Bidirectional Gate Valve

SEMICONDUCTORRectangular Gate Valve

SEMI E21.1-1296

50mm x 336mm

1.0 X E-4 ~ 1.2 X E5 Pa(abs)

< 1.0 X E-10 Pa*m³/sec

< 1.0 X E-10 Pa*m³/sec

< 1.0 X E-10 Pa*m³/sec

< 1.0 X E-8 Pa*m³/sec

O-Ring

Welded Bellows

PM _ Double Acting, TM _ Manual

OD Ø6

0.5 MPa

1,000,000

3,000,000

≤ 120℃

≤ 60℃

Non lubrication

PFPE Grease

PAO Grease

AL6061

AL6061

AL6061

STS304

AM350

STS316L

FKM

FFKM

FKM

FKM

Hard Anodizing

PM : Anodizing

TM : Anodizing

Fitting Standard

Gate Size(mm)

Pressure Range

Helium Leak Rate

Feed ThroughTM Valve

L/L Valve

Actuator Type

Air Connection

Air Pressure

Life Cycles

Temperature

Lubrication

Materials

Surface Treatment

TM VALVE

PM VALVE

Body

Actuator

Vacuum Inside

Mechanism

Air Cylinder

Valve Housing

Gate(Seat)

Bonnet

Shaft(Stem)

Bellows

Bellows End Piece

Valve Housing

Vacuum Seal

Pneumatic Seal

Gate(Seat)

Gate Seal

TM Valve

L/L Valve

External

Internal

External

Internal

TM Side

L/L Side