the fdsoi history and its future · 2017. 12. 18. · soitec ensures fd-soi wafer supply 300mm soi...
TRANSCRIPT
![Page 1: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/1.jpg)
The FDSOI history and its futureThe FDSOI history and its future
Philippe Flatresse, PhDBusiness Development Manager, FD-SOI Expert
![Page 2: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/2.jpg)
Our “digital” world in 2020
2020
Source: IDC
25+25+4BILLION
Connected People Revenue Opportunity Embedded and Int elligent SystemsApps GBs of Data
$4TRILLION TRILLION BILLION
50TRILLION
Power Efficient Technologies are mandatory
![Page 3: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/3.jpg)
Raw Material Engineered Material
Choosin g the right material is essential !
Needs of fully -depleted transistors
BOX
![Page 4: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/4.jpg)
FD-SOI: more than 20 years success history
Smart Cut Fab 3GHz+ APUTBB
Smart Cut invention
SOITEC creation
Smart Cut Fab
300mm Fab
3GHz+ AP
RF SOIIndustrystandard
FDSOI prod@ GF, SEC, ST
Multi-foundriesadoption
UTBB
R&D acceleration
![Page 5: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/5.jpg)
The electrical history of FDSOI
GND
Gate
VDD
Gate
DrainSource
PunchThrough !
GND
Gate
VDD
Gate
DrainSource
Thick Box
GND
Front Gate
VDD
Gate
DrainSource
Thin Box
Bulk Planar ETSOI UTBBExtremely Thin SOI Ultra thin Body & Box
PDSOI
GND
Gate
VDD
Gate
DrainSource
Thick Box
Thick SOI
Substrate
Through !
Substrate Substrate
Back Gate
Electrostatic issues� High Sub-VT slope� High DIBL
�Low Body Biasing Efficiency
Electrostatic Recovery☺Low Sub-VT slope☺ Low DIBL
Low Body Biasing Efficiency
Electrostatic Recovery☺Low Sub-VT slope☺ Low DIBL
☺ High Body Biasing Efficiency
Electrostatic issues� High Sub-VT slope� High DIBL
� History effect
Substrate
![Page 6: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/6.jpg)
Soitec ensures FD -SOI wafer supply
300mm SOI
Soitec Bernin II, FranceHVM
650 K wafers/y. capacity of which FD-SOI capacity will be increased from 100 K wafers/y. to 400 K wafers/y.
+ 800 K wafers/y. capacity ( FD-SOI pilot line launch – Sept. 17)
Total potential 300mm capacity =
Up to 1.5 M wafers/y.
Pasir Ris, SingaporeReady HVM
![Page 7: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/7.jpg)
FD-SOI focus stronger than ever
2014 2015 2016 2017
GF Chengdu fab announcement & fast construction Increasing number of products The winning combination
w/ BBS F B
FD-SOIRFMRAM
18FDS
Performance 1.2X
Power 0.60X
Logic Area 0.70X
Mask set
(10MTL)+5Layer
1515
Tape-Outs
15 product tape-outs by end 2018
1515
Tape-Outs
15 product tape-outs by end 2018 eMRAM
22FDX®
eNVM12FDXTM
12nm nodeannouncedwith 7nm FF perf
Increasingnumber of products
18nm announcement
0,2
0,6
1,0
1,4 PERFORMANCE
w/ BBFD-SOI at the heart of Samsung foundrystrategy
The best foundry team
![Page 8: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/8.jpg)
FD-SOI Multiple Foundry Offering
FDS18nm
FDX12nm
In development
RFeMRAM
SOTB65nm
FDS28nm
FDX22nm
In production
RFeMRAM
RFeMRAM
![Page 9: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/9.jpg)
22nm benchmark
![Page 10: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/10.jpg)
17/10/2017
S3S Conference 2017 How to Leverage SOI Platforms to Achieve Optimum Power Efficiency?10
Is Body Bias really a Game Changer?
