sector 002 assembly status report
DESCRIPTION
Sector 002 Assembly status report. Module loading task force meeting 25 May 2004. Contents. Sectors Glue 3-D Survey Other sector 2 Results Tool Upgrade Procedure Upgrades C 6 F 14 Cooling. Sector. - PowerPoint PPT PresentationTRANSCRIPT
Sector 002 Assemblystatus report
Module loading task force meeting
25 May 2004
Contents
• Sectors• Glue • 3-D Survey• Other sector 2 Results• Tool Upgrade• Procedure Upgrades
• C6F14 Cooling
Sector
• Sector 001 (FE_I1, prototype) had been assembled in 2003 with most of the final tooling, but not final glue procedures. It was never fully characterized.
• Sector 002 is our pre-production sector (FE-I2.1). It has been loaded with 3 module so far using “production” tooling and glue.
• Some revisions to the tooling and the procedure are now being implemented, reacting from the experience of loading the first side. Side 2 will be loaded when all the upgrades are in place.
• These are incremental small changes. We are not going off in any new direction.
Glue
• Implemented CPPM standards with a few adaptations specific to sector– Our dispenser is calibrated to 16 drops/ minute
• Had some problems getting fresh glue- long lead time. Now have too much fresh glue.
• Implemented new storage method – when new tubes are opened, take out each component and mix well
– Transfer immediately to individual, very cheap, 3cc syringes for storage (store 2cc in each syringe)
– when mixing, empty each syringe out completely into cup. This gives 1-1 by volume. Do this on scale to control that it matches 1-1 by weight, which it does for fresh glue to good accuracy.
Glue (cont.)
• Implemented glue drop mask which works very well.
• Dispensing takes 10min. /module,
which is acceptable • Quantity dispensed is 4 drops in
outer hole + 3 drops in inner hole (16 drops/minute with CPPM syringe and needle)
• 80% chip area coverage (gap is 75um set by fishing line).
3-D Survey
• A 3-D survey program has been implemented.
• It only works on side 1 of a sector due to interference with the cooling pipes.
• Sectors 1 and 2 have been measured (see next slide)
• Both sectors show out-of-plane modules with a small systematic tilt and with some modules bowed.
• We suspect the tilt is an imperfection of the tool head- deviations in the steel pins for example.
• The bow as well as some random tilts are due to lack of degrees of freedom in the pickup chuck to deal with module-to-module changes in how the module “hangs” from the flex.
3-D Survey (cont.)
Other Sector 2 Results
• 3 modules have been loaded so far (1 side)
• 2 modules are within 20 microns of nominal (all alignment marks)
• 1 module has 2 alignment marks off in x-y by 100um (x+y in quadrature)– The cause is understood to be (1) operator error and (2) lack of procedure
to prevent such an error.
– New assembly checklist now safeguards against this error.
• Quick electrical test shows no digital problems in 3 modules loaded
• No cooling test until 6 module loaded.
Tool Upgrade
Extreme case of tilt in module placement shown by glue pattern on chips
Adding +/- 200um of independent vertical adjustment to each vacuum cup
Procedure Upgrades
• New step-by-step checklist. Check each item off for each module loading operation.
• Vacuum chuck planarity calibration procedure using glass slide on deposition site (need adjustable cups first
for this).
C6F14 Cooling
• Closed circuit C6F14 loop operation demonstrated with dummy sector with heaters.
• 0.2m2 heat exchange area to chiller bath implemented with coil.
C6F14 Cooling (cont.)
0.01.02.0
3.04.05.06.07.0
8.09.010.0
0 10 20 30 40 50
Heater Power (W)
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T(b
ath
) D
eg.C