the effect of microcolumn geometry on the performance of

11
Louisiana Tech University From the SelectedWorks of Adarsh Radadia September 1, 2010 e effect of microcolumn geometry on the performance of micro-gas chromatography columns for chip scale gas analyzers A.D. Radadia, University of Illinois at Urbana–Champaign A. Salehi-Khojin, University of Illinois at Urbana–Champaign R.I. Masel, University of Illinois at Urbana–Champaign M.A. Shannon, University of Illinois at Urbana–Champaign Available at: hps://works.bepress.com/adarsh-radadia/21/

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Louisiana Tech University

From the SelectedWorks of Adarsh Radadia

September 1, 2010

The effect of microcolumn geometry on theperformance of micro-gas chromatographycolumns for chip scale gas analyzersA.D. Radadia, University of Illinois at Urbana–ChampaignA. Salehi-Khojin, University of Illinois at Urbana–ChampaignR.I. Masel, University of Illinois at Urbana–ChampaignM.A. Shannon, University of Illinois at Urbana–Champaign

Available at: https://works.bepress.com/adarsh-radadia/21/

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Please cite this article in press as: A.D. Radadia, et al., The effect of microcolumn geometry on the performance of micro-gas chromatographycolumns for chip scale gas analyzers, Sens. Actuators B: Chem. (2010), doi:10.1016/j.snb.2010.07.002

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1

Contents lists available at ScienceDirect

Sensors and Actuators B: Chemical

journa l homepage: www.e lsev ier .com/ locate /snb

The effect of microcolumn geometry on the performance of micro-gaschromatography columns for chip scale gas analyzers

1

2

A.D. Radadiaa, A. Salehi-Khojina,b, R.I. Masela,∗, M.A. Shannonb3

a Department of Chemical and Biomolecular Engineering, University of Illinois, 600 S, Mathews Ave, Urbana, IL 61801, USA4b Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL 61801, USA5

6

a r t i c l e i n f o7

8

Article history:9

Received 4 February 201010

Received in revised form 4 May 201011

Accepted 2 July 201012

Available online xxx

13

Keywords:14

Silicon GC column15

Micro-GC16

Microcolumns17

High resolution GC18

a b s t r a c t

Many microfabricated gas chromatography (micro-GC) column designs have been reported so far,but it is unclear how microcolumn design affects separation performance in the typical isothermalor temperature-programmed mode of operation. This paper compares the separation performanceof microfabricated serpentine, circular-spiral and square-spiral columns in both modes of operation.Experimentally although all the geometries have similar gas permeability and unretained solute bandbroadening, it is shown that the serpentine columns show higher separation plate numbers (lower bandbroadening) for retained solutes in isothermal mode of operation compared to circular- or square-spiralconfigurations. Also in temperature-programmed mode of operation, the serpentine design yields higherseparation numbers (peak–peak resolution) compared to spiral configurations. The advantage of using aserpentine configuration is clearly evident especially in the velocity range of 15–40 cm/s in either opera-tion modes, and independent of the temperature programming rate in temperature-programmed mode.An exemplary mix of 33 chemicals was used to demonstrate the higher speed and resolution of practicallyrelevant separations on serpentine column.

© 2010 Published by Elsevier B.V.

1. Introduction19

A microfabricated gas chromatograph (micro-GC) utilizes the20

high speed separation of a short microcolumn (<5 m length)21

fabricated on a small silicon or glass substrate to rapidly and22

selectively detect chemicals of interests in a portable form [1–27].23

The microcolumn consists of a long microfluidic channel, which24

has passivated sidewalls and a thin polymeric film, called the25

stationary phase that aids in the separation of gaseous chem-26

icals. At present there are no design guidelines for separation27

column miniaturization clearly identifying how to design a long28

column onto a relatively small substrate. The micro-GC researchers29

at different institutions have been experimenting with micro-30

columns of different configurations. For example, the micro-GC31

researchers at Sandia National Labs used circular-spiral design32

[1,4,18,19,21,24], University of Michigan used square-spiral design33

[5–9,12,13,20,28], University of Illinois, Honeywell, SLS Microtech-34

nology, and Louisiana State University used serpentine designs35

[10,11,14,26,29–31]. Polygonal spiral microcolumns have also been36

proposed by Manz et al. for liquid chromatography on chip [32].37

Although many microcolumn configurations have been proposed,38

∗ Corresponding author. Tel.: +1 217 333 6841.E-mail address: [email protected] (R.I. Masel).

no research work yet published has compared the separation per- 39

formance of differently coiled microcolumns. 40

Previously, the effect of coiling fused silica (FS) capillary 41

columns were studied during capillary column development cycle 42

to reduce the radial mass transfer resistance in the gas phase and 43

hence improve the separation performance [33–37]. A detailed 44

review on this topic is provided by Sumpter and Lee [38]. Chro- 45

matographic measurements are typically characterized by the 46

separation plate height (H) or plate numbers (N). It was found that 47

coiling the FS columns resulted in increased plate height, which 48

resulted in poor separations under practically relevant separation 49

conditions (near optimum linear velocity). Giddings proposed that 50

the “race track effect” caused the increase in plate height for coiled 51

columns [39,40], where “race track effect” was defined to be a result 52

of the difference in path lengths traveled by the molecules on the 53

inner and outer side of a bend with the pressure drop being con- 54

stant. The resulting pressure gradient is greatest for the shorter 55

inside path and hence faster velocities for molecules travelling on 56

the inner side of the bend. However Giddings did not consider sec- 57

ondary flow effects like Dean-flows on plate height. Theoretically 58

secondary flow induces radial mixing and is expected to decrease 59

axial dispersion along with the plate height [41,42]. However the 60

secondary flow when combined with retention at the sidewalls 61

results in slightly higher plate heights and poor separations as 62

shown by Tijssen [34,35,43,44]. A general rule thus formed that 63

0925-4005/$ – see front matter © 2010 Published by Elsevier B.V.doi:10.1016/j.snb.2010.07.002

