 3.50HWeight 40 lbs
Specifications
Extra-Large Rotary Pocket
4 X 40cc
4 X 60cc
4 X 75cc
6 X 25cc
6 X 40cc
1 X 400cc
1 X 400c
3 X100cc
6 X 40cc
15kWW
15kW
15kW
15kW
15kW
6kW
15kW
15kW
6kW
Direct
Direct
Direct
Direct
Direct
Indirect
Direct
Direct
Indirect
REFERENCEPART
NUMBER
EV-4000-1540
EV-4000-1560
EV-4000-1575
EV-6000-1525
EV-6000-1450
EV-4000-400CARiEV-4000-400CAR
EV-4000-15100
EV-6000-640i
992405
992400
992406
992599
993100
992720
993101
992400-2000
992674
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Horizontal Source Assembly
Features
■ UHV compatible system■ 8" or 10" Del-Seal™ CF flange mount■ Assembly includes rotary, linear and electrical
feedthroughs, clamps, linkages, water flow switchand water connections
■ Manual, push-pull shutter■ High temperature, 300°C manual rotary drive on
4 pocket models; blanked off on single pocket■ Flange seal surface to crucible centerline is 8" on
8" Del-Seal™ CF■ Flange seal surface to crucible centerline is 10"
on 10" Del-Seal™ CF■ Systems available with or without watercooled
roofs■ OEM packages available
Horizontal Flange Mounted System
UHV Single-Pocket Source
UHV Rotary-Pocket Source
e-Vap®
Modular Evaporation Sources
MDC www.mdcvacuum.com Phone 800-443-8817 17
Ver E ~ 07-06
Thin Film Deposition
e-Vap®
Modular Evaporation Sources
Optional Accessories
REFERENCEPART
NUMBERMOUNTING FRAME SOURCE COOLING SOURCE WEIGHT
FLANGE SIZE TYPE & VOLUME ROOF NUMBER POUNDS
EV-FMP-8H
EV-FMP-8RH
EV-FMP-10H
EV-FMP-10RH
EV-FMP-10HUHV
EV-FMP-10RHUHV
992515
992516
992499
992541
992498
992540
8" DEL-SEAL 1 ONE POCKET 7cc NO 990598 50
8" DEL-SEAL 1 ONE POCKET 7cc YES 990598 50
10" DEL-SEAL 1 ONE POCKET 7cc NO 990598 75
10" DEL-SEAL 1 ONE POCKET 7cc YES 990598 75
10" DEL-SEAL 4 FOUR POCKET 6cc NO 991700 95
10" DEL-SEAL 4 FOUR POCKET 6cc YES 991700 95
OPTIONNUMBERDESCRIPTION
-01
-02
-03
-04
-05
-06
-07
-08
PNEUMATIC SHUTTER,TWO POSITION
AUTO INDEXER AND DRIVE
GUIDE RODS
CUSTOM SOURCE POSITION
CUSTOM COOLING ROOF PORTS
15cc CRUCIBLE
25cc CRUCIBLE
40cc CRUCIBLE
OPTION -03
Pneumatic Shutter
Pneumatic shutters are an excellent tool forprecise control of film thickness on to a sub-strate. The air actuated shutter masks off thevapor stream between source and substrate atthe beginning and finishing stages of the evap-oration/deposition cycle. The shutter alsoallows pre-melt or “soak” prior to deposition byblanketing the evaporation material. This is atwo position shutter with a 120VAC solenoid.
OPTION -04 TO -08
OPTION -05
OPTION -02
OPTION -01
Guide Rods
Two linear bearing guide rods allow the flangemounted e-Vap® systems to be routinely main-tained by simply sliding in and out, in drawer-like fashion. A weldable support bracket kit isprovided to secure the guide rods onto theuser’s port flange. Installation is simple and selfexplanatory.
Crucible Indexer & Drive
The Auto-Indexer is a stepper motor drive unitwith optical encoding for rotating and position-ing multi-pocket e-Vap® sources. The unit candrive sources with up to eight pockets in eithera unidirectional or bidirectional manner. It canalso drive continuous carousel-type sources ateight speed settings. Includes mounting brack-et for external drive.
Custom Source Position & Volume
The standard distance from the source centerto the mounting-flange seal face is 10" or 8"for horizontal systems. For custom positionsbetween 8" to 12" add option 4. Standard sin-gle-pocket crucible volume is 7cc. For pocketvolumes of 15, 25 or 40cc add option -06, -07or -08 respectively.
Custom Roof Ports
Watercooled roofs have three ports. A mainport directly over the source, which is usedfor the deposition process. A second port forthe crystal sensor is used to monitor deposi-tion rate. A third port provides direct visualinspection of the source and beam through achamber viewport. Each of these port loca-tions can be specified by the customer.
Horizontal Flange Mounted Source
MDC has eliminated the difficulties of flange mounting electronbeam sources. Problems associated with designing and fittingsources into coating systems have been solved with the introductionof standard horizontal flange mounted evaporation sources. Thecompact footprint of these flanged evaporation systems allows theinstallation of up to three individual sources onto one ten-inch cham-ber. The flanged assemblies include an electron beam source with allwater and electrical connections. A guide rod option provides a
drawer like sliding action, ideal for installation and system mainte-nance. Horizontal flange mounted assemblies come ready to acceptthis guide rod kit. Another option includes a water-cooled roof, whichmounts directly above the e-Vap® source. The water-cooled roof actsas a heat barrier between the source and substrate and also pre-vents vapor condensation on chamber walls. The water-cooled roofis fitted with a deposition port angled towards the substrate, whichaids in deposition uniformity, even when source and substrate cen-terlines are offset. Horizontal systems purchased with a source con-trol module will be fitted with flange-mounted filament transformers.
