semiconductor rectangular gate valve slot valve fitting
TRANSCRIPT
Slot Valve
SEMICONDUCTORRectangular Gate Valve
Non-Standard
51mm x 420mm
1.0xE-6 Pa ~ 1.2xE5 Pa(abs)
< 1.0xE-10 Pa*㎥/sec
< 1.0xE-10 Pa*㎥/sec
Welded Bellows
Double Acting
OD Ø6
0.5 MPa
N/A
N/A
2,000,000
2,000,000
1,000,000
1,000,000
≤ 120℃
≤ 60℃
Non lubrication
PFPE Grease
AL6061
AL6061
AL6061
STS304
AL6061,STS304
AM350
STS316L
FKM
FKM
Anodizing
Anodizing
Fitting Standard
Gate Size(mm)
Pressure Range
Helium Leak Rate
Feed Through
Pneumatic Actuator Type
Air Connection
Air Pressure
Air Less Lock
Life Cycles
Temperature
Lubrication
Materials
Surface Treatment
Open
Close
Mechanism
Bellows
O-Ring(Seal)
lubrication
Body
Actuator
Vacuum Inside
Mechanism
Valve Body
Gate(Seat)
Bonnet
Shaft(Stem)
Mechanism(Cylinder)
Bellows
Bellows End Piece
Vacuum Seal
Pneumatic Seal
Valve Body
Gate(Seat)
External
Internal