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temperature programmed
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circular or square spiral configurations.
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configurations,
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(peak-peak
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Lousiana
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and co-workers
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Please cite this article in press as: A.D. Radadia, et al., The effect of microcolumn geometry on the performance of micro-gas chromatographycolumns for chip scale gas analyzers, Sens. Actuators B: Chem. (2010), doi:10.1016/j.snb.2010.07.002

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coiling adversely affected plate height. As stated by Sumpter and64

Lee in their review [38], modern commercial capillary columns are65

coiled around cages 15–20 cm diameters to reduce effects of col-66

umn coiling towards band broadening, and to size the column cages67

small enough to fit into the GC oven. However, GC column miniatur-68

ization requires fabricating a 1–3 m long column onto ∼2–10 sq cm69

substrates, which necessitates the use of small turns or coiling70

diameters (d < 3 cm).71

A serpentine microcolumn configuration consists of straight72

long segments and sharp 180◦ turns, while a circular-spiral consists73

of relatively less sharp turns and no straight segments. A square-74

spiral configuration involves many 90◦ turns and straight length75

segments than a serpentine. The flow pattern in different config-76

urations, and hence the separation performance can be predicted77

using simulations, which is out of the scope of this paper [4]. The78

objective of the work described in this article was to experimentally79

compare the separation results of serpentine, circular-spiral and80

square-spiral microcolumn configurations. In order to make any81

entrance effects small, microcolumn were designed to be 3 m long.82

The microcolumns were tested in the two typical microcolumn83

operating conditions, isothermally and temperature-programmed.84

Temperature-programmed separations are typically carried out to85

improve the peak–peak resolution. The isothermal separation char-86

acteristics of the configurations were compared in terms of the87

number of theoretical plates (N), which is inversely proportional88

to the band broadening. Temperature-programmed separation89

results were compared in terms of separation numbers (TZ), which90

is directly proportional to the peak–peak resolution. The tempera-91

ture programming rate and the carrier flow rate were varied where92

possible.93

We found using the methane injections that there was negli-94

gible difference in the permeability (average gas velocity) of the95

different microfabricated column configurations. The iso-octane96

injections at isothermal conditions showed that serpentine micro-97

columns result in higher number of separation plates compared98

to the spiral configurations. Also the n-alkane mix separation with99

the temperature-programmed conditions showed that using ser-100

pentine microcolumns results in higher separation numbers. We101

believe that the superior separation performance of the serpen-102

tine microcolumns can be attributed to the lower column length103

through which the Dean vortex propagates, and may also partly104

be due to the thinner, even stationary phase coating obtained on105

serpentine microcolumns.106

2. Materials and methods107

2.1. Design and fabrication of microcolumns108

Microcolumn fabrication started with a double side polished109

silicon wafer (4′′ in. diameter, 250 �m thick, 5–20 � cm p-type)110

from Silicon Quest International. The wafer was sputter coated with111

1000 Å thick aluminum on one side. The aluminum layer protected112

the silicon surface from getting damaged during the fabrication113

steps prior to anodic bonding. Shipley SPR220-7 photoresist was114

spin-coated on both sides of the wafer at 3000 rpm. Double side115

lithography was performed to obtain an image of microchannels on116

the aluminum side and fluid transfer holes on the silicon side. The117

chrome mask set for lithography was fabricated by Photo Sciences118

Inc. using a laser pattern generator. Microchannel mask consisted119

of four 3.2 cm × 3.2 cm dyes each filled with 100 �m wide and 3 m120

long microchannel folded in serpentine, circular-spiral, or square-121

spiral configuration. The serpentine microcolumn design consisted122

of 25.9 mm long straight segments and turns of 100 �m mean diam-123

eter. The circular-spiral and square-spiral designs consisted of two124

interlocked spiral channels connected by an S shaped segment125

(having 200 �m inner diameter turns) in the center of the chip. 126

The second mask consisted of 210 �m wide fluid transfer holes 127

for connecting the microchannels from the bottom side. 10 �m 128

wide crosses were designed in the masks to aid the alignment 129

process. Exposed photoresist was developed in MIF327 developer. 130

Overdevelopment with MIF327 was allowed to etch the underlying 131

aluminum layer exposing the silicon surface for reactive ion etch- 132

ing. The patterned photoresist was baked at 140 ◦C for 30 min to 133

withstand the plasma exposure in the reactive ion etching steps. 134