When ordering e-Vap® assembly options, please add the option number(s) tothe end of the desired assembly Part Number listed above. For example992515-01-02-03-04-05-08
18 Phone 800-443-8817 www.mdcvacuum.com MDC
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6.00
11.90
7.00
Vertical Source Assembly
Features
■ UHV compatible system■ 10.0" Del-Seal™ CF flange mount■ Assembly includes rotary and electrical
feedthroughs, clamps, linkages, water flow switchand water connections
■ Shutter is fitted with a high temperature, 300°Cmanual rotary drive
■ Flange seal surface to crucible centerline is 6"standard
■ Systems available with or without watercooledroofs
■ OEM packages available
Vertical Flange Mounted System
UHV Single-Pocket Source
Vertical Flange Mount / Less Cooling Roof
e-Vap®
Modular Evaporation Sources
MDC www.mdcvacuum.com Phone 800-443-8817 19
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Thin Film Deposition
REFERENCEPART
NUMBERMOUNTING FRAME SOURCE COOLING SOURCE WEIGHT
FLANGE SIZE TYPE & VOLUME ROOF NUMBER POUNDS
EV-FMP-10V
EV-FMP-10RV
992511
992513
10" DEL-SEAL 1 ONE POCKET 7cc NO 990598 50
10" DEL-SEAL 1 ONE POCKET 7cc YES 990598 50
Vertical Flange Mounted Source
MDC has eliminated the difficulties of flange mounting electronbeam sources. The effort that goes into designing and fitting asource to a vacuum coating chamber has been done for you with theintroduction of standard vertical flange mounted evaporationsources. The flanged assembly includes one 7cc electron beamsource with all water and electrical connections. This type of flangemounted system is typically installed vertically through the bottomside of a chamber. The compact footprint of these flanged evapora-tion systems requires only one port flange for installation. A popularoption commonly ordered with these systems is a water-cooled roof,which mounts directly above the e-Vap® source. The water-cooledroof acts as a heat barrier between the source and substrate and
Optional Accessories
OPTIONNUMBERDESCRIPTION
-01
-04
-05
-06
-07
-08
PNEUMATIC SHUTTER, TWO POSITION
CUSTOM SOURCE POSITION
CUSTOM COOLING ROOF PORTS
15cc CRUCIBLE
25cc CRUCIBLE
40cc CRUCIBLE
When ordering e-Vap® assembly options, please add the option number(s) tothe end of the desired assembly Part Number listed above. For example992511-01-04-05-08
OPTION -05
Pneumatic Shutter
Shutters mask off the vapor stream betweensource and substrate. Shutters are ideal forpre-melt or “soak” prior to deposition by blan-keting the evaporation material. Pneumaticshutters for vertical flanged assemblies cannotbe mounted on source flange, but can beinstalled through a secondary 1.33" Del-Seal™
CF port. This shutter is a two position shutterwhich includes a 120VAC solenoid.
OPTION -04
OPTION -01
Custom Roof Ports
Watercooled roofs have three ports. A mainport directly over the source, which is usedfor the deposition process. A second port forthe crystal sensor is used to monitor deposi-tion rate. A third port provides direct visualinspection of the source and beam through achamber viewport. Each of these port loca-tions can be specified by the customer.
Custom Source Position
Source position is the distance from the sourceface to mounting flange seal face. This dimen-sion is standard at 6" for all vertical systems.Customer chamber layout or specificationsmay dictate a custom distance. Source posi-tions between 6" and 10" are optional andavailable at the price listed bellow. Dimensionsoutside these limits must be quoted separately.
also prevents vapor condensation on chamber walls. The watercooled roof is fitted with a deposition port, angled towardsthe substrate, which yields excellent deposition uniformity, evenwhen source to substrate centerlines are offset. The single-pocketsource comes standard with a 7cc capacity crucible. The sameassembly can be fitted with larger capacity sources including 15, 25and 40cc versions. To order the larger volume crucible option addone of the three option numbers to the end of the assembly partnumber. Vertical systems purchased with a source control modulewill be fitted with flange-mounted filament transformers.
OPTION -06 TO -08 Custom Crucible Volume
The standard volume for a single-pocket cru-cible is 7cc. For single pocket volumes of 15,25 or 40cc add option -06, -07 or -08 respec-tively.
e-Vap®
Modular Evaporation Sources
20 Phone 800-443-8817 www.mdcvacuum.com MDC
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Features
■ 6kW, 10kW and 15kW models■ High frequency switching technology■ Excellent regulation■ Low stored energy■ Power efficiency greater than 85%■ Low ripple■ Rugged IGBT switches■ CE compliant
Sequential or simultaneous operation of up tothree electron beam evaporation sources
e-Vap® CVS Series Power Supplies are constructed using state-of-the-art solid state high frequency switching technology. They areoffered in three standard models rated for 6kW, 10kW and 15kW.CVS series power supplies are for use with the horizontal and verti-cal flange mounted systems detailed on the previous four pages, aswell as the e-Vap® modular sources as detailed beginning on pageof this catalog. These power supplies are also compatible with mostcommercially available electron beam sources and are recommend-ed as upgrade power supplies in existing electron beam evaporationsystems.
Power supply enclosures are fully interlocked for operator safety.e-Vap® CVS Series Power Supplies can power and control up tothree electron beam sources. Source controls and X-Y Sweeps arenot included with power supplies and must be purchased separate-ly. For ordering information please see the next three pages. Thee-Vap® source control module also employs solid state high fre-quency switching technology and is designed to precisely controlemission current when used with e-Vap® power supplies. MDC rec-ommends the use of a high voltage grounding hook when servicingor working with all high voltage power supplies. Grounding hooks aredetailed on page of this catalog.
CVS-6 Power Supply
REFERENCEPART
NUMBERPOWER WEIGHTSUPPLY VOLTAGE POUNDS
CVS-6-2CE
CVS-10-2CE
CVS-15-2CE
CVS-6-4CE
CVS-10-4CE
CVS-15-4CE
991240
991275
991242
991193
991245
991246
6kW 208 75
10kW 208 90
15kW 208 100
6kW 400 75
10kW 400 90
15kW 400 100
Specifications
Metering Digital Voltage and Emission Current
Cooling Air cooled
Input power 208 V ±10%, Three-phase, 50/60 Hz, 30, 40, 60 Amperes
400 V ± 5%, Three-phase, 50/60 Hz, 15, 20, 30 Amperes
Voltage output 1 to 10 kV DC, negative polarity
Voltage Ripple Less than 1% RMS
Voltage regulation ± 0.25% of full scale output
Efficiency 85%
Cables From – To LengthInput power cord Facilities outlet – Power Supply 12'8 gauge ground wire Power Supply – Ground 12'
Current output
6 kW 0 to 0.6 Amperes
10 kW 0 to 1.0 Amperes
15 kW 0 to 1.5 Amperes
Weight See Table
Dimensions 19" W x 10.25" H x 21" L
Power Supplies
e-Vap®
Modular Evaporation Sources
MDC www.mdcvacuum.com Phone 800-443-8817 21
Ver E ~ 07-06
Thin Film Deposition
REFERENCEPART
NUMBERWEIGHT
DESCRIPTION POUNDS
SCM2-DFM-CE
SCM2-RCM-CE
SCM2-RCM-1"B
EV-HRS
SCM-25FC-CE
991364-01
991364
991364-02
991062
991287
DIRECT PACKAGE 10
REMOTE PACKAGE 10
REMOTE FOR 2-1" BOLT FT10
HALF RACK SPACER 1
25-FOOT CABLE KIT 3
Source Control Module
Indirect
Source Control Module
Features
■ High frequency switching technologyImproved emission stability over 60 Hz SCR circuits
■ Compact filament transformer■ Electrically isolated from high voltage unit■ Grounded and shielded filament transformer
offers improved safety over conventional designs■ Self contained emission current monitoring for
independent operation■ CE compliant■ Full remote control capability■ Touch screen programming■ PS/2 handheld mouse/trackball■ Rack mount brackets included
e-Vap® CVS Source Control Modules are designed for use withe-Vap® CVS Series Power Supplies. The source control module unitincludes filament transformer assembly, hand held mouse controland all necessary cables for hook-up with an e-Vap® CVS PowerSupply. A maximum output current of 70 amperes assures sufficientpower to drive virtually any commercially available electron beamsource. e-Vap® CVS Source Control Modules are available in threeinstallation packages, direct flange mount and two remote cablemounts. Direct flange mount packages are used on all MDC flangemounted evaporation systems. This package allows mounting of thefilament transformer to a high voltage feedthrough fitted with a2.75" Del-Seal™ CF flange. Filament transformer attachment isaccomplished by bolting the transformer housing via two of theflanges .250-28 bolts positioned 180° apart. The remote cablemount packages provide 36" of high voltage cable with OFE copperconnector lugs and an acrylic high voltage shield. This package istypically used with modular source installations where high voltageelectrical feedthroughs are fitted with 2-3/4 Del-Seal™ CF flanges,but limited space does not allow direct installation. The secondremote package is used on installations where high voltage are two1" feedthroughs.The source control module’s compact size occupies only half thewidth in a standard 19" electronics rack. To facilitate the installationinto a standard 19" rack, MDC offers half-rack spacers. However, ifthe source control module is purchased in conjunction with an e-Vap® programmable X-Y sweep controller the two units can be fas-tened together to form the standard 19" rack width and would notrequire the half-rack spacer.
