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EE143 Homework 3 Spring 2009 Not for credit Source: Semiconductor Device Fundamentals, Robert F. Pierret.

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Page 1: Source: Semiconductor Device Fundamentals, Robert F. …ee143/fa09/homeworks/homework_4.pdf · EE143 Homework 3 Spring 2009 Not for credit Source: Semiconductor Device Fundamentals,

EE143 Homework 3Spring 2009

Not for credit

Source: Semiconductor Device Fundamentals, Robert F. Pierret.

Page 2: Source: Semiconductor Device Fundamentals, Robert F. …ee143/fa09/homeworks/homework_4.pdf · EE143 Homework 3 Spring 2009 Not for credit Source: Semiconductor Device Fundamentals,

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Page 3: Source: Semiconductor Device Fundamentals, Robert F. …ee143/fa09/homeworks/homework_4.pdf · EE143 Homework 3 Spring 2009 Not for credit Source: Semiconductor Device Fundamentals,

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Page 4: Source: Semiconductor Device Fundamentals, Robert F. …ee143/fa09/homeworks/homework_4.pdf · EE143 Homework 3 Spring 2009 Not for credit Source: Semiconductor Device Fundamentals,

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Page 5: Source: Semiconductor Device Fundamentals, Robert F. …ee143/fa09/homeworks/homework_4.pdf · EE143 Homework 3 Spring 2009 Not for credit Source: Semiconductor Device Fundamentals,

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Page 6: Source: Semiconductor Device Fundamentals, Robert F. …ee143/fa09/homeworks/homework_4.pdf · EE143 Homework 3 Spring 2009 Not for credit Source: Semiconductor Device Fundamentals,

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EE143%– Fall%2016 Microfabrication%Technologies ...ee143/fa16/lectures/...3 5 InterconnectRequirements • Low Ohmic resistance – interconnectsmaterialhaslowresistivity • lowcontactresistancetosemiconductordevice

EE143 Microfabrication Technologyee143/fa09/lectures/Section...Device Electronics for Integrated Circuits R. S. Muller and T. I. Kamins Wiley EE143 – Ali Javey Slide 0-3 Grading

EE143 S06 Lecture 20 Process Integrationee143/sp06/lectures/Lec_20.pdf · EE143 S06 Lecture 20 Process Integration Example IC Process Flows ... EE143 S06 Lecture 20 Self-aligned Oxide

InventionofTransistors% N 1947inst.eecs.berkeley.edu/~ee143/fa16/lectures/Lecture01-Intro.pdf · 1 1-1 EE143%– Fall%2016 MicrofabricationTechnologies Prof.%MingC.%Wu [email protected]

Electron Microscopy Homework_4

EE143 General Information - University of California, Berkeleyee143/fa05/lectures/Lec_01.pdf · Trends and forecast Other Websites for EE143 Overview 4. ... BioMEMS Emitters /Filter/Detectors

EE143 S06 Lecture 21 Basic Structure of CMOS Inverteree143/sp06/lectures/Lec_21.pdfP-tub N-tub Twin Tub. ... Twin Well CMOS Process Flow. Professor N Cheung, U.C. Berkeley 12 EE143

EE143 F2010 Lecture 24 Micro-Electro-Mechanical Systems (MEMS) Fabrication Fabrication ...ee143/fa10/lectures/Lec_… · · 2010-11-17• Fabrication Considerations ... Effect of

Section 2: Lithographyee143/fa08/lectures/Section 2 - Lithography.pdf• One mask for each lithography level in process EE143 – Ali Javey Lithographic Process. EE143 – Ali Javey

EE143 F2010 Lecture 14 Etching - University of California, …ee143/fa10/lectures/Lec_… · · 2010-10-12SiO2/Si etched by HF solution SiO2/Si etched by RIE (e.g. CF4 plasma)

EE143 F2010 Lecture 12 Vacuum Basicsee143/fa10/lectures/Lec_12.pdf · Professor N Cheung, U.C. Berkeley EE143 F2010 Lecture 12 1 Vacuum Basics 1. Units 1 atmosphere = 760 torr = 1.013x105

EE143 – Ali Javey Section 8: Metallization Jaeger Chapter 7

EE143 F2010 Lecture 6 Thermal Oxidation of Siee143/fa10/lectures/Lec_06.pdf · Thermal Oxidation of Si ... EE143 F2010 Lecture 6 2 Thermal SiO2 Properties (1) ... EE143 F2010 Lecture

