tcad: suprem,piscessuprem, piscesbandi.cbnu.ac.kr/~ysk/devnot6.pdf · 2011-04-10 · tcad:...
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TCAD: SUPREM, PISCESTCAD SUPREM, PISCES
김 영 석
충북대학교 전자정보대학
2012.9.1
E il ki @ b kEmail: [email protected]
전자정보대학 김영석 1
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TCADTCAD(Technology Computer Aided Design, Technology CAD)
Electronic design automation
Process CAD
M d l t (diff i I/I) > Si l t d iModels process steps (diffusion, I/I) => Simulates device structure (junction depth, doping profiles), e.g., SUPREM
Device CAD
Models devices based on fundamental physics (mobilities, doping profiles) => Simulates device behavior, e.g., PISCES
Ci it CADCircuit CAD
Compact Modeling of the device (not based on fundamental physics) => Simulates circuit behavior, e.g., SPICEp
전자정보대학 김영석 2
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TCAD
From WikiDFM: Design For Manufacturing PSM: Phase Shift Masking
전자정보대학 김영석 3
DFM: Design For Manufacturing, PSM: Phase Shift MaskingCMP: Chemical Mechanical Planarization, STI: Shallow Trench Isolation
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TCAD Work Flow
전자정보대학 김영석 4
http://www3.ntu.edu.sg/eee/eee6/LectureNotes/E425/index.htm
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Process Simulation
전자정보대학 김영석 5
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Process Simulation
ModelsInput- Grid Generation
OutputS / h- Diffusion
- OxidationI l t ti
- Grid Generation- Mask Definition- Structure Initialization
- Structure/Mesh- Doping profiles
Junction Depths- Implantation- Deposition/masking
- Process Step Spec.- Junction Depths
/masking/etching
전자정보대학 김영석 6
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Process SimulatorsProcess flow simulators are tools which simulate the full semiconductor manufacturing flow
Process Simulators
SUPREM3: 1-D Standford UnivSUPREM3: 1-D, Standford Univ.
SUPREM4: 2-D
FEDSS: IBM
PROPHET: AT&T
DIOS: ISE (Swiss)
TSUPREM4: commertial, based on SUPREM4
TAURUS-PROCESS
ATHENA: commertial based on SUPREM4ATHENA: commertial, based on SUPREM4
FLOOPS: U. of Florida
Equipment Simulators
ILLUM2D/3D: the Institute for Microelectronics at the Technical University of Vienna, lithography
SPLAT/SAMPLE2D/3D PROLITH SOLID E ACESSPLAT/SAMPLE2D/3D, PROLITH, SOLID E, ACES
전자정보대학 김영석 7
http://www.iue.tuwien.ac.at/phd/minixhofer/node4.html
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Summary of NMOS Process Flow
전자정보대학 김영석 8
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TCAD InputLayout
P C ditiProcess Conditions
Diffusion: Temp., Pressure, Time, Flow Rates
Oxidation: Temp. Ramps, Gas RampsOxidation Temp. Ramps, Gas Ramps
Ion Implantation: Dose, Energy, Tilt, Revolving, Beam Div., Ionization Level
전자정보대학 김영석 9
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NMOS Process Simulations with TSUPREM4
Mesh Generations
전자정보대학 김영석 10
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NMOS Process Simulations with TSUPREM4
Oxidation
전자정보대학 김영석 11
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NMOS Process Simulations with TSUPREM4
Nitride Deposition p s
전자정보대학 김영석 12
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NMOS Process Simulations with TSUPREM4
Nitride Etch
전자정보대학 김영석 13
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NMOS Process Simulations with TSUPREM4
Field Oxidation
전자정보대학 김영석 14
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NMOS Process Simulations with TSUPREM4
Nitride Remove
전자정보대학 김영석 15
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NMOS Process Simulations with TSUPREM4
Field Implant Profiles p s
전자정보대학 김영석 16
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NMOS Process Simulations with TSUPREM4
VTH Adjust Implant Profiles j s p s
전자정보대학 김영석 17
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NMOS Process Simulations with TSUPREM4
Before Gate Oxidation
전자정보대학 김영석 18
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NMOS Process Simulations with TSUPREM4
Gate Oxidation
전자정보대학 김영석 19
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NMOS Process Simulations with TSUPREM4
Polysilicon Gate Depositionys p s
전자정보대학 김영석 20
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NMOS Process Simulations with TSUPREM4
Gate Poly Etch y
전자정보대학 김영석 21
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NMOS Process Simulations with TSUPREM4
LDD and S/D Implant p
전자정보대학 김영석 22
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NMOS Process Simulations with TSUPREM4
LDD Spacer Oxide Etch p
전자정보대학 김영석 23
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NMOS Process Simulations with TSUPREM4
Metal Etch
전자정보대학 김영석 24
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Device Simulation
전자정보대학 김영석 25
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Device Simulation
Basic Eqs.i i ’
Input- Structure/Mesh
OutputS / h- Poission’s eq.
- Continuity eq.Drift Diffusion eq
- Structure/Mesh- Doping Profiles- Structure Initialization
- Structure/Mesh- Doping Profiles
Junction Depths- Drift-Diffusion eq.Models- Rec-Gen
- Process Step Spec.- Junction Depths
- Mobility- F-D, Boltzmann
전자정보대학 김영석 26
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Device SimulatorsGeneric Device Simulators
PISCES 2ET: Standford Univ.
FIELDAY
PADREPADRE
MINIMOS-NT
MEDICI: based on PISCESMEDICI: based on PISCES
DESSIS
ATLAS
FLOODS
Specialized Device Simulators
MINIMOS: f MOSFETMINIMOS: for MOSFET
PISCES: for MOSFET, Standford Univ.
SEQUOIASEQUOIA
BIPOLE: for Bipolar
전자정보대학 김영석 27
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NMOS Device Simulations with MEDICI
Initial Grid
전자정보대학 김영석 28
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NMOS Device Simulations with MEDICI
Doping Regridp g g
전자정보대학 김영석 29
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NMOS Device Simulations with MEDICI
Potential Regrid g
전자정보대학 김영석 30
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NMOS Device Simulations with MEDICI
Impurity Profilesp y s
전자정보대학 김영석 31
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NMOS Device Simulations with MEDICI
Impurity Contoursp y s
전자정보대학 김영석 32
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NMOS Device Simulations with MEDICI
Gate Characteristics s s
전자정보대학 김영석 33
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NMOS Device Simulations with MEDICI
Drain Characteristics s s
전자정보대학 김영석 34
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NMOS Device Simulations with MEDICI
Drain Characteristics: Potential Contours s s s
전자정보대학 김영석 35
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NMOS Device Simulations with MEDICI
Substrate Currents
전자정보대학 김영석 36
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NMOS Device Simulations with MEDICI
Gate Current
전자정보대학 김영석 37
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NMOS Device Simulations with MEDICI
Drain Current Snapback p
전자정보대학 김영석 38
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NMOS Device Simulations with MEDICI: Ex2
Definition of Mesh, Electrodes, Contacts s , s, s
전자정보대학 김영석 39
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NMOS Device Simulations with MEDICI: Ex2
Doping Profilesp g s
전자정보대학 김영석 40
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NMOS Device Simulations with MEDICI: Ex2
ID-Vg Curveg
전자정보대학 김영석 41