Specifications
Metering Digital Emission Current
Cooling Air cooled
Input power 208 V ±10%, Single-phase, 50/60 Hz, 8 Amperes
Voltage output 12 VAC
Current output 0 to 70 Amperes
Efficiency 85%
Cables From – To LengthInput power cord1 Wall outlet – Source Control Module 7.5'Interface cable1 Power Supply – Source Control Module 6'Secondary cable1 Transformer – e-Vap® Source 3'Control cable2 Source Control Module – Transformer 12'Transformer input cable2 Source Control Module – Transformer 12'High voltage cable2 Power Supply – Transformer 12'
Weight 20 lb
Dimensions 8.5" W x 5.25" H x 14" L1 Fixed length cables; not available in other lengths2 A 25-foot cable kit may be purchased separately; three cables are included in one kit
Direct
e-Vap®
Controls and Measurement
22 Phone 800-443-8817 www.mdcvacuum.com MDC
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Controls and Measurement
Features
■ Use with virtually any electron beam source■ Large color LCD display■ Store up to 99 sweep patterns (up to 95
user programmable)■ Four pre-defined and highly expandable
patterns include CIRCLE, SPIRAL, FIGURE 8, and, LINE patterns
■ PS/2 handheld mouse/trackball control included■ An audible alarm warns of possible fault conditions■ Ability to custom name each sweep pattern■ Ability to choose a crucible pocket number to
correspond to specific sweep patterns and/orparameters such as beam centering or evaporation material specification
■ Ability to custom name the sweep controller itself for coating machine identification
■ Expanded beam power-profile capabilities allow the user to control erosion of difficult to evaporate materials
■ Customizable display color (foreground and background) to match your company colors or coating machine colors
■ Password option – requires a four digit password to access functions
■ RS-232 interfaceSafety-interlocked
■ All cabling included■ CE compliant■ Rack mounting brackets included
e-Vap® XY Programmable Sweep Controller with mouse
The next generation e-Vap® Programmable Sweep Controller has taken electron beam sweep capabilities to a higher level in versatility and practicality.It combines years of customer feedback with the latest advances in electronicstechnology. It possesses profound advancements from its predecessor interms of functionality and ruggedness. It is designed with both the coatingengineer and coatingoperator in mind. Electronbeam control is dynami-cally precise allowing theuser optimum ability todeposit dielectrics andmetals in the mostdemanding of applications.The strength of the sweepcontroller lies in its abilityto easily adapt to differentevaporation processrequirements, using its many expandable sweep patterns. Four predefinedsweep patterns and up to 95 additional user-defined patterns can bestored. The predefined patterns include CIRCLE, SPIRAL, FIGURE 8, andLINE patterns. Each of the 95 user defined patterns may consist of up to 208 XY points with a different beam dwell time for each beam point.The user interface includes a large, vibrant color LCD display with six function keys and a smooth rolling adjustment knob. A handheld PS/2device/trackball is provided which allows beam maneuverability for crucible material preparation and evaporation. For computer-automatedvacuum systems, a detailed rear panel digital I/O port along with a standard RS-232 interface allows access to the most important sweeperfunctions and status signals. An optional interactive Windows program isavailable allowing desktop sweep pattern design and virtually unlimited sweep pattern storage.
SpecificationsGraphic Display Color LCD
Input Power 100-120/200-240V, 50/60Hz, 3A
Max Coil Output (sweep + dc bias) 5 Amps
Max Sweep Frequency 200 Hz
Programming Interface Pushbutton, Digital I/O, or RS-232
Mouse Remote Input PS/2
Max Cable Length (18AWG) 25 feet (7.6 meters)
Weight 11 lbs
Dimensions 8.5" W x 5.25" H x 14” L, Rack-mountable
XY Programmable Sweep Controller
Description
Welcome Screen DisplayWelcome Screen Display
Ordering Information
REFERENCEPART
NUMBERDESCRIPTION
XYS2-CE
EV-HRS
991344
991062
XY PROGRAMMABLE SWEEP CONTROLLER
HALF RACK SPACER
MDC www.mdcvacuum.com Phone 800-443-8817 23
Ver E ~ 07-06
Thin Film Deposition
The e-Vap® Crucible Indexer is a micro stepper controlled motor driveunit used to position and rotate a multi-hearth electron beam source.The crucible indexer will rotate and position up to eight pocket positions,additional eight preprogrammed configurations can be selected via dipswitch settings at the back of the controller. These include: 4 pocket, 6pocket, 2 pocket, 180° Banana, 3 pocket 90° Banana, 3 pocket 120°Banana, 3 pocket 135° Banana, 3 pocket 145° Banana, or Continuous360° rotation. An additional dip switch lets the user select the follow-ing modes: Bi-Direction (shortest path between pockets), CounterClockwise Rotation, UHV Source Type, High Speed Range, BCD I/O, andEnable Ethernet communications. In addition the indexer can be userconfigured for any pocket / banana crucible layout. The Indexer alsoeliminates mechanical adjustment of the home or 1st pocket location,the "home" position can be defined electronically.
