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IEEE RAS Technical Committee on Semiconductor Manufacturing Automation

http://xs3d.kaist.edu/TC-SMA

IEEE Robotics and Automation SocietyIEEE Robotics and Automation Society

Technical Committee (TC) on Semiconductor Manufacturing AutomationTechnical Committee (TC) on Semiconductor Manufacturing Automation

Year 2010 Operations Review

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Technical C mmittee (TC) Brief Data

� URL: http://xs3d.kaist.edu/TC-SMA

� F unding Date: August 1, 2001

� Scope:

± To promote basic and applied research in semiconductor

manufacturing and automation ± To provide a forum for exchanging ideas among

semiconductor manufacturing researchers and engineers

± To facilitate related scientif ic publications and events (such

as special conference sessions, workshops, symposia, and

special journal issues)

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Face-to-Face TC Meetings

� December 2009, Texas, USA (during Winter Sim and MASM)

� July 2010, San Francisco, USA (during 21st Annual IEEE/SEMI Advanced

Semiconductor Manufacturing Conference)

� NEXT MEETING: August 2010, Toronto, Canada (during the 6th IEEEConference on Automation Science and Engineering)

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Most Recent TC Meeting (during IEEE/SEMI ASMC 2010)

Attending (from left to right):Zubin Mevawalla (Ph.D. candidate, Georgia Tech), Jan Rothe (Global Foundries), Haim Albalak (Head, Tefen),

James Morrison (Prof., KAIST), Brett Williams (Engineer, ON Semiconductor), Lynn Yuwen Zhang, Ph.D. (Sr.

Engineer, Intel), Darryl Peters (Confluence), Fan-Tien Cheng (Prof., National Cheng Kung University), Dave Gross

(Director, Global Foundries), Claude Yugma (Prof., Ecole Nationale Superieure des Mines de Saint-Etienne), Agnes

Roussy (Prof., Ecole Nationale Superieure des Mines de Saint-Etienne), Kyungsu Park (Ph.D. candidate, KAIST),

Gyoungwon Park, Ph.D. (Manager, Finisar)

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Membership

� 258 TC members� All the major institutes and companies across Americas, Europe, and

Asia

� New member recruiting:

± August 2008, GOLD (Graduates of the Last Decade) lunch

± April 2007, GOLD (Graduates of the Last Decade) lunch

� Nominations and Awards:

± Dev Pillai (Intel Fellow), T-ASE Advisory Board, 2007

± Adar Kalir (Intel), T-ASE Associate Editor, 2007

± Chen-Fu Chien (TSMC & Tsinghua U), T-ASE Associate Editor, 2007

± Mike Tao Zhang, IEEE RAS Early Career Award in Robotics and

Automation, 2008 ± Meng-Chu Zhou, nominated for IEEE RAS Distinguished Lecturer, 2009

± Meng-Chu Zhou, selected as Sr. Editor of IEEE T-ASE, 2009

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Committee BoardHonorary Chairs

� Dr. Simon Yang, Senior Vice President & Chief Technology Officer, Chartered Semiconductor Manufacturing Co.� Dr. Douglas Chen-Hua Yu, Senior Director, Advanced Module Technology Development Division, TSMC

� Mu Der JENG , IEEE Fellow, Professor, Department of Electrical Engineering, National Taiwan Ocean University

� MengChu ZHOU, IEEE Fellow, Professor, Dept of Electrical and Computer Eng, New Jersey Institute of Technology

Co-Chairs� Thomas Wen-Yao CHEN, Director, Technology System Integration Division, TSMC

� Mike Tao ZHANG, VP Tianwei New Energy Holdings & Executive Vice President, US-China Green Energy Council

� James R. Morrison, Assistant Professor, Dept of Industrial and Systems Engineering, KAIST, South Korea

Academy Chair: Prof. Stanley B. Gershwin, Dept of Mechanical Engineering, MIT

Industry Chair: Dave Gross, Director, Global Manufacturing Systems Technology, Advanced Micro Devices (AM D)

Membership Chair: Dr. Chen-Fu Chien, Deputy Director, Industrial Eng., TSMC

Conference Chair: Prof. Shi-Chuang Chang, Dept of Electrical Engineering, National Taiwan University

PublicationChair: Prof. Ruey-Shan Andy Guo, Chair, Dept of Business Administration, National Taiwan University

Regional Chair, China: Prof. Han Ding, Cheung Kong Chair Professor and Director, Advanced Electronic Mfg Center,Shanghai Jiao Tong Univ.

Regional Chair, Europe: Dr. Arieh Greenberg, Senior Principal, Qimonda

Regional Chair, Israel: Dr. Adar Kalir, Staff Engineer, Intel Corporation

Regional Chair, Japan: Kenji Miyake, Chief Technology Officer, GEN Inc.Regional Chair, K orea: Prof. Tae-Eog Lee, Dept of Industrial Eng, Korea Advanced Institute of Science and Technology

Regional Chair, Tai an: Prof. Shi-Chung Chang, Dept of Electrical Eng, National Taiwan University

Regional Chair, U.S.A.: Prof. John W. Fowler, Dept of Industrial Engineering, Arizona State University

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Publication Involvement

� Special Issue on Equipment and Operations Automation in theSemiconductor Industry, IEEE Transactions on Automation Science and Engineering (T-ASE )

± Chen-Fu Chien, Stephane Dauzere-Peres, Milind Dawande, Han Ding, JamesMorrison, Jeff Pettinato, Jingang Yi (Guest Editors)

± 32 papers submitted and reviewed; Publication scheduled Jan 2011

� Planning for Special Issue on Automation in Green Technology for IEEE Transactions on Automation Science and Engineering (T-ASE )

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Conference Involvement

� 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference, San Francisco,

USA, July 2010

± Special session on Reducing Cost and Maximizing Equipment Productivity, co-chair James Morrison

� 6th Annual IEEE CASE 2010

± Special session on Green Tech Automation, chairs James Morrison and Jingshan Li

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Future Development

� Membership ² Distribute TC poster at conferences and hold TC meeting� 2009 Joint Winter Simulation and Modeling and Analysis of Semiconductor Manufacturing Conferences� 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2010)� 2010 IEEE Conference on Automation Science and Engineering (IEEE CASE 2010)� Same or more conferences in 2011«

� TC meetings ² IEEE/SEMI ASMC 2011 ² IEEE CASE, 2011

� Conference special sessions for 2011 ² IEEE/SEMI ASMC 2011 special session on Cost and Productivity ² IEEE CASE 2011 session on Green Technology Automation (this is a new regular track developed by

our TC) ² IEEE CASE 2011 special sessions in development ² IEEE ISSM 2011 special sessions in development

² Emerging needs?

� Publication ² Special issue of IEEE T-ASE on Equipment and Operations Automation in the

Semiconductor Industry to be published Jan 2011 ² Developing concept & proposal for special issue of IEEE T-ASE on Green Technology

Automation to be submitted 2011

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Future Development

� Nominate new TC co-chair to replace retiring co-chair

� Identify and develop new areas in the TC (e.g., Green

Technology Automation)

� Be a TC ambassador and develop our community (as

always!)

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