![Page 11: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/11.jpg)
18/10/2017
Strategic Planning 2017 Digital Presentation11
![Page 12: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/12.jpg)
Body Bias as key differentiator for FDSOI
Take the control of your circuit Do it dynamically!
Body Bias
Leakagereduction
PerformanceBoosting
Low leakage
High perf
Dynamically switch between high perf & low leakage
En
erg
ym
an
ag
em
en
t
Take the control of your process Operate safe at the edge
Low leakage
Ada
ptat
ive
Bod
y B
ias
SS FFTT
Body Bias
Offset process variation
En
erg
yC
om
pe
nsa
tio
n
![Page 13: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/13.jpg)
Body Bias gain per market segmentP
erfo
rman
ce B
oost
+50%
+200%
Pow
er Reduction
2X
10X
1.5X
Per
form
ance
Boo
st
+20%
Pow
er Reduction
Ultra Low VoltageHigh Perf Energy Efficiency Low Power
= Benchmark vs noBB
1.5X
![Page 14: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/14.jpg)
Leakage limit
Untrimmed
IDD
Q B
BG
EN
@ E
WS
/Ro
om
in F
T/M
b
28
nm
FD
FD-SOI key features summary
mmWave RF-CMOS Ultra Low VoltageProcess
compensation through body bias
Immunity to radiations
IDD
Q
SS
FF
Trimmed
IDD
Q B
BG
EN
@ E
WS
/Ro
om
Source: P. Flatresse, ST, ICICDT17Le
akag
e
Frequency
Performace Boost
Leakagespread
reduction
Source: GF, GTC2017
Source: Sugii ,Low Power El. Appl. 2014
Ne
utr
on
-SE
Rin
FT
/Mb
28
nm
FD
-SO
I
ST65nmBulk
Vendor A45nmBulk
ST45nmBulk
Vendor A28nmBulk
ST28nmBulk
ST28nm
FD-SOISource: ST, Shanghai FDSOI forum, 2015
Best CMOS mmWavewith similar
performance to SiGeradios
Operation at minimum energy point (<0.4V)
4X less process spread
+15% frequency boost
20x Soft Error Rate improvement vs. bulk
![Page 15: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/15.jpg)
FD-SOI ecosystem is getting stronger
SubstratesResearch Technology
& IPIP & Design
ServicesFabless & OEMs
Foundries & IDMs
& Licensees
>100 customer engagements
Tools & EDA
![Page 16: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/16.jpg)
FD-SOI for Automotive
FD-SOI - Reference technology for ADAS level 3 applications
Best power efficiency allowing simpler integration and enhanced reliability
Next generation e-Cockpit solution with full management of car infotainment
![Page 17: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/17.jpg)
FD-SOI for Internet of Things
A game changer technology for better battery life
FD-SOI cuts standard GPS power
consumption by 5 to 10 times
i.MX reference platform by NXP
![Page 18: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/18.jpg)
Platform Versatility
Unique Features
FD-SOI : 3 steps adoption
Platform Versatility: EnergyEfficiency + Performance on Demand
Courtesy of SAMSUNG
Unique Features :
Body Bias Compensation
mmWave CMOS
Radiation immunity
1
2
3
DifferentiationOptions
Differentiation Options: RF, MRAM, ULP
2
![Page 19: The FDSOI history and its future · 2017. 12. 18. · Soitec ensures FD-SOI wafer supply 300mm SOI Soitec Bernin II, France HVM 650 K wafers/y. capacity of which FD-SOI capacity will](https://reader035.vdocuments.site/reader035/viewer/2022070215/6118780d8e39a028672c70df/html5/thumbnails/19.jpg)
FDSOI is at the heart of every day life !
Power efficient & flexible technology with easy Analog /RF integration
Take-Aways
Power efficient & flexible technology with easy Analog /RF integration
Power, Performance not forgetting cost
Engineered substrate brings clear value to device
This is just the beginning…