The e-Vap® Crucible Indexer can be controlled either manually orremotely, it can be configured to interface with most deposition con-troller equipped to select pockets on a multi layer deposition. AWindows-based configuration screen can be used to customize thepocket layout. The drive motor comes with a bracket to attach to a 2.75inch Del Seal rotary feedthrough or to a 1 inch bolt type rotaryfeedthrough. The indexer is supplied with a coupling to connect the 1/4inch drive shaft to the 1/4 inch feedthrough shaft. The e-Vap® CrucibleIndexer is designed to be one of the most flexible methods to customizeor fine tune crucible rotation and control for multi hearth electron beamsources.
Specifications
MOTOR DRIVE
Motor type micro-stepper
Torque 1.4 N-m (200 oz-in)
Speed (RPM) low: 0.05, 0.06, 0.08, 0.10, 0.12, 0.15, 0.19, 0.24, 0.30, 0.37
high: 0.5, 0.6, 0.8, 1.0, 1.2, 1.5, 1.9, 2.4, 3.0, 3.7
Resolution 1.8ºl
Repeatability 0.25ºl
Size (height x width x depth) 89 x 89 x 122 mm (3.5" x 3.5" x 4.8")
Weight 1.5 Kg (3.2 lbs)
Power 12 W (supplied by controller)
Specifications
CONTROLLER
Pockets up to 8
digital inputs binary or BCD encoded
low = 0 to 2 Vdc, high = 4 to 24 Vdc, non-isolated
Communications RS-232 or Ethernet
Size (height x width x depth) 88 x 213 x 197 mm (3.5" x 8.4" x 7.75")
Weight 2.7 Kg (6 lbs)
Power 100-120 / 200-240 VAC, 50/60 Hz, 20W
Compliance CE (LVF & ECD)
Interconnecting cable 10ft (3m), standard DB25
REFERENCEPART
NUMBERDESCRIPTION
EV-CI-INDEXER 991400CRUCIBLE INDEXER
Features
■ Direct drive-No pulleys or belts to set or adjust■ Electronic calibration of position■ 8 predefined pocket configurations included■ User configurable feature allows for custom or
special pocket configurations■ Can be operated manually or by external controller■ Two speed ranges for a total of 20 speed settings■ 1.8º resolution■ CE compliant
e-Vap® Crucible Indexer
Crucible Indexer
e-Vap®
Controls and Measurement
24 ----Phone 800-443-8817 www.mdcvacuum.com MDC
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Controls and Measurement
Deposition Monitoring and Control
The SQC-122 controls deposition rate and thickness in multi-layerthing film deposition processes. The controller was designed forease of use with six content sensitive Softkeys providing rapidaccess to frequently used data. The 122C memory will hold up to 25processes consisting of 250 layers and 25 materials. Cut / Copy/Paste Capabilities make it easy to modify or duplicate processesand layers. The controller has inputs for two crystal sensors, two 0-10 volt outputs are available to control the evaporation rate. Eightrelays and digital inputs can be independently assigned to over 40possible events, including pocket rotation and external process con-trols. A windows program for set up and data acquisition is alsoincluded with the controller.
The SQC-310---- model of the controller includes software for co-deposition control. The two crystal sensors and two outputs to con-trol deposition rate, along with special software features allow forco-deposition capability.
MDC offers a choice of four units with a range of capabilities frommonitoring the deposition process to controlling multiple depositionprocess or controlling co-deposition processes. The choices are tai-lored from introductory / economical thin film deposition to fullprocess control for a production process. Co-deposition of materialsfrom multiple sources allows easier fabrication and investigation ofcomplex material compositions and layers. All of the monitors andcontrollers utilize proven 6 MHz quartz crystal sensor technology tomeasure the thin film deposition process.
The SQM-160 measures thickness and deposition rate of the thinfilm deposition process. The base unit can monitor from 2 indepen-dent measurement channels. Four relays are available to controlsource and crystal shutters during the deposition process. Up to ninefilms can be stored in memory in the SQM-160, active film can beeasily changed from the front panel. All parameters can also be setfrom the front panel of the monitor. The SQM-160 is a monitor onlyit is not capable of controlling the rate during deposition.
SQM-122C Two Channel Deposition Controller
Description
SQM-160 Rate/Thickness Monitor
SQM-122C Screen Example
SQM-310 Co Deposition Controller
MDC www.mdcvacuum.com Phone 800-443-8817 25
Thin Film Deposition
e-Vap®
Controls and Measurement
Crystal Sensor Packages
REFERENCEPART
NUMBERWEIGHT
DESCRIPTION MOUNT POUNDS
LPSP-1
LPSP-275
LPSP-HT-275
CRP-500-117
991310
991311
991637
991131
LOW PROFILE SENSOR PACKAGE 1" BASEPLATE 5
LOW PROFILE SENSOR PACKAGE 2.75" DEL-SEAL 5
BAKEABLE SENSOR PACKAGE 2.75" DEL-SEAL 5
SENSOR CRYSTALS, GOLD RATED BOX OF 10 5
1" Base-Plate Low Profile 2.75" Del-Seal™ CF Low Profile 2.75" Del-Seal™ CF Bakeable to 400°C
This low profile sensor package includes sensor head,oscillator, 30" in-vacuum cable, 6" BNC cable, 10' BNCcable, a box of gold coated sensor crystals with 5 crystals per box, two Swagelok® compression fittingsand a 1" base-plate sensor feedthrough. Bakeable to180°C.
This low profile sensor package includes sensor head,oscillator, 30" in-vacuum cable, 6" BNC cable, 10' BNCcable, a box of gold coated sensor crystals with 5 crystals per box, two Swagelok® compression fittingsand a 2.75" Del-Seal™ CF sensor feedthrough. Bakeableto 180°C.
This bakeable sensor package includes a 400°C bake-able sensor head, oscillator, 30" in-vacuum cable, 6"BNC cable, 10' BNC cable, and a box of gold coated sen-sor crystals with 5 crystals per box. Sensor head is preinstalled on a 2.75" Del-Seal™ CF flange, which includesthe sensor feedthrough.