Deep reactive ion etching was used to etch the channel patterns 135

100 �m deep and the access holes through the wafer. The micro- 136

column dyes were cleaned with Shipley Microposit Remover 1165 137

at 120 ◦C followed by an aluminum etching in type A aluminum 138

etchant (Transene company), and a standard clean 1 (SC-1) at 73 ◦C. 139

Pyrex® 7740 glass pieces approximately of the size of microcol- 140

umn dye were cut out from wafers using an IR laser and cleaned 141

using an SC-1 clean procedure. Silicon microcolumns were anodi- 142

cally sealed with the cleaned Pyrex® glass at 400 ◦C with 900 V bias. 143

Two microcolumns of each configuration were fabricated for this 144

study to account for any defects arising in the fabrication process. 145

Fig. 1A–C shows the photographs of the different silicon-Pyrex®146

microcolumn configurations fabricated: serpentine, circular-spiral, 147

and square-spiral. 148

2.2. Microcolumn passivation and stationary phase coating 149

An organosilicon hydride passivation using phenyl- 150

tris(dimethylsiloxy)silane (Ah3P) (Gelest, SIP6826) was performed 151

as previously reported to render the microcolumn walls inert 152

[14]. The OV-5 vinyl gum, which is a 5% polar silicone supplied 153

by Ohio Valley Specialty Company (Marietta, Ohio) was used 154

as the stationary phase. The coating solutions were prepared in 155

hexamethyldisilazane treated 12 × 32 vials obtained from Alltech 156

(#72670). The stationary phase (in the range of 0.05–0.07 g) was 157

transferred to a vial using the closed end of a melting point capillary 158

(Fisher Scientific, 12-141-5). 0.2 �m filtered pentane was injected 159

into the capped vial using a 500 ml gas-tight syringe (Supelco, 160

509485) to produce a 4% (w/v) coating solution. The phase was 161

dissolved by sonicating the vial for 20 min. Dicumyl peroxide 162

(DCP) (Sigma–Aldrich, >99%) in the form of freshly prepared 2% 163

(w/v) toluene solution was added to the coating solution using 164

a 10 �L syringe (Agilent Technologies, 5181-3354) to achieve a 165

concentration of 0.2% (w/w) of the stationary phase. 166

The coating procedure was slightly modified from the previously 167

reported [14]. The ends of the microcolumn were connected to a 168

3 m long FS capillary and a 1/16′′ in. PTFE tubing using Nanoports®169

(Upchurch Scientific, N-125S and N-333S respectively). The FS 170

capillaries used in coating method were bought from Polymicro 171

Technologies (100 �m I.D. and 200 �m O.D., TSP100200). Dur- 172

ing the coating process, Nanoports® were clamped physically and 173

were not attached using the supplied preformed epoxy ring. The 174

coating solution was introduced through the PTFE tubing using 175

a clean 500 �l gas-tight syringe. Mild hand pressure was used 176

to fill the coating solution into the microcolumn and the post- 177

column buffer capillary. The syringe was disconnected when four 178

drops of coating solution left through post-column buffer cap- 179

illary end. The Nanoport® (N-333S) with the PTFE tubing was 180

unclamped and replaced by another Nanoport® (N-125S) connect- 181

ing a 30 cm long pre-column buffer capillary. The latter capillary 182

was attached to a GC inlet and the coating solution was driven out 183

using 0.8 psi helium pressure at the GC inlet. When the coating 184

solution exited the post-column buffer capillary, the solvent from 185

the coated stationary phase was removed by flowing helium at 186

40 psi inlet pressure for 10 min. Subsequently, the helium pressure 187

was reduced to 0.8 psi and the stationary phase was cross-linked 188

and conditioned by heating the microcolumn to 160 ◦C overnight. 189

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circular spiral
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square spiral
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circular spiral and square spiral
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configurations
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peak-peak
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peak-peak
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5-20ohms-cm
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cm x 3.2cm dies
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dies
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die
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circular spiral,
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square spiral.
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(Sigma Aldrich,
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technologies

Please cite this article in press as: A.D. Radadia, et al., The effect of microcolumn geometry on the performance of micro-gas chromatographycolumns for chip scale gas analyzers, Sens. Actuators B: Chem. (2010), doi:10.1016/j.snb.2010.07.002

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Fig. 1. Photograph showing three different silicon-Pyrex® microcolumn configura-tions tested in this research: circular-spiral with 75 �m distance between channels(A), square-spiral (B), and serpentine with 100 �m separation distance betweenchannels (C). Each microcolumn shown is 3 m long and 100 �m × 100 �m in cross-section. Fused silica capillaries (200 �m O.D., 100 �m I.D.) were attached to themicrocolumn chip via Nanoports® (D).

