state of the art in microfabrication

1-Dec-2010 Jurriaan Schmitz - VLSI Photonics Workshop

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State of the art in MicrofabricationJurriaan Schmitz

[email protected] -- www.utwente.nl/ewi/sc

mailto:[email protected]

http://www.utwente.nl/ewi/sc

TIPP 2014, Amsterdam

Contents

Microelectronics: Moore’s Law today Technology advances inside the microchip Other microfabricated devices Prospects for radiation imaging


The beginning: 1960s

1961 Fairchild4T5R flip-flop

1962 RCA16T logic chip

1965 Fairchildopamp

Images:Computer history museum

1958 FairchildFirst planar transistor

1968 Fairchild2kT SRAM chip


Gordon Moore 1965

Transistors keep getting cheaper! Smaller components Bigger chips & wafers Better skills“Moore’s Law”: The number of components on a chip doubles every year


Moore’s Law – chips, accelerators, fusion…

5

“technology driven progress”

+Brilliance of synchrotron sources, # channels in trackers…


How is Moore’s Law keeping up?

1950 1960 1970 1980 1990 2000 2010 20201E+00

1E+01

1E+02

1E+03

1E+04

1E+05

1E+06

1E+07

1E+08

1E+09

1E+10Chart Title

Com

pone

nts

per c

hip

Year

Doubl

ing

per y

ear

Doubling per 2 years

GPU’s beat CPU’s


Moore’s Law: perspective

Transistor gate length scaling is slowing down (10% per generation) 300 → 450 mm transition is delayed to 2020 ITRS roadmap: multiple breakthroughs required by 2018 … what happens next?


Microchips keep getting better

Design gap Multicore processors Transistor performance boosters


Contents



The CMOS chip

Complexity is more than transistors alone:

A cm2 chip may contain~20 km wires~1010 contacts


Transistor evolution1970-2000: “the happy scaling era”

Keep everything the same, only miniaturize it: 1/√2 per generation

Poly Sigate

Inte

lSilicon

SiO2


Transistor evolution (2)2000-present: new technologies to boost performance

Intel


Another performance booster:Permanent strain → active strain modulation

Switch strain on and off Use piezoelectric material (e.g. PZT) High on-current & low off-current

T. Van Hemert et al.., IEEE Trans. El. Dev. 2013B. Kaleli et al., IEEE Trans. El. Dev. 2014


The art of microchips today

1-nm precision manufacturing Atomary sharp interfaces High-purity materials Best mastered:

Aluminum, copper, tungsten Silicon; SiGe alloys SiO2, HfO2, Si3N4

Conventional wisdom:“If you can do it in CMOS, do it in CMOS”“If you can do it in silicon, do it in silicon”

https://lh3.googleusercontent.com/-Xgsf2i715Vw/TYdf1WAWoVI/AAAAAAAAAHY/9YFXlsqIGnw/s1600/Intel+32nm+NMOS_branded.png


Emerging technologies in microelectronics:Replacing good old silicon

AIS

T

LETI

IBM

Selective GaN on Si Ultra-thin semi-on-insulator

Ge PMOS InGaAs NMOS


Emerging technologies in microelectronics:Replacing FLASH memory

Competitors:• Resistive RAM• Phase-change RAM• STT Magnetic RAM


But meanwhile, FLASH is going 3D


Contents



Microtechnology: more than chips

Flat Panel Displays

PhotovoltaicsLight Emitting Diodes Semiconductor lasers

Microfluidics Sensors



Flat Panel Displays



Steep market growthGaN-based technologyHetero-epitaxy

Haitz’ Law



Flat Panel Displays



High potential:Point-of-care medicineInternet-of-thingsUses mainstream technology


…and sensors for radiation imaging!

Microfabricated sensors in particle physics: Silicon detectors Charge-coupled devices Silicon photomultipliers CMOS-APS based detectors …Focus on semiconductors for signal generation. Scintillators? Gas?


InGrid: a radiation imaging detector

Standard CMOS

SU-8 post

Al electrode

Imag

es: N

ikhe

f

TimePix


Semiconductors on top of CMOS

“TFA detector”, Andrea Franco et al., IEEE Trans. Nucl. Sci. 2012


Or vice versa?

Stack thin-film transistors on your sensor Monocrystalline: 3D electronics as developed e.g. by LETI (Batude et al.) Polycrystalline:

e.g. I. Brunets et al., IEEE Trans. El. Dev. 2009

Low temp fabrication (~400 °C) High interconnect density >> TSV’s

LETIU.Twente


Advances in microfabrication:Consequences for Particle Physics

Miniaturized detector systems may boast Improved resolution and speed Reduced power consumption Less X0, lower mass Onboard intelligence “The interconnect benefit”

IC Future: new materials & lower-power circuits New semiconductor materials: GaN, InGaAs, Ge, … Performance in radiation imaging?


Thank you:

My coworkers at the University of Twente Nikhef Detector R&D group TIPP organizers Dutch Technology Foundation STW, Min. Economic Affairs, FOM and EU

1-Dec-2010 Jurriaan Schmitz - VLSI Photonics Workshop

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Questions?


Semiconductor market: arguably the largest industry

http://www.google.nl/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&docid=RTAK25wOQyqRzM&tbnid=a7UIx7UVjrpZ3M:&ved=0CAUQjRw&url=http://techon.nikkeibp.co.jp/english/handbook/analog/marketoutlook.html&ei=Nj2DUtPEEurD0QWdkIG4DA&bvm=bv.56343320,d.d2k&psig=AFQjCNGriB3jNwd9wYioHXg5EBYxH49OPg&ust=1384418975438084

http://www.google.nl/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&docid=RTAK25wOQyqRzM&tbnid=a7UIx7UVjrpZ3M:&ved=0CAUQjRw&url=http://techon.nikkeibp.co.jp/english/handbook/analog/marketoutlook.html&ei=Nj2DUtPEEurD0QWdkIG4DA&bvm=bv.56343320,d.d2k&psig=AFQjCNGriB3jNwd9wYioHXg5EBYxH49OPg&ust=1384418975438084


CPU clock frequency

The transistor count on a microprocessor has not increased since 2005. The clock frequency “ “ “ “ The transistor gate length has hardly reduced since 2005.

Chipworks: only 9% per generation lately, not 30% 90, 65, 45, 32, 22, 15 nm CMOS

RC bottleneck in the chip’s wiring

wikipedia


Trends like Moore’s “Law” are not forever

Passenger airplanes

But airplanes got much better since 1960!


Inside a TriGate chip

H5N1 virus(same scale)

chip

wor

ks

http://www.google.nl/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&docid=QlbCz9jfbAY1QM&tbnid=meErqzRLAsKFwM:&ved=0CAUQjRw&url=http://chipworksrealchips.blogspot.com/2012/04/intels-22-nm-trigate-transistors.html&ei=i2WDUqrhFIGQ0AWD0YGQDA&bvm=bv.56343320,d.d2k&psig=AFQjCNGRT64FuAT9Inh_HhzSsvU3Wp7tTw&ust=1384428683197679

state of the art in microfabrication

Documents

year tipp

d tipp

radiation imaging tipp

amsterdam4moores law

chip doubles

amsterdamemerging technologies

cm2 chip

performance inteltipp