Deposition Monitoring and Control
The SQM-242 is a thin film deposition controller and a standardPCI expansion card. Each SQM monitors from one to four crys-tal sensor inputs, and provides two control voltage outputs. Atypical single sensor deposition system is shown, the SQM-242card is installed in a computer, a quartz crystal sensor is con-nected to the input and the output is connected to a power sup-ply. The card will control the deposition rate and adjust the out-put of the power supply for constant deposition rate. The basicSQM-242 card includes software that is easily modified to
REFERENCEPART
NUMBERDESCRIPTION
SQM-160
SQC-122C
SQC-222C
SCM-242
SQS-242
991366
991309
991367
991327
991328
SQM-160 TWO CHANNEL DEPOSITION MONITOR
SQC-122C TWO CHANNEL DEPOSITION CONTROLLER
SQC-222C TWO CHANNEL DEPOSITION CONTROLLER
SQM-242 TWO CHANNEL DEPOSITION CONTROL CARD
SQS-242 CO DEPOSITION SOFTWARE
SQM-242 Co Deposition Controller Software
SQM-242 Co Deposition Controller PCI Card
communicate with digital I/O cards. The SQS-242 software packagesupports multiple cards, co-deposition, digital I/O , graphing, anddata logging.
26 Phone 800-443-8817 www.mdcvacuum.com MDC
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Pneumatic Shutter -Two Position
Pneumatic shutters are an excellent tool for precise control of film thicknessonto a substrate. The air actuated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of the evapora-tion/deposition cycle. The shutter also allows pre-melt or “soak” prior to depo-sition by blanketing the evaporation material. Shutters with a 2" diameter and2" stroke are used on sources with crucible volumes of less than 40cc. Shutterswith a 3" diameter and 4" stroke are used on sources with crucible volumes of40cc and greater. These shutters come standard with a 120VAC solenoid valve.
REFERENCEPART
NUMBERNOM. SHUTTER STROKEFLANGE DIAMETER LENGTH
PS-2P2-133
PS-2P3-133
PS-2P2-275
PS-2P3-275
991796-02
991796-01
991794-02
991794-01
1-1/3 2.00 2.00
1-1/3 3.00 4.00
2-3/4 2.00 2.00
2-3/4 3.00 4.00
Pneumatic Shutter - Three Position
Pneumatic shutters are an excellent tool for precise control of film thicknessonto a substrate. The air actuated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of the evapora-tion/deposition cycle. The shutter also allows pre-melt or “soak” prior to depo-sition by blanketing the evaporation material. A three position shutter offersgreater process flexibility than other shutters. In position one the shutter willclose the deposition and rate monitoring ports on a horizontal e-Vap® system fit-ted with a water-cooled roof. In position two the shutter continues to block thedeposition port, but opens the rate monitoring port. In position three all ports areopen and the system is ready to begin a coating cycle. This shutter includes a120VAC solenoid air control valve.
REFERENCEPART
NUMBERDESCRIPTION
PS-3PU-133 996343SHUTTER 3-POSITION
High Voltage Safety Accessories
REFERENCEPART
NUMBERDESCRIPTION
EV-SGH
HVE-2
BHVE-2
991106
640051
640057
HIGH VOLTAGE SAFETY GROUND HOOK
ACRYLIC SHIELD 2-3/4" DEL-SEAL
ACRYLIC SHIELD 1" BASE-PLATE
Grounding Hook... MDC recommends the use of a grounding hook prior to ser-vice or maintenance of any high voltage equipment. Connections which werepreviously energized should be discharged with a grounding hook solidly con-nected to a low impedance earth ground. Hook installation is made easy withthe supplied 64" insulated cable.
High Voltage Shield... To prevent accidental contact with exposed high voltageleads MDC recommends the use of high voltage acrylic shields. Shields areavailable for 2-3/4" Del-Seal™ CF flange and 1" Baseplate mounted feed -throughs. Strain relief will accept cable sizes from .23" to .47" diameters.
e-Vap®
Evaporation Source Accessories
MDC www.mdcvacuum.com Phone 800-443-8817 27
Ver E ~ 07-06
Thin Film Deposition
Manual Shutter - Push-Pull
Manual shutters are an excellent tool for control of film thickness onto a sub-strate. The manually operated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of the evapora-tion/deposition cycle. The shutter also allows pre-melt or “soak” prior to depo-sition by blanketing the evaporation material. Shutters with a 2" diameter by 2"stroke are used on sources with crucible volumes of less than 40cc. Shutterswith a 3" diameter by 4" stroke are used on sources with crucible volumes of40cc and greater.
Linear Guide Rods
Linear bearing guide rods allow horizontal flange mounted e-Vap® systems tobe routinely maintained by simply sliding in and out, in drawer-like fashion. Twolinear ball bushings provide the smooth gliding action required for ease of move-ment. Weldable support brackets secure the guide rods onto the user’s portflange. The bracket installation procedure is simple and self explanatory.
REFERENCEPART
NUMBERDESCRIPTION
EV-LGRA 991791GUIDE RODS
Water Flow Switch
e-Vap® electron beam sources rely on water-cooling to dissipate the largeamounts of heat generated by an electron beam. Proper water flow is essentialfor normal system operation as well as for safety. The water flow switch will turnoff all power to the e-Vap® source when and if a preset water flow rate dropsbelow its set point.
REFERENCEPART
NUMBERDESCRIPTION
EV-WF110
EV-WF240
991031
991031-01
WATER FLOW SWITCH 110V AC
WATER FLOW SWITCH 24VDC
REFERENCEPART
NUMBERNOM. SHUTTER STROKEFLANGE DIAMETER LENGTH
MS-2-133
MS-3-133
MS-2-275
MS-3-275
991793-01
991793-02
991792-01
991792-02
1-1/3 2.00 2.00
1-1/3 3.00 4.00
2-3/4 2.00 2.00
2-3/4 3.00 4.00
e-Vap®
Evaporation Source Accessories
28 Phone 800-443-8817 www.mdcvacuum.com MDC
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REFERENCEPART
NUMBERLINER CRUCIBLEMATERIAL SIZE
MDC recommends using crucible liners with all e-Vap® sources. Crucibleliners provide thermal isolation between a target material and a source’swatercooled crucible. These liners offer improved thermal stability whilereducing the transfer of heat to the crucible. Liners provide the ability to eas-ily and quickly switch evaporant materials without removing the source forcleaning. They also reduce power requirements to achieve specific evapora-tion rates. Graphite and vitreous carbon are the most popular liner materialsdue to their low cost and favorable thermal properties. Vitreous carbon isproduced using a patented glazing process baked above 1400°C eliminat-ing any porosity in the carbon. Please contact MDC sales for price and avail-ability on the various non-priced liner materials.