We find that the curing process of the stationary phase creates 190

hydrogen bond forming surface active sites of acidic nature and 191

so post-coating pinacolyl methylphosphonic acid (PMP) passiva- 192

tion treatments were performed as previously reported [14]. The 193

microcolumn was reconditioned at 200 ◦C with 40 psi inlet pres- 194

sure for 4 h. The completion of reconditioning process was checked 195

with the presence of a stable FID baseline. The connecting FS cap- 196

illaries were replaced with commercial passivated FS capillaries 197

(Restek, 100 �m I.D., 200 �m O.D., and 25 cm long, IP deactivated), 198

and the Nanoports® could be epoxied prior to testing separations 199

in microcolumns. 200

2.3. Microcolumn separation performance characterization 201

An Agilent 6893N GC/FID-MS equipped with 7683B autosam- 202

pler was used for all the separations. Fig. 1D shows the packaged 203

microcolumn with Nanoports® connecting the Restek (#560292) 204

deactivated guard capillaries (I.D. 100 �m, O.D. 200 �m) to the 205

microcolumn. Packaged microcolumns were placed in the GC oven 206

for testing and connected to the split inlet and FID using deac- 207

tivated FS capillary. Hydrogen was used as carrier gas in all the 208

tests. Test mixtures were prepared using puriss-grade chemicals 209

(GC standards) from Aldrich (Milwaukee, WI). The autosampler was 210

operated in fast injection mode; injections on just the guard cap- 211

illaries resulted in a methane FID peak width of 0.01 s (FWHM) at 212

all pressures. The effect of Nanoports on the column performance 213

was not evaluated. 214

2.3.1. Isothermal microcolumn tests 215

First, the packaged uncoated microcolumns were compared 216

for their flow permeability by measuring the average carrier gas 217

velocity at different inlet pressures. The average carrier gas veloc- 218

ity was calculated using the methane retention time and the 219

known length of the microcolumn plus the connection capillar- 220

ies. Secondly, peak broadening in microcolumn configurations was 221

studied using methane as the unretained tracer and iso-octane 222

as the retained tracer. We did not expect to see a difference in 223

the methane peak broadening obtained on the different configura- 224

tion due to the high diffusivity of methane in hydrogen. Uncoated 225

microcolumns were used for isothermal tests. Using iso-octane 226

as a tracer on uncoated microcolumns below iso-octane’s boil- 227

ing point (98–99 ◦C) allowed simulating chromatography process 228

with uniformly distributed stationary phase. In either case, 1 �L of 229

headspace vapor was injected with a split of 500:1 (injector tem- 230

perature 250 ◦C); the microcolumns were held at 40 ◦C in the GC 231

oven. The inlet pressure of the carrier gas was varied from 0.7 to 232

34 psi. The resulting chromatograms were analyzed using Peakfit 233

software (v 4.12) to calculate the retention time, peak width at half 234

maximum, and number of theoretical plates (N). The number of 235

theoretical plates was calculated by, 236

N = 5.54(

tR

Wh

)2(1) 237

where tR is the retention time, and Wh is the full width at half 238

maximum of the methane or iso-octane peak. Here we use N, the 239

total number of theoretical plates instead of effective number of 240

theoretical plates. 241

2.3.2. Temperature-programmed tests 242

The peak–peak resolutions in an n-alkane separation were 243

used to compare the temperature-programmed separation perfor- 244

mances of different microcolumn geometries. One microcolumn of 245

each configuration was used. The concept of separation number 246

(TZ, originally known as Trennzahl numbers) introduced by Kaiser 247

was used to enumerate the peak–peak resolution. The separation 248

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circular spiral with 75 μ
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square spiral
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3 m long and 100 μm x 100 μ
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(200 μm O.D., 100 μ
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isooctane
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Hydrogen.
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(98-99
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–34
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(1)
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peak-peak
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peak-peak

Please cite this article in press as: A.D. Radadia, et al., The effect of microcolumn geometry on the performance of micro-gas chromatographycolumns for chip scale gas analyzers, Sens. Actuators B: Chem. (2010), doi:10.1016/j.snb.2010.07.002

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numbers were calculated by,249

TZ = tR(z+1) − tRz

Whz + Wh(z+1)− 1 (2)250

where, z and z + 1 refer to two consecutive members of the n-alkane251

homologous series, tR is the retention time, and wh is the full width252

at half maximum of the n-alkane peak. Theoretically, TZ-values give253

the number of peaks, which can be resolved between the two main254

peaks, having a 4.7�-resolution between consecutive peaks (� is255

standard deviation).256

The n-alkane mixture was prepared by diluting 10 �L of equal257

weight mixture of n-alkanes (n-C7 to n-C13) in 1 ml of methylene258

chloride. 1 �L of the latter mix was injected with a split of 500:1259

(injector temperature 250 ◦C). The starting and final temperatures260

were 30 ◦C and 140 ◦C. A range of inlet gas pressures and temper-261

ature ramp rates were used to confirm the consistency in better262

performance of one channel configuration over another over a wide263

operating range. The effect of average carrier gas velocity was stud-264

ied in the range of 5–65 cm/s while keeping the temperature ramp265

rate constant at 10 ◦C/min. The effect of temperature ramp rate266

was studied using three different ramp rates, 10 ◦C/min, 25 ◦C/min,267

and 40 ◦C/min, keeping the average carrier gas velocity constant at268

21 cm/s.269

2.3.3. Applicability of results to real sample separations270

A 33 component multifunctional test mixture was also formu-271

lated to demonstrate how serpentine microcolumns give better272

separation than spiral microcolumns. The components are listed in273

Table 3 and are amongst commonly found air constituents or EPA274

listed air toxins. The mix was formulated by diluting 10 �L of equal275

weight mixture in 1 ml of methylene chloride. Chromatograms276

were produced by injecting 1 �L of the liquid mix with a split of277

500:1 (injector temperature 250 ◦C). The starting and final tem-278

perature was set to 30 ◦C and 140 ◦C, ramp rate of 10 ◦C/min was279

used. Hydrogen was used as the carrier gas and the average carrier280

gas velocity was set to 40 cm/s. Resolution (Rs) between peaks was281

calculated by,282

Rs = tR(z+1) − tRz

2(Wz + Wz+1)(3)283

where, z and z + 1 refer to two consecutive peaks used to calcu-284

late resolution, tR is the retention time, and W is the full width at285

peak base. The chromatogram was processed in Peakfit software to286

calculate the peak resolutions.287

3. Results and discussion288

3.1. Isothermals microcolumn tests289

First we want to show that the microcolumn fabrication we290

developed was repeatable and created microchannels of similar291

gas permeability. This fact is of high concern because a number of292

defects like silicon micrograss and particle-contamination-caused293

partial channel blockages can arise during fabrication. Fig. 2 shows294

the plot of average carrier gas velocity versus the inlet gas pressure295

on the different microcolumn configurations. The data points repre-296

sent the average reading from two chips of each configuration. The297

error bars in the plots, which are difficult to visualize (because <1%)298

show that similar velocity was obtained on microcolumns with299

similar configuration. Notice that the average velocities obtained on300

the different microcolumn configurations was also found to be sim-301

ilar (<6%) in the range of inlet pressure tested. This proves that the302

microcolumns with different configurations had similar gas perme-303

ability and we could use constant inlet pressure instead of constant304

average gas velocity while comparing the performances.305

Fig. 2. Average carrier gas velocity versus inlet pressure for the three differentuncoated microcolumn configurations: serpentine, circular-spiral, and square-spiral.