NMOS Fabrication Process Descriptioninst.eecs.berkeley.edu/~ee143/fa16/Lab/Overall... · growth and sintering 1 in EE143 lab, need RCA cleaning. Cylindrical carrier Carry boat 1 Need

EE143 S06 Final Exam Review EE143 LABee143/sp06/lectures/finalexam_review.pdf · Professor N Cheung, U.C. Berkeley 3 EE143 S06 Final Exam Review Si wafer Processing Steps Guidelines

EE143 S06 Lecture 15 Etching - University of California ...ee243/sp10/EE143/lectures/Lec_15.pdf · EE143 S06 Lecture 15 15 Example 2: Worst-case Design With Mask Erosion Let be the

Defects and ˝Damage - EECS Instructional Support …ee143/fa10/handouts/Defects_tutorial.pdf · Professor N Cheung, U.C. Berkeley EE143 F2010 Defects Tutorial 1 Defects and ˝Damage

EE143 S06 Lecture 21 Basic Structure of CMOS Inverter

middleby homework_4-2-07.pdf

EE143 F2010 Lecture 10 Dopant Diffusion (1) Predepositionee143/fa10/lectures/Lec_10.pdf · Professor N Cheung, U.C. Berkeley EE143 F2010 Lecture 10 1 Dopant Diffusion (1) Predeposition

EE143%– Fall%2016 …ee143/fa16/lectures/...1 1 EE143%– Fall%2016 Microfabrication%Technologies Lecture5:%Thermal%Oxidation Reading:%Jaeger%Chapter%3 Prof.%MingC.%Wu [email protected]

EE143 F2010 Lecture 22 Electrical Characteristics of MOS ...ee143/fa10/lectures/Lec_22.pdf · Professor N Cheung, U.C. Berkeley EE143 F2010 Lecture 22 1 Electrical Characteristics

EE143 F2010 Lecture 4 Photolithography - University of …ee143/fa10/lectures/Lec_… · · 2010-09-07Professor N. Cheung, U.C. Berkeley EE143 F2010 Lecture 4 4 Contact Printing

EE143%– Fall%2016 Microfabrication%Technologies Lecture7 ...ee143/fa16/lectures/Lecture07-Ion Implantation.pdf2 3 Equipment ( ) I(t)dt nqA Q qr mV T =! = = 0 2 1 Implanted Dose 2

Section 8: Metallization - EECS Instructional Support ...ee143/fa08/lectures/Section 8 - Metallization.pdf · • low contact resistance to semiconductor device • reliable long-term

EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143

EE143 Semiconductor Tutorial - EECS Instructional · PDF fileEE143 S06 Semiconductor Tutorial EE143 Semiconductor Tutorial-Electrons and “Holes ... Conduction Band and Valence Band

EE143 S06 Lecture 11 Photolithographyee243/sp10/EE143/lectures/Lec_11.pdfEE143 S06 Lecture 11 12 Photon sources ... Note degradation of image contrast and image slope ... “soluble

EE143 F2010 Final Exam Review EE143 LABee143/fa10/lectures/Lec_27.pdf · Professor N Cheung, U.C. Berkeley EE143 F2010 Final Exam Review 3 Si wafer Processing Steps Guidelines for

EE143 – Ali Javey Section 12: Intro to Devices Extensive reading materials on reserve, including Robert F. Pierret, Semiconductor Device Fundamentals

EE143%– Fall%2016 Microfabrication%Technologies Lecture14

EE143 F05 Lecture 5 Thermal Oxidation of Siee143/sp06/lectures/Lec_05.pdf · EE143 F05 Lecture 5 Thermal Oxidation of Si ... the lecture notes derivation includes gas transport effect

Section 2: Lithography Jaeger Chapter 2 EE143 Ali Javey

Solar Cells Fabrication Technologiesinst.eecs.berkeley.edu/~ee143/fa10/lectures/Lec_26.pdfMinimize Kerf Loss. Professor N Cheung, U.C. Berkeley EE143 F2010 Lecture 26 18 Generic Crystalline

EE143 F05 Lecture 5 Thermal Oxidation of Siee143/fa05/lectures/Lec_05.pdfProfessor N. Cheung, U.C. Berkeley 1 EE143 F05 Lecture 5 Thermal Oxidation of Si • General Properties of