Crucible Liners
GRAPHITE 2cc
GRAPHITE 6cc
GRAPHITE 7cc
GRAPHITE 15cc
GRAPHITE 25cc
GRAPHITE 30cc
GRAPHITE 40cc
GRAPHITE 60cc
GRAPHITE 75cc
GRAPHITE 100cc
VITREOUS CARBON 2cc
VITREOUS CARBON 6cc
VITREOUS CARBON 7cc
VITREOUS CARBON 15cc
VITREOUS CARBON 25cc
VITREOUS CARBON 30cc
VITREOUS CARBON 40cc
VITREOUS CARBON 60cc
VITREOUS CARBON 75cc
VITREOUS CARBON 100cc
FABMATE 2cc
FABMATE 6cc
FABMATE 15cc
FABMATE 25cc
FABMATE 40cc
MOLYBDENUM 2cc
MOLYBDENUM 6cc
MOLYBDENUM 7cc
MOLYBDENUM 15cc
MOLYBDENUM 25cc
MOLYBDENUM 30cc
MOLYBDENUM 40cc
MOLYBDENUM 60cc
MOLYBDENUM 75cc
MOLYBDENUM 100cc
TUNGSTEN 2cc
TUNGSTEN 6cc
EV-CL2G
EV-CL6G
EV-CL7G
EV-CL15G
EV-CL25G
EV-CL30G
EV-CL40G
EV-CL60G
EV-CL75G
EV-CL100G
EV-CL2VC
EV-CL6VC
EV-CL7VC
EV-CL15VC
EV-CL25VC
EV-CL30VC
EV-CL40VC
EV-CL60VC
EV-CL75VC
EV-CL100VC
EV-CL2FM
EV-CL6FM
EV-CL15FM
EV-CL25FM
EV-CL40FM
EV-CL2M
EV-CL6M
EV-CL7M
EV-CL15M
EV-CL25M
EV-CL30M
EV-CL40M
EV-CL60M
EV-CL75M
EV-CL100M
EV-CL2TU
EV-CL6TU
992584-01
990586-01
990587-01
990588-01
990589-01
992484-01
990590-01
992571-01
992572-01
992573-01
992584-02
990586-02
990587-02
990588-02
990589-02
992484-02
990590-02
992571-02
992572-02
992573-02
992584-10
990586-10
990588-10
990589-10
990590-10
992584-03
990586-03
990587-03
990588-03
990589-03
992484-03
990590-03
992571-03
992572-03
992573-03
992584-04
990586-04
TUNGSTEN 7cc
TUNGSTEN 15cc
TUNGSTEN 25cc
TUNGSTEN 30cc
TUNGSTEN 40cc
TUNGSTEN 60cc
TUNGSTEN 75cc
TUNGSTEN 100cc
BORON NITRIDE 2cc
BORON NITRIDE 6cc
BORON NITRIDE 7cc
BORON NITRIDE 15cc
BORON NITRIDE 25cc
BORON NITRIDE 30cc
BORON NITRIDE 40cc
BORON NITRIDE 60cc
BORON NITRIDE 75cc
BORON NITRIDE 100cc
ALUMINA 2cc
ALUMINA 6cc
ALUMINA 7cc
ALUMINA 15cc
ALUMINA 25cc
ALUMINA 30cc
ALUMINA 40cc
ALUMINA 60cc
ALUMINA 75cc
ALUMINA 100cc
COPPER 2cc
COPPER 6cc
COPPER 7cc
COPPER 15cc
COPPER 25cc
COPPER 30cc
COPPER 40cc
COPPER 60cc
COPPER 75cc
COPPER 100cc
REFERENCEPART
NUMBERLINER CRUCIBLEMATERIAL SIZE
EV-CL7TU
EV-CL15TU
EV-CL25TU
EV-CL30TU
EV-CL40TU
EV-CL60TU
EV-CL75TU
EV-CL100TU
EV-CL2BN
EV-CL6BN
EV-CL7BN
EV-CL15BN
EV-CL25BN
EV-CL30BN
EV-CL40BN
EV-CL60BN
EV-CL75BN
EV-CL100BN
EV-CL2A
EV-CL6A
EV-CL7A
EV-CL15A
EV-CL25A
EV-CL30A
EV-CL40A
EV-CL60A
EV-CL75A
EV-CL100A
EV-CL2CU
EV-CL6CU
EV-CL7CU
EV-CL15CU
EV-CL25CU
EV-CL30CU
EV-CL40CU
EV-CL60CU
EV-CL75CU
EV-CL100CU
990587-04
990588-04
990589-04
992484-04
990590-04
992571-04
992572-04
992573-04
992584-05
990586-05
990587-05
990588-05
990589-05
992484-05
990590-05
992571-05
992572-05
992573-05
992584-06
990586-06
990587-06
990588-06
990589-06
992484-06
990590-06
992571-06
992572-06
992573-06
992584-08
990586-08
990587-08
990588-08
990589-08
992484-08
990590-08
992571-08
992572-08
992573-08
e-Vap®
Evaporation Source Accessories
MDC www.mdcvacuum.com Phone 800-443-8817 29
Ver E ~ 07-06
Thin Film Deposition
EMITTER RETROFIT KIT
EMITTER RETROFIT KIT 1, 2, 5 1
EMITTER RETROFIT KIT 6 2
EMITTER ASSEMBLY
EMITTER ASSEMBLY 1, 2, 5 1
EMITTER ASSEMBLY 6 2
REPLACEMENT PARTS
ANODE 1-6 3
BEAM DEFLECTOR SHIELD 1-6 4
FILAMENT INSTALLATION TOOL 1-6 5
CATHODE BLOCK, LH 1-6 6
CATHODE BLOCK, RH 1-6 6
FASTENERS, NON-GALLING (Set of 8) 1-6 7
FILAMENT CLAMP, LH 1-6 8
FILAMENT CLAMP, RH 1-6 8
CONSUMABLES
FILAMENT SET, 5 ea. 1-6 9
INSULATOR, HIGH VOLTAGE 1-6 10
REFERENCEPART
NUMBERUSED WITH
DESCRIPTION FRAME SIZE FIGURE
EV-EAHF1-KIT
EV-EAHF6-KIT
EV-EAHF1
EV-EAHF6
EV-AHF
EV-BDSHF
EV-FIT
EV-LCBHF
EV-RCBHF
EV-FKHF
EV-LFCHF
EV-RFCHF
EV-FILHF
EV-IHVHF
992908
992909
992850-02
992850-01
992845
992846
992534-04
992853
992852
993042
992847-01
992847-02
990527
992414
Figure 3
Figure 5
Figure 7
Figure 1
Figure 9 Figure 10
Figure 8
Figure 6
Figure 4
HF Emitter Assembly
Retrofit KitA complete HF Emitter Assembly retrofit kit includes:■ One HF Emitter Assembly■ One filament installation tool■ One face plate for emitter■ Permanent magnets (Frame size 5 and 6 only)■ Two installation screws■ Detailed instructions
Components may be purchased individually or as acomplete retrofit kit.
The spare parts detailed below are a list of e-Vap® consumable com-ponents which may require periodic replacement. These compo-nents have been specifically designed for use with MDC e-Vap®
electron beam evaporation sources and systems equipped with theHF Emitter Assembly.