Secondly we tested for the band broadening of methane and 306

iso-octane pulses in the different microcolumn configurations. 307

Methane was used as the unretained tracer, and iso-octane was 308

used as the tracer that gets adsorbed on the microcolumn wall. 309

The band broadening of the injected pulse is inversely propor- 310

tional to what is chromatographically measured, the number of 311

theoretical plates generated per meter (N). Figs. 3 and 4 show the 312

N-value for the methane and iso-octane elutions respectively, on 313

different microcolumn configurations as a function of inlet pres- 314

sure. Due to the high diffusivity of methane in hydrogen (carrier 315

gas) we expect the molecular diffusivity to be the main cause of 316

the band broadening in the case of methane and any difference in 317

N-value arising due to the microcolumn geometry to appear minis- 318

cule. While in the case of iso-octane, we expect the comparatively 319

low diffusivity of iso-octane to interfere less, and the retention 320

at the sidewalls to amplify the difference in N-value arising due 321

to the microcolumn geometries. Fig. 3 shows that as expected 322

the serpentine, circular-spiral, and square-spiral microcolumns 323

gave comparable number (within 12%) of theoretical plates in the 324

Fig. 3. Number of theoretical plates generated for unretained peak (methane) elu-tion versus inlet pressure for the different uncoated microcolumn configurations.Hydrogen was used as the carrier gas. The error bars indicate the deviation in resultsfrom the set of chips of each microcolumn configuration.

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values
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peaks which
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circular spiral, and square spiral.
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square
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Hydrogen
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circular
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square spiral configurations. 1

Please cite this article in press as: A.D. Radadia, et al., The effect of microcolumn geometry on the performance of micro-gas chromatographycolumns for chip scale gas analyzers, Sens. Actuators B: Chem. (2010), doi:10.1016/j.snb.2010.07.002

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Fig. 4. Plot of theoretical plate height for slightly retained solute (iso-octane at 40 ◦C)versus inlet pressure with different uncoated microcolumn configurations. Hydro-gen was used as the carrier gas. 1 �L of headspace vapor was injected with a split of500:1 (injector temperature 250 ◦C); the microcolumn was held at 40 ◦C. The pointsrepresent the average value of theoretical plates obtained from two different micro-column chips of each configuration; the error bars indicate the deviation in resultswithin each configuration.

methane band-broadening test. To enumerate, at 15 psi inlet pres-325

sure the number of theoretical plates per meter for serpentine326

and circular-spiral microcolumns were approximately 11,200 and327

11,400 respectively, while square-spiral microcolumns resulted in328

approximately 10,100 plates per meter. In the case of all micro-329

column geometries, the theoretical plate numbers increase with330

the inlet pressure and then plateaus after 30 psi. The deviation331

in N-values for the square-spiral microcolumns were found to be332

higher (0.5–38%) compared to those on serpentine and circular-333

spiral microcolumns (0.3–12%). Overall there was no significant334

difference between the methane elution N-values on the different335

microcolumn configurations as expected given the high diffusivity336

of methane.337

In contrast, there was a significant difference in the N-values338

obtained from iso-octane peak elutions. Fig. 4 shows that ser-339

pentine microcolumns gave higher N-values compared to the340

spiral designs at or above 8 psi inlet pressures. To enumerate,341

at 15 psi inlet pressure, the serpentine microcolumns result in342

approximately 18,700 plates per meter while circular-spiral and343

square-spiral microcolumns result in approximately 11,000 and344

10,500 plates per meter respectively. In the case of spiral config-345

urations, the N-value increases initially with an increase in inlet346

pressure and then plateaus at ∼11,000 plates per meter after reach-347

ing 15 psi inlet pressure, whereas for serpentine configurations, the348

N-value gradually increases with the inlet pressure up to ∼19,000349

plates per meter and then at about 20 psi onwards N-value grad-350

ually starts decreasing. The difference between the square- and351

circular-spiral configurations was not resolvable due to the higher352

uncertainty in square-spiral results. The maximum deviations in353

plate number per meter for each configuration were nearly 1800,354

1700, and 3000 plates for serpentine, circular-spiral and square-355

spiral designs respectively.356

One might wonder if this result was associated with difficulties357

with making connections to square columns. Theoretically, if there358

was a problem with the connections, a term in the Golay equa-359

tion called the extra-column dispersion should increase. According360

to the Golay equation, an increase in the extra-column dispersion361

would cause the number of theoretical plates to decrease at higher362

pressures. Notice that the serpentine shows a downward trend363

at high pressures in Fig. 4. However, no such downward trend is364

Table 1Calculated values of the dispersion, M, for the columns tested here.

