Actoprobe Scanning Confocal Raman Microscope

Designed by Dr. Pranav Rathi

Laser

RamanSpectrometer

Optics: Beam expander & mirrors

Confocal Microscope setup

AFM

Illuminator side

Microscope side

Top view of Confocal Raman AFM system design

Illuminator

Confocal Microscope

Laser RamanSpectrometer

Optics: Beam expander & mirrors

Microscopeplatform

Illuminatorplatform

AFMy

z

xy

zx

yz

x

f r

xy

s

s

s

s

ss

M M

Illuminator

Confocal Microscope

Laser RamanSpectrometer

Optics: Beam expander & mirrors M1

M2

Laser inlet

Signal outletRight channel (arm)

Left channel (arm)

Camera

White light inlet

High NA objective

Sample plane

Laser light couple (fiber coupler optional)

5 to 100um apertures

Lens

Confocal microscope Illuminator

AFM sample loading unloading schemeSample

loading area

Confocal Raman AFM System Working

Illumination Channel

Detection ChannelAFM

9

Special AFM probes

Extended Z-range AFMMicro-Raman FPA Spectra

SLS FPA

Confocal Optical

5μm SLS FPA

AFMWorking Principle

Data

Confocal images of FPA with 6.7-µm deep trenches (left). The image size is 18 µm x 18 µm. The sample is scanned at different depths starting from the pixel top. The dashed lines (different colors) inside the figures correspond to the cross sections used to create the FPA side wall profile (right). Each data point in the profile corresponds to one of the dashed lines in the confocal image. This is illustrated by the different colors. The data suggests the resolution to be better than 50 nm lateral and 150 nm vertical.