Figure 2
e-Vap®
Evaporation Source Accessories
30 Phone 800-443-8817 www.mdcvacuum.com MDC
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The spare parts detailed below are a list of e-Vap® consumable componentswhich may require periodic replacement. These components have beenspecifically designed for use with MDC e-Vap® electron beam evaporationsources and systems.
ANODE 1-6 1
BEAM DEFLECTOR SHIELD 1, 2, 5, 6 2
BEAM DEFLECTOR SHIELD 3, 4 2
BEAM FORMER 1 - 6 3
CATHODE BLOCK, LH 1, 2 4
CATHODE BLOCK, RH 1, 2 4
CATHODE BLOCK, LH 3 - 6 4
CATHODE BLOCK, RH 3 - 6 4
EMITTER ASSEMBLY 1, 2 6
EMITTER ASSEMBLY, OLD 5 6
EMITTER ASSEMBLY 6 6
EMITTER ASSEMBLY 3 6
EMITTER ASSEMBLY 4 6
FASTENERS, NON-GALLING 1 - 6 5
FILAMENT CLAMP, LH 1 - 6 7
FILAMENT CLAMP, RH 1 - 6 7
FILAMENT SET, 5 ea. 1, 2, 6 8
FILAMENT SET, 5 ea. 3, 4, 5 8
INSULATOR, HIGH VOLTAGE 1 - 6 A
INSULATOR, FILAMENT BLOCK 1 - 6 B
INSULATOR, BEAM DEFLECTOR 1 - 6 C
INSULATOR, BEAM FORMER 1 - 6 D
REFERENCEPART
NUMBERUSED WITH
DESCRIPTION FRAME SIZE FIGURE
EV-EA
EV-BDS
EV-BDS
EV-BF
EV-LCB
EV-RCB
EV-LCB
EV-RCB
EV-EA-1000
EV-EA-4010
EV-EA-4015
EV-EA-4066
EV-EA-4UHV
EV-FK
EV-LFC
EV-RFC
EV-FIL
EV-FIL
EV-IHV
EV-IFB
EV-IBDS
EV-IBDS
990537
992201
990534
990533
990525-01
990526-01
990525-02
990526-02
990630-01
990630-02
990630-03
990630-04
990630-06
990585
990531
990532
992330
990527
990530
990528
990535
990529
270º Emitter Consumable Accessories
Figure 1
Figure 3
Figure 5
Figure 6
Figure 8 Figure 9
Figure 7
Figure 4
Figure 2
A
B
C
D
C
e-Vap®
Evaporation Source Accessories
MDC www.mdcvacuum.com Phone 800-443-8817 31
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Thin Film Deposition
e-Vap®
Evaporation Source Accessories
Installation Hardware
Listed below are the essential components required for a typical installation ofstand-alone modular e-Vap® electron beam sources. Included are feedthroughsfor source water cooling and all electrical interfaces. Manual and auto-indexertype rotary feedthroughs are available for the installation of multi-pocket sources.All components are fitted with industry standard vacuum mounts to facilitatesource installation onto existing coating systems. Standard mounts include... Del-Seal™ CF metal seal flanges and 1" baseplate O-ring seal mounts. Customers withBalzers systems with 1-1/4" base plate ports can use MDC 1-1/4" to 1" base-plate port adapters.
FEEDTHROUGHS, WATER & ELECTRICAL
WATER, DUAL .312" TUBES, 2.75" DEL-SEAL 1
WATER, DUAL .312" TUBES, 1" BASE-PLATE 1
SWEEP COIL, 4 PIN .056, 1.33" DEL-SEAL 2
SWEEP COIL, 4 PIN .056, 2.75" DEL-SEAL 2
SWEEP COIL, 4 PIN .056, 1" BASE-PLATE 2
TC-CRIMP CONTACTS FOR .056 PIN, Pkg of 5 2
HIGH VOLTAGE, 2 PIN .250, 12kV 2.75" DEL-SEAL 3
HIGH VOLTAGE, 1 PIN .312, 12kV 1" BASE-PLATE 10
CONNECTOR, RIGHT ANGLE POWER, .25" PIN 3
CONNECTOR, INLINE POWER, 25" PIN 3
CONNECTOR, RIGHT ANGLE, .312" PIN
FEEDTHROUGHS, ROTARY BELLOWS SEAL
ROTARY MANUAL, .250 SHAFT, 1.33" DEL-SEAL 4
ROTARY MANUAL, .250 SHAFT, 2.75" DEL-SEAL 4
ROTARY, .250 SHAFT BOTH ENDS, 1.33" DEL-SEAL 5
ROTARY, .250 SHAFT BOTH ENDS, 2.75" DEL-SEAL 5
FEEDTHROUGHS, ROTARY O-RING SEAL
ROTARY, .250 SHAFT BOTH ENDS, 1" BASE-PLATE 6
ASSEMBLY EQUIPMENT
BASE-PLATE ADAPTER BALZERS 1-1/4" TO MDC 1" 7
VCR® GLAND, .250" MODIFIED .218" BORE 8
VCR® GLAND, .250" TO .312" TUBE ADAPTER 8
WATER FLOW SWITCH, 110V AC 9
WATER FLOW SWITCH, 240V DC 9
HIGH VOLTAGE SAFETY GROUND HOOK 11
HIGH VOLTAGE ACRYLIC SHIELD, 2-3/4" DEL-SEAL 12
HIGH VOLTAGE ACRYLIC SHIELD, 1" BASE-PLATE 12
REFERENCEPART
NUMBERDESCRIPTION FIGURE
991534
991726
991531
991532
991727
991538
640005
992940
991537
991536
992818-03
670004
670005
991731
991730
652000
991813
990610
991809
991031
991031-01
991106
640051
640057
Figure 2
Figure 4
Figure 6
Figure 8
Figure 11
Figure 9
Figure 7
Figure 5
Figure 3
EV-LF275
EV-LF1
EV-IF133
EV-IF275
EV-IF1
TC-CRIMP
EV-HC275
EV-HC1
RAPC
ILPC
REVHVC
HTBRM-133
HTBRM-275
EV-BRMI-133
EV-BRMI-275
FRM-1
EV-BAI
EV-MVCR
EV-TAVCR
EV-WF110
EV-WF24D
EV-SGH
HVE-2
BHVE-2
Figure 1
Figure 10
Figure 12
32 Phone 800-443-8817 www.mdcvacuum.com MDC
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Ver E ~ 07-06
Complete Vacuum Coating SolutionsHigh and Ultra-High Vacuum Systems
HV Chamber notes:• High vacuum D chamber and box coater packages.• Full internal deposition shielding.• Water cooled chamber option.• Integrated frame system with casters and leveling pads.• Dry pumping. Standard packages use mag lev turbo and
scroll pump.• Digital vacuum gauging.• Sample and source viewports.• Static and rotating sample holders up to 4” standard.