M for n = 1 M for n = 0.5

Spiral 1.6 × 10−4 11.5 × 10−4

Square-spiral 1.4 × 10−4 1.7 × 10−4

Serpentine 1.2 × 10−4 1.2 × 10−4

observed in the spiral and square-spiral columns. Therefore, the 365

extra-column dispersion must be smaller for the spiral and square- 366

spiral columns than for the serpentines. Therefore, the difference 367

in the separation must be intrinsic to the columns and not associ- 368

ated with connections or other extra-column artifacts. These results 369

have been confirmed on two sets of microcolumns. 370

The better performance of serpentine microcolumns could be 371

reasoned by the facts that: (1) the serpentine configuration pro- 372

duces hydro-dynamically more favorable flow for the separation, 373

and (2) the serpentine configuration allows thinner and more uni- 374

form coating of the stationary phase film. Given that the iso-octane 375

was used below its boiling point (98–99 ◦C) on microcolumns 376

without stationary phase, it allowed us to carry out the chro- 377

matography process with uniformly distributed stationary phase 378

conditions. This implies that the higher N-values on the iso-octane 379

tracer test results from the serpentine microcolumns being hydro- 380

dynamically more favorable for achieving lower peak broadening. 381

We can speculate why this occurs. Recall, that during the flow 382

around a turn, the gas undergoes a centrifugal force proportional 383

to (W/R) where W is the width of the column and R is the radius 384

of curvature of the turn. That produces dispersion roughly pro- 385

portional to (W/R)n where n ∼ 0.5–1 [34]. Consequently, to some 386

approximation, we can get a measure of the dispersion via, 387

M =∫ L

0(W/R)n dL

L(4) 388

where, M is a measure of the amount of dispersion, and L is the 389

length of the column. We have computed M for the three geome- 390

tries in our experiments with n = 0.5 and 1 and Table 1 shows 391

the results. Notice that M is smaller for the serpentines than for 392

the other geometries. The serpentine column has very sharp turns 393

(180◦) but there are only 114 of them, while the square-spiral 394

design has 268 90◦-turns i.e. about 2.5 times as many turns as the 395

serpentine design. Evidently, the larger number of turns leads to 396

higher dispersion, even though each individual turn has a smaller 397

effect on the dispersion. 398

3.2. Temperature-programmed microcolumn tests 399

Fig. 5 shows temperature-programmed separation chro- 400

matograms of n-C7 to n-C13 mixture on the coated microcolumns 401

of different configurations at two different carrier gas velocities, 402

26 cm/s (A) and 40 cm/s (B). Peak shapes were good on all the three 403

microcolumns with minimal signs of tailing and no artifacts. We 404

believe the slight tailing in all peaks occurs due to dead volume 405

that exist at the Nanoport connections; however tailing accounts 406

for less 5% of total peak area, and does not significantly affect our 407

findings. The n-alkane peaks were seen to elute faster on the ser- 408

pentine microcolumn followed by the circular-spiral microcolumn; 409

however the difference between the circular- and square-spiral 410

configurations is less compared to serpentine and circular-spiral 411

microcolumns. To enumerate, at carrier gas velocity of 26 cm/s 412

(Fig. 5A) the C11 peak elutes at 240.6 s on the serpentine micro- 413

column compared to 249.3 s and 251.04 s on the circular- and 414

square-spiral microcolumns respectively. A similar trend is also 415

observed at carrier gas velocity of 40 cm/s (Fig. 5B); the C11 peak 416

elutes at 193.74 s, 201.78 s, and 204.3 s on the serpentine, circular- 417

spiral, and square-spiral configurations. A more detailed analysis 418

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circular spiral
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square spiral
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values
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square spiral
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(0.5-38%)
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circular spiral
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(0.3-12%).
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circular spiral and square spiral
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increase
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square and circular spiral configurations
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the
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square spiral
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deviation in
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circular spiral and square spiral
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Square spiral
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square spiral
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extra column
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square spiral
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set of
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1)
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hydrodynamically
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2)
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(98-99
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w/R) where w
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w/R)n where n∼0.5-1
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(4)M=∫0L(WR)nd
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square spiral
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Temperature programmed
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circular spiral
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circular and square spiral configurations
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(last
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circular spiral
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circular and square spiral
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Similar
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circular
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square spiral.Fig. 3Number of theoretical

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Fig. 5. Temperature-programmed chromatograms of a n-C5 to n-C13 mixture on 3-m-long microcolumns of serpentine, circular-spiral, and square-spiral configurations. 1 �Lof the liquid mix was injected with a split of 500:1 (injector temperature 250 ◦C). The data shown corresponds to experiments using an average carrier gas velocity of 26 cm/s(A) and 40 cm/s (B). A temperature ramp rate of 10 ◦C/min was used with the starting and final temperature of 30 ◦C and 140 ◦C, respectively.

was carried out for each of the configurations by calculating the419

separation numbers (TZ) for the consecutive peak pairs at different420

inlet pressures. TZ was chosen as a measure because it is a widely421

accepted term that is applied to temperature-programmed column422

analysis of homologous series elution, here the n-alkanes.423

Fig. 6 shows the effect of carrier gas inlet pressure on TZ-value424

for the C7–C8, C8–C9, C9–C10, and C10–C11 alkane pair elution on425

the different microcolumn configurations. The TZ in all microcol-426

umn designs followed a commonly reported trend; the values were427

found to increase rapidly with the inlet pressure until maxima428

was reached and decreased slowly. Table 2 lists the maximum TZ429

obtained and its corresponding inlet pressure on the tested micro-430

column configurations with the different alkane pairs. Serpentine431

microcolumns were found to achieve higher TZ in the inlet pres-432

sure range of 6–16 psi followed by the circular-spiral and then433

the square-spiral designs. We also found that serpentine micro-434

Table 2Maximum separation numbers achieved and corresponding inlet pressure (psi)required on the different column configurations for the various alkane pairs. (Valuesin ( ) indicate the corresponding carrier gas inlet pressure in psi).

