SENTECH equipmentfor thin film measurement

• Research & development• Quality control in production• Photovoltaics• LEDs & OLEDs

Spectroscopic ellipsometersLaser ellipsometersAutomated measurement systemsReflectometers

Spectroscopic ellipsometers

DUV-VIS-NIR spectroscopic ellipsometer SENresearch 4.0Large variety of options for R & D and routine applications from DUV to NIR

• Widest spectral range 190 nm (deep UV) – 3,500 nm (NIR)• No moving parts with SSA principle• Full Mueller matrix by innovative 2 C design• SpectraRay/4 comprehensive ellipsometry

software

Cost-effective ellipsometer

SENproFocused on speed and accuracy for the measurementofthinfilms(1nmto15μm)

• Spectral range 370 –1,050 nm• Goniometer with preset angles of incidence• Step Scan Analyzer principle for highest

measurement accuracy• Spectroscopic ellipsometer

software SpectraRay/4

Infrared spectroscopic ellipsometer

SENDIRAVibrational spectroscopic analysis of thin layers (dielectric layers, TCOs, semiconductors, organic layers)

• IR spectral range 1,700 – 25,000 nm• Fully applicable FTIR spectrometer• Proprietary ellipsometer software

SpectraRay/4

Spectroscopic ellipsometer software SpectraRay/4User-friendly software with recipe orien-ted mode for operators and advanced mode for inter active measurement and modeling

• Supports variable angle, multi-experiment, and combined photometric measurements

• Ellipsometric,reflection,andtransmission data

• Huge library of materials‘ data, large number of dispersion models

• Sample effects: depolarization, non-uniformity, scattering (Mueller-matrix),backsidereflection

Automated ellipsometer for R & D SENDUROFast, highly precise, and repeatable measurements in production, process monitoring, and R & D

• Spectral range 290 – 850 nm• Patented automatic alignment sensors• Step Scan Analyzer principle for highest

measurement accuracy• Small footprint• Routine applications• Proprietary ellipsometer

software SpectraRay/4

Laser ellipsometers

Multiple angle laser ellipsometer SE 400advCharacterizationofsinglefilmsandsubstratesinmicroelectronic, photovoltaic, data storage, display technology, life science, metal processing, etc.

• Applicationspecificanglesofincidence• HeNe laser of 632.8 nm wavelength• Measurement precision of 0.1 Å• Highmeasurementspeedallowsforfilmgrowth

monitoring and endpoint detection

CombinedEllipsometryReflectometry SE 500advMaximumflexibilityfortheanalysisofthickdielectric, organic, photoresist, silicon, or polysiliconfilms

• Fast and unambiguous determination of the thicknessoftransparentfilmsupto25µm

• Multiple angle manual goniometer for the characterizationofsinglefilmsandlayerstacks

Automated measurement tools

Ellipsometer for routine applications SENDURO 200 / 300Veryfastmeasurementoffilmsbetweenafewångstromandmorethan50µmthickness

• Cassette to cassette load for 200 mm and 300 mm wafers

• Spectral range 290 – 850 nm• Recipe based measurements• Proprietary ellipsometer software

SpectraRay/4

Summary

SENTECH Instruments GmbHSchwarzschildstr. 212489 Berlin, GermanyTel: +49 30 6392 5520Fax: +49 30 6392 5522E-mail: marketing@sentech.dewww.sentech.com

Sales office:SENTECH Gesellschaft für Sensortechnik mbHKonrad-Zuse-Bogen 1382152 Krailling / KIM, GermanyTel: +49 89 897 9607 0Fax: +49 89 897 9607 22E-mail: sales@sentech.dewww.sentech-sales.de

Reflectometers

Film Thickness Probe FTPadvFast and easy measurementoffilmthickness in production, process monitoring, and R & D

• Thicknessrange30nm–25µm• Recipe oriented software• Adaptation to a microscope

for measurements in small areas

• Small spot size• UV to NIR spectral range• Most accurate measurement by height

and tilt adjustment of samples• Optional high resolution mapping• Comprehensive, recipe-oriented

reflectometersoftwareFTPadv EXPERT

Spectroscopicreflectometer

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SENDIRA ( ) ( )SENDURO

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( ) only in special applicationsPlease consult also our brochures about thin film metrologyfor crystalline silicon and thin film solar cells.