Special sizes upon request.• Substrate heating options.• E-Vap electron beam evaporation sources.
Single or multi pocket.• Re-Vap resistive evaporation sources. Single or multiple sources.• Sputtering sources.• Ion source for pre-clean etch or Ion assisted deposition.• Crystal rate monitor system. Crystal rate controller systems.• Manual gas systems. Mass flow control systems.• Electronics rack with cable assemblies.• Easy to follow instruction manuals.• Factory and onsite training available.
Thin FilmHV Packaged Systems
MDC offers virtually every component required for vacuum research and vacuum coating applications. Now with the introduction of the MDCstandard chamber line researchers and OEM’s have the advantage of bundling these high quality pieces together without hours or weeks ofspecial engineering. Many of our most popular parts are already designed to work together.
Shown: Optional Sputter Source
Shown: High Vacuum Coating System (Multiple Options Available)
Shown: High Vacuum D-Shape Chamber (Multiple Options Available)
MDC www.mdcvacuum.com Phone 800-443-8817 33
Ver E ~ 07-06
Thin Film Deposition
Complete Vacuum Coating SolutionsUltra High Vacuum System - with ION Assisted eVap
Easy Accessfor Source Loading
Water Cooled Chamber
eVap Source
Crucible Indexer
Rate Controll erION Source ad GasController
eVap Source & Sweep Controller
Dry Turbo CartDry Pumping
Frame 5Six Pocket
2” Ø SampleLoad Lock Systems
Thin FilmUHV Packaged Systems
Electronics and Control RackIsolation Valve
Digital Vacuum Gauge
ION Source
Pump Controller
High VoltagePwr Supply
Shown: Complete High Vacuum Coating Solution (part number 204199)
UHV chamber notes: Shown part number 204199 UHV load lock coating system including:• 6 pocket e-vap source with auto indexing• Ion source for pre clean or assisted deposition• Sample holder for 2” diameter.• Crystal rate monitor• Load lock system• Water cooled chamber• Large diameter view port for sample (IR coated)• Source viewport (IR coated) with shutter• Full removable sst internal shielding• Front access port for source material loading.• Spare ports• Utilities panel for gas, water and air connections
• Mag lev turbo with dry scroll roughing pump.• Digital vacuum gauging• Dry turbo cart for load lock system• Frame with heavy duty casters and leveling pads
Assembled electronics rack including:• Rate monitor control• Ion source power supply• Gas controller with 100sccm mass flow control• Programmable e-vap source controller• Programmable e-vap sweep controller• Turbo pump controller• 6 kilowatt e-vap high voltage power supply• All required cables.
34 Phone 800-443-8817 www.mdcvacuum.com MDC
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Shipping Method
All standard shipments are made by thefollowing method unless otherwise specified:• FOB Hayward, California and Sarasota,
Florida.• prepay and added to invoice (PPA);• shipped via UPS ground service or best
way as determined by MDC.
Nonstandard shipments must be specified bythe customer. General notes include thefollowing:• orders may be specified to ship collect;• charges for nonstandard methods of
shipping are determined by the specifiedcarrier;
• in some cases, oversized items may becharged at a “dimensional weight” (dim-weight) rate which is substantially higherthan surface rates.
MDC recommends in all cases that analternative carrier be named at the time oforder.
Weights stated in this catalog are forreference only. Exact shipping weights aredetermined at the time of shipment.
Payment Terms
Net 30 days with prior credit approval.VISA®, MasterCard® and American Express®
credit cards, prepaid, are also accepted.
Prices and Specifications
Prices and specifications are subject tochange without notice.
Delivery
Every effort will be made to ship within three(3) days of receipt of an order. In the event ofback-order, a firm delivery date will beestablished and quoted.
Warranty
All products manufactured by MDC VacuumProducts, LLC are warranted to be free fromdefects in materials and workmanship for aperiod of twelve (12) months from the dateof shipment by MDC Vacuum Products, LLCto the buyer. Liability under this warranty isexpressly limited to repair or replacement ofdefective products at the option of MDCVacuum Products, LLC. Products returned toMDC Vacuum Products, LLC for repair orreplacement shall be received prepaid.Expendable items such as gaskets, bellows,bearings, lubricants, etc., may have a servicelife of less than one year in normal usage. Ifsuch items fail to give reasonable service fora period of time, as determined by MDCVacuum Products, LLC, they will be repairedor replaced by MDC Vacuum Products, LLCat its election.
Return Policy
In the event that a product is to be returnedto MDC, a Return Authorization (RA) numbermust be obtained from the MDC SalesDepartment prior to shipment of the product.Call the toll free number listed at the bottomof this page and request an RA number. Tofacilitate processing, please provide theoriginal date of purchase and either theoriginal purchase order number or theoriginal MDC sales order number.
Products returned to MDC Vacuum Products,LLC for repair or replacement shall be
received prepaid. Items arriving without aReturn Authorization number will be refused.
A product failing to give reasonable servicefor a period of time, as determined by MDCVacuum Products, LLC, will be repair ed orreplaced by MDC Vacuum Products, LLC atits election.
Trademark Ownership
American Express® American Express Co.MasterCard® Mastercard International Inc.VISA® VISA International Service AssociationApiezon® Avo Biddle InstrumentsAutoCad® AutoDesk CorporationConflat®, Fel-Pro® Varian Associates Inc.Corning®, Pyrex® Corning Inc.Dicronite® Rotary Components, Inc.Kovar® Carpenter TechnologyMazak® Yamazaki Mazak Corp.Slo-Syn® Superior Electric Co.Suprasil™ Heraeus Amersil Inc.Swagelok®, VCR® Swagelok Co.Teflon® E.I. DuPont de Nemours & Co., Inc.Viton®, Buna®, Kapton®, Kalrez®, Krytox®,Vespel®, Delrin® DuPont Dow
ElastomersCab-Fast® Caburn-MDC EuropeDel-Seal™, Del-Base™, Del-Weld™, Kwik-Flange™, Large-Flange™, Mini-Scaffold™,Auto-Dock™, C-Loc™, Uni-Loc™, V-Plane™, Re-Vap™, e-Vap®
MDC Vacuum Products, LLC
MDC customer service and technical department MDC inventory and stock room MDC shipping and receiving department
All dimensions in this catalog are given ininches unless specified otherwise.
e-Vap®
Ordering Information
35
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MDC 23842 Cabot Boulevard, Hayward, CA 94545-1651• Toll Free 800-443-8817• Phone 510-265-3500 • Fax 510-887-0626• e-mail [email protected] • www.mdcvacuum.com
Thin Film Deposition Solutions
engineered process solutions