Configuration\alkane pair C7/C8 C8/C9 C9/C10 C10/C11

Serpentine 7.33 (10) 9.65 (10) 10.56 (16) 10.56 (16)Circular-spiral 6.7 (12) 8.34 (12) 9.8 (16) 10.12 (16)Square-spiral 5.9 (16) 7.54 (16) 8.74 (16) 9.08 (16)

column achieved its maximum TZ at lower inlet pressure of 10 psi 435

for the C7–C8 and C8–C9 alkane pairs compared to 12 and 16 psi for 436

the circular- and square-spiral configurations respectively. Serpen- 437

tine microcolumns resulted in higher separation numbers than the 438

circular-spiral microcolumn in the inlet pressure range of 6–16 psi 439

for four alkane pairs compared. To illustrate, at 10 psi the TZ-values 440

Fig. 6. Separation number (TZ) versus inlet pressure for four different alkane pairs on the three microcolumn configurations. The starting and final temperatures were 30 ◦Cand 140 ◦C respectively; temperature ramp rate of 10 ◦C/min was used.

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circular spiral, and square spiral
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square
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26 cm/s (A) and 40 cm/s
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-C8, C8-C9, C9-C10, and C10
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circular spiral
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square spiral
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Configuration\Alkane
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Circular spiral
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Square spiral
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10 psi for the C7-C8 and C8-
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circular and square spiral configurations
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at
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10 psi the TZ values for the

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Fig. 7. A plot of separation numbers (TZ) for n-alkane pairs versus the retentiontimes for the heavier alkane of the pair. Data was extracted from the temperature-programmed separation chromatograms of n-C5 to n-C12 mixture at three differentramp rates for the three column configurations. The starting and final temperaturesfor the separation were 30 ◦C and 140 ◦C respectively. The numbers on the plotsrepresent the temperature ramp rate used for the separation.

for the C9–C10 pair were found to be 10.47, 8.87 and, 7.58 on the441

serpentine, circular-spiral and square-spiral configurations respec-442

tively. Higher TZ-values imply higher resolution and hence higher443

peak capacity. Serpentines overall resulted in higher TZ-values,444

hence promising higher resolution or higher peak capacity. The445

results were tested in the inlet pressure range of 6–16 psi, which446

translates to 32–82 cm/s with hydrogen as the carrier gas in our447

case. At lower velocities the difference is negligible because the448

molecular dispersion is the major cause of band broadening. At449

higher velocities the extra band broadening becomes a major con-450

tributor to the band broadening compared to the hydrodynamics451

or the diffusion resistance offered by the stationary phase (majorly452

due to phase thickness) and hence the differences due to channel453

configurations disappear.454

Fig. 7 shows the effect of temperature ramp rates (10, 20,455

and 40 ◦C/min) on the TZ-value for the different alkane pairs456

separated on different microcolumn configurations. Serpentine457

microcolumns resulted in higher separation numbers for each458

peak pair compared to the spiral configurations in all the459

three temperature-programmed rate tests. It was found that the460

circular-spiral microcolumns gave higher separation numbers than461

square-spiral microcolumn at 25 and 40 ◦C/min, while square-462

spiral microcolumns resulted in higher separation numbers at 463

10 ◦C/min. To enumerate, the separation numbers for C9/C10 pair 464

for the circular-spiral and square-spiral were calculated to be 6.87 465

and 6.06 at 10 ◦C/min, 5.87 and 7.18 at 25 ◦C/min, and 6.19 and 6.65 466

at 40 ◦C/min. The X-axis of the plots indicates the elution times for 467

the heavier alkane of the pair. The elution times for the alkane pairs 468

were also less on the serpentine microcolumns compared to spi- 469

ral configurations at all temperature ramp rates and the difference 470

was more apparent with the heavier alkanes. This delayed elution 471

on the spiral columns may be attributed to the slightly thicker sta- 472

tionary phase coatings compared to serpentine columns. The higher 473

TZ-values obtained using serpentine columns may be collectively 474

due to the lower hydrodynamic dispersion and thinner stationary 475

phase deposition compared to spiral columns. We believe major 476

degradation in performance of circular- and square-spiral columns 477

originates in the central region of the spiral where there is large 478

density of turns leading to higher effect of centrifugal force. Large 479

density of turns also implies overall thicker stationary phase films. 480

In the central regions, both the circular- and the square-spiral col- 481

umn seem to be equivalent. That explains why these two columns 482

Table 3Separation data for the temperature-programmed (NR = not resolved). Q1

No. Compound Resolution

Serpentine Circular-spiral Square-spiral

1 Benzene2 Heptane3 3-Pentanone4 Toluene5 Octane6 2-Hexanone7 Chlorobenzene8 Ethylbenzene9 m-Xylene10 Styrene 1.10 0.64 0.97

0.52 0.88 0.351.65 1.08 1.480.43 0.56 0.311.37 1.54 1.171.48 1.36 1.312.06 1.85 1.810.71 NR 0.670.56 NR 0.511.85 1.30 1.613.55 2.75 3.082.20 1.47 1.881.98 1.21 1.702.35 2.11 1.972.02 NR NR0.35 NR NR

11 Nonane12 1,4-Dichlorobutane13 �-Pinene14 1-Bromohexane15 3-Chlorotoluene16 1,3,5-Trimethylbenzene17 1,2,4-Trimethylbenzene18 1,3-Dichlorobenzene19 Decane20 Limonene21 1-Chlorooctane22 Terpinolene23 Undecane24 1,6-Dichlorohexane25 2-Ethoxyphenol26 Naphthalene27 4-Decanone28 Dodecane29 2-Decanone30 6-Undecanone31 Tridecane32 Carvacrol

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psi which
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square spiral
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in all the three temperature-programmed
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TZ values
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circular and
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circular and
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temperature programmed. (NR = not
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á-Pinene
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Data for temperature-programmed separation. (Values are with respect to the preceding peak, NR= not resolved)
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This Table has to be changed to reflect values correctly. Please see table 3 in attached documentation.

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Fig. 8. Chromatograms showing temperature-programmed separation of the 33 component mix (described in Table 1) obtained on the three microcolumn configurations.1 �L liquid mixture was injected with a split of 500:1 (injector temperature of 250 ◦C). The starting and final temperature of 30 ◦C and 140 ◦C was used; the temperatureramp rate was set to 10 ◦C/min. Hydrogen was used as the carrier gas; the average carrier gas velocity was set to 40 cm/s.

have similar performance. In other words, the serpentine geometry483

is the optimum to obtain long straight sections that perform best484

for micro-GC.485

3.3. Applicability of results to real sample separations486

Fig. 8 shows the temperature-programmed separation of the487

33 component mix on the three different microcolumn configura-488

tions. The peaks eluted faster (last peak at 360.6 s) on the serpentine489

design compared to the spiral configurations (last peak at 393.6 s490

and 394.2 s for the circular- and square-spiral respectively) under491

the same operating conditions. Peaks 6 and 25 corresponding to492

2-hexanone and 2-ethoxyphenol respectively showed a different493

elution sequence on the three microcolumn configurations. The 2-494

hexanone peak (6) elutes at 36.6 s on the serpentine microcolumn495

as a distinct peak between the octane (5) and chlorobenzene (7)496

peaks at 32.52 s and 42.96 s; while peak 6 co-elutes with peak 8497

on the circular-spiral microcolumn and with peak 5 on the square-498

spiral microcolumn. The 2-ethoxyphenol peak (25) elutes at 3.89 s499

on the serpentine microcolumn, just before the naphthalene peak500

(26); while peak 25 elutes irresolvably at the tailing end of the501

peak 26 on the circular-spiral microcolumn and co-elutes with502

peak 26 on the square-spiral microcolumn. Peak tailing was seen503

for all microchip configurations and occurs due to the dead vol-504

umes at the capillary connections, and in case of severe tailing due505

to presence of active sites that exist in all the microchip designs506

[14]. Peak resolution analysis was performed on peaks 10–26 and507

reported in Table 3. The resolution between peaks was found to508

be higher on the serpentine microcolumn compared to the spiral 509

microcolumn configurations except for peak pairs 11–12, 13–14, 510

and 14–15, where the circular microcolumn configuration resulted 511

in higher resolution. Amongst the spiral configurations the circular- 512

spiral configuration resulted in higher resolution between peaks 513

compared to square-spiral microcolumns. 514

4. Conclusions 515

The results in this article show that channel configurations 516

do play an important role in microcolumn separation perfor- 517

mance including in temperature-programmed mode. We observe 518

that serpentine columns result in better separation characteristics, 519

which can be attributed to the more favorable hydrodynamic flow. 520

Isothermal methane and iso-octane injection results presented in 521

the article show that although not a major difference appears in 522

the permeability of the serpentine and the spiral configurations, 523

the serpentine configuration results in higher number of theoreti- 524

cal plates per meter compared to square- or circular-spiral designs. 525

The configurations were found to affect the performance the most 526

when the velocity with hydrogen as carrier gas is between 32 and 527

82 cm/s. The temperature programming rate does not affect the fact 528

that serpentine designs perform better than the spirals. Application 529

of the findings of this work implies that microcolumns should be 530

designed in serpentine configuration to obtain higher number of 531

theoretical plates for isothermal separations and higher separation 532

numbers for temperature-programmed separations. 533

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respectively. Serpentine microcolumns
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circular and square spiral
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circular spiral
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square spiral
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circular spiral
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square spiral
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configurations. In order to make any entrance
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was not resolvable due to
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square spiral
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configurations. Also the n-alkane mix separation
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square or circular spiral
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temperature programmed

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Acknowledgement534

This work was supported financially by the Defense Advanced535

Research Projects Agency (DARPA) under U.S. Air Force grant536

FA8650-04-1-7121. Any opinions, findings, and conclusions or537

recommendations expressed in this manuscript are those of the538

authors and do not necessarily reflect the views of the Defense539

Advanced Projects Research Agency, or the U.S. Air Force.540

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Biographies 671

A.D. Radadia received a PhD in Chemical and Biomolecular Engineering from the 672

University of Illinois in 2009. His PhD work included defining design principles 673

for microfabricated gas chromatography columns. Currently he is a post-doctoral 674

research associate with the Micro and Nanotechnology Labs at Illinois. 675

A. Salehi-Khojin received PhD degree in Mechanical Engineering from Clemson 676

University, in 2008. He is currently a Post Doctorate Research Associate with the 677

Department of Chemical and Biomolecular Engineering and Department of Mechan- 678

ical Science and Engineering, University of Illinois at Urbana–Champaign, Urbana, 679

working on MEMS based chemical sensors for multi-component gas analysis. During 680

his PhD, he also developed new microstructure based approaches for low dimen- 681

sional material characterization and ultra small mass detection. 682

R.I. Masel received a PhD in Chemical Engineering from UC Berkeley. He is currently 683

a professor of Chemical and Biomolecular Engineering at the University of Illinois 684

since 1978 and hold affiliations with the Department of Mechanical Science and 685

Engineering as well as Electrical and Computer Engineering. His current field of 686

research is in three areas, fuel cells, sensors, and MEMS. 687

M.A. Shannon received a PhD in Mechanical Engineering from UC Berkeley. He 688

is currently a professor of Mechanical Science and Engineering at the University 689

of Illinois since 1994 and an affiliate of the Beckman Institute for Advanced Sci- 690

ence and Technology with appointments in Electrical and Computer Engineering as 691

well as Bioengineering. His current field of research is MEMS and microfabrication 692

technologies, including the fabrication of biosensors. 693

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